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- using Aitex.Core.Common;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Venus_Core;
- using Venus_RT.Devices.EFEM;
- namespace Venus_RT.Modules.EFEM
- {
- public class EFEMAlignRoutine : ModuleRoutineBase, IRoutine
- {
- private enum AlignStep
- {
- WaitIdle,
- Rotate,
- End
- }
- private int _moveTimeout = 20 * 1000;
- EfemBase _efem;
- private double angle = 25;
- private WaferSize ws = WaferSize.WS12;
- public EFEMAlignRoutine(EfemBase efem) : base(ModuleName.Aligner1)
- {
- _efem = efem;
- }
- public RState Start(params object[] objs)
- {
- if (!_efem.IsHomed)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"EFEM is not homed, please home it first");
- return RState.Failed;
- }
- if (objs.Length >= 3)
- {
- try
- {
- angle = Convert.ToDouble(objs[2]);
- }
- catch
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"ALIAN PARAMETER IS ILLEGAL ");
- }
-
- }
- if (!WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem PreAligner not have wafer, cannot do the align action");
- return RState.Failed;
- }
- else
- {
- Trace.WriteLine("开始Align");
- return Runner.Start(Module,$"PreAligner Start align");
- }
- }
- public RState Monitor()
- {
- Runner.Wait(AlignStep.WaitIdle, WaitEFEMIdle, _delay_60s)
- .Run(AlignStep.Rotate, fnalign, CheckAlignDone, _moveTimeout)
- .End( AlignStep.End, ActionDone, 0);
- return Runner.Status;
- }
- private bool fnalign()
- {
- LOG.Write(eEvent.EV_EFEM_ROBOT, ModuleName.EfemRobot, $"Wafer Align: {angle}");
- return _efem.Align(Module,angle,0,ws);
- }
- private bool CheckAlignDone()
- {
- if (_efem.Status == RState.End)
- {
- return true;
- }
- else if (_efem.Status != RState.Running)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem PreAligner align failed: {_efem.Status}");
- return true;
- }
- return false;
- }
- private bool ActionDone()
- {
- return true;
- }
- private bool WaitEFEMIdle()
- {
- return _efem.Status == RState.End;
- }
- public void Abort()
- {
- throw new NotImplementedException();
- }
- }
- }
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