VenusDispatcher.cs 116 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. using Venus_RT.Modules.TM.VenusEntity;
  25. using System.Threading.Tasks;
  26. using Venus_RT.Modules.VCE;
  27. namespace Venus_RT.Modules
  28. {
  29. class VCETask : ModuleTask
  30. {
  31. public VCETask(ModuleName mod) : base(mod)
  32. {
  33. }
  34. }
  35. public class VenusPMTask : ModuleTask
  36. {
  37. enum CleanType
  38. {
  39. IdleClean,
  40. PreJobClean,
  41. PostJobClean,
  42. WTWClean,
  43. }
  44. public override int TimeToReady
  45. {
  46. get
  47. {
  48. if (!Scheduler.IsOnline)
  49. return int.MaxValue / 2;
  50. switch (Status)
  51. {
  52. case ModuleStatus.Idle:
  53. case ModuleStatus.Processing:
  54. case ModuleStatus.IdleClean:
  55. case ModuleStatus.PreJobClean:
  56. {
  57. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  58. }
  59. case ModuleStatus.PostJobClean:
  60. case ModuleStatus.WTWClean:
  61. {
  62. if (_pendingCleanTask.Count == 0)
  63. {
  64. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  65. }
  66. }
  67. break;
  68. }
  69. return int.MaxValue / 2;
  70. }
  71. }
  72. public bool HasPendingCleanTask => _pendingCleanTask.Count > 0;
  73. private WaferTask _wafer;
  74. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  75. private string _preJobCleanRecipe;
  76. private string _postJobCleanRecipe;
  77. private string _wtwCleanRecipe;
  78. private Queue<CleanType> _pendingCleanTask = new Queue<CleanType>();
  79. public VenusPMTask(ModuleName pm) : base(pm)
  80. {
  81. }
  82. public override RState Run()
  83. {
  84. if (Scheduler.IsIdle)
  85. {
  86. switch (Status)
  87. {
  88. case ModuleStatus.Idle:
  89. {
  90. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  91. {
  92. if (_pendingCleanTask.Count > 0)
  93. {
  94. var cleanTask = _pendingCleanTask.Dequeue();
  95. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  96. {
  97. Status = ModuleStatus.WaitPostJobClean;
  98. }
  99. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  100. {
  101. Status = ModuleStatus.WaitPreJobClean;
  102. }
  103. }
  104. else if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  105. {
  106. Status = ModuleStatus.StartIdleClean;
  107. }
  108. }
  109. }
  110. break;
  111. case ModuleStatus.WaitProcess:
  112. {
  113. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  114. Status = ModuleStatus.StartProcess;
  115. }
  116. break;
  117. case ModuleStatus.WaitPreJobClean:
  118. {
  119. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  120. {
  121. if (_pmScheduler.RunJobCleanTask(_preJobCleanRecipe))
  122. {
  123. Status = ModuleStatus.StartPreJobClean;
  124. }
  125. else
  126. {
  127. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe{_preJobCleanRecipe} failed");
  128. Status = ModuleStatus.Idle;
  129. _preJobCleanRecipe = string.Empty;
  130. }
  131. }
  132. }
  133. break;
  134. case ModuleStatus.WaitPostJobClean:
  135. {
  136. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  137. {
  138. if (_pmScheduler.RunJobCleanTask(_postJobCleanRecipe))
  139. {
  140. Status = ModuleStatus.StartPostJobClean;
  141. }
  142. else
  143. {
  144. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe{_postJobCleanRecipe} failed");
  145. Status = ModuleStatus.Idle;
  146. _postJobCleanRecipe = string.Empty;
  147. }
  148. }
  149. }
  150. break;
  151. case ModuleStatus.WaitWTWClean:
  152. {
  153. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  154. {
  155. if (_pmScheduler.RunJobCleanTask(_wtwCleanRecipe))
  156. {
  157. Status = ModuleStatus.StartWTWClean;
  158. }
  159. else
  160. {
  161. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW Wafer clean recipe{_wtwCleanRecipe} failed");
  162. Status = ModuleStatus.Idle;
  163. _wtwCleanRecipe = string.Empty;
  164. }
  165. }
  166. }
  167. break;
  168. case ModuleStatus.Processing:
  169. {
  170. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  171. if (Scheduler.IsOnline)
  172. {
  173. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  174. {
  175. _wafer.Return();
  176. Status = ModuleStatus.Idle;
  177. }
  178. }
  179. else // handle offline exception situation
  180. {
  181. Status = ModuleStatus.Idle;
  182. }
  183. }
  184. break;
  185. case ModuleStatus.PreJobClean:
  186. {
  187. _preJobCleanRecipe = string.Empty;
  188. Status = ModuleStatus.Idle;
  189. }
  190. break;
  191. case ModuleStatus.PostJobClean:
  192. {
  193. _postJobCleanRecipe = string.Empty;
  194. if (_pendingCleanTask.Count > 0)
  195. {
  196. var cleanTask = _pendingCleanTask.Dequeue();
  197. if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  198. {
  199. Status = ModuleStatus.WaitPreJobClean;
  200. break;
  201. }
  202. }
  203. Status = ModuleStatus.Idle;
  204. }
  205. break;
  206. case ModuleStatus.WTWClean:
  207. {
  208. if (_pendingCleanTask.Count > 0)
  209. {
  210. var cleanTask = _pendingCleanTask.Dequeue();
  211. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  212. {
  213. Status = ModuleStatus.WaitPostJobClean;
  214. }
  215. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  216. {
