EfemHomeRoutine.cs 8.9 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using Venus_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using Venus_RT.Devices.EFEM;
  15. namespace Venus_RT.Modules.EFEM
  16. {
  17. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  18. {
  19. private enum HomeStep
  20. {
  21. WaitEFEMReady,
  22. ClearError,
  23. InitRobot,
  24. HomeAllAxes,
  25. CheckWaferPresence,
  26. End,
  27. }
  28. private enum HomeModuleStep
  29. {
  30. Home,
  31. HomeAxes,
  32. End,
  33. }
  34. private int _homeTimeout = 30 * 1000;
  35. ModuleName _targetModule;
  36. EfemBase _efem;
  37. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  38. {
  39. _efem = efem;
  40. }
  41. public RState Start(params object[] objs)
  42. {
  43. _targetModule = (ModuleName)objs[0];
  44. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  45. return Runner.Start(Module, $"Home {_targetModule}");
  46. }
  47. public RState Monitor()
  48. {
  49. if(_targetModule == ModuleName.EFEM)
  50. {
  51. Runner.Wait(HomeStep.WaitEFEMReady, WaitEFEMIdle, _delay_60s)
  52. .Run(HomeStep.ClearError, ClearError, IsStepComplete, _homeTimeout)
  53. .Run(HomeStep.InitRobot, HomeAll, IsStepComplete, _homeTimeout)
  54. .Run(HomeStep.HomeAllAxes, HomeAllAxes, IsStepComplete, _homeTimeout)
  55. .Run(HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _homeTimeout)
  56. .End(HomeStep.End, NullFun, _delay_50ms);
  57. }
  58. else
  59. {
  60. Runner.Wait(HomeStep.WaitEFEMReady, WaitEFEMIdle, _delay_60s)
  61. .Run(HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  62. .Run(HomeModuleStep.HomeAxes, HomeModuleAxes, IsStepComplete, _homeTimeout)
  63. .End(HomeModuleStep.End, NullFun, _delay_50ms);
  64. }
  65. return Runner.Status;
  66. }
  67. public void Abort()
  68. {
  69. }
  70. private bool IsStepComplete()
  71. {
  72. if (_efem.Status == RState.End)
  73. {
  74. return true;
  75. }
  76. else if (_efem.Status == RState.Failed || _efem.Status == RState.Timeout)
  77. {
  78. Runner.Stop($"Efem home failed: {_efem.Status}");
  79. //LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem home failed: {_efem.Status}");
  80. return true;
  81. }
  82. else
  83. return false;
  84. }
  85. private bool WaitEFEMIdle()
  86. {
  87. return _efem.Status != RState.Running;
  88. }
  89. private bool ClearError()
  90. {
  91. return _efem.ClearError();
  92. }
  93. private bool HomeAll()
  94. {
  95. return _efem.HomeAll();
  96. }
  97. private bool HomeModule()
  98. {
  99. return _efem.Home(_targetModule);
  100. }
  101. private bool HomeAllAxes()
  102. {
  103. return _efem.OriginalSearch(ModuleName.EFEM);
  104. }
  105. private bool HomeModuleAxes()
  106. {
  107. return _efem.OriginalSearch(_targetModule);
  108. }
  109. private bool CheckWaferPresence()
  110. {
  111. return _efem.CheckWaferPresence();
  112. }
  113. private bool VerifyWaferPresence()
  114. {
  115. if (_efem.Status == RState.End)
  116. {
  117. var waferPresence = _efem.GetWaferPresence();
  118. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,
  119. if (waferPresence.Length != 3)
  120. {
  121. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");
  122. return false;
  123. }
  124. //upper arm
  125. if (waferPresence[0] == '1')
  126. {
  127. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  128. {
  129. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  130. }
  131. }
  132. else
  133. {
  134. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  135. {
  136. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  137. }
  138. }
  139. //lower arm
  140. if (waferPresence[1] == '1')
  141. {
  142. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  143. {
  144. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  145. }
  146. }
  147. else
  148. {
  149. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  150. {
  151. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  152. }
  153. }
  154. //aligner1
  155. if (waferPresence[2] == '1')
  156. {
  157. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  158. {
  159. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  160. }
  161. }
  162. else
  163. {
  164. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  165. {
  166. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  167. }
  168. }
  169. //aligner2
  170. //if (waferPresence[3] == '1')
  171. //{
  172. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  173. // {
  174. // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  175. // }
  176. //}
  177. //else
  178. //{
  179. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  180. // {
  181. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  182. // }
  183. //}
  184. //cooling1
  185. //if (waferPresence[4] == '1')
  186. //{
  187. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  188. // {
  189. // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  190. // }
  191. //}
  192. //else
  193. //{
  194. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  195. // {
  196. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  197. // }
  198. //}
  199. //cooling2
  200. //if (waferPresence[5] == '1')
  201. //{
  202. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  203. // {
  204. // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  205. // }
  206. //}
  207. //else
  208. //{
  209. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  210. // {
  211. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  212. // }
  213. //}
  214. return true;
  215. }
  216. else if (_efem.Status != RState.Running)
  217. {
  218. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  219. return true;
  220. }
  221. else
  222. return false;
  223. }
  224. }
  225. }