OverKepler2200AViewModel.cs 67 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using System.Windows.Controls;
  20. using Aitex.Core.RT.Log;
  21. namespace Venus_MainPages.ViewModels
  22. {
  23. internal class OverKepler2200AViewModel : BindableBase
  24. {
  25. #region 私有字段
  26. private double m_TurboN2FlowSetPoint;
  27. private List<string> m_CurrentModuleRecipes = new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. //private bool m_MFC7ValveIsOpen;
  46. //private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. //private bool m_PVHe1ValveIsOpen;
  51. //private bool m_PVHe2ValveIsOpen;
  52. private bool m_TurboPumpPumpingValveIsOpen;
  53. private bool m_TurboPumpPurgeValveIsOpen;
  54. private bool m_GuageValveIsOpen;
  55. private bool m_PendulumValveIsOpen;
  56. private bool m_PurgeValveIsOpen;
  57. //private double m_HeGasSetpoint;
  58. //private int m_HePressureSetpoint;
  59. private float m_SRFFwdPowerSetpoint;
  60. //private float m_BRFFwdPowerSetpoint;
  61. private float m_SRFMatchC1;
  62. private float m_SRFMatchC2;
  63. //private float m_BRFMatchC1;
  64. //private float m_BRFMatchC2;
  65. private double m_MFC1SetPoint;
  66. private double m_MFC2SetPoint;
  67. private double m_MFC3SetPoint;
  68. private double m_MFC4SetPoint;
  69. private double m_MFC5SetPoint;
  70. private double m_MFC6SetPoint;
  71. private double m_MFC7SetPoint;
  72. private double m_MFC8SetPoint;
  73. private double m_N2SetPoint;
  74. private AITMfcData m_MFC1Data;
  75. private AITMfcData m_MFC2Data;
  76. private AITMfcData m_MFC3Data;
  77. private AITMfcData m_MFC4Data;
  78. private AITMfcData m_MFC5Data;
  79. private AITMfcData m_MFC6Data;
  80. //private AITMfcData m_MFC7Data;
  81. //private AITMfcData m_MFC8Data;
  82. //private AITMfcData m_MFCHeData;
  83. private AITMfcData m_MFCN2Data;
  84. private AITHeaterData m_PendulumHeaterData;
  85. private AITRfData m_SRFData;
  86. //private AITRfData m_BRFData;
  87. private AITPendulumValveData m_PendulumValveData;
  88. //private AITHVData m_ESCHVData;
  89. private PMState m_PMCurrentState;
  90. private bool m_SourceRFMatchInterlock;
  91. private bool m_IsWLK;
  92. private bool m_IsWaterFlowOk;
  93. private bool m_IsTurboPumpInterlock;
  94. private bool m_IsCDAOK;
  95. private bool m_SensorGasBoxDoor;
  96. private bool m_SensorGasBoxPressure;
  97. private bool m_PumpIsOpen;
  98. private bool m_TurboIsOpen;
  99. private bool m_IsATM;
  100. private bool m_IsVAC;
  101. private List<string> m_RtDataKeys;
  102. private Dictionary<string, object> m_RtDataValues;
  103. private int m_PositionValue;
  104. private bool m_IsPositionMode;
  105. //private int m_ESCVoltage;
  106. private bool m_GasIsFlowing;
  107. private bool m_IsProcessing;
  108. private bool m_IsAutoMode;
  109. private int m_SelectedRecipeIndex=-1;
  110. private ComboBoxItem m_SelectedRecipeType;
  111. //private float m_ChillerTempSetpoint;
  112. private float m_WallTempSetpoint;
  113. private bool m_HeIsPressureMode = true;
  114. //private bool m_ChillerIsOn;
  115. private float m_ChamberPressure;
  116. private float m_ProcessPressure;
  117. private float m_ForelinePressurePressure;
  118. //private float m_ESCHePressure;
  119. ButterflyValveView butterflyValveMessageBox;
  120. HeaterView heaterView;
  121. private int m_TurboPumpRotationalSpeed;
  122. //private bool m_LiftPinIsUp;
  123. private bool m_IsSlitDoorClosed=true;
  124. private bool m_IsLidClosed=true;
  125. //private float m_MatchC1;
  126. //private float m_MatchC2;
  127. //private string m_MatchWorkMode;
  128. private AITMatchData m_MatchData;
  129. //private float m_PendulumValvePosition;
  130. private bool m_IsTurboPumpAtSpeed;
  131. private bool m_TurboPumpWaterFlowSwitch;
  132. private bool m_IsHasWafer;
  133. private Recipe m_CurrentRecipe = new Recipe();
  134. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  135. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  136. private double m_ChamberPressureFeedBack;
  137. private string m_WaferID;
  138. private string m_ModuleName;
  139. private int? currentRecipeNumber;
  140. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  141. private ComboBoxItem m_SelectedPosition;
  142. private int m_HighTemperatureHeaterTemperatureSetpoint;
  143. private float m_HighTemperatureHeaterRatioSetpoint;
  144. private PressureType m_PressureType;
  145. private bool m_IsInclude;
  146. DispatcherTimer timer;
  147. #endregion
  148. #region 属性
  149. public bool IsInclude
  150. {
  151. get { return m_IsInclude; }
  152. set { SetProperty(ref m_IsInclude, value); }
  153. }
  154. public PressureType PressureType
  155. {
  156. get { return m_PressureType; }
  157. set { SetProperty(ref m_PressureType, value); }
  158. }
  159. public double TurboN2FlowSetPoint
  160. {
  161. get { return m_TurboN2FlowSetPoint; }
  162. set
  163. {
  164. if (value != m_TurboN2FlowSetPoint)
  165. {
  166. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  167. }
  168. SetProperty(ref m_TurboN2FlowSetPoint, value);
  169. }
  170. }
  171. public List<string> CurrentModuleRecipes
  172. {
  173. get { return m_CurrentModuleRecipes; }
  174. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  175. }
  176. public Recipe CurrentRecipe
  177. {
  178. get { return m_CurrentRecipe; }
  179. set { SetProperty(ref m_CurrentRecipe, value); }
  180. }
  181. public RecipeResult CurrentRecipeResult
  182. {
  183. get { return m_CurrentRecipeResult; }
  184. set { SetProperty(ref m_CurrentRecipeResult, value); }
  185. }
  186. public RecipeStep CurrentRecipeStep
  187. {
  188. get { return m_CurrentRecipeStep; }
  189. set { SetProperty(ref m_CurrentRecipeStep, value); }
  190. }
  191. public bool IsHasWafer
  192. {
  193. get { return m_IsHasWafer; }
  194. set { SetProperty(ref m_IsHasWafer, value); }
  195. }
  196. public AITMatchData MatchData
  197. {
  198. get { return m_MatchData; }
  199. set { SetProperty(ref m_MatchData, value); }
  200. }
  201. public bool IsTurboPumpAtSpeed
  202. {
  203. get { return m_IsTurboPumpAtSpeed; }
  204. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  205. }
  206. public bool TurboPumpWaterFlowSwitch
  207. {
  208. get { return m_TurboPumpWaterFlowSwitch; }
  209. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  210. }
  211. //public float PendulumValvePosition
  212. //{
  213. // get { return m_PendulumValvePosition; }
  214. // set { SetProperty(ref m_PendulumValvePosition, value); }
  215. //}
  216. //public float BiasMatchC1
  217. //{
  218. // get { return m_BiasMatchC1; }
  219. // set
  220. // {