  217. Status = ModuleStatus.WaitPreJobClean;
  218. }
  219. }
  220. else
  221. {
  222. Status = ModuleStatus.Idle;
  223. }
  224. _wtwCleanRecipe = string.Empty;
  225. }
  226. break;
  227. case ModuleStatus.IdleClean:
  228. {
  229. Status = ModuleStatus.Idle;
  230. }
  231. break;
  232. case ModuleStatus.StartProcess:
  233. {
  234. if (RouteManager.IsATMMode)
  235. {
  236. Status = ModuleStatus.Processing;
  237. }
  238. }
  239. break;
  240. }
  241. }
  242. else
  243. {
  244. switch (Status)
  245. {
  246. case ModuleStatus.StartProcess:
  247. Status = ModuleStatus.Processing;
  248. break;
  249. case ModuleStatus.StartIdleClean:
  250. Status = ModuleStatus.IdleClean;
  251. break;
  252. case ModuleStatus.StartPreJobClean:
  253. Status = ModuleStatus.PreJobClean;
  254. break;
  255. case ModuleStatus.StartPostJobClean:
  256. Status = ModuleStatus.PostJobClean;
  257. break;
  258. case ModuleStatus.StartWTWClean:
  259. Status = ModuleStatus.WTWClean;
  260. break;
  261. }
  262. }
  263. return RState.Running;
  264. }
  265. public override void WaferArrived(WaferTask wafer, int slot)
  266. {
  267. _wafer = wafer;
  268. Status = ModuleStatus.WaitProcess;
  269. }
  270. public override void WaferLeaved(WaferTask wafer, int slot)
  271. {
  272. if (!string.IsNullOrWhiteSpace(_wafer.wtwCleanRecipe.Trim()) && (_pendingCleanTask.Count == 0 || _pendingCleanTask.First() != CleanType.PostJobClean))
  273. {
  274. Status = ModuleStatus.WaitWTWClean;
  275. _wtwCleanRecipe = _wafer.wtwCleanRecipe;
  276. }
  277. else if (_pendingCleanTask.Count > 0)
  278. {
  279. var cleanTask = _pendingCleanTask.Dequeue();
  280. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  281. {
  282. Status = ModuleStatus.WaitPostJobClean;
  283. }
  284. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  285. {
  286. Status = ModuleStatus.WaitPreJobClean;
  287. }
  288. }
  289. _wafer = null;
  290. }
  291. public void InvokePreJobClean(string preJobClean)
  292. {
  293. _preJobCleanRecipe = preJobClean;
  294. _pendingCleanTask.Enqueue(CleanType.PreJobClean);
  295. //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke preClean {preJobClean}");
  296. }
  297. public bool IsPreJobCleanDone()
  298. {
  299. return !_pendingCleanTask.Contains(CleanType.PreJobClean) && string.IsNullOrWhiteSpace(_preJobCleanRecipe);
  300. }
  301. public void InvokePostJobClean(string postJobClean)
  302. {
  303. _postJobCleanRecipe = postJobClean;
  304. _pendingCleanTask.Enqueue(CleanType.PostJobClean);
  305. //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke postClean {postJobClean}");
  306. }
  307. public bool IsPostJobCleanDone()
  308. {
  309. return !_pendingCleanTask.Contains(CleanType.PostJobClean) && string.IsNullOrWhiteSpace(_postJobCleanRecipe);
  310. }
  311. }
  312. //class VenusPMTask : ModuleTask
  313. //{
  314. // public enum RecipeJobType
  315. // {
  316. // PreClean,
  317. // Process,
  318. // PostClean,
  319. // WtwClean,
  320. // }
  321. //
  322. // public override int TimeToReady
  323. // {
  324. // get
  325. // {
  326. // switch (Status)
  327. // {
  328. // case ModuleStatus.Idle:
  329. // case ModuleStatus.IdleClean:
  330. // case ModuleStatus.PreJobClean:
  331. // case ModuleStatus.PostJobClean:
  332. // case ModuleStatus.WTWClean:
  333. // case ModuleStatus.Processing:
  334. // {
  335. // return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  336. // }
  337. // }
  338. //
  339. // return int.MaxValue / 2;
  340. // }
  341. // }
  342. //
  343. // private WaferTask _wafer;
  344. // private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  345. //
  346. // Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  347. // KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  348. //
  349. // public VenusPMTask(ModuleName mod) : base(mod)
  350. // { }
  351. // public override RState Run()
  352. // {
  353. // if(_runingWaferTask.Value.Count == 0)
  354. // {
  355. // if(_pendingWaferTasks.Count > 0)
  356. // {
  357. // _runingWaferTask = _pendingWaferTasks.Dequeue();
  358. // }
  359. // else
  360. // {
  361. // if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  362. // {
  363. // if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  364. // {
  365. // if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  366. // {
  367. // Status = ModuleStatus.StartIdleClean;
  368. // }
  369. // }
  370. // }
  371. // }
  372. // }
  373. // else
  374. // {
  375. // if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  376. // {
  377. //
  378. // switch(_runingWaferTask.Value.First().Key)
  379. // {
  380. // case RecipeJobType.PreClean:
  381. // {
  382. // if(WaferManager.Instance.CheckNoWafer(Module,0))
  383. // {
  384. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  385. // {
  386. // Status = ModuleStatus.StartPreJobClean;
  387. // }
  388. // else
  389. // {
  390. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  391. // TryDequeueRuningTask(Status);
  392. // Status = ModuleStatus.Idle;
  393. // }
  394. // }
  395. // }
  396. // break;
  397. // case RecipeJobType.Process:
  398. // {
  399. // if (WaferManager.Instance.CheckHasWafer(Module, 0))
  400. // {
  401. // if(_wafer.waferId == _runingWaferTask.Key)
  402. // {
  403. // Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  404. // Status = ModuleStatus.StartProcess;
  405. // }
  406. // else
  407. // {
  408. // LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  409. // }
  410. // }
  411. // }
  412. // break;
  413. // case RecipeJobType.PostClean:
  414. // {
  415. // if (WaferManager.Instance.CheckNoWafer(Module, 0))
  416. // {
  417. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  418. // {
  419. // Status = ModuleStatus.StartPostJobClean;
  420. // }
  421. // else
  422. // {
  423. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  424. // TryDequeueRuningTask(Status);
  425. // Status = ModuleStatus.Idle;
  426. // }
  427. // }
  428. // }
  429. // break;
  430. // case RecipeJobType.WtwClean:
  431. // {
  432. // if (WaferManager.Instance.CheckNoWafer(Module, 0))
  433. // {
  434. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  435. // {
  436. // Status = ModuleStatus.StartWTWClean;
  437. // }
  438. // else
  439. // {
  440. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  441. // TryDequeueRuningTask(Status);
  442. // Status = ModuleStatus.Idle;
  443. // }
  444. // }
  445. // }
  446. // break;
  447. // }
  448. // }
  449. // }
  450. //
  451. // if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  452. // {
  453. // if (Scheduler.IsIdle)
  454. // {
  455. // if (Scheduler.NoWafer(0) && Scheduler.LastPMWaferID != null)
  456. // {
  457. // TryDequeueRuningTask(Status);
  458. // }
  459. //
  460. // switch (Status)
  461. // {
  462. // case ModuleStatus.Processing:
  463. // {
  464. // var wafer = WaferManager.Instance.GetWafer(Module, 0);
  465. // if (Scheduler.IsOnline)
  466. // {
  467. // if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  468. // {
  469. // _wafer.Return();
  470. // // Last Process PM ID
  471. // Scheduler.LastPMWaferID = wafer.InnerId;
  472. // //TryDequeueRuningTask(Status);
  473. // Status = ModuleStatus.Idle;
  474. // }
  475. // }
  476. // else // handle offline exception situation
  477. // {
  478. // TryDequeueRuningTask(Status);
  479. // Status = ModuleStatus.Idle;
  480. // }
  481. // }
  482. // break;
  483. // case ModuleStatus.PreJobClean:
  484. // case ModuleStatus.PostJobClean:
  485. // case ModuleStatus.WTWClean:
  486. // {
  487. // TryDequeueRuningTask(Status);
  488. // Status = ModuleStatus.Idle;
  489. // }
  490. // break;
  491. // case ModuleStatus.IdleClean:
  492. // {
  493. // Status = ModuleStatus.Idle;
  494. // }
  495. // break;
  496. // case ModuleStatus.StartProcess:
  497. // {
  498. // if (RouteManager.IsATMMode)
  499. // {
  500. // Status = ModuleStatus.Processing;
  501. // }
  502. // }
  503. // break;
  504. // }
  505. // }
  506. // else
  507. // {
  508. // switch (Status)
  509. // {
  510. // case ModuleStatus.StartProcess:
  511. // Status = ModuleStatus.Processing;
  512. // break;
  513. // case ModuleStatus.StartIdleClean:
  514. // Status = ModuleStatus.IdleClean;
  515. // break;
  516. // case ModuleStatus.StartPreJobClean:
  517. // Status = ModuleStatus.PreJobClean;
  518. // break;
  519. // case ModuleStatus.StartPostJobClean:
  520. // Status = ModuleStatus.PostJobClean;
  521. // break;
  522. // case ModuleStatus.StartWTWClean:
  523. // Status = ModuleStatus.WTWClean;
  524. // break;
  525. // }
  526. // }
  527. // }
  528. //
  529. // return RState.Running;
  530. // }
  531. //
  532. // void TryDequeueRuningTask( ModuleStatus status)
  533. // {
  534. // bool bMatch = false;
  535. // if (_runingWaferTask.Value.Count > 0)
  536. // {
  537. // switch(status)
  538. // {
  539. // case ModuleStatus.PreJobClean:
  540. // if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  541. // {
  542. // _runingWaferTask.Value.Dequeue();
  543. // bMatch = true;
  544. // }
  545. // break;
  546. // case ModuleStatus.Processing:
  547. // if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  548. // {
  549. // //_runingWaferTask.Value.Dequeue();
  550. // bMatch = true;
  551. // }
  552. // break;
  553. // case ModuleStatus.PostJobClean:
  554. // if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  555. // {
  556. // _runingWaferTask.Value.Dequeue();
  557. // bMatch = true;
  558. // }
  559. // break;
  560. // case ModuleStatus.WTWClean:
  561. // if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  562. // {
  563. // _runingWaferTask.Value.Dequeue();
  564. // bMatch = true;
  565. // }
  566. // break;
  567. // case ModuleStatus.WaitPreJobClean:
  568. // case ModuleStatus.WaitProcess:
  569. // case ModuleStatus.WaitPostJobClean:
  570. // case ModuleStatus.WaitWTWClean:
  571. // case ModuleStatus.Idle:
  572. // _runingWaferTask.Value.Dequeue();
  573. // break;
  574. // }
  575. // }
  576. //
  577. // if(!bMatch)
  578. // {
  579. // string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  580. // LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  581. // }
