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- using Aitex.Core.Common.DeviceData;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.OperationCenter;
- using Prism.Commands;
- using Prism.Mvvm;
- using System;
- using System.Collections.Generic;
- using System.Windows;
- using System.Windows.Threading;
- using Venus_Core;
- using Venus_MainPages.Views;
- using System.Linq;
- using System.Threading.Tasks;
- using System.IO;
- using Venus_Themes.CustomControls;
- using Venus_MainPages.Unity;
- using MECF.Framework.Common.CommonData.DeviceData;
- using Path = System.IO.Path;
- using System.Windows.Controls;
- using Aitex.Core.RT.Log;
- namespace Venus_MainPages.ViewModels
- {
- internal class OverKepler2200BViewModel : BindableBase
- {
- #region 私有字段
- private double m_TurboN2FlowSetPoint;
- private List<string> m_CurrentModuleRecipes = new List<string>();
- private bool m_PVN21ValveIsOpen;
- private bool m_PVN22ValveIsOpen;
- private bool m_N2ValveIsOpen;
- private bool m_PV11ValveIsOpen;
- private bool m_PV12ValveIsOpen;
- private bool m_PV21ValveIsOpen;
- private bool m_PV22ValveIsOpen;
- private bool m_PV31ValveIsOpen;
- private bool m_PV32ValveIsOpen;
- private bool m_PV41ValveIsOpen;
- private bool m_PV42ValveIsOpen;
- private bool m_MFC1ValveIsOpen;
- private bool m_MFC2ValveIsOpen;
- private bool m_MFC3ValveIsOpen;
- private bool m_MFC4ValveIsOpen;
- private bool m_MFC5ValveIsOpen;
- private bool m_MFC6ValveIsOpen;
- //private bool m_MFC7ValveIsOpen;
- //private bool m_MFC8ValveIsOpen;
- private bool m_GasFinalValveIsOpen;
- private bool m_SoftPumpValveIsOpen;
- private bool m_FastPumpValveIsOpen;
- //private bool m_PVHe1ValveIsOpen;
- //private bool m_PVHe2ValveIsOpen;
- private bool m_TurboPumpPumpingValveIsOpen;
- private bool m_TurboPumpPurgeValveIsOpen;
- private bool m_GuageValveIsOpen;
- private bool m_PendulumValveIsOpen;
- private bool m_PurgeValveIsOpen;
- private double m_HeGasSetpoint;
- private int m_HePressureSetpoint;
- private float m_SRFFwdPowerSetpoint;
- //private float m_BRFFwdPowerSetpoint;
- private float m_SRFMatchC1;
- private float m_SRFMatchC2;
- //private float m_BRFMatchC1;
- //private float m_BRFMatchC2;
- private double m_MFC1SetPoint;
- private double m_MFC2SetPoint;
- private double m_MFC3SetPoint;
- private double m_MFC4SetPoint;
- private double m_MFC5SetPoint;
- private double m_MFC6SetPoint;
- private double m_MFC7SetPoint;
- private double m_MFC8SetPoint;
- private double m_N2SetPoint;
- private double m_RFBoxC1Setpoint;
- private AITMfcData m_MFC1Data;
- private AITMfcData m_MFC2Data;
- private AITMfcData m_MFC3Data;
- private AITMfcData m_MFC4Data;
- private AITMfcData m_MFC5Data;
- private AITMfcData m_MFC6Data;
- //private AITMfcData m_MFC7Data;
- //private AITMfcData m_MFC8Data;
- //private AITMfcData m_MFCHeData;
- private AITMfcData m_MFCN2Data;
- private AITMatchData m_MatchData;
- private AITMatchData m_RFBoxData;
- private AITHeaterData m_PendulumHeaterData;
- private AITRfData m_SRFData;
- //private AITRfData m_BRFData;
- private AITPendulumValveData m_PendulumValveData;
- //private AITHVData m_ESCHVData;
- private PMState m_PMCurrentState;
- private bool m_SourceRFMatchInterlock;
- private bool m_IsWLK;
- private bool m_IsWaterFlowOk;
- private bool m_IsTurboPumpInterlock;
- private bool m_IsCDAOK;
- private bool m_SensorGasBoxDoor;
- private bool m_SensorGasBoxPressure;
- private bool m_PumpIsOpen;
- private bool m_TurboIsOpen;
- private bool m_IsATM;
- private bool m_IsVAC;
- private List<string> m_RtDataKeys;
- private Dictionary<string, object> m_RtDataValues;
- private int m_PositionValue;
- private bool m_IsPositionMode;
- //private int m_ESCVoltage;
- private bool m_GasIsFlowing;
- private bool m_IsProcessing;
- private bool m_IsAutoMode;
- //private string m_SelectedRecipe;
- //private float m_ChillerTempSetpoint;
- //private float m_WallTempSetpoint;
- //private bool m_HeIsPressureMode = true;
- //private bool m_ChillerIsOn;
- private float m_ChamberPressure;
- private float m_ProcessPressure;
- private float m_ForelinePressurePressure;
- //private float m_ESCHePressure;
- ButterflyValveView butterflyValveMessageBox;
- HeaterView heaterView;
- private int m_TurboPumpRotationalSpeed;
- //private bool m_LiftPinIsUp;
- private bool m_IsSlitDoorClosed=true;
- private bool m_IsLidClosed=true;
- //private float m_ChillerTemperature;
- //private float m_HVTemperature;
- //private int m_ESCHVOutputVoltage;
- //private float m_SRfReflectPower;
- //private float m_SRfForwardPowerFeedBack;
- //private float m_BRfReflectPower;
- //private float m_BRfForwardPowerFeedBack;
- //private int m_MatchWorkMode;
- //private int m_BiasMatchWorkMode;
- private float m_MatchC1;
- private float m_MatchC2;
- private string m_MatchWorkMode;
- private float m_BiasMatchC1;
- private float m_BiasMatchC2;
- //private float m_RFBoxC1;
- //private float m_PendulumValvePosition;
- private bool m_IsTurboPumpAtSpeed;
- private bool m_TurboPumpWaterFlowSwitch;
- private bool m_IsHasWafer;
- private Recipe m_CurrentRecipe = new Recipe();
- private RecipeResult m_CurrentRecipeResult = new RecipeResult();
- private RecipeStep m_CurrentRecipeStep = new RecipeStep();
- private double m_ChamberPressureFeedBack;
- private string m_WaferID;
- private string m_ModuleName;
- private int? currentRecipeNumber;
- private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
- private ComboBoxItem m_SelectedPosition;
- private int m_HighTemperatureHeaterTemperatureSetpoint;
- private int m_HighTemperatureHeaterRatioSetpoint;
- private PressureType m_PressureType;
- private bool m_IsInclude;
- private int m_SelectedRecipeIndex=-1;
- private ComboBoxItem m_SelectedRecipeType;
- DispatcherTimer timer;
- #endregion
- #region 属性
- public bool IsInclude
- {
- get { return m_IsInclude; }
- set { SetProperty(ref m_IsInclude, value); }
- }
- public PressureType PressureType
- {
- get { return m_PressureType; }
- set { SetProperty(ref m_PressureType, value); }
- }
- public double TurboN2FlowSetPoint
- {
- get { return m_TurboN2FlowSetPoint; }
- set
- {
- if (value != m_TurboN2FlowSetPoint)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
- }
- SetProperty(ref m_TurboN2FlowSetPoint, value);
- }
- }
- public List<string> CurrentModuleRecipes
- {
- get { return m_CurrentModuleRecipes; }
- set { SetProperty(ref m_CurrentModuleRecipes, value); }
- }
- public Recipe CurrentRecipe
- {
- get { return m_CurrentRecipe; }
- set { SetProperty(ref m_CurrentRecipe, value); }
- }
- public RecipeResult CurrentRecipeResult
- {
- get { return m_CurrentRecipeResult; }
- set { SetProperty(ref m_CurrentRecipeResult, value); }
- }
- public RecipeStep CurrentRecipeStep
- {
- get { return m_CurrentRecipeStep; }
- set { SetProperty(ref m_CurrentRecipeStep, value); }
- }
- public bool IsHasWafer
- {
- get { return m_IsHasWafer; }
- set { SetProperty(ref m_IsHasWafer, value); }
- }
- public bool IsTurboPumpAtSpeed
- {
- get { return m_IsTurboPumpAtSpeed; }
- set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
- }
- public bool TurboPumpWaterFlowSwitch
- {
- get { return m_TurboPumpWaterFlowSwitch; }
- set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
- }
- //public float PendulumValvePosition
- //{
- // get { return m_PendulumValvePosition; }
- // set { SetProperty(ref m_PendulumValvePosition, value); }
- //}
- public float BiasMatchC1
- {
- get { return m_BiasMatchC1; }
- set
- {
- SetProperty(ref m_BiasMatchC1, value);
- }
- }
- public float BiasMatchC2
- {
- get { return m_BiasMatchC2; }
- set
- {
- SetProperty(ref m_BiasMatchC2, value);
- }
- }
- public float MatchC1
- {
- get { return m_MatchC1; }
- set
- {
- SetProperty(ref m_MatchC1, value);
- }
- }
- public float MatchC2
- {
- get { return m_MatchC2; }
- set
- {
- SetProperty(ref m_MatchC2, value);
- }
- }
- public AITPendulumValveData PendulumValveData
- {
- get { return m_PendulumValveData; }
- set
- {
- SetProperty(ref m_PendulumValveData, value);
- }
- }
- public bool IsLidClosed
- {
- get { return m_IsLidClosed; }
- set
- {
- SetProperty(ref m_IsLidClosed, value);
- }
- }
- public bool IsSlitDoorClosed
- {
- get { return m_IsSlitDoorClosed; }
- set
- {
- SetProperty(ref m_IsSlitDoorClosed, value);
- }
- }
- public int TurboPumpRotationalSpeed
- {
- get { return m_TurboPumpRotationalSpeed; }
- set
- {
- SetProperty(ref m_TurboPumpRotationalSpeed, value);
- }
- }
- public float ChamberPressure
- {
- get { return m_ChamberPressure; }
- set
- {
- SetProperty(ref m_ChamberPressure, value);
- }
- }
- public float ProcessPressure
- {
- get { return m_ProcessPressure; }
- set
- {
- SetProperty(ref m_ProcessPressure, value);
- }
- }
- public float ForelinePressure
- {
- get { return m_ForelinePressurePressure; }
- set
- {
- SetProperty(ref m_ForelinePressurePressure, value);
- }
- }
- public bool SourceRFMatchInterlock
- {
- get { return m_SourceRFMatchInterlock; }
- set
- {
- SetProperty(ref m_SourceRFMatchInterlock, value);
- }
- }
- public bool IsWLK
- {
- get { return m_IsWLK; }
- set
- {
- SetProperty(ref m_IsWLK, value);
- }
- }
- public bool IsWaterFlowOk
- {
- get { return m_IsWaterFlowOk; }
- set
- {
- SetProperty(ref m_IsWaterFlowOk, value);
- }
- }
- public bool IsCDAOK
- {
- get { return m_IsCDAOK; }
- set
- {
- SetProperty(ref m_IsCDAOK, value);
- }
- }
- public bool SensorGasBoxDoor
- {
- get { return m_SensorGasBoxDoor; }
- set
- {
- SetProperty(ref m_SensorGasBoxDoor, value);
- }
- }
- public bool SensorGasBoxPressure
- {
- get { return m_SensorGasBoxPressure; }
- set
- {
- SetProperty(ref m_SensorGasBoxPressure, value);
- }
- }
- public bool IsTurboPumpInterlock
- {
- get { return m_IsTurboPumpInterlock; }
- set
- {
- SetProperty(ref m_IsTurboPumpInterlock, value);
- }
- }
- public string ModuleName
- {
- get { return m_ModuleName; }
- set
- {
- SetProperty(ref m_ModuleName, value);
- }
- }
- public double MFC1SetPoint
- {
- get { return m_MFC1SetPoint; }
- set { SetProperty(ref m_MFC1SetPoint, value); }
- }
- public double MFC2SetPoint
- {
- get { return m_MFC2SetPoint; }
- set { SetProperty(ref m_MFC2SetPoint, value); }
- }
- public double MFC3SetPoint
- {
- get { return m_MFC3SetPoint; }
- set { SetProperty(ref m_MFC3SetPoint, value); }
- }
- public double MFC4SetPoint
- {
- get { return m_MFC4SetPoint; }
- set { SetProperty(ref m_MFC4SetPoint, value); }
- }
- public double MFC5SetPoint
- {
- get { return m_MFC5SetPoint; }
- set { SetProperty(ref m_MFC5SetPoint, value); }
- }
- public double MFC6SetPoint
- {
- get { return m_MFC6SetPoint; }
- set { SetProperty(ref m_MFC6SetPoint, value); }
- }
- public double MFC7SetPoint
- {
- get { return m_MFC7SetPoint; }
- set { SetProperty(ref m_MFC7SetPoint, value); }
- }
- public double MFC8SetPoint
- {
- get { return m_MFC8SetPoint; }
- set { SetProperty(ref m_MFC8SetPoint, value); }
- }
- public double N2SetPoint
- {
- get { return m_N2SetPoint; }
- set { SetProperty(ref m_N2SetPoint, value); }
- }
- public double RFBoxC1Setpoint
- {
- get { return m_RFBoxC1Setpoint; }
- set { SetProperty(ref m_RFBoxC1Setpoint, value); }
- }
- public AITMfcData MFC1Data
- {
- get { return m_MFC1Data; }
- set { SetProperty(ref m_MFC1Data, value); }
- }
- public AITMfcData MFC2Data
- {
- get { return m_MFC2Data; }
- set { SetProperty(ref m_MFC2Data, value); }
- }
- public AITMfcData MFC3Data
- {
- get { return m_MFC3Data; }
- set { SetProperty(ref m_MFC3Data, value); }
- }
- public AITMfcData MFC4Data
- {
- get { return m_MFC4Data; }
- set { SetProperty(ref m_MFC4Data, value); }
- }
- public AITMfcData MFC5Data
- {
- get { return m_MFC5Data; }
- set { SetProperty(ref m_MFC5Data, value); }
- }
- public AITMfcData MFC6Data
- {
- get { return m_MFC6Data; }
- set { SetProperty(ref m_MFC6Data, value); }
- }
- //public AITMfcData MFC7Data
- //{
- // get { return m_MFC7Data; }
- // set { SetProperty(ref m_MFC7Data, value); }
- //}
- //public AITMfcData MFC8Data
- //{
- // get { return m_MFC8Data; }
- // set { SetProperty(ref m_MFC8Data, value); }
- //}
- //public AITMfcData MFCHeData
- //{
- // get { return m_MFCHeData; }
- // set { SetProperty(ref m_MFCHeData, value); }
- //}
- public AITMfcData MFCN2Data
- {
- get { return m_MFCN2Data; }
- set { SetProperty(ref m_MFCN2Data, value); }
- }
- public AITMatchData MatchData
- {
- get { return m_MatchData; }
- set { SetProperty(ref m_MatchData, value); }
- }
- public AITMatchData RFBoxData
- {
- get { return m_RFBoxData; }
- set { SetProperty(ref m_RFBoxData, value); }
- }
- //public AITHeaterData ValveHeaterData
- //{
- // get { return m_ValveHeaterData; }
- // set { SetProperty(ref m_ValveHeaterData, value); }
- //}
- //public AITHeaterData ForelineHeaterData
- //{
- // get { return m_ForelineHeaterData; }
- // set { SetProperty(ref m_ForelineHeaterData, value); }
- //}
- //public AITHeaterData WallHeaterData
- //{
- // get { return m_WallHeaterData; }
- // set { SetProperty(ref m_WallHeaterData, value); }
- //}
- public AITRfData SRFData
- {
- get { return m_SRFData; }
- set { SetProperty(ref m_SRFData, value); }
- }
- //public AITRfData BRFData
- //{
- // get { return m_BRFData; }
- // set { SetProperty(ref m_BRFData, value); }
- //}
- public PMState PMCurrentState
- {
- get { return m_PMCurrentState; }
- set { SetProperty(ref m_PMCurrentState, value); }
- }
- #region 阀
- public bool GasFinalValveIsOpen
- {
- get { return m_GasFinalValveIsOpen; }
- set { SetProperty(ref m_GasFinalValveIsOpen, value); }
- }
- public bool PVN21ValveIsOpen
- {
- get { return m_PVN21ValveIsOpen; }
- set { SetProperty(ref m_PVN21ValveIsOpen, value); }
- }
- public bool PVN22ValveIsOpen
- {
- get { return m_PVN22ValveIsOpen; }
- set { SetProperty(ref m_PVN22ValveIsOpen, value); }
- }
- public bool N2ValveIsOpen
- {
- get { return m_N2ValveIsOpen; }
- set { SetProperty(ref m_N2ValveIsOpen, value); }
- }
- public bool PV11ValveIsOpen
- {
- get { return m_PV11ValveIsOpen; }
- set { SetProperty(ref m_PV11ValveIsOpen, value); }
- }
- public bool PV12ValveIsOpen
- {
- get { return m_PV12ValveIsOpen; }
- set { SetProperty(ref m_PV12ValveIsOpen, value); }
- }
- public bool MFC1ValveIsOpen
- {
- get { return m_MFC1ValveIsOpen; }
- set { SetProperty(ref m_MFC1ValveIsOpen, value); }
- }
- public bool PV21ValveIsOpen
- {
- get { return m_PV21ValveIsOpen; }
- set { SetProperty(ref m_PV21ValveIsOpen, value); }
- }
- public bool PV22ValveIsOpen
- {
- get { return m_PV22ValveIsOpen; }
- set { SetProperty(ref m_PV22ValveIsOpen, value); }
- }
- public bool MFC2ValveIsOpen
- {
- get { return m_MFC2ValveIsOpen; }
- set { SetProperty(ref m_MFC2ValveIsOpen, value); }
- }
- public bool PV31ValveIsOpen
- {
- get { return m_PV31ValveIsOpen; }
- set { SetProperty(ref m_PV31ValveIsOpen, value); }
- }
- public bool PV32ValveIsOpen
- {
- get { return m_PV32ValveIsOpen; }
- set { SetProperty(ref m_PV32ValveIsOpen, value); }
- }
- public bool MFC3ValveIsOpen
- {
- get { return m_MFC3ValveIsOpen; }
- set { SetProperty(ref m_MFC3ValveIsOpen, value); }
- }
- public bool PV41ValveIsOpen
- {
- get { return m_PV41ValveIsOpen; }
- set { SetProperty(ref m_PV41ValveIsOpen, value); }
- }
- public bool PV42ValveIsOpen
- {
- get { return m_PV42ValveIsOpen; }
- set { SetProperty(ref m_PV42ValveIsOpen, value); }
- }
- public bool MFC4ValveIsOpen
- {
- get { return m_MFC4ValveIsOpen; }
- set { SetProperty(ref m_MFC4ValveIsOpen, value); }
- }
- public bool MFC5ValveIsOpen
- {
- get { return m_MFC5ValveIsOpen; }
- set { SetProperty(ref m_MFC5ValveIsOpen, value); }
- }
- public bool MFC6ValveIsOpen
- {
- get { return m_MFC6ValveIsOpen; }
- set { SetProperty(ref m_MFC6ValveIsOpen, value); }
- }
- //public bool MFC7ValveIsOpen
- //{
- // get { return m_MFC7ValveIsOpen; }
- // set { SetProperty(ref m_MFC7ValveIsOpen, value); }
- //}
- //public bool MFC8ValveIsOpen
- //{
- // get { return m_MFC8ValveIsOpen; }
- // set { SetProperty(ref m_MFC8ValveIsOpen, value); }
- //}
- //public bool PVHe1ValveIsOpen
- //{
- // get { return m_PVHe1ValveIsOpen; }
- // set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
- //}
- //public bool PVHe2ValveIsOpen
- //{
- // get { return m_PVHe2ValveIsOpen; }
- // set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
- //}
- public bool TurboPumpPumpingValveIsOpen
- {
- get { return m_TurboPumpPumpingValveIsOpen; }
- set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
- }
- public bool TurboPumpPurgeValveIsOpen
- {
- get { return m_TurboPumpPurgeValveIsOpen; }
- set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
- }
- public bool SoftPumpValveIsOpen
- {
- get { return m_SoftPumpValveIsOpen; }
- set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
- }
- public bool FastPumpValveIsOpen
- {
- get { return m_FastPumpValveIsOpen; }
- set { SetProperty(ref m_FastPumpValveIsOpen, value); }
- }