  221. // SetProperty(ref m_BiasMatchC1, value);
  222. // }
  223. //}
  224. //public float BiasMatchC2
  225. //{
  226. // get { return m_BiasMatchC2; }
  227. // set
  228. // {
  229. // SetProperty(ref m_BiasMatchC2, value);
  230. // }
  231. //}
  232. //public float MatchC1
  233. //{
  234. // get { return m_MatchC1; }
  235. // set
  236. // {
  237. // SetProperty(ref m_MatchC1, value);
  238. // }
  239. //}
  240. //public float MatchC2
  241. //{
  242. // get { return m_MatchC2; }
  243. // set
  244. // {
  245. // SetProperty(ref m_MatchC2, value);
  246. // }
  247. //}
  248. public AITPendulumValveData PendulumValveData
  249. {
  250. get { return m_PendulumValveData; }
  251. set
  252. {
  253. SetProperty(ref m_PendulumValveData, value);
  254. }
  255. }
  256. //public AITHVData ESCHVData
  257. //{
  258. // get { return m_ESCHVData; }
  259. // set
  260. // {
  261. // SetProperty(ref m_ESCHVData, value);
  262. // }
  263. //}
  264. //public int ESCHVOutputVoltage
  265. //{
  266. // get { return m_ESCHVOutputVoltage; }
  267. // set
  268. // {
  269. // SetProperty(ref m_ESCHVOutputVoltage, value);
  270. // }
  271. //}
  272. //public float ChillerTemperature
  273. //{
  274. // get { return m_ChillerTemperature; }
  275. // set
  276. // {
  277. // SetProperty(ref m_ChillerTemperature, value);
  278. // }
  279. //}
  280. //public float HVTemperature
  281. //{
  282. // get { return m_HVTemperature; }
  283. // set
  284. // {
  285. // SetProperty(ref m_HVTemperature, value);
  286. // }
  287. //}
  288. public bool IsLidClosed
  289. {
  290. get { return m_IsLidClosed; }
  291. set
  292. {
  293. SetProperty(ref m_IsLidClosed, value);
  294. }
  295. }
  296. public bool IsSlitDoorClosed
  297. {
  298. get { return m_IsSlitDoorClosed; }
  299. set
  300. {
  301. SetProperty(ref m_IsSlitDoorClosed, value);
  302. }
  303. }
  304. //public bool LiftPinIsUp
  305. //{
  306. // get { return m_LiftPinIsUp; }
  307. // set
  308. // {
  309. // SetProperty(ref m_LiftPinIsUp, value);
  310. // }
  311. //}
  312. public int TurboPumpRotationalSpeed
  313. {
  314. get { return m_TurboPumpRotationalSpeed; }
  315. set
  316. {
  317. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  318. }
  319. }
  320. //public float ESCHePressure
  321. //{
  322. // get { return m_ESCHePressure; }
  323. // set
  324. // {
  325. // SetProperty(ref m_ESCHePressure, value);
  326. // }
  327. //}
  328. public float ChamberPressure
  329. {
  330. get { return m_ChamberPressure; }
  331. set
  332. {
  333. SetProperty(ref m_ChamberPressure, value);
  334. }
  335. }
  336. public float ProcessPressure
  337. {
  338. get { return m_ProcessPressure; }
  339. set
  340. {
  341. SetProperty(ref m_ProcessPressure, value);
  342. }
  343. }
  344. public float ForelinePressure
  345. {
  346. get { return m_ForelinePressurePressure; }
  347. set
  348. {
  349. SetProperty(ref m_ForelinePressurePressure, value);
  350. }
  351. }
  352. public bool SourceRFMatchInterlock
  353. {
  354. get { return m_SourceRFMatchInterlock; }
  355. set
  356. {
  357. SetProperty(ref m_SourceRFMatchInterlock, value);
  358. }
  359. }
  360. public bool IsWLK
  361. {
  362. get { return m_IsWLK; }
  363. set
  364. {
  365. SetProperty(ref m_IsWLK, value);
  366. }
  367. }
  368. public bool IsWaterFlowOk
  369. {
  370. get { return m_IsWaterFlowOk; }
  371. set
  372. {
  373. SetProperty(ref m_IsWaterFlowOk, value);
  374. }
  375. }
  376. public bool IsCDAOK
  377. {
  378. get { return m_IsCDAOK; }
  379. set
  380. {
  381. SetProperty(ref m_IsCDAOK, value);
  382. }
  383. }
  384. public bool SensorGasBoxDoor
  385. {
  386. get { return m_SensorGasBoxDoor; }
  387. set
  388. {
  389. SetProperty(ref m_SensorGasBoxDoor, value);
  390. }
  391. }
  392. public bool SensorGasBoxPressure
  393. {
  394. get { return m_SensorGasBoxPressure; }
  395. set
  396. {
  397. SetProperty(ref m_SensorGasBoxPressure, value);
  398. }
  399. }
  400. public bool IsTurboPumpInterlock
  401. {
  402. get { return m_IsTurboPumpInterlock; }
  403. set
  404. {
  405. SetProperty(ref m_IsTurboPumpInterlock, value);
  406. }
  407. }
  408. public string ModuleName
  409. {
  410. get { return m_ModuleName; }
  411. set
  412. {
  413. SetProperty(ref m_ModuleName, value);
  414. }
  415. }
  416. public double MFC1SetPoint
  417. {
  418. get { return m_MFC1SetPoint; }
  419. set { SetProperty(ref m_MFC1SetPoint, value); }
  420. }
  421. public double MFC2SetPoint
  422. {
  423. get { return m_MFC2SetPoint; }
  424. set { SetProperty(ref m_MFC2SetPoint, value); }
  425. }
  426. public double MFC3SetPoint
  427. {
  428. get { return m_MFC3SetPoint; }
  429. set { SetProperty(ref m_MFC3SetPoint, value); }
  430. }
  431. public double MFC4SetPoint
  432. {
  433. get { return m_MFC4SetPoint; }
  434. set { SetProperty(ref m_MFC4SetPoint, value); }
  435. }
  436. public double MFC5SetPoint
  437. {
  438. get { return m_MFC5SetPoint; }
  439. set { SetProperty(ref m_MFC5SetPoint, value); }
  440. }
  441. public double MFC6SetPoint
  442. {
  443. get { return m_MFC6SetPoint; }
  444. set { SetProperty(ref m_MFC6SetPoint, value); }
  445. }
  446. public double MFC7SetPoint
  447. {
  448. get { return m_MFC7SetPoint; }
  449. set { SetProperty(ref m_MFC7SetPoint, value); }
  450. }
  451. public double MFC8SetPoint
  452. {
  453. get { return m_MFC8SetPoint; }
  454. set { SetProperty(ref m_MFC8SetPoint, value); }
  455. }
  456. public double N2SetPoint
  457. {
  458. get { return m_N2SetPoint; }
  459. set { SetProperty(ref m_N2SetPoint, value); }
  460. }
  461. public AITMfcData MFC1Data
  462. {
  463. get { return m_MFC1Data; }
  464. set { SetProperty(ref m_MFC1Data, value); }
  465. }
  466. public AITMfcData MFC2Data
  467. {
  468. get { return m_MFC2Data; }
  469. set { SetProperty(ref m_MFC2Data, value); }
  470. }
  471. public AITMfcData MFC3Data
  472. {
  473. get { return m_MFC3Data; }
  474. set { SetProperty(ref m_MFC3Data, value); }
  475. }
  476. public AITMfcData MFC4Data
  477. {
  478. get { return m_MFC4Data; }
  479. set { SetProperty(ref m_MFC4Data, value); }
  480. }
  481. public AITMfcData MFC5Data
  482. {
  483. get { return m_MFC5Data; }
  484. set { SetProperty(ref m_MFC5Data, value); }
  485. }
  486. public AITMfcData MFC6Data
  487. {
  488. get { return m_MFC6Data; }
  489. set { SetProperty(ref m_MFC6Data, value); }
  490. }
  491. //public AITMfcData MFC7Data
  492. //{
  493. // get { return m_MFC7Data; }
  494. // set { SetProperty(ref m_MFC7Data, value); }
  495. //}
  496. //public AITMfcData MFC8Data