  582. //
  583. // if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  584. // {
  585. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  586. // }
  587. // }
  588. //
  589. // public override void WaferArrived(WaferTask wafer, int slot)
  590. // {
  591. // _wafer = wafer;
  592. // }
  593. //
  594. // public override void WaferLeaved(WaferTask wafer, int slot)
  595. // {
  596. // _wafer = null;
  597. // }
  598. //
  599. // public void SubscribeWaferTask(WaferTask waferTask)
  600. // {
  601. // var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  602. //
  603. // if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  604. // {
  605. // waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  606. // }
  607. //
  608. // if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  609. // {
  610. // waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  611. // }
  612. //
  613. // if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  614. // {
  615. // LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  616. // }
  617. // else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  618. // {
  619. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  620. // }
  621. // else
  622. // {
  623. // _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  624. // }
  625. // }
  626. //
  627. // public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  628. // {
  629. // var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  630. //
  631. // if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  632. // {
  633. // lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  634. // }
  635. // else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  636. // {
  637. // lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  638. // }
  639. // else
  640. // {
  641. // return;
  642. // }
  643. //
  644. // if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  645. // {
  646. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  647. // }
  648. // else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  649. // {
  650. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  651. // }
  652. // else
  653. // {
  654. // _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  655. // }
  656. // }
  657. //
  658. // public bool ReadyMoveIn(WaferTask wafer)
  659. // {
  660. // return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  661. // }
  662. //
  663. // public bool IsAllJobCompleted()
  664. // {
  665. // return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  666. // }
  667. //
  668. // public bool IsRecipeJobDone(RecipeJobType job)
  669. // {
  670. // return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
  671. // }
  672. //
  673. // public override void ResetTask()
  674. // {
  675. // base.ResetTask();
  676. //
  677. // _wafer = null;
  678. // _pendingWaferTasks.Clear();
  679. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  680. // }
  681. //}
  682. class PreAlignTask : ModuleTask
  683. {
  684. private WaferTask _wafer;
  685. public PreAlignTask(ModuleName aligner) : base(aligner)
  686. {
  687. }
  688. public override RState Run()
  689. {
  690. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  691. if (tmRobot == null || !tmRobot.IsAvailable)
  692. return RState.Running;
  693. switch (Status)
  694. {
  695. case ModuleStatus.WaitAlign:
  696. {
  697. tmRobot.Align(0);
  698. Status = ModuleStatus.Aligning;
  699. }
  700. break;
  701. case ModuleStatus.Aligning:
  702. {
  703. _wafer.IsAligned = true;
  704. Status = ModuleStatus.Idle;
  705. }
  706. break;
  707. }
  708. return RState.Running;
  709. }
  710. public override void WaferArrived(WaferTask wafer, int slot)
  711. {
  712. _wafer = wafer;
  713. Status = ModuleStatus.WaitAlign;
  714. }
  715. public override void WaferLeaved(WaferTask wafer, int slot)
  716. {
  717. _wafer = null;
  718. }
  719. }
  720. class VenusTMRobotTask : ModuleTask
  721. {
  722. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  723. public override RState Run()
  724. {
  725. return base.Run();
  726. }
  727. }
  728. class VenusDispatcher : ICycle
  729. {
  730. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  731. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  732. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  733. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  734. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  735. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  736. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  737. private List<MoveItem> _curTmAction = new List<MoveItem>();
  738. private Dictionary<ModuleName, List<Guid>> _preLotCleanMarks = new Dictionary<ModuleName, List<Guid>>();
  739. private Dictionary<ModuleName, List<Guid>> _postLotCleanMarks = new Dictionary<ModuleName, List<Guid>>();
  740. private bool _isCycleMode;
  741. private int _cycleSetPoint = 0;
  742. private int _cycledCount = 0;
  743. private int _cycledWafer = 0;
  744. private float _throughput = 0.0f;