- public bool GuageValveIsOpen
- {
- get { return m_GuageValveIsOpen; }
- set { SetProperty(ref m_GuageValveIsOpen, value); }
- }
- #endregion
- public Dictionary<string, object> RtDataValues
- {
- get { return m_RtDataValues; }
- set { SetProperty(ref m_RtDataValues, value); }
- }
- public bool PumpIsOpen
- {
- get { return m_PumpIsOpen; }
- set { SetProperty(ref m_PumpIsOpen, value); }
- }
- public bool PendulumValveIsOpen
- {
- get { return m_PendulumValveIsOpen; }
- set { SetProperty(ref m_PendulumValveIsOpen, value); }
- }
- public bool PurgeValveIsOpen
- {
- get { return m_PurgeValveIsOpen; }
- set { SetProperty(ref m_PurgeValveIsOpen, value); }
- }
- public bool TurboIsOpen
- {
- get { return m_TurboIsOpen; }
- set { SetProperty(ref m_TurboIsOpen, value); }
- }
- public bool IsATM
- {
- get { return m_IsATM; }
- set { SetProperty(ref m_IsATM, value); }
- }
- public bool IsVAC
- {
- get { return m_IsVAC; }
- set { SetProperty(ref m_IsVAC, value); }
- }
- //public bool BRFIsOn
- //{
- // get { return m_BRFIsOn; }
- // set { SetProperty(ref m_BRFIsOn, value); }
- //}
- //public bool SRFIsOn
- //{
- // get { return m_SRFIsOn; }
- // set { SetProperty(ref m_SRFIsOn, value); }
- //}
- public int PositionValue
- {
- get { return m_PositionValue; }
- set { SetProperty(ref m_PositionValue, value); }
- }
- public bool IsPositionMode
- {
- get { return m_IsPositionMode; }
- set { SetProperty(ref m_IsPositionMode, value); }
- }
- public double HeGasSetpoint
- {
- get { return m_HeGasSetpoint; }
- set
- {
- SetProperty(ref m_HeGasSetpoint, value);
- }
- }
- public int HePressureSetpoint
- {
- get { return m_HePressureSetpoint; }
- set
- {
- SetProperty(ref m_HePressureSetpoint, value);
- }
- }
- public float SRFFwdPowerSetpoint
- {
- get { return m_SRFFwdPowerSetpoint; }
- set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
- }
- //public float BRFFwdPowerSetpoint
- //{
- // get { return m_BRFFwdPowerSetpoint; }
- // set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
- //}
- //public int ESCVoltage
- //{
- // get { return m_ESCVoltage; }
- // set { SetProperty(ref m_ESCVoltage, value); }
- //}
- public float SRFMatchC1
- {
- get { return m_SRFMatchC1; }
- set { SetProperty(ref m_SRFMatchC1, value); }
- }
- public float SRFMatchC2
- {
- get { return m_SRFMatchC2; }
- set { SetProperty(ref m_SRFMatchC2, value); }
- }
- public string MatchWorkMode
- {
- get { return m_MatchWorkMode; }
- set
- {
- SetProperty(ref m_MatchWorkMode, value);
- }
- }
- //public float BRFMatchC1
- //{
- // get { return m_BRFMatchC1; }
- // set { SetProperty(ref m_BRFMatchC1, value); }
- //}
- //public float BRFMatchC2
- //{
- // get { return m_BRFMatchC2; }
- // set { SetProperty(ref m_BRFMatchC2, value); }
- //}
- public bool GasIsFlowing
- {
- get { return m_GasIsFlowing; }
- set { SetProperty(ref m_GasIsFlowing, value); }
- }
- public bool IsProcessing
- {
- get { return m_IsProcessing; }
- set { SetProperty(ref m_IsProcessing, value); }
- }
- public bool IsAutoMode
- {
- get { return m_IsAutoMode; }
- set { SetProperty(ref m_IsAutoMode, value); }
- }
- public int SelectedRecipeIndex
- {
- get { return m_SelectedRecipeIndex; }
- set { SetProperty(ref m_SelectedRecipeIndex, value); }
- }
- public ComboBoxItem SelectedRecipeType
- {
- get { return m_SelectedRecipeType; }
- set { SetProperty(ref m_SelectedRecipeType, value); }
- }
- public double ChamberPressureFeedBack
- {
- get { return m_ChamberPressureFeedBack; }
- set { SetProperty(ref m_ChamberPressureFeedBack, value); }
- }
- public string WaferID
- {
- get { return m_WaferID; }
- set { SetProperty(ref m_WaferID, value); }
- }
- public AITHighTemperatureHeaterData HighTemperatureHeaterData
- {
- get { return m_HighTemperatureHeaterData; }
- set { SetProperty(ref m_HighTemperatureHeaterData, value); }
- }
- public ComboBoxItem SelectedPosition
- {
- get { return m_SelectedPosition; }
- set { SetProperty(ref m_SelectedPosition, value); }
- }
- public int HighTemperatureHeaterTemperatureSetpoint
- {
- get { return m_HighTemperatureHeaterTemperatureSetpoint; }
- set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
- }
- public int HighTemperatureHeaterRatioSetpoint
- {
- get { return m_HighTemperatureHeaterRatioSetpoint; }
- set { SetProperty(ref m_HighTemperatureHeaterRatioSetpoint, value); }
- }
- public AITHeaterData PendulumHeaterData
- {
- get { return m_PendulumHeaterData; }
- set { SetProperty(ref m_PendulumHeaterData, value); }
- }
- #endregion
- #region 命令
- private DelegateCommand _PMInitCommnad;
- public DelegateCommand PMInitCommnad =>
- _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
- private DelegateCommand _PMAbortCommnad;
- public DelegateCommand PMAbortCommnad =>
- _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
- private DelegateCommand _GasCommand;
- public DelegateCommand GasCommand =>
- _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
- //private DelegateCommand _HeCommand;
- //public DelegateCommand HeCommand =>
- // _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
- //private DelegateCommand _RfCommand;
- //public DelegateCommand RfCommand =>
- // _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
- private DelegateCommand _PurgeCommand;
- public DelegateCommand PurgeCommand =>
- _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
- private DelegateCommand _VentCommand;
- public DelegateCommand VentCommand =>
- _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
- private DelegateCommand _PumpCommand;
- public DelegateCommand PumpCommand =>
- _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