  497. //{
  498. // get { return m_MFC8Data; }
  499. // set { SetProperty(ref m_MFC8Data, value); }
  500. //}
  501. //public AITMfcData MFCHeData
  502. //{
  503. // get { return m_MFCHeData; }
  504. // set { SetProperty(ref m_MFCHeData, value); }
  505. //}
  506. public AITMfcData MFCN2Data
  507. {
  508. get { return m_MFCN2Data; }
  509. set { SetProperty(ref m_MFCN2Data, value); }
  510. }
  511. //public AITHeaterData ValveHeaterData
  512. //{
  513. // get { return m_ValveHeaterData; }
  514. // set { SetProperty(ref m_ValveHeaterData, value); }
  515. //}
  516. //public AITHeaterData ForelineHeaterData
  517. //{
  518. // get { return m_ForelineHeaterData; }
  519. // set { SetProperty(ref m_ForelineHeaterData, value); }
  520. //}
  521. //public AITHeaterData WallHeaterData
  522. //{
  523. // get { return m_WallHeaterData; }
  524. // set { SetProperty(ref m_WallHeaterData, value); }
  525. //}
  526. public AITRfData SRFData
  527. {
  528. get { return m_SRFData; }
  529. set { SetProperty(ref m_SRFData, value); }
  530. }
  531. //public AITRfData BRFData
  532. //{
  533. // get { return m_BRFData; }
  534. // set { SetProperty(ref m_BRFData, value); }
  535. //}
  536. public PMState PMCurrentState
  537. {
  538. get { return m_PMCurrentState; }
  539. set { SetProperty(ref m_PMCurrentState, value); }
  540. }
  541. #region 阀
  542. public bool GasFinalValveIsOpen
  543. {
  544. get { return m_GasFinalValveIsOpen; }
  545. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  546. }
  547. public bool PVN21ValveIsOpen
  548. {
  549. get { return m_PVN21ValveIsOpen; }
  550. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  551. }
  552. public bool PVN22ValveIsOpen
  553. {
  554. get { return m_PVN22ValveIsOpen; }
  555. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  556. }
  557. public bool N2ValveIsOpen
  558. {
  559. get { return m_N2ValveIsOpen; }
  560. set { SetProperty(ref m_N2ValveIsOpen, value); }
  561. }
  562. public bool PV11ValveIsOpen
  563. {
  564. get { return m_PV11ValveIsOpen; }
  565. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  566. }
  567. public bool PV12ValveIsOpen
  568. {
  569. get { return m_PV12ValveIsOpen; }
  570. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  571. }
  572. public bool MFC1ValveIsOpen
  573. {
  574. get { return m_MFC1ValveIsOpen; }
  575. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  576. }
  577. public bool PV21ValveIsOpen
  578. {
  579. get { return m_PV21ValveIsOpen; }
  580. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  581. }
  582. public bool PV22ValveIsOpen
  583. {
  584. get { return m_PV22ValveIsOpen; }
  585. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  586. }
  587. public bool MFC2ValveIsOpen
  588. {
  589. get { return m_MFC2ValveIsOpen; }
  590. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  591. }
  592. public bool PV31ValveIsOpen
  593. {
  594. get { return m_PV31ValveIsOpen; }
  595. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  596. }
  597. public bool PV32ValveIsOpen
  598. {
  599. get { return m_PV32ValveIsOpen; }
  600. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  601. }
  602. public bool MFC3ValveIsOpen
  603. {
  604. get { return m_MFC3ValveIsOpen; }
  605. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  606. }
  607. public bool PV41ValveIsOpen
  608. {
  609. get { return m_PV41ValveIsOpen; }
  610. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  611. }
  612. public bool PV42ValveIsOpen
  613. {
  614. get { return m_PV42ValveIsOpen; }
  615. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  616. }
  617. public bool MFC4ValveIsOpen
  618. {
  619. get { return m_MFC4ValveIsOpen; }
  620. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  621. }
  622. public bool MFC5ValveIsOpen
  623. {
  624. get { return m_MFC5ValveIsOpen; }
  625. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  626. }
  627. public bool MFC6ValveIsOpen
  628. {
  629. get { return m_MFC6ValveIsOpen; }
  630. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  631. }
  632. //public bool MFC7ValveIsOpen
  633. //{
  634. // get { return m_MFC7ValveIsOpen; }
  635. // set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  636. //}
  637. //public bool MFC8ValveIsOpen
  638. //{
  639. // get { return m_MFC8ValveIsOpen; }
  640. // set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  641. //}
  642. //public bool PVHe1ValveIsOpen
  643. //{
  644. // get { return m_PVHe1ValveIsOpen; }
  645. // set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  646. //}
  647. //public bool PVHe2ValveIsOpen
  648. //{
  649. // get { return m_PVHe2ValveIsOpen; }
  650. // set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  651. //}
  652. public bool TurboPumpPumpingValveIsOpen
  653. {
  654. get { return m_TurboPumpPumpingValveIsOpen; }
  655. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  656. }
  657. public bool TurboPumpPurgeValveIsOpen
  658. {
  659. get { return m_TurboPumpPurgeValveIsOpen; }
  660. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  661. }
  662. public bool SoftPumpValveIsOpen
  663. {
  664. get { return m_SoftPumpValveIsOpen; }
  665. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  666. }
  667. public bool FastPumpValveIsOpen
  668. {
  669. get { return m_FastPumpValveIsOpen; }
  670. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  671. }
  672. public bool GuageValveIsOpen
  673. {
  674. get { return m_GuageValveIsOpen; }
  675. set { SetProperty(ref m_GuageValveIsOpen, value); }
  676. }
  677. #endregion
  678. public Dictionary<string, object> RtDataValues
  679. {
  680. get { return m_RtDataValues; }
  681. set { SetProperty(ref m_RtDataValues, value); }
  682. }
  683. public bool PumpIsOpen
  684. {
  685. get { return m_PumpIsOpen; }
  686. set { SetProperty(ref m_PumpIsOpen, value); }
  687. }
  688. public bool PendulumValveIsOpen
  689. {
  690. get { return m_PendulumValveIsOpen; }
  691. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  692. }
  693. public bool PurgeValveIsOpen
  694. {
  695. get { return m_PurgeValveIsOpen; }
  696. set { SetProperty(ref m_PurgeValveIsOpen, value); }
  697. }
  698. public bool TurboIsOpen
  699. {
  700. get { return m_TurboIsOpen; }
  701. set { SetProperty(ref m_TurboIsOpen, value); }
  702. }
  703. public bool IsATM
  704. {
  705. get { return m_IsATM; }
  706. set { SetProperty(ref m_IsATM, value); }
  707. }
  708. public bool IsVAC
  709. {
  710. get { return m_IsVAC; }
  711. set { SetProperty(ref m_IsVAC, value); }
  712. }
  713. //public bool BRFIsOn
