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ISchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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SchedulerAligner.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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SchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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SchedulerEfemRobot.cs
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
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SchedulerLoadLock.cs
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6d393bb86d
new routing algorithm with prediction.
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1 year ago |
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SchedulerLoadPort.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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SchedulerModule.cs
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9189e1b51f
new routing algorithm update.
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1 year ago |
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SchedulerPM.cs
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9a410e084a
fix exception:
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11 months ago |
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SchedulerSETMRobot.cs
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 months ago |
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SchedulerTMRobot.cs
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20606c1ffb
check in new routing algorithm code.
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1 year ago |
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SchedulerVCE.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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TransferModule.cs
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 months ago |
zhouhr
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM