OverKepler2300ViewModel.cs 71 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using Aitex.Core.RT.Log;
  20. using System.Windows.Controls;
  21. //using System.Drawing.Drawing2D;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverKepler2300ViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private List<string> m_CurrentModuleRecipes = new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. private bool m_MFC7ValveIsOpen;
  46. private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. private bool m_PVHe1ValveIsOpen;
  51. private bool m_PVHe2ValveIsOpen;
  52. private bool m_TurboPumpPumpingValveIsOpen;
  53. private bool m_TurboPumpPurgeValveIsOpen;
  54. private bool m_GuageValveIsOpen;
  55. private bool m_PendulumValveIsOpen;
  56. private double m_HeGasSetpoint;
  57. private int m_HePressureSetpoint;
  58. private float m_SRFFwdPowerSetpoint;
  59. private float m_BRFFwdPowerSetpoint;
  60. private float m_SRFMatchC1;
  61. private float m_SRFMatchC2;
  62. private float m_BRFMatchC1;
  63. private float m_BRFMatchC2;
  64. private double m_MFC1SetPoint;
  65. private double m_MFC2SetPoint;
  66. private double m_MFC3SetPoint;
  67. private double m_MFC4SetPoint;
  68. private double m_MFC5SetPoint;
  69. private double m_MFC6SetPoint;
  70. private double m_MFC7SetPoint;
  71. private double m_MFC8SetPoint;
  72. private double m_N2SetPoint;
  73. private AITMfcData m_MFC1Data;
  74. private AITMfcData m_MFC2Data;
  75. private AITMfcData m_MFC3Data;
  76. private AITMfcData m_MFC4Data;
  77. private AITMfcData m_MFC5Data;
  78. private AITMfcData m_MFC6Data;
  79. private AITMfcData m_MFC7Data;
  80. private AITMfcData m_MFC8Data;
  81. private AITMfcData m_MFCHeData;
  82. private AITMfcData m_MFCN2Data;
  83. private AITHeaterData m_ValveHeaterData;
  84. private AITHeaterData m_ForelineHeaterData;
  85. private AITHeaterData m_WallHeaterData;
  86. private AITHeaterData m_PendulumHeaterData;
  87. private AITRfData m_SRFData;
  88. private AITRfData m_BRFData;
  89. private AITMatchData m_SMatchData;
  90. private AITMatchData m_BMatchData;
  91. private AITPendulumValveData m_PendulumValveData;
  92. private PMState m_PMCurrentState;
  93. private bool m_SourceRFFanInterlock;
  94. private bool m_IsWLK;
  95. private bool m_IsWaterFlowOk;
  96. private bool m_IsTurboPumpInterlock;
  97. private bool m_IsCDAOK;
  98. private bool m_SensorGasBoxDoor;
  99. private bool m_SensorGasBoxPressure;
  100. private bool m_PumpIsOpen;
  101. private bool m_TurboIsOpen;
  102. private bool m_IsATM;
  103. private bool m_IsVAC;
  104. private List<string> m_RtDataKeys;
  105. private Dictionary<string, object> m_RtDataValues;
  106. private int m_PositionValue;
  107. private bool m_IsPositionMode;
  108. private int m_ESCVoltage;
  109. private bool m_GasIsFlowing;
  110. private bool m_IsProcessing;
  111. private bool m_IsAutoMode;
  112. private string m_SelectedRecipe;
  113. private float m_ChillerTempSetpoint;
  114. private float m_InnerChillerTempSetpoint;
  115. private float m_OuterChillerTempSetpoint;
  116. private float m_TopChillerTempSetpoint;
  117. private float m_WallTempSetpoint;
  118. private bool m_HeIsPressureMode = true;
  119. private bool m_ChillerIsOn;
  120. private bool m_InnerChillerIsOn;
  121. private bool m_OuterChillerIsOn;
  122. private bool m_TopChillerIsOn;
  123. private float m_ChamberPressure;
  124. private float m_ProcessPressure;
  125. private float m_ForelinePressurePressure;
  126. private float m_ESCHePressure;
  127. ButterflyValveView butterflyValveMessageBox;
  128. HeaterView heaterView;
  129. private int m_TurboPumpRotationalSpeed;
  130. private bool m_LiftPinIsUp;
  131. private bool m_IsSlitDoorClosed=true;
  132. private bool m_IsLidClosed=true;
  133. private float m_ChillerTemperature;
  134. private float m_InnerTemperature;
  135. private float m_OuterTemperature;
  136. private float m_TopTemperature;
  137. private int m_ESCHVOutputVoltage;
  138. //private float m_MatchC1;
  139. //private float m_MatchC2;
  140. //private float m_BiasMatchC1;
  141. //private float m_BiasMatchC2;
  142. private float m_PendulumValvePosition;
  143. private bool m_IsTurboPumpAtSpeed;
  144. private bool m_TurboPumpWaterFlowSwitch;
  145. private bool m_IsHasWafer;
  146. private Recipe m_CurrentRecipe = new Recipe();
  147. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  148. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  149. private double m_ChamberPressureFeedBack;
  150. private double m_TurboN2FlowSetPoint;
  151. private string m_ModuleName;
  152. private string m_WaferID;
  153. private int? currentRecipeNumber;
  154. private bool m_IsInclude;
  155. private int m_SelectedRecipeIndex=-1;
  156. private ComboBoxItem m_SelectedRecipeType;
  157. DispatcherTimer timer;
  158. #endregion
  159. #region 属性
  160. public bool IsInclude
  161. {
  162. get { return m_IsInclude; }
  163. set { SetProperty(ref m_IsInclude, value); }
  164. }
  165. public List<string> CurrentModuleRecipes
  166. {
  167. get { return m_CurrentModuleRecipes; }
  168. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  169. }
  170. public Recipe CurrentRecipe
  171. {
  172. get { return m_CurrentRecipe; }
  173. set { SetProperty(ref m_CurrentRecipe, value); }
  174. }
  175. public RecipeResult CurrentRecipeResult
  176. {
  177. get { return m_CurrentRecipeResult; }
  178. set { SetProperty(ref m_CurrentRecipeResult, value); }
  179. }
  180. public RecipeStep CurrentRecipeStep
  181. {
  182. get { return m_CurrentRecipeStep; }
  183. set { SetProperty(ref m_CurrentRecipeStep, value); }
  184. }
  185. public bool IsHasWafer
  186. {
  187. get { return m_IsHasWafer; }
  188. set { SetProperty(ref m_IsHasWafer, value); }
  189. }
  190. public bool IsTurboPumpAtSpeed
  191. {
  192. get { return m_IsTurboPumpAtSpeed; }
  193. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  194. }
  195. public bool TurboPumpWaterFlowSwitch
  196. {
  197. get { return m_TurboPumpWaterFlowSwitch; }
  198. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  199. }
  200. public float PendulumValvePosition
  201. {
  202. get { return m_PendulumValvePosition; }
  203. set { SetProperty(ref m_PendulumValvePosition, value); }
  204. }
  205. public AITMatchData BMatchData
  206. {
  207. get { return m_BMatchData; }
  208. set { SetProperty(ref m_BMatchData, value); }
  209. }
  210. public AITMatchData SMatchData
  211. {
  212. get { return m_SMatchData; }
  213. set { SetProperty(ref m_SMatchData, value); }
  214. }
  215. //public float BiasMatchC1
  216. //{
  217. // get { return m_BiasMatchC1; }
  218. // set
  219. // {
  220. // SetProperty(ref m_BiasMatchC1, value);
  221. // }
  222. //}
  223. //public float BiasMatchC2
  224. //{
  225. // get { return m_BiasMatchC2; }
  226. // set
  227. // {
  228. // SetProperty(ref m_BiasMatchC2, value);
  229. // }
  230. //}
  231. //public float MatchC1
  232. //{
  233. // get { return m_MatchC1; }
  234. // set
  235. // {
  236. // SetProperty(ref m_MatchC1, value);
  237. // }
  238. //}
  239. //public float MatchC2
  240. //{
  241. // get { return m_MatchC2; }
  242. // set
  243. // {
  244. // SetProperty(ref m_MatchC2, value);
  245. // }
  246. //}
  247. public AITPendulumValveData PendulumValveData
  248. {
  249. get { return m_PendulumValveData; }
  250. set
  251. {
  252. SetProperty(ref m_PendulumValveData, value);
  253. }
  254. }
  255. //public AITHVData ESCHVData
  256. //{
  257. // get { return m_ESCHVData; }
  258. // set
  259. // {
  260. // SetProperty(ref m_ESCHVData, value);
  261. // }
  262. //}
  263. public int ESCHVOutputVoltage
  264. {
  265. get { return m_ESCHVOutputVoltage; }
  266. set
  267. {
  268. SetProperty(ref m_ESCHVOutputVoltage, value);
  269. }
  270. }
  271. public float ChillerTemperature
  272. {
  273. get { return m_ChillerTemperature; }
  274. set
  275. {
  276. SetProperty(ref m_ChillerTemperature, value);
  277. }
  278. }
  279. public float InnerTemperature
  280. {
  281. get { return m_InnerTemperature; }
  282. set
  283. {
  284. SetProperty(ref m_InnerTemperature, value);
  285. }
  286. }
  287. public float OuterTemperature
  288. {
  289. get { return m_OuterTemperature; }
  290. set
  291. {
  292. SetProperty(ref m_OuterTemperature, value);
  293. }
  294. }
  295. public float TopTemperature
  296. {
  297. get { return m_TopTemperature; }
  298. set
  299. {
  300. SetProperty(ref m_TopTemperature, value);
  301. }
  302. }
  303. //public float HVTemperature
  304. //{
  305. // get { return m_HVTemperature; }
  306. // set
  307. // {
  308. // SetProperty(ref m_HVTemperature, value);
  309. // }
  310. //}
  311. public bool IsLidClosed
  312. {
  313. get { return m_IsLidClosed; }
  314. set
  315. {
  316. SetProperty(ref m_IsLidClosed, value);
  317. }
  318. }
  319. public bool IsSlitDoorClosed
  320. {
  321. get { return m_IsSlitDoorClosed; }
  322. set
  323. {
  324. SetProperty(ref m_IsSlitDoorClosed, value);
  325. }
  326. }
  327. public bool LiftPinIsUp
  328. {
  329. get { return m_LiftPinIsUp; }
  330. set
  331. {
  332. SetProperty(ref m_LiftPinIsUp, value);
  333. }
  334. }
  335. public int TurboPumpRotationalSpeed
  336. {
  337. get { return m_TurboPumpRotationalSpeed; }
  338. set
  339. {
  340. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  341. }
  342. }
  343. public float ESCHePressure
  344. {
  345. get { return m_ESCHePressure; }
  346. set
  347. {
  348. SetProperty(ref m_ESCHePressure, value);
  349. }
  350. }
  351. public float ChamberPressure
  352. {
  353. get { return m_ChamberPressure; }
  354. set
  355. {
  356. SetProperty(ref m_ChamberPressure, value);
  357. }
  358. }
  359. public float ProcessPressure
  360. {
  361. get { return m_ProcessPressure; }
  362. set
  363. {
  364. SetProperty(ref m_ProcessPressure, value);
  365. }
  366. }
  367. public float ForelinePressure
  368. {
  369. get { return m_ForelinePressurePressure; }
  370. set
  371. {
  372. SetProperty(ref m_ForelinePressurePressure, value);
  373. }
  374. }
  375. public bool SourceRFFanInterlock
  376. {
  377. get { return m_SourceRFFanInterlock; }
  378. set
  379. {
  380. SetProperty(ref m_SourceRFFanInterlock, value);
  381. }
  382. }
  383. public bool IsWLK
  384. {
  385. get { return m_IsWLK; }
  386. set
  387. {
  388. SetProperty(ref m_IsWLK, value);
  389. }
  390. }
  391. public bool IsWaterFlowOk
  392. {
  393. get { return m_IsWaterFlowOk; }
  394. set
  395. {
  396. SetProperty(ref m_IsWaterFlowOk, value);
  397. }
  398. }
  399. public bool IsCDAOK
  400. {
  401. get { return m_IsCDAOK; }
  402. set
  403. {
  404. SetProperty(ref m_IsCDAOK, value);
  405. }
  406. }
  407. public bool SensorGasBoxDoor
  408. {
  409. get { return m_SensorGasBoxDoor; }
  410. set
  411. {
  412. SetProperty(ref m_SensorGasBoxDoor, value);
  413. }
  414. }
  415. public bool SensorGasBoxPressure
  416. {
  417. get { return m_SensorGasBoxPressure; }
  418. set
  419. {
  420. SetProperty(ref m_SensorGasBoxPressure, value);
  421. }
  422. }
  423. public bool IsTurboPumpInterlock
  424. {
  425. get { return m_IsTurboPumpInterlock; }
  426. set
  427. {
  428. SetProperty(ref m_IsTurboPumpInterlock, value);
  429. }
  430. }
  431. public string ModuleName
  432. {
  433. get { return m_ModuleName; }
  434. set
  435. {
  436. SetProperty(ref m_ModuleName, value);
  437. }
  438. }
  439. public double MFC1SetPoint
  440. {
  441. get { return m_MFC1SetPoint; }
  442. set { SetProperty(ref m_MFC1SetPoint, value); }
  443. }
  444. public double MFC2SetPoint
  445. {
  446. get { return m_MFC2SetPoint; }
  447. set { SetProperty(ref m_MFC2SetPoint, value); }
  448. }
  449. public double MFC3SetPoint
  450. {
  451. get { return m_MFC3SetPoint; }
  452. set { SetProperty(ref m_MFC3SetPoint, value); }
  453. }
  454. public double MFC4SetPoint
  455. {
  456. get { return m_MFC4SetPoint; }
  457. set { SetProperty(ref m_MFC4SetPoint, value); }
  458. }
  459. public double MFC5SetPoint
  460. {
  461. get { return m_MFC5SetPoint; }
  462. set { SetProperty(ref m_MFC5SetPoint, value); }
  463. }
  464. public double MFC6SetPoint
  465. {
  466. get { return m_MFC6SetPoint; }
  467. set { SetProperty(ref m_MFC6SetPoint, value); }
  468. }
  469. public double MFC7SetPoint
  470. {
  471. get { return m_MFC7SetPoint; }
  472. set { SetProperty(ref m_MFC7SetPoint, value); }
  473. }
  474. public double MFC8SetPoint
  475. {
  476. get { return m_MFC8SetPoint; }
  477. set { SetProperty(ref m_MFC8SetPoint, value); }
  478. }
  479. public double N2SetPoint
  480. {
  481. get { return m_N2SetPoint; }
  482. set { SetProperty(ref m_N2SetPoint, value); }
  483. }
  484. public double TurboN2FlowSetPoint
  485. {
  486. get { return m_TurboN2FlowSetPoint; }
  487. set
  488. {
  489. if (value != m_TurboN2FlowSetPoint)
  490. {
  491. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  492. }
  493. SetProperty(ref m_TurboN2FlowSetPoint, value);
  494. }
  495. }
  496. public AITMfcData MFC1Data
  497. {
  498. get { return m_MFC1Data; }
  499. set { SetProperty(ref m_MFC1Data, value); }
  500. }
  501. public AITMfcData MFC2Data
  502. {
  503. get { return m_MFC2Data; }
  504. set { SetProperty(ref m_MFC2Data, value); }
  505. }
  506. public AITMfcData MFC3Data
  507. {
  508. get { return m_MFC3Data; }
  509. set { SetProperty(ref m_MFC3Data, value); }
  510. }
  511. public AITMfcData MFC4Data
  512. {
  513. get { return m_MFC4Data; }
  514. set { SetProperty(ref m_MFC4Data, value); }
  515. }
  516. public AITMfcData MFC5Data
  517. {
  518. get { return m_MFC5Data; }
  519. set { SetProperty(ref m_MFC5Data, value); }
  520. }
  521. public AITMfcData MFC6Data
  522. {
  523. get { return m_MFC6Data; }
  524. set { SetProperty(ref m_MFC6Data, value); }
  525. }
