OverKepler2200BViewModel.cs 66 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using System.Windows.Controls;
  20. using Aitex.Core.RT.Log;
  21. namespace Venus_MainPages.ViewModels
  22. {
  23. internal class OverKepler2200BViewModel : BindableBase
  24. {
  25. #region 私有字段
  26. private double m_TurboN2FlowSetPoint;
  27. private List<string> m_CurrentModuleRecipes = new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. //private bool m_MFC7ValveIsOpen;
  46. //private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. //private bool m_PVHe1ValveIsOpen;
  51. //private bool m_PVHe2ValveIsOpen;
  52. private bool m_TurboPumpPumpingValveIsOpen;
  53. private bool m_TurboPumpPurgeValveIsOpen;
  54. private bool m_GuageValveIsOpen;
  55. private bool m_PendulumValveIsOpen;
  56. private bool m_PurgeValveIsOpen;
  57. private double m_HeGasSetpoint;
  58. private int m_HePressureSetpoint;
  59. private float m_SRFFwdPowerSetpoint;
  60. //private float m_BRFFwdPowerSetpoint;
  61. private float m_SRFMatchC1;
  62. private float m_SRFMatchC2;
  63. //private float m_BRFMatchC1;
  64. //private float m_BRFMatchC2;
  65. private double m_MFC1SetPoint;
  66. private double m_MFC2SetPoint;
  67. private double m_MFC3SetPoint;
  68. private double m_MFC4SetPoint;
  69. private double m_MFC5SetPoint;
  70. private double m_MFC6SetPoint;
  71. private double m_MFC7SetPoint;
  72. private double m_MFC8SetPoint;
  73. private double m_N2SetPoint;
  74. private double m_RFBoxC1Setpoint;
  75. private AITMfcData m_MFC1Data;
  76. private AITMfcData m_MFC2Data;
  77. private AITMfcData m_MFC3Data;
  78. private AITMfcData m_MFC4Data;
  79. private AITMfcData m_MFC5Data;
  80. private AITMfcData m_MFC6Data;
  81. //private AITMfcData m_MFC7Data;
  82. //private AITMfcData m_MFC8Data;
  83. //private AITMfcData m_MFCHeData;
  84. private AITMfcData m_MFCN2Data;
  85. private AITMatchData m_MatchData;
  86. private AITMatchData m_RFBoxData;
  87. private AITHeaterData m_PendulumHeaterData;
  88. private AITRfData m_SRFData;
  89. //private AITRfData m_BRFData;
  90. private AITPendulumValveData m_PendulumValveData;
  91. //private AITHVData m_ESCHVData;
  92. private PMState m_PMCurrentState;
  93. private bool m_SourceRFMatchInterlock;
  94. private bool m_IsWLK;
  95. private bool m_IsWaterFlowOk;
  96. private bool m_IsTurboPumpInterlock;
  97. private bool m_IsCDAOK;
  98. private bool m_SensorGasBoxDoor;
  99. private bool m_SensorGasBoxPressure;
  100. private bool m_PumpIsOpen;
  101. private bool m_TurboIsOpen;
  102. private bool m_IsATM;
  103. private bool m_IsVAC;
  104. private List<string> m_RtDataKeys;
  105. private Dictionary<string, object> m_RtDataValues;
  106. private int m_PositionValue;
  107. private bool m_IsPositionMode;
  108. //private int m_ESCVoltage;
  109. private bool m_GasIsFlowing;
  110. private bool m_IsProcessing;
  111. private bool m_IsAutoMode;
  112. //private string m_SelectedRecipe;
  113. //private float m_ChillerTempSetpoint;
  114. //private float m_WallTempSetpoint;
  115. //private bool m_HeIsPressureMode = true;
  116. //private bool m_ChillerIsOn;
  117. private float m_ChamberPressure;
  118. private float m_ProcessPressure;
  119. private float m_ForelinePressurePressure;
  120. //private float m_ESCHePressure;
  121. ButterflyValveView butterflyValveMessageBox;
  122. HeaterView heaterView;
  123. private int m_TurboPumpRotationalSpeed;
  124. //private bool m_LiftPinIsUp;
  125. private bool m_IsSlitDoorClosed=true;
  126. private bool m_IsLidClosed=true;
  127. //private float m_ChillerTemperature;
  128. //private float m_HVTemperature;
  129. //private int m_ESCHVOutputVoltage;
  130. //private float m_SRfReflectPower;
  131. //private float m_SRfForwardPowerFeedBack;
  132. //private float m_BRfReflectPower;
  133. //private float m_BRfForwardPowerFeedBack;
  134. //private int m_MatchWorkMode;
  135. //private int m_BiasMatchWorkMode;
  136. private float m_MatchC1;
  137. private float m_MatchC2;
  138. private string m_MatchWorkMode;
  139. private float m_BiasMatchC1;
  140. private float m_BiasMatchC2;
  141. //private float m_RFBoxC1;
  142. //private float m_PendulumValvePosition;
  143. private bool m_IsTurboPumpAtSpeed;
  144. private bool m_TurboPumpWaterFlowSwitch;
  145. private bool m_IsHasWafer;
  146. private Recipe m_CurrentRecipe = new Recipe();
  147. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  148. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  149. private double m_ChamberPressureFeedBack;
  150. private string m_WaferID;
  151. private string m_ModuleName;
  152. private int? currentRecipeNumber;
  153. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  154. private ComboBoxItem m_SelectedPosition;
  155. private int m_HighTemperatureHeaterTemperatureSetpoint;
  156. private int m_HighTemperatureHeaterRatioSetpoint;
  157. private PressureType m_PressureType;
  158. private bool m_IsInclude;
  159. private int m_SelectedRecipeIndex=-1;
  160. private ComboBoxItem m_SelectedRecipeType;
  161. DispatcherTimer timer;
  162. #endregion
  163. #region 属性
  164. public bool IsInclude
  165. {
  166. get { return m_IsInclude; }
  167. set { SetProperty(ref m_IsInclude, value); }
  168. }
  169. public PressureType PressureType
  170. {
  171. get { return m_PressureType; }
  172. set { SetProperty(ref m_PressureType, value); }
  173. }
  174. public double TurboN2FlowSetPoint
  175. {
  176. get { return m_TurboN2FlowSetPoint; }
  177. set
  178. {
  179. if (value != m_TurboN2FlowSetPoint)
  180. {
  181. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  182. }
  183. SetProperty(ref m_TurboN2FlowSetPoint, value);
  184. }
  185. }
  186. public List<string> CurrentModuleRecipes
  187. {
  188. get { return m_CurrentModuleRecipes; }
  189. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  190. }
  191. public Recipe CurrentRecipe
  192. {
  193. get { return m_CurrentRecipe; }
  194. set { SetProperty(ref m_CurrentRecipe, value); }
  195. }
  196. public RecipeResult CurrentRecipeResult
  197. {
  198. get { return m_CurrentRecipeResult; }
  199. set { SetProperty(ref m_CurrentRecipeResult, value); }
  200. }
  201. public RecipeStep CurrentRecipeStep
  202. {
  203. get { return m_CurrentRecipeStep; }
  204. set { SetProperty(ref m_CurrentRecipeStep, value); }
  205. }
  206. public bool IsHasWafer
  207. {
  208. get { return m_IsHasWafer; }
  209. set { SetProperty(ref m_IsHasWafer, value); }
  210. }
  211. public bool IsTurboPumpAtSpeed
  212. {
  213. get { return m_IsTurboPumpAtSpeed; }