- private DelegateCommand _OpenPumpCommand;
- public DelegateCommand OpenPumpCommand =>
- _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
- private DelegateCommand _ClosePumpCommand;
- public DelegateCommand ClosePumpCommand =>
- _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
- private DelegateCommand _OpenTurboPumpCommand;
- public DelegateCommand OpenTurboPumpCommand =>
- _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
- private DelegateCommand _CloseTurboPumpCommand;
- public DelegateCommand CloseTurboPumpCommand =>
- _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
- private DelegateCommand _OpenPendulumValveCommand;
- public DelegateCommand OpenPendulumValveCommand =>
- _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
- private DelegateCommand _ClosePendulumValveCommand;
- public DelegateCommand ClosePendulumValveCommand =>
- _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
- //private DelegateCommand<object> _PinUpDownCommand;
- //public DelegateCommand<object> PinUpDownCommand =>
- // _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
- private DelegateCommand<object> _LidUpDownCommand;
- public DelegateCommand<object> LidUpDownCommand =>
- _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
- private DelegateCommand _SetSRfCommand;
- public DelegateCommand SetSRfCommand =>
- _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
- //private DelegateCommand _SetBRfCommand;
- //public DelegateCommand SetBRfCommand =>
- // _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
- private DelegateCommand _OpenButterflyValveViewCommand;
- public DelegateCommand OpenButterflyValveViewCommand =>
- _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
- //private DelegateCommand _HVCommand;
- //public DelegateCommand HVCommand =>
- // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
- //private DelegateCommand _HVSetCommand;
- //public DelegateCommand HVSetCommand =>
- // _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
- private DelegateCommand _LoadRecipeCommand;
- public DelegateCommand LoadRecipeCommand =>
- _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
- private DelegateCommand _SwitchTypeCommand;
- public DelegateCommand SwitchTypeCommand =>
- _SwitchTypeCommand ?? (_SwitchTypeCommand = new DelegateCommand(OnSwitchType));
-
- private DelegateCommand<object> _ControlValveCommand;
- public DelegateCommand<object> ControlValveCommand =>
- _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
- private DelegateCommand<object> _RunRecipeCommand;
- public DelegateCommand<object> RunRecipeCommand =>
- _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
- private DelegateCommand _SetChillerTempCommand;
- public DelegateCommand SetChillerTempCommand =>
- _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
- //private DelegateCommand _OnOffChillerCommand;
- //public DelegateCommand OnOffChillerCommand =>
- // _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
- private DelegateCommand _SetHeaterRatioCommand;
- public DelegateCommand SetHeaterRatioCommand =>
- _SetHeaterRatioCommand ?? (_SetHeaterRatioCommand = new DelegateCommand(OnSetHeaterRatio));
- private DelegateCommand<object> _HeaterCommand;
- public DelegateCommand<object> HeaterCommand =>
- _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
- private DelegateCommand _EndStepCommand;
- public DelegateCommand EndStepCommand =>
- _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
- private DelegateCommand _GotoPositionCommand;
- public DelegateCommand GotoPositionCommand =>
- _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
- private DelegateCommand _SwitchHighTemperatureHeaterCommand;
- public DelegateCommand SwitchHighTemperatureHeaterCommand =>
- _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
- private DelegateCommand<object> _AbortRecipeCommnad;
- public DelegateCommand<object> AbortRecipeCommnad =>
- _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
- private DelegateCommand _SetRfBoxC1Command;
- public DelegateCommand SetRfBoxC1Command =>
- _SetRfBoxC1Command ?? (_SetRfBoxC1Command = new DelegateCommand(OnSetRfBoxC1));
- private DelegateCommand _IncludeCommand;
- public DelegateCommand IncludeCommand =>
- _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
- #endregion
- #region 构造函数
- public OverKepler2200BViewModel()
- {
- m_RtDataKeys = new List<string>();
- m_IsATM = true;
- ModuleName = "PMA";
- //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
- timer = new DispatcherTimer();
- timer.Interval = TimeSpan.FromSeconds(0.5);
- timer.Tick += timer_Tick;
- //timer.Start();
- PressureType = PressureType.Pa;
- }
- #endregion
- #region 命令方法
- private void OnControlValve(object obj)
- {
- CommonValveControl commonValveControl = (CommonValveControl)obj;
- if (commonValveControl.IsCanEdit == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
- string operation = commonValveControl.Status ? "关闭" : "打开";
- LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
- }
- }
- private void OnPMInit()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
- LOG.Info($"{ModuleName},初始化");
- }
- private void OnGas()
- {
- object[] mfc = new object[8];
- mfc[0] = MFC1SetPoint;
- mfc[1] = MFC2SetPoint;
- mfc[2] = MFC3SetPoint;
- mfc[3] = MFC4SetPoint;
- mfc[4] = MFC5SetPoint;
- mfc[5] = MFC6SetPoint;
- mfc[6] = 0d;
- mfc[7] = 0d;
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
- string operation = GasIsFlowing ? "关闭" : "打开";
- LOG.Info($"{ModuleName},{operation} GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
