EFEMAlignRoutine.cs 3.2 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.Schedulers;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using System;
  9. using System.Collections.Generic;
  10. using System.Diagnostics;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices.EFEM;
  16. namespace Venus_RT.Modules.EFEM
  17. {
  18. public class EFEMAlignRoutine : ModuleRoutineBase, IRoutine
  19. {
  20. private enum AlignStep
  21. {
  22. WaitIdle,
  23. Rotate,
  24. End
  25. }
  26. private int _moveTimeout = 20 * 1000;
  27. EfemBase _efem;
  28. private double angle = 25;
  29. private WaferSize ws = WaferSize.WS12;
  30. public EFEMAlignRoutine(EfemBase efem) : base(ModuleName.Aligner1)
  31. {
  32. _efem = efem;
  33. }
  34. public RState Start(params object[] objs)
  35. {
  36. if (!_efem.IsHomed)
  37. {
  38. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"EFEM is not homed, please home it first");
  39. return RState.Failed;
  40. }
  41. if (objs.Length >= 3)
  42. {
  43. try
  44. {
  45. angle = Convert.ToDouble(objs[2]);
  46. }
  47. catch
  48. {
  49. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"ALIAN PARAMETER IS ILLEGAL ");
  50. }
  51. }
  52. if (!WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  53. {
  54. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem PreAligner not have wafer, cannot do the align action");
  55. return RState.Failed;
  56. }
  57. else
  58. {
  59. Trace.WriteLine("开始Align");
  60. return Runner.Start(Module,$"PreAligner Start align");
  61. }
  62. }
  63. public RState Monitor()
  64. {
  65. Runner.Wait(AlignStep.WaitIdle, WaitEFEMIdle, _delay_60s)
  66. .Run(AlignStep.Rotate, fnalign, CheckAlignDone, _moveTimeout)
  67. .End( AlignStep.End, ActionDone, 0);
  68. return Runner.Status;
  69. }
  70. private bool fnalign()
  71. {
  72. LOG.Write(eEvent.EV_EFEM_ROBOT, ModuleName.EfemRobot, $"Wafer Align: {angle}");
  73. return _efem.Align(Module,angle,0,ws);
  74. }
  75. private bool CheckAlignDone()
  76. {
  77. if (_efem.Status == RState.End)
  78. {
  79. return true;
  80. }
  81. else if (_efem.Status != RState.Running)
  82. {
  83. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem PreAligner align failed: {_efem.Status}");
  84. return true;
  85. }
  86. return false;
  87. }
  88. private bool ActionDone()
  89. {
  90. return true;
  91. }
  92. private bool WaitEFEMIdle()
  93. {
  94. return _efem.Status == RState.End;
  95. }
  96. public void Abort()
  97. {
  98. throw new NotImplementedException();
  99. }
  100. }
  101. }