  526. public AITMfcData MFC7Data
  527. {
  528. get { return m_MFC7Data; }
  529. set { SetProperty(ref m_MFC7Data, value); }
  530. }
  531. public AITMfcData MFC8Data
  532. {
  533. get { return m_MFC8Data; }
  534. set { SetProperty(ref m_MFC8Data, value); }
  535. }
  536. public AITMfcData MFCHeData
  537. {
  538. get { return m_MFCHeData; }
  539. set { SetProperty(ref m_MFCHeData, value); }
  540. }
  541. public AITMfcData MFCN2Data
  542. {
  543. get { return m_MFCN2Data; }
  544. set { SetProperty(ref m_MFCN2Data, value); }
  545. }
  546. public AITHeaterData ValveHeaterData
  547. {
  548. get { return m_ValveHeaterData; }
  549. set { SetProperty(ref m_ValveHeaterData, value); }
  550. }
  551. public AITHeaterData ForelineHeaterData
  552. {
  553. get { return m_ForelineHeaterData; }
  554. set { SetProperty(ref m_ForelineHeaterData, value); }
  555. }
  556. public AITHeaterData WallHeaterData
  557. {
  558. get { return m_WallHeaterData; }
  559. set { SetProperty(ref m_WallHeaterData, value); }
  560. }
  561. public AITHeaterData PendulumHeaterData
  562. {
  563. get { return m_PendulumHeaterData; }
  564. set { SetProperty(ref m_PendulumHeaterData, value); }
  565. }
  566. public AITRfData SRFData
  567. {
  568. get { return m_SRFData; }
  569. set { SetProperty(ref m_SRFData, value); }
  570. }
  571. public AITRfData BRFData
  572. {
  573. get { return m_BRFData; }
  574. set { SetProperty(ref m_BRFData, value); }
  575. }
  576. public PMState PMCurrentState
  577. {
  578. get { return m_PMCurrentState; }
  579. set { SetProperty(ref m_PMCurrentState, value); }
  580. }
  581. #region 阀
  582. public bool GasFinalValveIsOpen
  583. {
  584. get { return m_GasFinalValveIsOpen; }
  585. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  586. }
  587. public bool PVN21ValveIsOpen
  588. {
  589. get { return m_PVN21ValveIsOpen; }
  590. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  591. }
  592. public bool PVN22ValveIsOpen
  593. {
  594. get { return m_PVN22ValveIsOpen; }
  595. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  596. }
  597. public bool N2ValveIsOpen
  598. {
  599. get { return m_N2ValveIsOpen; }
  600. set { SetProperty(ref m_N2ValveIsOpen, value); }
  601. }
  602. public bool PV11ValveIsOpen
  603. {
  604. get { return m_PV11ValveIsOpen; }
  605. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  606. }
  607. public bool PV12ValveIsOpen
  608. {
  609. get { return m_PV12ValveIsOpen; }
  610. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  611. }
  612. public bool MFC1ValveIsOpen
  613. {
  614. get { return m_MFC1ValveIsOpen; }
  615. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  616. }
  617. public bool PV21ValveIsOpen
  618. {
  619. get { return m_PV21ValveIsOpen; }
  620. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  621. }
  622. public bool PV22ValveIsOpen
  623. {
  624. get { return m_PV22ValveIsOpen; }
  625. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  626. }
  627. public bool MFC2ValveIsOpen
  628. {
  629. get { return m_MFC2ValveIsOpen; }
  630. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  631. }
  632. public bool PV31ValveIsOpen
  633. {
  634. get { return m_PV31ValveIsOpen; }
  635. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  636. }
  637. public bool PV32ValveIsOpen
  638. {
  639. get { return m_PV32ValveIsOpen; }
  640. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  641. }
  642. public bool MFC3ValveIsOpen
  643. {
  644. get { return m_MFC3ValveIsOpen; }
  645. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  646. }
  647. public bool PV41ValveIsOpen
  648. {
  649. get { return m_PV41ValveIsOpen; }
  650. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  651. }
  652. public bool PV42ValveIsOpen
  653. {
  654. get { return m_PV42ValveIsOpen; }
  655. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  656. }
  657. public bool MFC4ValveIsOpen
  658. {
  659. get { return m_MFC4ValveIsOpen; }
  660. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  661. }
  662. public bool MFC5ValveIsOpen
  663. {
  664. get { return m_MFC5ValveIsOpen; }
  665. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  666. }
  667. public bool MFC6ValveIsOpen
  668. {
  669. get { return m_MFC6ValveIsOpen; }
  670. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  671. }
  672. public bool MFC7ValveIsOpen
  673. {
  674. get { return m_MFC7ValveIsOpen; }
  675. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  676. }
  677. public bool MFC8ValveIsOpen
  678. {
  679. get { return m_MFC8ValveIsOpen; }
  680. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  681. }
  682. public bool PVHe1ValveIsOpen
  683. {
  684. get { return m_PVHe1ValveIsOpen; }
  685. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  686. }
  687. public bool PVHe2ValveIsOpen
  688. {
  689. get { return m_PVHe2ValveIsOpen; }
  690. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  691. }
  692. public bool TurboPumpPumpingValveIsOpen
  693. {
  694. get { return m_TurboPumpPumpingValveIsOpen; }
  695. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  696. }
  697. public bool TurboPumpPurgeValveIsOpen
  698. {
  699. get { return m_TurboPumpPurgeValveIsOpen; }
  700. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  701. }
  702. public bool SoftPumpValveIsOpen
  703. {
  704. get { return m_SoftPumpValveIsOpen; }
  705. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  706. }
  707. public bool FastPumpValveIsOpen
  708. {
  709. get { return m_FastPumpValveIsOpen; }
  710. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  711. }
  712. public bool GuageValveIsOpen
  713. {
  714. get { return m_GuageValveIsOpen; }
  715. set { SetProperty(ref m_GuageValveIsOpen, value); }
  716. }
  717. #endregion
  718. public Dictionary<string, object> RtDataValues
  719. {
  720. get { return m_RtDataValues; }
  721. set { SetProperty(ref m_RtDataValues, value); }
  722. }
  723. public bool PumpIsOpen
  724. {
  725. get { return m_PumpIsOpen; }
  726. set { SetProperty(ref m_PumpIsOpen, value); }
  727. }
  728. public bool PendulumValveIsOpen
  729. {
  730. get { return m_PendulumValveIsOpen; }
  731. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  732. }
  733. public bool TurboIsOpen
  734. {
  735. get { return m_TurboIsOpen; }
  736. set { SetProperty(ref m_TurboIsOpen, value); }
  737. }
  738. public bool IsATM
  739. {
  740. get { return m_IsATM; }
  741. set { SetProperty(ref m_IsATM, value); }
  742. }
  743. public bool IsVAC
  744. {
  745. get { return m_IsVAC; }
  746. set { SetProperty(ref m_IsVAC, value); }
  747. }
  748. //public bool BRFIsOn
  749. //{
  750. // get { return m_BRFIsOn; }
  751. // set { SetProperty(ref m_BRFIsOn, value); }
  752. //}
  753. //public bool SRFIsOn
  754. //{
  755. // get { return m_SRFIsOn; }
  756. // set { SetProperty(ref m_SRFIsOn, value); }