- }
-
- //private void OnRf()
- //{
- // if (PMCurrentState == PMState.RfPowering)
- // {
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- // LOG.Info($"{ModuleName},关闭RF");
- // }
- // else
- // {
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
- // LOG.Info($"{ModuleName},开始RF,Power值{SRFFwdPowerSetpoint}");
- // }
- //}
- private void OnPurge()
- {
- if (PMCurrentState == PMState.Purging)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- LOG.Info($"{ModuleName},关闭Purge");
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
- LOG.Info($"{ModuleName},开始Purge");
- }
- }
- private void OnVent()
- {
- if (PMCurrentState == PMState.Venting)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- LOG.Info($"{ModuleName},关闭Vent");
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
- LOG.Info($"{ModuleName},开始Vent");
- }
- }
- private void OnPump()
- {
- //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
- if (PMCurrentState == PMState.Pumping)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- return;
- }
- string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
- string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
- // 设置底压
- double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
- if (basePressure <= 0.01 || basePressure >= 1000)
- {
- MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
- return;
- }
- double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
- if (pumpLimit <= 0.01 || pumpLimit >= 1200)
- {
- MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
- return;
- }
- InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
- InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
- LOG.Info($"{ModuleName},开始Pump Down");
- }
- private void OnOpenPump()
- {
- if (PMCurrentState == PMState.LaunchingPump)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- return;
- }
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
- LOG.Info($"{ModuleName},打开Pump");
- }
- private void OnClosePump()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
- LOG.Info($"{ModuleName},关闭Pump");
- }
- private void OnOpenTurboPump()
- {
- if (PMCurrentState == PMState.LaunchingTurboPump)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- return;
- }
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
- LOG.Info($"{ModuleName},打开分子泵");
- }
- private void OnCloseTurboPump()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
- LOG.Info($"{ModuleName},关闭分子泵");
- }
- private void OnOpenPendulumValve()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
- LOG.Info($"{ModuleName},打开钟摆阀");
- }
- private void OnClosePendulumValve()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
- LOG.Info($"{ModuleName},关闭钟摆阀");
- }
- //private void OnPinUpDown(object upDown)
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
- //}
- private void OnLidUpDown(object upDown)
- {
- //var value = (bool)upDown;
- if (upDown.ToString() == "Up")
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
- LOG.Info($"{ModuleName},打开Lid");
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
- LOG.Info($"{ModuleName},关闭Lid");
- }
- }
- private void OnSetSRf()
- {
- if (SRFData.IsRfOn == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
- }
- else
- {
- if (GasIsFlowing == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
- }
- }
- }
- private void OnPMAbort()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
- LOG.Info($"{ModuleName},Abort");
- }
- private void OnOpenButterflyValveView()
- {
- var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
- if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
- {
- butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
- butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
- butterflyValveMessageBox.Left = 700;
- butterflyValveMessageBox.Top = 600;
- butterflyValveMessageBox.Show();
- butterflyValveMessageBox.Owner = _mainWindow;
- }
- }
- private void OnSwitchType()
- {
- SelectedRecipeIndex = -1;
- }
- private void OnLoadRecipe()
- {
- string recipeType = SelectedRecipeType.Content.ToString();
- CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType)).ToList();
- }
- private void OnRunRecipe(object obj)
- {
- if (SelectedRecipeIndex == -1)
- {
- return;
- }
- string recipeName = CurrentModuleRecipes[SelectedRecipeIndex];
- string recipeType = SelectedRecipeType.Content.ToString();
- ClearData();
- var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType, recipeName + ".rcp");
- CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, recipeType);
- LOG.Info($"{ModuleName},Run Recipe {recipeName},");
- }
- private void OnHeater(object obj)
- {
- if (IsAutoMode == true)
- {
- return;
- }
- AITHeaterData heaterData = obj as AITHeaterData;
- var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
- if (heaterView == null || heaterView.IsVisible == false)
- {
- heaterView = new HeaterView(heaterData, ModuleName);
- heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
- heaterView.Owner = _mainWindow;
- heaterView.Show();
- }
- }
- private void OnOnline()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
- LOG.Info("{ModuleName},Switch to Online");
- }
- private void OnOffline()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
- LOG.Info("{ModuleName},Switch to Offline");
- }
- private void OnEndStep()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
- //if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
- //}
- //else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
- //}
- }
- private void OnGotoPosition()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