  745. private bool _IsPumpBeforeSequence = false; //是否需要自动pump
  746. private bool _VceAutoUnLoad = false; //是否需要job完自动unload
  747. private int _tmRobotSingleArmOption = 0;
  748. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  749. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  750. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  751. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  752. private Stopwatch _cycleWatch = new Stopwatch();
  753. private SchedulerFACallback _faCallback;
  754. private SchedulerDBCallback _dbCallback;
  755. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  756. public bool HasJobRunning => _lstControlJobs.Count > 0;
  757. private RState _cycleState = RState.Init;
  758. public RState CycleState => _cycleState;
  759. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  760. public List<string> InUseRecipes = new List<string>();
  761. public VenusDispatcher()
  762. {
  763. _faCallback = new SchedulerFACallback();
  764. _dbCallback = new SchedulerDBCallback();
  765. InitModules();
  766. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  767. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  768. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  769. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  770. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  771. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  772. {
  773. _loadportControlJobDic[lp.ToString()] = null;
  774. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  775. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  776. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  777. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  778. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  779. }
  780. DATA.Subscribe("Scheduler.CurrentRecipeList", () => _lstProcessJobs);
  781. _IsPumpBeforeSequence = SC.GetValue<bool>("System.IsPumpBeforeJob");
  782. _VceAutoUnLoad = SC.GetValue<bool>("System.IsAutoUnload");
  783. }
  784. #region public interface
  785. /// <summary>
  786. /// 获取lp当前的ControlJob
  787. /// </summary>
  788. /// <param name="lp"></param>
  789. /// <returns></returns>
  790. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  791. {
  792. if (ModuleHelper.IsLoadPort(lp))
  793. {
  794. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  795. }
  796. else
  797. {
  798. return null;
  799. }
  800. }
  801. public RState Start(params object[] objs)
  802. {
  803. if (WaferManager.Instance.HasDuplicatedWafer)
  804. {
  805. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  806. return RState.Failed;
  807. }
  808. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  809. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  810. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  811. _cycledWafer = 0;
  812. _cycledCount = 0;
  813. _throughput = 0;
  814. Clear();
  815. _cycleWatch.Stop();
  816. _lpCycleWafer[ModuleName.LP1] = 0;
  817. _lpCycleWafer[ModuleName.LP2] = 0;
  818. _lpCycleCount[ModuleName.LP1] = 0;
  819. _lpCycleCount[ModuleName.LP2] = 0;
  820. return RState.Running;
  821. }
  822. public bool CreateJob(Dictionary<string, object> param, out string reason)
  823. {
  824. reason = "";
  825. //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  826. //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  827. string[] slotSequence = (string[])param["SlotSequence"];
  828. string jobId = (string)param["JobId"];
  829. string module = (string)param["Module"];
  830. if (string.IsNullOrEmpty(jobId))
  831. {
  832. jobId = "CJ_Local_" + module;
  833. }
  834. //bool autoStart = (bool)param["AutoStart"];
  835. string lotId = jobId;
  836. if (param.ContainsKey("LotId"))
  837. lotId = (string)param["LotId"];
  838. string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
  839. string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;
  840. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  841. {
  842. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  843. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  844. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  845. return false;
  846. }
  847. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  848. {
  849. reason = $"{module} should be LoadPort";
  850. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  851. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  852. return false;
  853. }
  854. if (_lstControlJobs.Exists(x => x.Name == jobId))
  855. {
  856. reason = $"{jobId} already created";
  857. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  858. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  859. return false;
  860. }
  861. ControlJobInfo cj = new ControlJobInfo();
  862. cj.Name = jobId;
  863. cj.Module = module;
  864. cj.LotName = lotId;
  865. cj.LotInnerId = Guid.NewGuid();
  866. cj.LotWafers = new List<WaferInfo>();
  867. cj.SetState(EnumControlJobState.WaitingForStart);
  868. cj.JetState = EnumJetCtrlJobState.Quequed;
  869. cj.SequenceNameList = slotSequence;
  870. cj.CycleNumber = _cycleSetPoint; // only for temperary debug
  871. cj.PreJobClean = preCleanRecipe;