  214. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  215. }
  216. public bool TurboPumpWaterFlowSwitch
  217. {
  218. get { return m_TurboPumpWaterFlowSwitch; }
  219. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  220. }
  221. //public float PendulumValvePosition
  222. //{
  223. // get { return m_PendulumValvePosition; }
  224. // set { SetProperty(ref m_PendulumValvePosition, value); }
  225. //}
  226. public float BiasMatchC1
  227. {
  228. get { return m_BiasMatchC1; }
  229. set
  230. {
  231. SetProperty(ref m_BiasMatchC1, value);
  232. }
  233. }
  234. public float BiasMatchC2
  235. {
  236. get { return m_BiasMatchC2; }
  237. set
  238. {
  239. SetProperty(ref m_BiasMatchC2, value);
  240. }
  241. }
  242. public float MatchC1
  243. {
  244. get { return m_MatchC1; }
  245. set
  246. {
  247. SetProperty(ref m_MatchC1, value);
  248. }
  249. }
  250. public float MatchC2
  251. {
  252. get { return m_MatchC2; }
  253. set
  254. {
  255. SetProperty(ref m_MatchC2, value);
  256. }
  257. }
  258. public AITPendulumValveData PendulumValveData
  259. {
  260. get { return m_PendulumValveData; }
  261. set
  262. {
  263. SetProperty(ref m_PendulumValveData, value);
  264. }
  265. }
  266. public bool IsLidClosed
  267. {
  268. get { return m_IsLidClosed; }
  269. set
  270. {
  271. SetProperty(ref m_IsLidClosed, value);
  272. }
  273. }
  274. public bool IsSlitDoorClosed
  275. {
  276. get { return m_IsSlitDoorClosed; }
  277. set
  278. {
  279. SetProperty(ref m_IsSlitDoorClosed, value);
  280. }
  281. }
  282. public int TurboPumpRotationalSpeed
  283. {
  284. get { return m_TurboPumpRotationalSpeed; }
  285. set
  286. {
  287. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  288. }
  289. }
  290. public float ChamberPressure
  291. {
  292. get { return m_ChamberPressure; }
  293. set
  294. {
  295. SetProperty(ref m_ChamberPressure, value);
  296. }
  297. }
  298. public float ProcessPressure
  299. {
  300. get { return m_ProcessPressure; }
  301. set
  302. {
  303. SetProperty(ref m_ProcessPressure, value);
  304. }
  305. }
  306. public float ForelinePressure
  307. {
  308. get { return m_ForelinePressurePressure; }
  309. set
  310. {
  311. SetProperty(ref m_ForelinePressurePressure, value);
  312. }
  313. }
  314. public bool SourceRFMatchInterlock
  315. {
  316. get { return m_SourceRFMatchInterlock; }
  317. set
  318. {
  319. SetProperty(ref m_SourceRFMatchInterlock, value);
  320. }
  321. }
  322. public bool IsWLK
  323. {
  324. get { return m_IsWLK; }
  325. set
  326. {
  327. SetProperty(ref m_IsWLK, value);
  328. }
  329. }
  330. public bool IsWaterFlowOk
  331. {
  332. get { return m_IsWaterFlowOk; }
  333. set
  334. {
  335. SetProperty(ref m_IsWaterFlowOk, value);
  336. }
  337. }
  338. public bool IsCDAOK
  339. {
  340. get { return m_IsCDAOK; }
  341. set
  342. {
  343. SetProperty(ref m_IsCDAOK, value);
  344. }
  345. }
  346. public bool SensorGasBoxDoor
  347. {
  348. get { return m_SensorGasBoxDoor; }
  349. set
  350. {
  351. SetProperty(ref m_SensorGasBoxDoor, value);
  352. }
  353. }
  354. public bool SensorGasBoxPressure
  355. {
  356. get { return m_SensorGasBoxPressure; }
  357. set
  358. {
  359. SetProperty(ref m_SensorGasBoxPressure, value);
  360. }
  361. }
  362. public bool IsTurboPumpInterlock
  363. {
  364. get { return m_IsTurboPumpInterlock; }
  365. set
  366. {
  367. SetProperty(ref m_IsTurboPumpInterlock, value);
  368. }
  369. }
  370. public string ModuleName
  371. {
  372. get { return m_ModuleName; }
  373. set
  374. {
  375. SetProperty(ref m_ModuleName, value);
  376. }
  377. }
  378. public double MFC1SetPoint
  379. {
  380. get { return m_MFC1SetPoint; }
  381. set { SetProperty(ref m_MFC1SetPoint, value); }
  382. }
  383. public double MFC2SetPoint
  384. {
  385. get { return m_MFC2SetPoint; }
  386. set { SetProperty(ref m_MFC2SetPoint, value); }
  387. }
  388. public double MFC3SetPoint
  389. {
  390. get { return m_MFC3SetPoint; }
  391. set { SetProperty(ref m_MFC3SetPoint, value); }
  392. }
  393. public double MFC4SetPoint
  394. {
  395. get { return m_MFC4SetPoint; }
  396. set { SetProperty(ref m_MFC4SetPoint, value); }
  397. }
  398. public double MFC5SetPoint
  399. {
  400. get { return m_MFC5SetPoint; }
  401. set { SetProperty(ref m_MFC5SetPoint, value); }
  402. }
  403. public double MFC6SetPoint
  404. {
  405. get { return m_MFC6SetPoint; }
  406. set { SetProperty(ref m_MFC6SetPoint, value); }
  407. }
  408. public double MFC7SetPoint
  409. {
  410. get { return m_MFC7SetPoint; }
  411. set { SetProperty(ref m_MFC7SetPoint, value); }
  412. }
  413. public double MFC8SetPoint
  414. {
  415. get { return m_MFC8SetPoint; }
  416. set { SetProperty(ref m_MFC8SetPoint, value); }
  417. }
  418. public double N2SetPoint
  419. {
  420. get { return m_N2SetPoint; }
  421. set { SetProperty(ref m_N2SetPoint, value); }
  422. }
  423. public double RFBoxC1Setpoint
  424. {
  425. get { return m_RFBoxC1Setpoint; }
  426. set { SetProperty(ref m_RFBoxC1Setpoint, value); }
  427. }
  428. public AITMfcData MFC1Data
  429. {
  430. get { return m_MFC1Data; }
  431. set { SetProperty(ref m_MFC1Data, value); }
  432. }
  433. public AITMfcData MFC2Data
  434. {
  435. get { return m_MFC2Data; }
  436. set { SetProperty(ref m_MFC2Data, value); }
  437. }
  438. public AITMfcData MFC3Data
  439. {
  440. get { return m_MFC3Data; }
  441. set { SetProperty(ref m_MFC3Data, value); }
  442. }
  443. public AITMfcData MFC4Data
  444. {
  445. get { return m_MFC4Data; }
  446. set { SetProperty(ref m_MFC4Data, value); }
  447. }
  448. public AITMfcData MFC5Data
  449. {
  450. get { return m_MFC5Data; }
  451. set { SetProperty(ref m_MFC5Data, value); }
  452. }
  453. public AITMfcData MFC6Data
  454. {
  455. get { return m_MFC6Data; }
  456. set { SetProperty(ref m_MFC6Data, value); }
  457. }
  458. //public AITMfcData MFC7Data
  459. //{
  460. // get { return m_MFC7Data; }
  461. // set { SetProperty(ref m_MFC7Data, value); }
  462. //}
  463. //public AITMfcData MFC8Data
  464. //{
  465. // get { return m_MFC8Data; }
  466. // set { SetProperty(ref m_MFC8Data, value); }
  467. //}
  468. //public AITMfcData MFCHeData
  469. //{
  470. // get { return m_MFCHeData; }
  471. // set { SetProperty(ref m_MFCHeData, value); }
  472. //}
  473. public AITMfcData MFCN2Data
  474. {
  475. get { return m_MFCN2Data; }
  476. set { SetProperty(ref m_MFCN2Data, value); }
  477. }
  478. public AITMatchData MatchData