  714. //{
  715. // get { return m_BRFIsOn; }
  716. // set { SetProperty(ref m_BRFIsOn, value); }
  717. //}
  718. //public bool SRFIsOn
  719. //{
  720. // get { return m_SRFIsOn; }
  721. // set { SetProperty(ref m_SRFIsOn, value); }
  722. //}
  723. public int PositionValue
  724. {
  725. get { return m_PositionValue; }
  726. set { SetProperty(ref m_PositionValue, value); }
  727. }
  728. public bool IsPositionMode
  729. {
  730. get { return m_IsPositionMode; }
  731. set { SetProperty(ref m_IsPositionMode, value); }
  732. }
  733. //public double HeGasSetpoint
  734. //{
  735. // get { return m_HeGasSetpoint; }
  736. // set
  737. // {
  738. // SetProperty(ref m_HeGasSetpoint, value);
  739. // }
  740. //}
  741. //public int HePressureSetpoint
  742. //{
  743. // get { return m_HePressureSetpoint; }
  744. // set
  745. // {
  746. // SetProperty(ref m_HePressureSetpoint, value);
  747. // }
  748. //}
  749. public float SRFFwdPowerSetpoint
  750. {
  751. get { return m_SRFFwdPowerSetpoint; }
  752. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  753. }
  754. //public float BRFFwdPowerSetpoint
  755. //{
  756. // get { return m_BRFFwdPowerSetpoint; }
  757. // set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  758. //}
  759. //public int ESCVoltage
  760. //{
  761. // get { return m_ESCVoltage; }
  762. // set { SetProperty(ref m_ESCVoltage, value); }
  763. //}
  764. public float SRFMatchC1
  765. {
  766. get { return m_SRFMatchC1; }
  767. set { SetProperty(ref m_SRFMatchC1, value); }
  768. }
  769. public float SRFMatchC2
  770. {
  771. get { return m_SRFMatchC2; }
  772. set { SetProperty(ref m_SRFMatchC2, value); }
  773. }
  774. //public string MatchWorkMode
  775. //{
  776. // get { return m_MatchWorkMode; }
  777. // set
  778. // {
  779. // SetProperty(ref m_MatchWorkMode, value);
  780. // }
  781. //}
  782. //public float BRFMatchC1
  783. //{
  784. // get { return m_BRFMatchC1; }
  785. // set { SetProperty(ref m_BRFMatchC1, value); }
  786. //}
  787. //public float BRFMatchC2
  788. //{
  789. // get { return m_BRFMatchC2; }
  790. // set { SetProperty(ref m_BRFMatchC2, value); }
  791. //}
  792. public bool GasIsFlowing
  793. {
  794. get { return m_GasIsFlowing; }
  795. set { SetProperty(ref m_GasIsFlowing, value); }
  796. }
  797. public bool IsProcessing
  798. {
  799. get { return m_IsProcessing; }
  800. set { SetProperty(ref m_IsProcessing, value); }
  801. }
  802. public bool IsAutoMode
  803. {
  804. get { return m_IsAutoMode; }
  805. set { SetProperty(ref m_IsAutoMode, value); }
  806. }
  807. public int SelectedRecipeIndex
  808. {
  809. get { return m_SelectedRecipeIndex; }
  810. set { SetProperty(ref m_SelectedRecipeIndex, value); }
  811. }
  812. public ComboBoxItem SelectedRecipeType
  813. {
  814. get { return m_SelectedRecipeType; }
  815. set { SetProperty(ref m_SelectedRecipeType, value); }
  816. }
  817. //public float ChillerTempSetpoint
  818. //{
  819. // get { return m_ChillerTempSetpoint; }
  820. // set { SetProperty(ref m_ChillerTempSetpoint, value); }
  821. //}
  822. public float WallTempSetpoint
  823. {
  824. get { return m_WallTempSetpoint; }
  825. set { SetProperty(ref m_WallTempSetpoint, value); }
  826. }
  827. public bool HeIsPressureMode
  828. {
  829. get { return m_HeIsPressureMode; }
  830. set { SetProperty(ref m_HeIsPressureMode, value); }
  831. }
  832. //public bool ChillerIsOn
  833. //{
  834. // get { return m_ChillerIsOn; }
  835. // set { SetProperty(ref m_ChillerIsOn, value); }
  836. //}
  837. public double ChamberPressureFeedBack
  838. {
  839. get { return m_ChamberPressureFeedBack; }
  840. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  841. }
  842. public string WaferID
  843. {
  844. get { return m_WaferID; }
  845. set { SetProperty(ref m_WaferID, value); }
  846. }
  847. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  848. {
  849. get { return m_HighTemperatureHeaterData; }
  850. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  851. }
  852. public ComboBoxItem SelectedPosition
  853. {
  854. get { return m_SelectedPosition; }
  855. set { SetProperty(ref m_SelectedPosition, value); }
  856. }
  857. public int HighTemperatureHeaterTemperatureSetpoint
  858. {
  859. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  860. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  861. }
  862. public float HighTemperatureHeaterRatioSetpoint
  863. {
  864. get { return m_HighTemperatureHeaterRatioSetpoint; }
  865. set { SetProperty(ref m_HighTemperatureHeaterRatioSetpoint, value); }
  866. }
  867. public AITHeaterData PendulumHeaterData
  868. {
  869. get { return m_PendulumHeaterData; }
  870. set { SetProperty(ref m_PendulumHeaterData, value); }
  871. }
  872. #endregion
  873. #region 命令
  874. private DelegateCommand _PMInitCommnad;
  875. public DelegateCommand PMInitCommnad =>
  876. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  877. private DelegateCommand _PMAbortCommnad;
  878. public DelegateCommand PMAbortCommnad =>
  879. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  880. private DelegateCommand _GasCommand;
  881. public DelegateCommand GasCommand =>
  882. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  883. //private DelegateCommand _HeCommand;
  884. //public DelegateCommand HeCommand =>
  885. // _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  886. //private DelegateCommand _RfCommand;
  887. //public DelegateCommand RfCommand =>
  888. // _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  889. private DelegateCommand _PurgeCommand;
  890. public DelegateCommand PurgeCommand =>
  891. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  892. private DelegateCommand _VentCommand;
  893. public DelegateCommand VentCommand =>
  894. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  895. private DelegateCommand _PumpCommand;
  896. public DelegateCommand PumpCommand =>
  897. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  898. private DelegateCommand _OpenPumpCommand;
  899. public DelegateCommand OpenPumpCommand =>
  900. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  901. private DelegateCommand _ClosePumpCommand;
  902. public DelegateCommand ClosePumpCommand =>
  903. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  904. private DelegateCommand _OpenTurboPumpCommand;
  905. public DelegateCommand OpenTurboPumpCommand =>
  906. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  907. private DelegateCommand _CloseTurboPumpCommand;
  908. public DelegateCommand CloseTurboPumpCommand =>
  909. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  910. private DelegateCommand _OpenPendulumValveCommand;
  911. public DelegateCommand OpenPendulumValveCommand =>
  912. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  913. private DelegateCommand _ClosePendulumValveCommand;
  914. public DelegateCommand ClosePendulumValveCommand =>
  915. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  916. //private DelegateCommand<object> _PinUpDownCommand;
  917. //public DelegateCommand<object> PinUpDownCommand =>
  918. // _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  919. private DelegateCommand<object> _LidUpDownCommand;
  920. public DelegateCommand<object> LidUpDownCommand =>
  921. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  922. private DelegateCommand _SetSRfCommand;
  923. public DelegateCommand SetSRfCommand =>
  924. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  925. //private DelegateCommand _SetBRfCommand;
  926. //public DelegateCommand SetBRfCommand =>
  927. // _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  928. private DelegateCommand _OpenButterflyValveViewCommand;
  929. public DelegateCommand OpenButterflyValveViewCommand =>
  930. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  931. //private DelegateCommand _HVCommand;
  932. //public DelegateCommand HVCommand =>
  933. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  934. //private DelegateCommand _HVSetCommand;
  935. //public DelegateCommand HVSetCommand =>
  936. // _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  937. private DelegateCommand _LoadRecipeCommand;
  938. public DelegateCommand LoadRecipeCommand =>
  939. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  940. private DelegateCommand _SwitchTypeCommand;
  941. public DelegateCommand SwitchTypeCommand =>
  942. _SwitchTypeCommand ?? (_SwitchTypeCommand = new DelegateCommand(OnSwitchType));
  943. private DelegateCommand<object> _ControlValveCommand;
  944. public DelegateCommand<object> ControlValveCommand =>
  945. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  946. private DelegateCommand<object> _RunRecipeCommand;
  947. public DelegateCommand<object> RunRecipeCommand =>
  948. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  949. private DelegateCommand _SetChillerTempCommand;
  950. public DelegateCommand SetChillerTempCommand =>
  951. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  952. private DelegateCommand _SetHeaterRatioCommand;
  953. public DelegateCommand SetHeaterRatioCommand =>
  954. _SetHeaterRatioCommand ?? (_SetHeaterRatioCommand = new DelegateCommand(OnSetHeaterRatio));
  955. //private DelegateCommand _OnOffChillerCommand;
  956. //public DelegateCommand OnOffChillerCommand =>
  957. // _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  958. private DelegateCommand<object> _HeaterCommand;
  959. public DelegateCommand<object> HeaterCommand =>
  960. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  961. private DelegateCommand _EndStepCommand;
  962. public DelegateCommand EndStepCommand =>
  963. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  964. private DelegateCommand _GotoPositionCommand;
  965. public DelegateCommand GotoPositionCommand =>
  966. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  967. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  968. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  969. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  970. private DelegateCommand<object> _AbortRecipeCommnad;
  971. public DelegateCommand<object> AbortRecipeCommnad =>
  972. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  973. private DelegateCommand _IncludeCommand;
  974. public DelegateCommand IncludeCommand =>
  975. _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
  976. #endregion
  977. #region 构造函数
  978. public OverKepler2200AViewModel()
  979. {
  980. m_RtDataKeys = new List<string>();
  981. m_IsATM = true;
  982. ModuleName = "PMA";
  983. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  984. timer = new DispatcherTimer();
  985. timer.Interval = TimeSpan.FromMilliseconds(500);
  986. timer.Tick += timer_Tick;
  987. //timer.Start();
  988. //PressureType = (PressureType)Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig("System.PressureUnitType"));
  989. //m_ChamberType=(JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString());
  990. PressureType = PressureType.Pa;
  991. }
  992. #endregion
  993. #region 命令方法
  994. private void OnControlValve(object obj)
  995. {
  996. CommonValveControl commonValveControl = (CommonValveControl)obj;
  997. if (commonValveControl.IsCanEdit == true)
  998. {
  999. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  1000. string operation = commonValveControl.Status ? "关闭" : "打开";
  1001. LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
  1002. }
  1003. }
  1004. private void OnPMInit()
  1005. {
  1006. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  1007. LOG.Info($"{ModuleName},初始化");
  1008. }
  1009. private void OnGas()
  1010. {
  1011. object[] mfc = new object[8];
  1012. mfc[0] = MFC1SetPoint;
  1013. mfc[1] = MFC2SetPoint;
  1014. mfc[2] = MFC3SetPoint;
  1015. mfc[3] = MFC4SetPoint;
  1016. mfc[4] = MFC5SetPoint;
  1017. mfc[5] = MFC6SetPoint;
  1018. mfc[6] = 0d;
  1019. mfc[7] = 0d;
  1020. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1021. string operation = GasIsFlowing ? "关闭" : "打开";
  1022. LOG.Info($"{ModuleName},{operation} GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
  1023. }
  1024. //private void OnRf()
  1025. //{
  1026. // if (PMCurrentState == PMState.RfPowering)
  1027. // {
  1028. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1029. // LOG.Info($"{ModuleName},关闭RF");
  1030. // }
  1031. // else
  1032. // {
  1033. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1034. // LOG.Info($"{ModuleName},开始RF,Power值{SRFFwdPowerSetpoint}");
  1035. // }
  1036. //}
  1037. private void OnPurge()
  1038. {
  1039. if (PMCurrentState == PMState.Purging)
  1040. {
  1041. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1042. LOG.Info($"{ModuleName},关闭Purge");
  1043. }
  1044. else
  1045. {
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1047. LOG.Info($"{ModuleName},开始Purge");
  1048. }
  1049. }
  1050. private void OnVent()
  1051. {
  1052. if (PMCurrentState == PMState.Venting)
  1053. {
  1054. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1055. LOG.Info($"{ModuleName},关闭Vent");
  1056. }
  1057. else
  1058. {
  1059. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1060. LOG.Info($"{ModuleName},开始Vent");
  1061. }
  1062. }