  757. //}
  758. public int PositionValue
  759. {
  760. get { return m_PositionValue; }
  761. set { SetProperty(ref m_PositionValue, value); }
  762. }
  763. public bool IsPositionMode
  764. {
  765. get { return m_IsPositionMode; }
  766. set { SetProperty(ref m_IsPositionMode, value); }
  767. }
  768. public double HeGasSetpoint
  769. {
  770. get { return m_HeGasSetpoint; }
  771. set
  772. {
  773. SetProperty(ref m_HeGasSetpoint, value);
  774. }
  775. }
  776. public int HePressureSetpoint
  777. {
  778. get { return m_HePressureSetpoint; }
  779. set
  780. {
  781. SetProperty(ref m_HePressureSetpoint, value);
  782. }
  783. }
  784. public float SRFFwdPowerSetpoint
  785. {
  786. get { return m_SRFFwdPowerSetpoint; }
  787. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  788. }
  789. public float BRFFwdPowerSetpoint
  790. {
  791. get { return m_BRFFwdPowerSetpoint; }
  792. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  793. }
  794. public int ESCVoltage
  795. {
  796. get { return m_ESCVoltage; }
  797. set { SetProperty(ref m_ESCVoltage, value); }
  798. }
  799. public float SRFMatchC1
  800. {
  801. get { return m_SRFMatchC1; }
  802. set { SetProperty(ref m_SRFMatchC1, value); }
  803. }
  804. public float SRFMatchC2
  805. {
  806. get { return m_SRFMatchC2; }
  807. set { SetProperty(ref m_SRFMatchC2, value); }
  808. }
  809. public float BRFMatchC1
  810. {
  811. get { return m_BRFMatchC1; }
  812. set { SetProperty(ref m_BRFMatchC1, value); }
  813. }
  814. public float BRFMatchC2
  815. {
  816. get { return m_BRFMatchC2; }
  817. set { SetProperty(ref m_BRFMatchC2, value); }
  818. }
  819. public bool GasIsFlowing
  820. {
  821. get { return m_GasIsFlowing; }
  822. set { SetProperty(ref m_GasIsFlowing, value); }
  823. }
  824. public bool IsProcessing
  825. {
  826. get { return m_IsProcessing; }
  827. set { SetProperty(ref m_IsProcessing, value); }
  828. }
  829. public bool IsAutoMode
  830. {
  831. get { return m_IsAutoMode; }
  832. set { SetProperty(ref m_IsAutoMode, value); }
  833. }
  834. public string SelectedRecipe
  835. {
  836. get { return m_SelectedRecipe; }
  837. set { SetProperty(ref m_SelectedRecipe, value); }
  838. }
  839. public float ChillerTempSetpoint
  840. {
  841. get { return m_ChillerTempSetpoint; }
  842. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  843. }
  844. public float InnerChillerTempSetpoint
  845. {
  846. get { return m_InnerChillerTempSetpoint; }
  847. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  848. }
  849. public float OuterChillerTempSetpoint
  850. {
  851. get { return m_OuterChillerTempSetpoint; }
  852. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  853. }
  854. public float TopChillerTempSetpoint
  855. {
  856. get { return m_TopChillerTempSetpoint; }
  857. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  858. }
  859. public float WallTempSetpoint
  860. {
  861. get { return m_WallTempSetpoint; }
  862. set { SetProperty(ref m_WallTempSetpoint, value); }
  863. }
  864. public bool HeIsPressureMode
  865. {
  866. get { return m_HeIsPressureMode; }
  867. set { SetProperty(ref m_HeIsPressureMode, value); }
  868. }
  869. public bool ChillerIsOn
  870. {
  871. get { return m_ChillerIsOn; }
  872. set { SetProperty(ref m_ChillerIsOn, value); }
  873. }
  874. public bool InnerChillerIsOn
  875. {
  876. get { return m_InnerChillerIsOn; }
  877. set { SetProperty(ref m_InnerChillerIsOn, value); }
  878. }
  879. public bool OuterChillerIsOn
  880. {
  881. get { return m_OuterChillerIsOn; }
  882. set { SetProperty(ref m_OuterChillerIsOn, value); }
  883. }
  884. public bool TopChillerIsOn
  885. {
  886. get { return m_TopChillerIsOn; }
  887. set { SetProperty(ref m_TopChillerIsOn, value); }
  888. }
  889. public double ChamberPressureFeedBack
  890. {
  891. get { return m_ChamberPressureFeedBack; }
  892. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  893. }
  894. public string WaferID
  895. {
  896. get { return m_WaferID; }
  897. set { SetProperty(ref m_WaferID, value); }
  898. }
  899. public int SelectedRecipeIndex
  900. {
  901. get { return m_SelectedRecipeIndex; }
  902. set { SetProperty(ref m_SelectedRecipeIndex, value); }
  903. }
  904. public ComboBoxItem SelectedRecipeType
  905. {
  906. get { return m_SelectedRecipeType; }
  907. set { SetProperty(ref m_SelectedRecipeType, value); }
  908. }
  909. #endregion
  910. #region 命令
  911. private DelegateCommand _PMInitCommnad;
  912. public DelegateCommand PMInitCommnad =>
  913. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  914. private DelegateCommand _PMAbortCommnad;
  915. public DelegateCommand PMAbortCommnad =>
  916. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  917. private DelegateCommand _GasCommand;
  918. public DelegateCommand GasCommand =>
  919. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  920. private DelegateCommand _HeCommand;
  921. public DelegateCommand HeCommand =>
  922. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  923. private DelegateCommand _RfCommand;
  924. public DelegateCommand RfCommand =>
  925. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  926. private DelegateCommand _PurgeCommand;
  927. public DelegateCommand PurgeCommand =>
  928. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  929. private DelegateCommand _VentCommand;
  930. public DelegateCommand VentCommand =>
  931. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  932. private DelegateCommand _PumpCommand;
  933. public DelegateCommand PumpCommand =>
  934. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  935. private DelegateCommand _OpenPumpCommand;
  936. public DelegateCommand OpenPumpCommand =>
  937. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  938. private DelegateCommand _ClosePumpCommand;
  939. public DelegateCommand ClosePumpCommand =>
  940. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  941. private DelegateCommand _OpenTurboPumpCommand;
  942. public DelegateCommand OpenTurboPumpCommand =>
  943. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  944. private DelegateCommand _CloseTurboPumpCommand;
  945. public DelegateCommand CloseTurboPumpCommand =>
  946. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  947. private DelegateCommand _OpenPendulumValveCommand;
  948. public DelegateCommand OpenPendulumValveCommand =>
  949. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  950. private DelegateCommand _ClosePendulumValveCommand;
  951. public DelegateCommand ClosePendulumValveCommand =>
  952. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  953. private DelegateCommand<object> _PinUpDownCommand;
  954. public DelegateCommand<object> PinUpDownCommand =>
  955. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  956. private DelegateCommand<object> _LidUpDownCommand;
  957. public DelegateCommand<object> LidUpDownCommand =>