- LOG.Info($"{ModuleName},HighTemperatureHeater to {SelectedPosition.Content}");
- }
- private void OnSwitchHighTemperatureHeater()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIsonFeedBack);
- }
- private void OnSetChillerTemp()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
- }
- private void OnSetHeaterRatio()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterRatio", HighTemperatureHeaterRatioSetpoint);
- }
- private DelegateCommand _OnlineCommand;
- public DelegateCommand OnlineCommand =>
- _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
- private DelegateCommand _OfflineCommand;
- public DelegateCommand OfflineCommand =>
- _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
- private async void OnAbortRecipe(object obj)
- {
- if (PMCurrentState != PMState.Processing)
- {
- return;
- }
- switch (obj.ToString())
- {
- case "0":
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
- break;
- case "1":
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
- //if (ESCHVData.IsOn == true)
- //{
- // await Task.Delay(3000);
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
- //}
- break;
- case "2":
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
- await Task.Delay(3000);
- InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
- break;
- }
- }
- private void OnSetRfBoxC1()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.RFBox}.{AITRfOperation.SetMatchPositionC1}", RFBoxC1Setpoint);
- }
- private void OnInclude()
- {
- if (IsInclude)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
- }
- }
- #endregion
- #region 私有方法
- private void ClearData()
- {
- //ESCVoltage = 0;
- SRFFwdPowerSetpoint = 0;
- SRFMatchC1 = 0;
- SRFMatchC2 = 0;
- //BRFFwdPowerSetpoint = 0;
- //BRFMatchC1 = 0;
- //BRFMatchC2 = 0;
- HeGasSetpoint = 0;
- MFC1SetPoint = 0;
- MFC2SetPoint = 0;
- MFC3SetPoint = 0;
- MFC4SetPoint = 0;
- MFC5SetPoint = 0;
- MFC6SetPoint = 0;
- MFC7SetPoint = 0;
- MFC8SetPoint = 0;
- }
- private IEnumerable<string> GetFilesNames(string path)
- {
- if (Directory.Exists(path))
- {
- return Directory.GetFiles(path, "*.rcp")?
- .Select(Path.GetFileNameWithoutExtension);
- }
- else
- {
- return new List<string>();
- }
- }
- void timer_Tick(object sender, EventArgs e)
- {
- RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
- if (RtDataValues == null || RtDataValues.Count == 0)
- {
- return;
- }
- //var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
- //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
- TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
- PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
- GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
- PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
- PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
- PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
- PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
- PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
- PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
- PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
- PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
- MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
- MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
- MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
- MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
- MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
- MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
- //MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
- //MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
- N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
- SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
- FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
- GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
- //PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
- //PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
- PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
- PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
- TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
- TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
- PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
- PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
- TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
- //LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
- IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"TM.{ModuleName}SlitDoor.IsClosed");
- IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
- //PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
- TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
- //PositionValue = -((int)((PendulumValvePosition) * 0.09));
- PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
- GasIsFlowing = PMCurrentState == PMState.GasFlowing;
- IsProcessing = PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean;
- MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
- MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
- MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
- MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
- MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
- MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
- //MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
- //MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
- //MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
- MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
- SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
- //BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
- PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
- //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
- //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
- //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
- //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
- PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
- ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
- ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
- ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
- //ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
- //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
- //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
- //ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
- SourceRFMatchInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFMatchInterlock");
- IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
- IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
- IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
- IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
- SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
- SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
- IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
- IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
- //ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
- //MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
- //MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
- //MatchWorkMode = CommonFunction.GetValue<string>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.WorkMode");
- MatchData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.DeviceData");
- RFBoxData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.RFBox}.DeviceData");
- TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
- IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
- IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
- WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
- CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
- //if (IsProcessing)
- //{
- // if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
- // {
- // var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
- // CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
- // CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
- // }
- // currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
- //}
-
- if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 2000)
- {
- ChamberPressureFeedBack = ProcessPressure;
- }
- else
- {
- ChamberPressureFeedBack = ChamberPressure;
- }
- HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
- IsAutoMode = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
- IsInclude = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
- }
- public void addDataKeys()
- {
- m_RtDataKeys.Clear();
- m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
- //m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
- //m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
- //m_RtDataKeys.Add($"{ModuleName}.MfcHe");
- m_RtDataKeys.Add($"{ModuleName}.MfcN2");
- m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
- m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
- m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
- m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
- //m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
- m_RtDataKeys.Add($"{ModuleName}.IsATM");
- m_RtDataKeys.Add($"{ModuleName}.IsVAC");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
- //m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
- //m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
- //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
- //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
- m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
- m_RtDataKeys.Add($"TM.{ModuleName}SlitDoor.IsClosed");
- m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
- //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
- //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
- //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.RFBox}.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
- //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
- //m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
- //m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
- m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
- m_RtDataKeys.Add($"{ModuleName}.IsWLK");
- m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
- m_RtDataKeys.Add($"{ModuleName}.SourceRFMatchInterlock");
- m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
- m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
- m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
- //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
- //m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
- //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
- //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
- //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.FsmState");
- m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
- m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
- m_RtDataKeys.Add($"{ModuleName}.HasWafer");
- m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
- m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.IsOnline");
- m_RtDataKeys.Add($"{ModuleName}.IsInclude");
- }
- public void EnterExitView(bool isEnter)
- {
- if (isEnter)
- {
- timer_Tick(null, null);
- timer.Start();
- }
- else
- {
- timer.Stop();
- }
- }
- #endregion
- }
- }
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