  1063. private void OnPump()
  1064. {
  1065. if (PMCurrentState == PMState.Pumping)
  1066. {
  1067. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1068. return;
  1069. }
  1070. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1071. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1072. // 设置底压
  1073. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1074. if (basePressure <= 0.01 || basePressure >= 1000)
  1075. {
  1076. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1077. return;
  1078. }
  1079. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1080. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1081. {
  1082. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1083. return;
  1084. }
  1085. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1086. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1087. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1088. LOG.Info($"{ModuleName},开始Pump Down");
  1089. }
  1090. private void OnOpenPump()
  1091. {
  1092. if (PMCurrentState == PMState.LaunchingPump)
  1093. {
  1094. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1095. return;
  1096. }
  1097. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1098. LOG.Info($"{ModuleName},打开Pump");
  1099. }
  1100. private void OnClosePump()
  1101. {
  1102. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1103. LOG.Info($"{ModuleName},关闭Pump");
  1104. }
  1105. private void OnOpenTurboPump()
  1106. {
  1107. if (PMCurrentState == PMState.LaunchingTurboPump)
  1108. {
  1109. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1110. return;
  1111. }
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1113. LOG.Info($"{ModuleName},打开分子泵");
  1114. }
  1115. private void OnCloseTurboPump()
  1116. {
  1117. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1118. LOG.Info($"{ModuleName},关闭分子泵");
  1119. }
  1120. private void OnOpenPendulumValve()
  1121. {
  1122. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1123. LOG.Info($"{ModuleName},打开钟摆阀");
  1124. }
  1125. private void OnClosePendulumValve()
  1126. {
  1127. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1128. LOG.Info($"{ModuleName},关闭钟摆阀");
  1129. }
  1130. private void OnLidUpDown(object upDown)
  1131. {
  1132. if (upDown.ToString() == "Up")
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1135. LOG.Info($"{ModuleName},打开Lid");
  1136. }
  1137. else
  1138. {
  1139. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1140. LOG.Info($"{ModuleName},关闭Lid");
  1141. }
  1142. }
  1143. private void OnSetSRf()
  1144. {
  1145. if (SRFData.IsRfOn == true)
  1146. {
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1148. LOG.Info($"{ModuleName},关闭RF");
  1149. }
  1150. else
  1151. {
  1152. if (GasIsFlowing == true)
  1153. {
  1154. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1155. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1156. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1157. LOG.Info($"{ModuleName},开始RF,Power值{SRFFwdPowerSetpoint}");
  1158. }
  1159. }
  1160. }
  1161. private void OnPMAbort()
  1162. {
  1163. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1164. LOG.Info($"{ModuleName},Abort");
  1165. }
  1166. private void OnOpenButterflyValveView()
  1167. {
  1168. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1169. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1170. {
  1171. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1172. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1173. butterflyValveMessageBox.Left = 700;
  1174. butterflyValveMessageBox.Top = 600;
  1175. butterflyValveMessageBox.Show();
  1176. butterflyValveMessageBox.Owner = _mainWindow;
  1177. }
  1178. }
  1179. private void OnLoadRecipe()
  1180. {
  1181. //string recipeName = CurrentModuleRecipes[SelectedRecipeIndex];
  1182. string recipeType = SelectedRecipeType.Content.ToString();
  1183. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType)).ToList();
  1184. }
  1185. private void OnSwitchType()
  1186. {
  1187. SelectedRecipeIndex = -1;
  1188. }
  1189. private void OnRunRecipe(object obj)
  1190. {
  1191. if (SelectedRecipeIndex == -1)
  1192. {
  1193. return;
  1194. }
  1195. string recipeName = CurrentModuleRecipes[SelectedRecipeIndex];
  1196. string recipeType = SelectedRecipeType.Content.ToString();
  1197. ClearData();
  1198. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType, recipeName + ".rcp");
  1199. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1200. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, recipeType);
  1201. LOG.Info($"{ModuleName},Run Recipe {recipeName},");
  1202. }
  1203. private void OnHeater(object obj)
  1204. {
  1205. if (IsAutoMode == true)
  1206. {
  1207. return;
  1208. }
  1209. AITHeaterData heaterData = obj as AITHeaterData;
  1210. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1211. if (heaterView == null || heaterView.IsVisible == false)
  1212. {
  1213. heaterView = new HeaterView(heaterData, ModuleName);
  1214. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1215. heaterView.Owner = _mainWindow;
  1216. heaterView.Show();
  1217. }
  1218. }
  1219. private void OnOnline()
  1220. {
  1221. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
  1222. LOG.Info($"{ModuleName},Switch to Online");
  1223. }
  1224. private void OnOffline()
  1225. {
  1226. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
  1227. LOG.Info($"{ModuleName},Switch to Offline");
  1228. }
  1229. private void OnEndStep()
  1230. {
  1231. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1232. //else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1233. //{
  1234. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1235. //}
  1236. }
  1237. private void OnGotoPosition()
  1238. {
  1239. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1240. LOG.Info($"{ModuleName},HighTemperatureHeater to {SelectedPosition.Content}");
  1241. }
  1242. private void OnSwitchHighTemperatureHeater()
  1243. {
  1244. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIsonFeedBack);
  1245. }
  1246. private void OnSetChillerTemp()
  1247. {
  1248. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1249. }
  1250. private void OnSetHeaterRatio()
  1251. {
  1252. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterRatio", HighTemperatureHeaterRatioSetpoint);
  1253. }
  1254. private DelegateCommand _OnlineCommand;
  1255. public DelegateCommand OnlineCommand =>
  1256. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1257. private DelegateCommand _OfflineCommand;
  1258. public DelegateCommand OfflineCommand =>