  958. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  959. private DelegateCommand _SetSRfCommand;
  960. public DelegateCommand SetSRfCommand =>
  961. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  962. private DelegateCommand _SetBRfCommand;
  963. public DelegateCommand SetBRfCommand =>
  964. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  965. private DelegateCommand _OpenButterflyValveViewCommand;
  966. public DelegateCommand OpenButterflyValveViewCommand =>
  967. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  968. //private DelegateCommand _HVCommand;
  969. //public DelegateCommand HVCommand =>
  970. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  971. //private DelegateCommand _HVSetCommand;
  972. //public DelegateCommand HVSetCommand =>
  973. // _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  974. private DelegateCommand _LoadRecipeCommand;
  975. public DelegateCommand LoadRecipeCommand =>
  976. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  977. private DelegateCommand<object> _ControlValveCommand;
  978. public DelegateCommand<object> ControlValveCommand =>
  979. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  980. private DelegateCommand<object> _RunRecipeCommand;
  981. public DelegateCommand<object> RunRecipeCommand =>
  982. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  983. private DelegateCommand<object> _SetChillerTempCommand;
  984. public DelegateCommand<object> SetChillerTempCommand =>
  985. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  986. private DelegateCommand<object> _OnOffChillerCommand;
  987. public DelegateCommand<object> OnOffChillerCommand =>
  988. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  989. private DelegateCommand<object> _HeaterCommand;
  990. public DelegateCommand<object> HeaterCommand =>
  991. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  992. private DelegateCommand _EndStepCommand;
  993. public DelegateCommand EndStepCommand =>
  994. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  995. private DelegateCommand _OnlineCommand;
  996. public DelegateCommand OnlineCommand =>
  997. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  998. private DelegateCommand _OfflineCommand;
  999. public DelegateCommand OfflineCommand =>
  1000. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1001. private DelegateCommand<object> _AbortRecipeCommnad;
  1002. public DelegateCommand<object> AbortRecipeCommnad =>
  1003. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  1004. private DelegateCommand _IncludeCommand;
  1005. public DelegateCommand IncludeCommand =>
  1006. _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
  1007. private DelegateCommand _SwitchTypeCommand;
  1008. public DelegateCommand SwitchTypeCommand =>
  1009. _SwitchTypeCommand ?? (_SwitchTypeCommand = new DelegateCommand(OnSwitchType));
  1010. #endregion
  1011. #region 构造函数
  1012. public OverKepler2300ViewModel()
  1013. {
  1014. m_RtDataKeys = new List<string>();
  1015. m_IsATM = true;
  1016. ModuleName = "PMA";
  1017. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1018. timer = new DispatcherTimer();
  1019. timer.Interval = TimeSpan.FromSeconds(0.5);
  1020. timer.Tick += timer_Tick;
  1021. //timer.Start();
  1022. }
  1023. #endregion
  1024. #region 命令方法
  1025. private void OnControlValve(object obj)
  1026. {
  1027. CommonValveControl commonValveControl = (CommonValveControl)obj;
  1028. if (commonValveControl.IsCanEdit == true)
  1029. {
  1030. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  1031. string operation = commonValveControl.Status ? "关闭" : "打开";
  1032. LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
  1033. }
  1034. }
  1035. private void OnPMInit()
  1036. {
  1037. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  1038. }
  1039. private async void OnGas()
  1040. {
  1041. await Task.Run(async () =>
  1042. {
  1043. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  1044. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  1045. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1047. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1048. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1049. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1050. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1051. await Task.Delay(1000);
  1052. object[] mfc = new object[8];
  1053. string[] mfcSetPoint = new string[8];
  1054. mfc[0] = MFC1Data.SetPoint;
  1055. mfc[1] = MFC2Data.SetPoint;
  1056. mfc[2] = MFC3Data.SetPoint;
  1057. mfc[3] = MFC4Data.SetPoint;
  1058. mfc[4] = MFC5Data.SetPoint;
  1059. mfc[5] = MFC6Data.SetPoint;
  1060. mfc[6] = MFC7Data.SetPoint;
  1061. mfc[7] = MFC8Data.SetPoint;
  1062. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1063. string operation = GasIsFlowing ? "关闭" : "打开";
  1064. LOG.Info($"{ModuleName},{operation}GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
  1065. });
  1066. }
  1067. private void OnHe()
  1068. {
  1069. if (PVHe1ValveIsOpen == true)
  1070. {
  1071. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1072. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1073. }
  1074. else
  1075. {
  1076. if (HeIsPressureMode)
  1077. {
  1078. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1079. }
  1080. else
  1081. {
  1082. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1083. }
  1084. }
  1085. }
  1086. private void OnRf()
  1087. {
  1088. if (PMCurrentState == PMState.RfPowering)
  1089. {
  1090. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1091. }
  1092. else
  1093. {
  1094. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1095. }
  1096. }
  1097. private void OnPurge()
  1098. {
  1099. if (PMCurrentState == PMState.Purging)
  1100. {
  1101. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1102. }
  1103. else
  1104. {
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1106. }
  1107. }
  1108. private void OnVent()
  1109. {
  1110. if (PMCurrentState == PMState.Venting)
  1111. {
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1113. }
  1114. else
  1115. {
  1116. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1117. }
  1118. }
  1119. private void OnPump()
  1120. {
  1121. if (PMCurrentState == PMState.Pumping)
  1122. {
  1123. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1124. return;
  1125. }
  1126. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1127. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1128. // 设置底压
  1129. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1130. if (basePressure <= 0.01 || basePressure >= 1000)
  1131. {
  1132. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1133. return;
  1134. }
  1135. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1136. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1137. {
  1138. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1139. return;