  479. {
  480. get { return m_MatchData; }
  481. set { SetProperty(ref m_MatchData, value); }
  482. }
  483. public AITMatchData RFBoxData
  484. {
  485. get { return m_RFBoxData; }
  486. set { SetProperty(ref m_RFBoxData, value); }
  487. }
  488. //public AITHeaterData ValveHeaterData
  489. //{
  490. // get { return m_ValveHeaterData; }
  491. // set { SetProperty(ref m_ValveHeaterData, value); }
  492. //}
  493. //public AITHeaterData ForelineHeaterData
  494. //{
  495. // get { return m_ForelineHeaterData; }
  496. // set { SetProperty(ref m_ForelineHeaterData, value); }
  497. //}
  498. //public AITHeaterData WallHeaterData
  499. //{
  500. // get { return m_WallHeaterData; }
  501. // set { SetProperty(ref m_WallHeaterData, value); }
  502. //}
  503. public AITRfData SRFData
  504. {
  505. get { return m_SRFData; }
  506. set { SetProperty(ref m_SRFData, value); }
  507. }
  508. //public AITRfData BRFData
  509. //{
  510. // get { return m_BRFData; }
  511. // set { SetProperty(ref m_BRFData, value); }
  512. //}
  513. public PMState PMCurrentState
  514. {
  515. get { return m_PMCurrentState; }
  516. set { SetProperty(ref m_PMCurrentState, value); }
  517. }
  518. #region 阀
  519. public bool GasFinalValveIsOpen
  520. {
  521. get { return m_GasFinalValveIsOpen; }
  522. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  523. }
  524. public bool PVN21ValveIsOpen
  525. {
  526. get { return m_PVN21ValveIsOpen; }
  527. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  528. }
  529. public bool PVN22ValveIsOpen
  530. {
  531. get { return m_PVN22ValveIsOpen; }
  532. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  533. }
  534. public bool N2ValveIsOpen
  535. {
  536. get { return m_N2ValveIsOpen; }
  537. set { SetProperty(ref m_N2ValveIsOpen, value); }
  538. }
  539. public bool PV11ValveIsOpen
  540. {
  541. get { return m_PV11ValveIsOpen; }
  542. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  543. }
  544. public bool PV12ValveIsOpen
  545. {
  546. get { return m_PV12ValveIsOpen; }
  547. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  548. }
  549. public bool MFC1ValveIsOpen
  550. {
  551. get { return m_MFC1ValveIsOpen; }
  552. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  553. }
  554. public bool PV21ValveIsOpen
  555. {
  556. get { return m_PV21ValveIsOpen; }
  557. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  558. }
  559. public bool PV22ValveIsOpen
  560. {
  561. get { return m_PV22ValveIsOpen; }
  562. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  563. }
  564. public bool MFC2ValveIsOpen
  565. {
  566. get { return m_MFC2ValveIsOpen; }
  567. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  568. }
  569. public bool PV31ValveIsOpen
  570. {
  571. get { return m_PV31ValveIsOpen; }
  572. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  573. }
  574. public bool PV32ValveIsOpen
  575. {
  576. get { return m_PV32ValveIsOpen; }
  577. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  578. }
  579. public bool MFC3ValveIsOpen
  580. {
  581. get { return m_MFC3ValveIsOpen; }
  582. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  583. }
  584. public bool PV41ValveIsOpen
  585. {
  586. get { return m_PV41ValveIsOpen; }
  587. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  588. }
  589. public bool PV42ValveIsOpen
  590. {
  591. get { return m_PV42ValveIsOpen; }
  592. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  593. }
  594. public bool MFC4ValveIsOpen
  595. {
  596. get { return m_MFC4ValveIsOpen; }
  597. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  598. }
  599. public bool MFC5ValveIsOpen
  600. {
  601. get { return m_MFC5ValveIsOpen; }
  602. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  603. }
  604. public bool MFC6ValveIsOpen
  605. {
  606. get { return m_MFC6ValveIsOpen; }
  607. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  608. }
  609. //public bool MFC7ValveIsOpen
  610. //{
  611. // get { return m_MFC7ValveIsOpen; }
  612. // set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  613. //}
  614. //public bool MFC8ValveIsOpen
  615. //{
  616. // get { return m_MFC8ValveIsOpen; }
  617. // set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  618. //}
  619. //public bool PVHe1ValveIsOpen
  620. //{
  621. // get { return m_PVHe1ValveIsOpen; }
  622. // set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  623. //}
  624. //public bool PVHe2ValveIsOpen
  625. //{
  626. // get { return m_PVHe2ValveIsOpen; }
  627. // set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  628. //}
  629. public bool TurboPumpPumpingValveIsOpen
  630. {
  631. get { return m_TurboPumpPumpingValveIsOpen; }
  632. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  633. }
  634. public bool TurboPumpPurgeValveIsOpen
  635. {
  636. get { return m_TurboPumpPurgeValveIsOpen; }
  637. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  638. }
  639. public bool SoftPumpValveIsOpen
  640. {
  641. get { return m_SoftPumpValveIsOpen; }
  642. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  643. }
  644. public bool FastPumpValveIsOpen
  645. {
  646. get { return m_FastPumpValveIsOpen; }
  647. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  648. }
  649. public bool GuageValveIsOpen
  650. {
  651. get { return m_GuageValveIsOpen; }
  652. set { SetProperty(ref m_GuageValveIsOpen, value); }
  653. }
  654. #endregion
  655. public Dictionary<string, object> RtDataValues
  656. {
  657. get { return m_RtDataValues; }
  658. set { SetProperty(ref m_RtDataValues, value); }
  659. }
  660. public bool PumpIsOpen
  661. {
  662. get { return m_PumpIsOpen; }
  663. set { SetProperty(ref m_PumpIsOpen, value); }
  664. }
  665. public bool PendulumValveIsOpen
  666. {
  667. get { return m_PendulumValveIsOpen; }
  668. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  669. }
  670. public bool PurgeValveIsOpen
  671. {
  672. get { return m_PurgeValveIsOpen; }
  673. set { SetProperty(ref m_PurgeValveIsOpen, value); }
  674. }
  675. public bool TurboIsOpen
  676. {
  677. get { return m_TurboIsOpen; }
  678. set { SetProperty(ref m_TurboIsOpen, value); }
  679. }
  680. public bool IsATM
  681. {
  682. get { return m_IsATM; }
  683. set { SetProperty(ref m_IsATM, value); }
  684. }
  685. public bool IsVAC
  686. {
  687. get { return m_IsVAC; }
  688. set { SetProperty(ref m_IsVAC, value); }
  689. }
  690. //public bool BRFIsOn
  691. //{
  692. // get { return m_BRFIsOn; }