  1259. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1260. private async void OnAbortRecipe(object obj)
  1261. {
  1262. if (PMCurrentState != PMState.Processing)
  1263. {
  1264. return;
  1265. }
  1266. switch (obj.ToString())
  1267. {
  1268. case "0":
  1269. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1270. break;
  1271. case "1":
  1272. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1273. //if (ESCHVData.IsOn == true)
  1274. //{
  1275. // await Task.Delay(3000);
  1276. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1277. //}
  1278. break;
  1279. case "2":
  1280. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1281. await Task.Delay(3000);
  1282. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1283. break;
  1284. }
  1285. }
  1286. private void OnInclude()
  1287. {
  1288. if (IsInclude)
  1289. {
  1290. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
  1291. }
  1292. else
  1293. {
  1294. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
  1295. }
  1296. }
  1297. #endregion
  1298. #region 私有方法
  1299. private void ClearData()
  1300. {
  1301. SRFFwdPowerSetpoint = 0;
  1302. SRFMatchC1 = 0;
  1303. SRFMatchC2 = 0;
  1304. MFC1SetPoint = 0;
  1305. MFC2SetPoint = 0;
  1306. MFC3SetPoint = 0;
  1307. MFC4SetPoint = 0;
  1308. MFC5SetPoint = 0;
  1309. MFC6SetPoint = 0;
  1310. MFC7SetPoint = 0;
  1311. MFC8SetPoint = 0;
  1312. }
  1313. private IEnumerable<string> GetFilesNames(string path)
  1314. {
  1315. if (Directory.Exists(path))
  1316. {
  1317. return Directory.GetFiles(path, "*.rcp")?
  1318. .Select(Path.GetFileNameWithoutExtension);
  1319. }
  1320. else
  1321. {
  1322. return new List<string>();
  1323. }
  1324. }
  1325. void timer_Tick(object sender, EventArgs e)
  1326. {
  1327. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1328. if (RtDataValues == null || RtDataValues.Count == 0)
  1329. {
  1330. return;
  1331. }
  1332. //var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1333. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1334. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1335. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1336. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1337. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1338. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1339. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1340. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1341. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1342. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1343. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1344. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1345. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1346. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1347. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1348. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1349. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1350. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1351. //MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1352. //MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1353. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1354. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1355. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1356. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1357. //PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1358. //PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1359. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1360. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1361. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1362. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1363. PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
  1364. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1365. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1366. //LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1367. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"TM.{ModuleName}SlitDoor.IsClosed");
  1368. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1369. //PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1370. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1371. //PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1372. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1373. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1374. IsProcessing = PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean;
  1375. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1376. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1377. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1378. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1379. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1380. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1381. //MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1382. //MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1383. //MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1384. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1385. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1386. //BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1387. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1388. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1389. //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1390. //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1391. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1392. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1393. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1394. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1395. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1396. //ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1397. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1398. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1399. //ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1400. SourceRFMatchInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFMatchInterlock");
  1401. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1402. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1403. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1404. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1405. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1406. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1407. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1408. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1409. //ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1410. //MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1411. //MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1412. //MatchWorkMode = CommonFunction.GetValue<string>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1413. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1414. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1415. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1416. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1417. MatchData = CommonFunction.GetValue<AITMatchData>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.DeviceData");