  1140. }
  1141. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1142. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1143. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1144. }
  1145. private void OnOpenPump()
  1146. {
  1147. if (PMCurrentState == PMState.LaunchingPump)
  1148. {
  1149. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1150. return;
  1151. }
  1152. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1153. }
  1154. private void OnClosePump()
  1155. {
  1156. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1157. }
  1158. private void OnOpenTurboPump()
  1159. {
  1160. if (PMCurrentState == PMState.LaunchingTurboPump)
  1161. {
  1162. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1163. return;
  1164. }
  1165. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1166. }
  1167. private void OnCloseTurboPump()
  1168. {
  1169. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1170. }
  1171. private void OnOpenPendulumValve()
  1172. {
  1173. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1174. }
  1175. private void OnClosePendulumValve()
  1176. {
  1177. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1178. }
  1179. private void OnPinUpDown(object upDown)
  1180. {
  1181. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1182. }
  1183. private void OnLidUpDown(object upDown)
  1184. {
  1185. //var value = (bool)upDown;
  1186. if (upDown.ToString() == "Up")
  1187. {
  1188. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1189. }
  1190. else
  1191. {
  1192. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1193. }
  1194. }
  1195. private void OnSetSRf()
  1196. {
  1197. if (SRFData.IsRfOn == true)
  1198. {
  1199. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1200. }
  1201. else
  1202. {
  1203. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1205. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1206. }
  1207. }
  1208. private void OnSetBRf()
  1209. {
  1210. if (BRFData.IsRfOn == true)
  1211. {
  1212. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1213. }
  1214. else
  1215. {
  1216. if (GasIsFlowing == true)
  1217. {
  1218. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1219. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1220. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1221. }
  1222. }
  1223. }
  1224. private void OnPMAbort()
  1225. {
  1226. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1227. }
  1228. private void OnOpenButterflyValveView()
  1229. {
  1230. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1231. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1232. {
  1233. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1234. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1235. butterflyValveMessageBox.Left = 700;
  1236. butterflyValveMessageBox.Top = 600;
  1237. butterflyValveMessageBox.Show();
  1238. butterflyValveMessageBox.Owner = _mainWindow;
  1239. }
  1240. }
  1241. private void OnLoadRecipe()
  1242. {
  1243. string recipeType = SelectedRecipeType.Content.ToString();
  1244. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType)).ToList();
  1245. }
  1246. //private void OnHVSet()
  1247. //{
  1248. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1249. //}
  1250. private void OnSwitchType()
  1251. {
  1252. SelectedRecipeIndex = -1;
  1253. }
  1254. private void OnRunRecipe(object obj)
  1255. {
  1256. if (SelectedRecipeIndex == -1)
  1257. {
  1258. return;
  1259. }
  1260. string recipeName = CurrentModuleRecipes[SelectedRecipeIndex];
  1261. string recipeType = SelectedRecipeType.Content.ToString();
  1262. ClearData();
  1263. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType, recipeName + ".rcp");
  1264. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1265. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, recipeType);
  1266. LOG.Info($"{ModuleName},Run Recipe {recipeName},");
  1267. }
  1268. private void OnSetChillerTemp(object obj)
  1269. {
  1270. float offset;
  1271. float setPoint;
  1272. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1273. switch (chillerType)
  1274. {
  1275. case ChillerType.Chiller:
  1276. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1277. float.TryParse(value, out offset);
  1278. setPoint = ChillerTempSetpoint;
  1279. break;
  1280. case ChillerType.InnerChiller:
  1281. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1282. float.TryParse(Innervalue, out offset);
  1283. setPoint = InnerChillerTempSetpoint;
  1284. break;
  1285. case ChillerType.OuterChiller:
  1286. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1287. float.TryParse(Outervalue, out offset);
  1288. setPoint = OuterChillerTempSetpoint;
  1289. break;
  1290. case ChillerType.TopChiller:
  1291. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1292. float.TryParse(Topvalue, out offset);
  1293. setPoint = TopChillerTempSetpoint;
  1294. break;
  1295. default:
  1296. return;
  1297. }
  1298. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1299. }
  1300. private void OnOffChiller(object obj)
  1301. {
  1302. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1303. switch (chillerType)
  1304. {
  1305. case ChillerType.Chiller:
  1306. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1307. break;
  1308. case ChillerType.InnerChiller:
  1309. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1310. break;
  1311. case ChillerType.OuterChiller:
  1312. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1313. break;
  1314. case ChillerType.TopChiller:
  1315. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1316. break;
  1317. default:
  1318. return;
  1319. }
  1320. }
  1321. private void OnHeater(object obj)
  1322. {
  1323. if (IsAutoMode == true)
  1324. {
  1325. return;
  1326. }
  1327. AITHeaterData heaterData = obj as AITHeaterData;
  1328. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1329. if (heaterView == null || heaterView.IsVisible == false)
  1330. {
  1331. heaterView = new HeaterView(heaterData, ModuleName);
  1332. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1333. heaterView.Owner = _mainWindow;
  1334. heaterView.Show();
  1335. }
  1336. }
  1337. private void OnEndStep()
  1338. {
  1339. //if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1340. //{
  1341. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1342. //}
  1343. //else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1344. //{
  1345. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1346. //}
  1347. if (CurrentRecipeResult?.RecipeStepNumber != null)
  1348. {
  1349. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1350. }
  1351. }
  1352. private void OnOnline()
  1353. {
  1354. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
  1355. }
  1356. private void OnOffline()
  1357. {
  1358. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
  1359. }