  693. // set { SetProperty(ref m_BRFIsOn, value); }
  694. //}
  695. //public bool SRFIsOn
  696. //{
  697. // get { return m_SRFIsOn; }
  698. // set { SetProperty(ref m_SRFIsOn, value); }
  699. //}
  700. public int PositionValue
  701. {
  702. get { return m_PositionValue; }
  703. set { SetProperty(ref m_PositionValue, value); }
  704. }
  705. public bool IsPositionMode
  706. {
  707. get { return m_IsPositionMode; }
  708. set { SetProperty(ref m_IsPositionMode, value); }
  709. }
  710. public double HeGasSetpoint
  711. {
  712. get { return m_HeGasSetpoint; }
  713. set
  714. {
  715. SetProperty(ref m_HeGasSetpoint, value);
  716. }
  717. }
  718. public int HePressureSetpoint
  719. {
  720. get { return m_HePressureSetpoint; }
  721. set
  722. {
  723. SetProperty(ref m_HePressureSetpoint, value);
  724. }
  725. }
  726. public float SRFFwdPowerSetpoint
  727. {
  728. get { return m_SRFFwdPowerSetpoint; }
  729. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  730. }
  731. //public float BRFFwdPowerSetpoint
  732. //{
  733. // get { return m_BRFFwdPowerSetpoint; }
  734. // set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  735. //}
  736. //public int ESCVoltage
  737. //{
  738. // get { return m_ESCVoltage; }
  739. // set { SetProperty(ref m_ESCVoltage, value); }
  740. //}
  741. public float SRFMatchC1
  742. {
  743. get { return m_SRFMatchC1; }
  744. set { SetProperty(ref m_SRFMatchC1, value); }
  745. }
  746. public float SRFMatchC2
  747. {
  748. get { return m_SRFMatchC2; }
  749. set { SetProperty(ref m_SRFMatchC2, value); }
  750. }
  751. public string MatchWorkMode
  752. {
  753. get { return m_MatchWorkMode; }
  754. set
  755. {
  756. SetProperty(ref m_MatchWorkMode, value);
  757. }
  758. }
  759. //public float BRFMatchC1
  760. //{
  761. // get { return m_BRFMatchC1; }
  762. // set { SetProperty(ref m_BRFMatchC1, value); }
  763. //}
  764. //public float BRFMatchC2
  765. //{
  766. // get { return m_BRFMatchC2; }
  767. // set { SetProperty(ref m_BRFMatchC2, value); }
  768. //}
  769. public bool GasIsFlowing
  770. {
  771. get { return m_GasIsFlowing; }
  772. set { SetProperty(ref m_GasIsFlowing, value); }
  773. }
  774. public bool IsProcessing
  775. {
  776. get { return m_IsProcessing; }
  777. set { SetProperty(ref m_IsProcessing, value); }
  778. }
  779. public bool IsAutoMode
  780. {
  781. get { return m_IsAutoMode; }
  782. set { SetProperty(ref m_IsAutoMode, value); }
  783. }
  784. public int SelectedRecipeIndex
  785. {
  786. get { return m_SelectedRecipeIndex; }
  787. set { SetProperty(ref m_SelectedRecipeIndex, value); }
  788. }
  789. public ComboBoxItem SelectedRecipeType
  790. {
  791. get { return m_SelectedRecipeType; }
  792. set { SetProperty(ref m_SelectedRecipeType, value); }
  793. }
  794. public double ChamberPressureFeedBack
  795. {
  796. get { return m_ChamberPressureFeedBack; }
  797. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  798. }
  799. public string WaferID
  800. {
  801. get { return m_WaferID; }
  802. set { SetProperty(ref m_WaferID, value); }
  803. }
  804. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  805. {
  806. get { return m_HighTemperatureHeaterData; }
  807. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  808. }
  809. public ComboBoxItem SelectedPosition
  810. {
  811. get { return m_SelectedPosition; }
  812. set { SetProperty(ref m_SelectedPosition, value); }
  813. }
  814. public int HighTemperatureHeaterTemperatureSetpoint
  815. {
  816. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  817. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  818. }
  819. public int HighTemperatureHeaterRatioSetpoint
  820. {
  821. get { return m_HighTemperatureHeaterRatioSetpoint; }
  822. set { SetProperty(ref m_HighTemperatureHeaterRatioSetpoint, value); }
  823. }
  824. public AITHeaterData PendulumHeaterData
  825. {
  826. get { return m_PendulumHeaterData; }
  827. set { SetProperty(ref m_PendulumHeaterData, value); }
  828. }
  829. #endregion
  830. #region 命令
  831. private DelegateCommand _PMInitCommnad;
  832. public DelegateCommand PMInitCommnad =>
  833. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  834. private DelegateCommand _PMAbortCommnad;
  835. public DelegateCommand PMAbortCommnad =>
  836. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  837. private DelegateCommand _GasCommand;
  838. public DelegateCommand GasCommand =>
  839. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  840. //private DelegateCommand _HeCommand;
  841. //public DelegateCommand HeCommand =>
  842. // _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  843. //private DelegateCommand _RfCommand;
  844. //public DelegateCommand RfCommand =>
  845. // _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  846. private DelegateCommand _PurgeCommand;
  847. public DelegateCommand PurgeCommand =>
  848. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  849. private DelegateCommand _VentCommand;
  850. public DelegateCommand VentCommand =>
  851. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  852. private DelegateCommand _PumpCommand;
  853. public DelegateCommand PumpCommand =>
  854. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  855. private DelegateCommand _OpenPumpCommand;
  856. public DelegateCommand OpenPumpCommand =>
  857. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  858. private DelegateCommand _ClosePumpCommand;
  859. public DelegateCommand ClosePumpCommand =>
  860. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  861. private DelegateCommand _OpenTurboPumpCommand;
  862. public DelegateCommand OpenTurboPumpCommand =>
  863. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  864. private DelegateCommand _CloseTurboPumpCommand;
  865. public DelegateCommand CloseTurboPumpCommand =>
  866. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  867. private DelegateCommand _OpenPendulumValveCommand;
  868. public DelegateCommand OpenPendulumValveCommand =>
  869. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  870. private DelegateCommand _ClosePendulumValveCommand;
  871. public DelegateCommand ClosePendulumValveCommand =>
  872. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  873. //private DelegateCommand<object> _PinUpDownCommand;
  874. //public DelegateCommand<object> PinUpDownCommand =>
  875. // _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  876. private DelegateCommand<object> _LidUpDownCommand;
  877. public DelegateCommand<object> LidUpDownCommand =>