  1418. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1419. //if (IsProcessing)
  1420. //{
  1421. // if (CurrentRecipeResult!=null && CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1422. // {
  1423. // var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1424. // CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1425. // CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1426. // currentRecipeNumber = CurrentRecipeResult?.RecipeStepNumber;
  1427. // }
  1428. //}
  1429. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 2000)
  1430. {
  1431. ChamberPressureFeedBack = ProcessPressure;
  1432. }
  1433. else
  1434. {
  1435. ChamberPressureFeedBack = ChamberPressure;
  1436. }
  1437. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1438. IsAutoMode = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1439. IsInclude= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
  1440. }
  1441. public void addDataKeys()
  1442. {
  1443. m_RtDataKeys.Clear();
  1444. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1445. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1446. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1447. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1448. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1449. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1450. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1451. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1452. //m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1453. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1454. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1455. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1456. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1457. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1458. //m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1459. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1460. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1461. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1462. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1463. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1464. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1465. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1466. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1467. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1468. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1469. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1470. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1471. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1472. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1473. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1474. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1475. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1476. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1477. //m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1478. //m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1479. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1480. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1481. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1482. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1483. //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1484. //m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1485. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1486. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1487. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1488. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1489. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1490. m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
  1491. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1492. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1493. m_RtDataKeys.Add($"TM.{ModuleName}SlitDoor.IsClosed");
  1494. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1495. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1496. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1497. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.DeviceData");
  1498. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1499. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1500. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1501. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1502. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1503. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1504. //m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1505. //m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1506. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1507. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1508. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1509. m_RtDataKeys.Add($"{ModuleName}.SourceRFMatchInterlock");
  1510. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1511. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1512. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1513. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1514. //m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1515. //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1516. //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1517. //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1518. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1519. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1520. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1521. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1522. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1523. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1524. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1525. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1526. m_RtDataKeys.Add($"{ModuleName}.IsInclude");
  1527. }
  1528. public void EnterExitView(bool isEnter)
  1529. {
  1530. if (isEnter)
  1531. {
  1532. timer_Tick(null, null);
  1533. timer.Start();
  1534. }
  1535. else
  1536. {
  1537. timer.Stop();
  1538. }
  1539. }
  1540. #endregion
  1541. }
  1542. }