  872. cj.PostJobClean = postCleanRecipe;
  873. _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
  874. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  875. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  876. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  877. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  878. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  879. {
  880. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  881. continue;
  882. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  883. indexSequence[groupName] = slotSequence[i];
  884. if (!seqSlot.ContainsKey(groupName))
  885. {
  886. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  887. }
  888. if (!seqSlotWafers.ContainsKey(groupName))
  889. {
  890. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  891. }
  892. seqSlot[groupName][i] = true;
  893. if (!WaferManager.Instance.CheckHasWafer(module, i))
  894. {
  895. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  896. return false;
  897. }
  898. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  899. {
  900. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  901. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  902. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  903. return false;
  904. }
  905. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  906. {
  907. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  908. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  909. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  910. return false;
  911. }
  912. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  913. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  914. cj.LotWafers.Add(waferInfo);
  915. waferInfo.SequenceName = slotSequence[i];
  916. waferInfo.LotId = lotId;
  917. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  918. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  919. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  920. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  921. }
  922. if (seqSlotWafers.Count == 0)
  923. {
  924. reason = $"job has not assign wafer";
  925. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  926. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  927. return false;
  928. }
  929. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  930. string[] seqs = seqSlot.Keys.ToArray();
  931. for (int i = 0; i < seqs.Length; i++)
  932. {
  933. ProcessJobInfo pj = new ProcessJobInfo();
  934. pj.Name = jobId + "_" + (i + 1);
  935. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  936. if (pj.Sequence == null)
  937. {
  938. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  939. return false;
  940. }
  941. pj.ControlJobName = cj.Name;
  942. pj.LotName = lotId;
  943. pj.SlotWafers = seqSlotWafers[seqs[i]];
  944. pj.SetState(EnumProcessJobState.Queued);
  945. if (!CheckSequencePmReady(pj.Sequence, out reason))
  946. {
  947. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  948. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  949. return false;
  950. }
  951. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  952. {
  953. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  954. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  955. return false;
  956. }
  957. pjs.Add(pj);
  958. }
  959. _dbCallback.LotUpdate(cj);
  960. foreach (var pj in pjs)
  961. {
  962. cj.ProcessJobNameList.Add(pj.Name);
  963. _lstProcessJobs.Add(pj);
  964. }
  965. _lstControlJobs.Add(cj);
  966. //AssociatedPMWithLP(cj);
  967. _loadportControlJobDic[cj.Module] = cj;
  968. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  969. return true;
  970. }
  971. public bool CheckAllJobDone()
  972. {
  973. foreach (var cj in _lstControlJobs)
  974. {
  975. if (cj.State != EnumControlJobState.Completed)
  976. return false;
  977. }
  978. InUseRecipes.Clear();
  979. return true;
  980. }
  981. public bool CheckJobJustDone(out string sJobName)
  982. {
  983. foreach (var cj in _lstControlJobs)
  984. {
  985. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  986. {
  987. //LP;WaferSize;Lot;Number;Start;End;
  988. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  989. cj.BeenPosted = true;
  990. return true;
  991. }
  992. }
  993. sJobName = "NULL";
  994. return false;
  995. }
  996. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  997. {
  998. foreach (var pj in _lstProcessJobs)
  999. {
  1000. if (pj.ControlJobName == cj.Name)
  1001. return pj;
  1002. }
  1003. return null;
  1004. }
  1005. public bool AbortJob(string jobName, out string reason)
  1006. {
  1007. reason = "";
  1008. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1009. if (cj == null)
  1010. {
  1011. reason = $"abort job rejected, not found job with id {jobName}";
  1012. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1013. return false;
  1014. }
  1015. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  1016. foreach (var pj in _lstProcessJobs)
  1017. {
  1018. if (pj.ControlJobName == cj.Name)
  1019. {
  1020. pj.SetState(EnumProcessJobState.Aborting);