  878. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  879. private DelegateCommand _SetSRfCommand;
  880. public DelegateCommand SetSRfCommand =>
  881. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  882. //private DelegateCommand _SetBRfCommand;
  883. //public DelegateCommand SetBRfCommand =>
  884. // _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  885. private DelegateCommand _OpenButterflyValveViewCommand;
  886. public DelegateCommand OpenButterflyValveViewCommand =>
  887. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  888. //private DelegateCommand _HVCommand;
  889. //public DelegateCommand HVCommand =>
  890. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  891. //private DelegateCommand _HVSetCommand;
  892. //public DelegateCommand HVSetCommand =>
  893. // _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  894. private DelegateCommand _LoadRecipeCommand;
  895. public DelegateCommand LoadRecipeCommand =>
  896. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  897. private DelegateCommand _SwitchTypeCommand;
  898. public DelegateCommand SwitchTypeCommand =>
  899. _SwitchTypeCommand ?? (_SwitchTypeCommand = new DelegateCommand(OnSwitchType));
  900. private DelegateCommand<object> _ControlValveCommand;
  901. public DelegateCommand<object> ControlValveCommand =>
  902. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  903. private DelegateCommand<object> _RunRecipeCommand;
  904. public DelegateCommand<object> RunRecipeCommand =>
  905. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  906. private DelegateCommand _SetChillerTempCommand;
  907. public DelegateCommand SetChillerTempCommand =>
  908. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  909. //private DelegateCommand _OnOffChillerCommand;
  910. //public DelegateCommand OnOffChillerCommand =>
  911. // _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  912. private DelegateCommand _SetHeaterRatioCommand;
  913. public DelegateCommand SetHeaterRatioCommand =>
  914. _SetHeaterRatioCommand ?? (_SetHeaterRatioCommand = new DelegateCommand(OnSetHeaterRatio));
  915. private DelegateCommand<object> _HeaterCommand;
  916. public DelegateCommand<object> HeaterCommand =>
  917. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  918. private DelegateCommand _EndStepCommand;
  919. public DelegateCommand EndStepCommand =>
  920. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  921. private DelegateCommand _GotoPositionCommand;
  922. public DelegateCommand GotoPositionCommand =>
  923. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  924. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  925. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  926. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  927. private DelegateCommand<object> _AbortRecipeCommnad;
  928. public DelegateCommand<object> AbortRecipeCommnad =>
  929. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  930. private DelegateCommand _SetRfBoxC1Command;
  931. public DelegateCommand SetRfBoxC1Command =>
  932. _SetRfBoxC1Command ?? (_SetRfBoxC1Command = new DelegateCommand(OnSetRfBoxC1));
  933. private DelegateCommand _IncludeCommand;
  934. public DelegateCommand IncludeCommand =>
  935. _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
  936. #endregion
  937. #region 构造函数
  938. public OverKepler2200BViewModel()
  939. {
  940. m_RtDataKeys = new List<string>();
  941. m_IsATM = true;
  942. ModuleName = "PMA";
  943. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  944. timer = new DispatcherTimer();
  945. timer.Interval = TimeSpan.FromSeconds(0.5);
  946. timer.Tick += timer_Tick;
  947. //timer.Start();
  948. PressureType = PressureType.Pa;
  949. }
  950. #endregion
  951. #region 命令方法
  952. private void OnControlValve(object obj)
  953. {
  954. CommonValveControl commonValveControl = (CommonValveControl)obj;
  955. if (commonValveControl.IsCanEdit == true)
  956. {
  957. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  958. string operation = commonValveControl.Status ? "关闭" : "打开";
  959. LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
  960. }
  961. }
  962. private void OnPMInit()
  963. {
  964. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  965. LOG.Info($"{ModuleName},初始化");
  966. }
  967. private void OnGas()
  968. {
  969. object[] mfc = new object[8];
  970. mfc[0] = MFC1SetPoint;
  971. mfc[1] = MFC2SetPoint;
  972. mfc[2] = MFC3SetPoint;
  973. mfc[3] = MFC4SetPoint;
  974. mfc[4] = MFC5SetPoint;
  975. mfc[5] = MFC6SetPoint;
  976. mfc[6] = 0d;
  977. mfc[7] = 0d;
  978. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  979. string operation = GasIsFlowing ? "关闭" : "打开";
  980. LOG.Info($"{ModuleName},{operation} GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
  981. }
  982. //private void OnRf()
  983. //{
  984. // if (PMCurrentState == PMState.RfPowering)
  985. // {
  986. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  987. // LOG.Info($"{ModuleName},关闭RF");
  988. // }
  989. // else
  990. // {
  991. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  992. // LOG.Info($"{ModuleName},开始RF,Power值{SRFFwdPowerSetpoint}");
  993. // }
  994. //}
  995. private void OnPurge()
  996. {
  997. if (PMCurrentState == PMState.Purging)
  998. {
  999. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1000. LOG.Info($"{ModuleName},关闭Purge");
  1001. }
  1002. else
  1003. {
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1005. LOG.Info($"{ModuleName},开始Purge");
  1006. }
  1007. }
  1008. private void OnVent()
  1009. {
  1010. if (PMCurrentState == PMState.Venting)
  1011. {
  1012. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1013. LOG.Info($"{ModuleName},关闭Vent");
  1014. }
  1015. else
  1016. {
  1017. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1018. LOG.Info($"{ModuleName},开始Vent");
  1019. }
  1020. }
  1021. private void OnPump()
  1022. {
  1023. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1024. if (PMCurrentState == PMState.Pumping)
  1025. {
  1026. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1027. return;
  1028. }
  1029. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1030. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1031. // 设置底压
  1032. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1033. if (basePressure <= 0.01 || basePressure >= 1000)
  1034. {
  1035. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1036. return;
  1037. }
  1038. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1039. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1040. {