  1360. private async void OnAbortRecipe(object obj)
  1361. {
  1362. if (PMCurrentState != PMState.Processing)
  1363. {
  1364. return;
  1365. }
  1366. switch (obj.ToString())
  1367. {
  1368. case "0":
  1369. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1370. break;
  1371. case "1":
  1372. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1373. //if (ESCHVData.IsOn == true)
  1374. //{
  1375. // await Task.Delay(3000);
  1376. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1377. //}
  1378. break;
  1379. case "2":
  1380. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1381. await Task.Delay(3000);
  1382. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1383. break;
  1384. }
  1385. }
  1386. private void OnInclude()
  1387. {
  1388. if (IsInclude)
  1389. {
  1390. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
  1391. }
  1392. else
  1393. {
  1394. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
  1395. }
  1396. }
  1397. #endregion
  1398. #region 私有方法
  1399. private void ClearData()
  1400. {
  1401. ESCVoltage = 0;
  1402. SRFFwdPowerSetpoint = 0;
  1403. SRFMatchC1 = 0;
  1404. SRFMatchC2 = 0;
  1405. BRFFwdPowerSetpoint = 0;
  1406. BRFMatchC1 = 0;
  1407. BRFMatchC2 = 0;
  1408. HeGasSetpoint = 0;
  1409. MFC1SetPoint = 0;
  1410. MFC2SetPoint = 0;
  1411. MFC3SetPoint = 0;
  1412. MFC4SetPoint = 0;
  1413. MFC5SetPoint = 0;
  1414. MFC6SetPoint = 0;
  1415. MFC7SetPoint = 0;
  1416. MFC8SetPoint = 0;
  1417. }
  1418. private IEnumerable<string> GetFilesNames(string path)
  1419. {
  1420. if (Directory.Exists(path))
  1421. {
  1422. return Directory.GetFiles(path, "*.rcp")?
  1423. .Select(Path.GetFileNameWithoutExtension);
  1424. }
  1425. else
  1426. {
  1427. return new List<string>();
  1428. }
  1429. }
  1430. void timer_Tick(object sender, EventArgs e)
  1431. {
  1432. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1433. if (RtDataValues == null)
  1434. {
  1435. return;
  1436. }
  1437. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1438. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1439. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1440. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1441. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1442. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1443. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1444. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1445. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1446. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1447. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1448. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1449. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1450. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1451. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1452. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1453. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1454. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1455. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1456. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1457. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1458. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1459. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1460. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1461. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1462. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1463. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1464. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1465. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1466. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1467. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1468. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1469. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1470. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1471. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1472. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1473. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1474. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1475. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1476. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1477. IsProcessing = PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean;
  1478. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1479. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1480. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1481. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1482. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1483. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1484. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1485. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1486. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1487. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1488. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1489. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1490. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1491. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1492. BMatchData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.DeviceData");
  1493. SMatchData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.DeviceData");
  1494. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1495. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1496. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1497. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1498. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1499. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1500. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1501. ESCHePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ESCHePressure");
  1502. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1503. InnerTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerInnerTemp");
  1504. OuterTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerOuterTemp");
  1505. TopTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerTopTemp");
  1506. InnerChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.InnerChiller.IsOn");
  1507. OuterChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.OuterChiller.IsOn");
  1508. TopChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TopChiller.IsOn");