  1021. pjAbortList.Add(pj);
  1022. int unprocessed = 0;
  1023. int aborted = 0;
  1024. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  1025. foreach (var waferInfo in wafers)
  1026. {
  1027. waferInfo.ProcessJob = null;
  1028. waferInfo.NextSequenceStep = 0;
  1029. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  1030. unprocessed++;
  1031. }
  1032. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  1033. }
  1034. }
  1035. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  1036. _dbCallback.LotFinished(cj);
  1037. foreach (var pj in pjAbortList)
  1038. {
  1039. _lstProcessJobs.Remove(pj);
  1040. }
  1041. _lstControlJobs.Remove(cj);
  1042. if (_loadportControlJobDic.ContainsKey(cj.Module))
  1043. {
  1044. _loadportControlJobDic[cj.Module] = null;
  1045. }
  1046. return true;
  1047. }
  1048. public bool StopJob(string jobName, out string reason)
  1049. {
  1050. reason = "";
  1051. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1052. if (cj == null)
  1053. {
  1054. reason = $"stop job rejected, not found job with id {jobName}";
  1055. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1056. return false;
  1057. }
  1058. foreach (var pj in _lstProcessJobs)
  1059. {
  1060. if (pj.ControlJobName == cj.Name)
  1061. {
  1062. pj.SetState(EnumProcessJobState.Stopping);
  1063. }
  1064. }
  1065. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  1066. _dbCallback.LotFinished(cj);
  1067. if (_loadportControlJobDic.ContainsKey(cj.Module))
  1068. {
  1069. _loadportControlJobDic[cj.Module] = null;
  1070. }
  1071. return true;
  1072. }
  1073. public bool ResumeJob(string jobName, out string reason)
  1074. {
  1075. reason = "";
  1076. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1077. if (cj == null)
  1078. {
  1079. reason = $"resume job rejected, not found job with id {jobName}";
  1080. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  1081. return false;
  1082. }
  1083. if (cj.State == EnumControlJobState.Paused)
  1084. {
  1085. cj.SetState(EnumControlJobState.Executing);
  1086. }
  1087. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  1088. _cycleState = RState.Running;
  1089. return true;
  1090. }
  1091. public bool PauseJob(string jobName, out string reason)
  1092. {
  1093. reason = "";
  1094. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1095. if (cj == null)
  1096. {
  1097. reason = $"pause job rejected, not found job with id {jobName}";
  1098. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  1099. return false;
  1100. }
  1101. if (cj.State == EnumControlJobState.Executing)
  1102. {
  1103. cj.SetState(EnumControlJobState.Paused);
  1104. }
  1105. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  1106. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  1107. _cycleState = RState.Paused;
  1108. return true;
  1109. }
  1110. public bool StartJob(string jobName, out string reason)
  1111. {
  1112. reason = "";
  1113. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1114. if (cj == null)
  1115. {
  1116. reason = $"start job rejected, not found job with id {jobName}";
  1117. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1118. return false;
  1119. }
  1120. if (cj.State == EnumControlJobState.WaitingForStart)
  1121. {
  1122. cj.SetState(EnumControlJobState.Queued);
  1123. //PreJobClean(cj);
  1124. cj.StartTime = DateTime.Now;
  1125. _dbCallback.LotCreated(cj);
  1126. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  1127. //if (!_blockingWatcher.IsRunning)
  1128. // _blockingWatcher.Restart();
  1129. //ResetTraceFlag();
  1130. }
  1131. if (!_cycleWatch.IsRunning)
  1132. {
  1133. _cycleWatch.Restart();
  1134. }
  1135. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  1136. {
  1137. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  1138. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  1139. }
  1140. _cycleState = RState.Running;
  1141. if (_IsPumpBeforeSequence)
  1142. {
  1143. Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(ModuleHelper.Converter(cj.Module))).PostMsg(VceMSG.Pump);
  1144. }
  1145. return true;
  1146. }
  1147. public RState Monitor()
  1148. {
  1149. prelude();
  1150. RunWaferTask();
  1151. RunModuleTasks();
  1152. RoutingWafers();
  1153. epilogue();
  1154. return _cycleState;
  1155. }
  1156. public void Abort()
  1157. {
  1158. }
  1159. public void Clear()
  1160. {
  1161. foreach (var module in _dictModuleTask)
  1162. {
  1163. module.Value.Status = ModuleStatus.Idle;
  1164. module.Value.Scheduler.ResetTask();
  1165. module.Value.ResetTask();
  1166. }
  1167. List<string> keys = _loadportControlJobDic.Keys.ToList();
  1168. foreach (var key in keys)
  1169. {
  1170. _loadportControlJobDic[key] = null;
  1171. }
  1172. foreach (var preLot in _preLotCleanMarks)
  1173. {
  1174. preLot.Value.Clear();
  1175. }
  1176. foreach (var postLot in _postLotCleanMarks)
  1177. {
  1178. postLot.Value.Clear();
  1179. }
  1180. _lstWaferTasks.Clear();
  1181. _tmSchdActions.Clear();
  1182. _curTmAction.Clear();
  1183. _lstControlJobs.Clear();