  1041. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1042. return;
  1043. }
  1044. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1045. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1047. LOG.Info($"{ModuleName},开始Pump Down");
  1048. }
  1049. private void OnOpenPump()
  1050. {
  1051. if (PMCurrentState == PMState.LaunchingPump)
  1052. {
  1053. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1054. return;
  1055. }
  1056. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1057. LOG.Info($"{ModuleName},打开Pump");
  1058. }
  1059. private void OnClosePump()
  1060. {
  1061. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1062. LOG.Info($"{ModuleName},关闭Pump");
  1063. }
  1064. private void OnOpenTurboPump()
  1065. {
  1066. if (PMCurrentState == PMState.LaunchingTurboPump)
  1067. {
  1068. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1069. return;
  1070. }
  1071. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1072. LOG.Info($"{ModuleName},打开分子泵");
  1073. }
  1074. private void OnCloseTurboPump()
  1075. {
  1076. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1077. LOG.Info($"{ModuleName},关闭分子泵");
  1078. }
  1079. private void OnOpenPendulumValve()
  1080. {
  1081. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1082. LOG.Info($"{ModuleName},打开钟摆阀");
  1083. }
  1084. private void OnClosePendulumValve()
  1085. {
  1086. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1087. LOG.Info($"{ModuleName},关闭钟摆阀");
  1088. }
  1089. //private void OnPinUpDown(object upDown)
  1090. //{
  1091. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1092. //}
  1093. private void OnLidUpDown(object upDown)
  1094. {
  1095. //var value = (bool)upDown;
  1096. if (upDown.ToString() == "Up")
  1097. {
  1098. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1099. LOG.Info($"{ModuleName},打开Lid");
  1100. }
  1101. else
  1102. {
  1103. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1104. LOG.Info($"{ModuleName},关闭Lid");
  1105. }
  1106. }
  1107. private void OnSetSRf()
  1108. {
  1109. if (SRFData.IsRfOn == true)
  1110. {
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1112. }
  1113. else
  1114. {
  1115. if (GasIsFlowing == true)
  1116. {
  1117. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1120. }
  1121. }
  1122. }
  1123. private void OnPMAbort()
  1124. {
  1125. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1126. LOG.Info($"{ModuleName},Abort");
  1127. }
  1128. private void OnOpenButterflyValveView()
  1129. {
  1130. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1131. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1132. {
  1133. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1134. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1135. butterflyValveMessageBox.Left = 700;
  1136. butterflyValveMessageBox.Top = 600;
  1137. butterflyValveMessageBox.Show();
  1138. butterflyValveMessageBox.Owner = _mainWindow;
  1139. }
  1140. }
  1141. private void OnSwitchType()
  1142. {
  1143. SelectedRecipeIndex = -1;
  1144. }
  1145. private void OnLoadRecipe()
  1146. {
  1147. string recipeType = SelectedRecipeType.Content.ToString();
  1148. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType)).ToList();
  1149. }
  1150. private void OnRunRecipe(object obj)
  1151. {
  1152. if (SelectedRecipeIndex == -1)
  1153. {
  1154. return;
  1155. }
  1156. string recipeName = CurrentModuleRecipes[SelectedRecipeIndex];
  1157. string recipeType = SelectedRecipeType.Content.ToString();
  1158. ClearData();
  1159. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType, recipeName + ".rcp");
  1160. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1161. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, recipeType);
  1162. LOG.Info($"{ModuleName},Run Recipe {recipeName},");
  1163. }
  1164. private void OnHeater(object obj)
  1165. {
  1166. if (IsAutoMode == true)
  1167. {
  1168. return;
  1169. }
  1170. AITHeaterData heaterData = obj as AITHeaterData;
  1171. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1172. if (heaterView == null || heaterView.IsVisible == false)
  1173. {
  1174. heaterView = new HeaterView(heaterData, ModuleName);
  1175. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1176. heaterView.Owner = _mainWindow;
  1177. heaterView.Show();
  1178. }
  1179. }
  1180. private void OnOnline()
  1181. {
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
  1183. LOG.Info("{ModuleName},Switch to Online");
  1184. }
  1185. private void OnOffline()
  1186. {
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
  1188. LOG.Info("{ModuleName},Switch to Offline");
  1189. }
  1190. private void OnEndStep()
  1191. {
  1192. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1193. //if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1194. //{
  1195. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1196. //}
  1197. //else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1198. //{
  1199. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1200. //}
  1201. }
  1202. private void OnGotoPosition()
  1203. {
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1205. LOG.Info($"{ModuleName},HighTemperatureHeater to {SelectedPosition.Content}");
  1206. }
  1207. private void OnSwitchHighTemperatureHeater()
  1208. {
  1209. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIsonFeedBack);
  1210. }
  1211. private void OnSetChillerTemp()
  1212. {
  1213. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1214. }
  1215. private void OnSetHeaterRatio()
  1216. {
  1217. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterRatio", HighTemperatureHeaterRatioSetpoint);
  1218. }
  1219. private DelegateCommand _OnlineCommand;
  1220. public DelegateCommand OnlineCommand =>
  1221. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1222. private DelegateCommand _OfflineCommand;
  1223. public DelegateCommand OfflineCommand =>
  1224. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1225. private async void OnAbortRecipe(object obj)
  1226. {
  1227. if (PMCurrentState != PMState.Processing)
  1228. {
  1229. return;
  1230. }
  1231. switch (obj.ToString())
  1232. {
  1233. case "0":
  1234. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1235. break;
  1236. case "1":
  1237. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1238. //if (ESCHVData.IsOn == true)
  1239. //{
  1240. // await Task.Delay(3000);
  1241. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1242. //}
  1243. break;
  1244. case "2":