  1509. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1510. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1511. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1512. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1513. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1514. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1515. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1516. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1517. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1518. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1519. //MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1520. //MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1521. //BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1522. //BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1523. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1524. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1525. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1526. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1527. //if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1528. //{
  1529. // //if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1530. // //{
  1531. // // var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1532. // // CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1533. // // CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1534. // //}
  1535. // //currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1536. //}
  1537. //else
  1538. //{
  1539. // CurrentRecipeResult = null;
  1540. // CurrentRecipeStep = null;
  1541. //}
  1542. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 100)
  1543. {
  1544. ChamberPressureFeedBack = ProcessPressure;
  1545. }
  1546. else
  1547. {
  1548. ChamberPressureFeedBack = ChamberPressure;
  1549. }
  1550. IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1551. IsInclude = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
  1552. }
  1553. public void addDataKeys()
  1554. {
  1555. m_RtDataKeys.Clear();
  1556. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1557. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1558. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1559. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1560. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1561. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1562. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1563. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1564. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1565. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1566. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1567. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1568. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1569. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1570. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1571. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1572. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1573. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1574. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1575. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1576. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1577. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1578. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1579. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1580. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1581. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1582. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1583. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1584. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1585. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1586. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1587. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1588. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1589. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1590. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1591. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1592. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1593. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1594. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1595. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1596. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1597. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1598. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1599. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1600. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1601. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1602. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1603. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1604. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1605. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1606. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1607. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1608. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1609. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1610. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1611. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1612. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1613. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1614. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1615. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1616. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1617. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1618. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1619. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1620. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1621. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1622. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1623. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1624. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1625. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1626. m_RtDataKeys.Add($"{ModuleName}.InnerChiller.IsOn");
  1627. m_RtDataKeys.Add($"{ModuleName}.OuterChiller.IsOn");
  1628. m_RtDataKeys.Add($"{ModuleName}.TopChiller.IsOn");
  1629. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1630. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1631. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1632. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1633. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.DeviceData");
  1634. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.DeviceData");
  1635. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1636. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1637. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1638. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1639. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1640. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1641. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1642. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1643. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1644. m_RtDataKeys.Add($"{ModuleName}.IsInclude");
  1645. }
  1646. public void EnterExitView(bool isEnter)
  1647. {
  1648. if (isEnter)
  1649. {
  1650. timer_Tick(null, null);
  1651. timer.Start();
  1652. }
  1653. else
  1654. {
  1655. timer.Stop();
  1656. }
  1657. }
  1658. #endregion
  1659. }
  1660. }