  1245. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1246. await Task.Delay(3000);
  1247. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1248. break;
  1249. }
  1250. }
  1251. private void OnSetRfBoxC1()
  1252. {
  1253. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.RFBox}.{AITRfOperation.SetMatchPositionC1}", RFBoxC1Setpoint);
  1254. }
  1255. private void OnInclude()
  1256. {
  1257. if (IsInclude)
  1258. {
  1259. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
  1260. }
  1261. else
  1262. {
  1263. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
  1264. }
  1265. }
  1266. #endregion
  1267. #region 私有方法
  1268. private void ClearData()
  1269. {
  1270. //ESCVoltage = 0;
  1271. SRFFwdPowerSetpoint = 0;
  1272. SRFMatchC1 = 0;
  1273. SRFMatchC2 = 0;
  1274. //BRFFwdPowerSetpoint = 0;
  1275. //BRFMatchC1 = 0;
  1276. //BRFMatchC2 = 0;
  1277. HeGasSetpoint = 0;
  1278. MFC1SetPoint = 0;
  1279. MFC2SetPoint = 0;
  1280. MFC3SetPoint = 0;
  1281. MFC4SetPoint = 0;
  1282. MFC5SetPoint = 0;
  1283. MFC6SetPoint = 0;
  1284. MFC7SetPoint = 0;
  1285. MFC8SetPoint = 0;
  1286. }
  1287. private IEnumerable<string> GetFilesNames(string path)
  1288. {
  1289. if (Directory.Exists(path))
  1290. {
  1291. return Directory.GetFiles(path, "*.rcp")?
  1292. .Select(Path.GetFileNameWithoutExtension);
  1293. }
  1294. else
  1295. {
  1296. return new List<string>();
  1297. }
  1298. }
  1299. void timer_Tick(object sender, EventArgs e)
  1300. {
  1301. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1302. if (RtDataValues == null || RtDataValues.Count == 0)
  1303. {
  1304. return;
  1305. }
  1306. //var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1307. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1308. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1309. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1310. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1311. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1312. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1313. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1314. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1315. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1316. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1317. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1318. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1319. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1320. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1321. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1322. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1323. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1324. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1325. //MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1326. //MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1327. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1328. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1329. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1330. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1331. //PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1332. //PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1333. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1334. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1335. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1336. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1337. PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
  1338. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1339. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1340. //LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1341. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"TM.{ModuleName}SlitDoor.IsClosed");
  1342. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1343. //PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1344. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1345. //PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1346. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1347. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1348. IsProcessing = PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean;
  1349. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1350. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1351. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1352. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1353. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1354. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1355. //MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1356. //MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1357. //MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1358. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1359. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1360. //BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1361. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1362. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1363. //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1364. //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1365. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1366. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1367. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1368. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1369. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1370. //ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1371. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1372. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1373. //ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1374. SourceRFMatchInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFMatchInterlock");
  1375. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1376. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1377. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1378. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1379. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1380. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1381. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1382. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1383. //ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1384. //MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1385. //MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1386. //MatchWorkMode = CommonFunction.GetValue<string>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1387. MatchData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.DeviceData");
  1388. RFBoxData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.RFBox}.DeviceData");
  1389. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1390. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1391. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1392. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1393. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1394. //if (IsProcessing)
  1395. //{
  1396. // if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1397. // {
  1398. // var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1399. // CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1400. // CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1401. // }
  1402. // currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1403. //}
  1404. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 2000)
  1405. {
  1406. ChamberPressureFeedBack = ProcessPressure;
  1407. }
  1408. else
  1409. {
  1410. ChamberPressureFeedBack = ChamberPressure;
  1411. }
  1412. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1413. IsAutoMode = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1414. IsInclude = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
  1415. }
  1416. public void addDataKeys()
  1417. {
  1418. m_RtDataKeys.Clear();
  1419. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1420. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1421. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1422. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1423. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1424. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1425. //m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1426. //m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1427. //m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1428. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1429. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1430. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1431. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1432. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1433. //m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1434. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1435. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1436. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1437. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1438. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1439. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1440. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1441. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1442. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1443. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1444. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1445. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1446. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1447. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1448. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1449. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1450. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1451. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1452. //m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1453. //m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1454. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1455. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1456. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1457. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1458. //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1459. //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1460. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1461. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1462. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1463. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1464. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1465. m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
  1466. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1467. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1468. m_RtDataKeys.Add($"TM.{ModuleName}SlitDoor.IsClosed");
  1469. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1470. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1471. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1472. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1473. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1474. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1475. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.DeviceData");
  1476. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.RFBox}.DeviceData");
  1477. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1478. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1479. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1480. //m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1481. //m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1482. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1483. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1484. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1485. m_RtDataKeys.Add($"{ModuleName}.SourceRFMatchInterlock");
  1486. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1487. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1488. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1489. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1490. //m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1491. //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1492. //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1493. //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1494. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1495. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1496. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1497. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1498. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1499. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1500. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1501. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1502. m_RtDataKeys.Add($"{ModuleName}.IsInclude");
  1503. }
  1504. public void EnterExitView(bool isEnter)
  1505. {
  1506. if (isEnter)
  1507. {
  1508. timer_Tick(null, null);
  1509. timer.Start();
  1510. }
  1511. else
  1512. {
  1513. timer.Stop();
  1514. }
  1515. }
  1516. #endregion
  1517. }
  1518. }