  1184. _lstProcessJobs.Clear();
  1185. InUseRecipes.Clear();
  1186. _lpCycleWafer[ModuleName.LP1] = 0;
  1187. _lpCycleWafer[ModuleName.LP2] = 0;
  1188. _lpCycleCount[ModuleName.LP1] = 0;
  1189. _lpCycleCount[ModuleName.LP2] = 0;
  1190. _lpThroughput[ModuleName.LP1] = 0;
  1191. _lpThroughput[ModuleName.LP2] = 0;
  1192. _cycleState = RState.End;
  1193. }
  1194. #endregion
  1195. #region manual return wafer
  1196. // manual return one wafer while system is auto running
  1197. public bool ManualReturnWafer(object[] objs)
  1198. {
  1199. ModuleName SourceModule = (ModuleName)objs[0];
  1200. int SourceSlot = (int)objs[1];
  1201. if (!_dictModuleTask.Keys.Contains(SourceModule))
  1202. {
  1203. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  1204. return false;
  1205. }
  1206. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  1207. {
  1208. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  1209. return false;
  1210. }
  1211. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  1212. {
  1213. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  1214. return false;
  1215. }
  1216. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  1217. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  1218. _qeReturnWafers.Enqueue(wafer);
  1219. return true;
  1220. }
  1221. public RState CheckManualReturnWafer()
  1222. {
  1223. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  1224. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  1225. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  1226. {
  1227. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  1228. return RState.Failed;
  1229. }
  1230. foreach (var mod in _dictModuleTask)
  1231. {
  1232. if (ModuleHelper.IsLoadPort(mod.Key))
  1233. continue;
  1234. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  1235. {
  1236. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  1237. return RState.Failed;
  1238. }
  1239. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  1240. for (int slot = 0; slot < nSlotNumber; slot++)
  1241. {
  1242. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  1243. if (wafer.IsEmpty)
  1244. continue;
  1245. var destLP = (ModuleName)wafer.OriginStation;
  1246. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  1247. {
  1248. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  1249. return RState.Failed;
  1250. }
  1251. if (!ModuleHelper.IsLoadPort(destLP))
  1252. {
  1253. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  1254. return RState.Failed;
  1255. }
  1256. }
  1257. }
  1258. Clear();
  1259. return RState.Running;
  1260. }
  1261. public RState ReturnAllWafers()
  1262. {
  1263. int systemWaferCount = 0;
  1264. foreach (var mod in _dictModuleTask)
  1265. {
  1266. if (ModuleHelper.IsLoadPort(mod.Key))
  1267. continue;
  1268. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  1269. for (int slot = 0; slot < nSlotNumber; slot++)
  1270. {
  1271. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  1272. if (!wafer.IsEmpty)
  1273. systemWaferCount++;
  1274. }
  1275. }
  1276. if (systemWaferCount == 0)
  1277. return RState.End;
  1278. ReturnInternalWafers();
  1279. return RState.Running;
  1280. }
  1281. #endregion
  1282. #region internal implementation
  1283. private void InitModules()
  1284. {
  1285. foreach (var module in ModuleHelper.InstalledModules)
  1286. {
  1287. if (ModuleHelper.IsInstalled(module))
  1288. {
  1289. if (ModuleHelper.IsPm(module))
  1290. {
  1291. _dictModuleTask[module] = new VenusPMTask(module);
  1292. _preLotCleanMarks[module] = new List<Guid>();
  1293. _postLotCleanMarks[module] = new List<Guid>();
  1294. }
  1295. else if (ModuleHelper.IsTMRobot(module))
  1296. {
  1297. _dictModuleTask[module] = new VenusTMRobotTask(module);
  1298. }
  1299. else if (ModuleHelper.IsAligner(module))
  1300. {
  1301. _dictModuleTask[module] = new PreAlignTask(module);
  1302. }
  1303. else if (ModuleHelper.IsLoadPort(module))
  1304. {
  1305. _dictModuleTask[module] = new LoadPortTask(module);
  1306. }
  1307. }
  1308. }
  1309. }
  1310. private void prelude()
  1311. {
  1312. bool available = true;
  1313. foreach (var mod in _dictModuleTask)
  1314. {
  1315. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  1316. }
  1317. }
  1318. private void epilogue()
  1319. {
  1320. UpdateProcessJobStatus();
  1321. UpdateControlJobStatus();
  1322. RunLotCleanTasks();
  1323. CreateNewWaferTask();
  1324. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  1325. }
  1326. private void RunWaferTask()
  1327. {
  1328. foreach (var task in _lstWaferTasks)
  1329. {
  1330. task.Run();
  1331. }
  1332. }
  1333. private void RunModuleTasks()
  1334. {
  1335. foreach (var task in _dictModuleTask)
  1336. {
  1337. task.Value.Run();
  1338. }
  1339. }
  1340. private void RoutingWafers()
  1341. {
  1342. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1343. {
  1344. RunSchdTMActions();
  1345. return;
  1346. }
  1347. if (_tmRobotStatus != RState.End)
  1348. return;
  1349. if (_tmRobotSingleArmOption != 0)
  1350. {
  1351. RoutingWaferWithSingleArm();
  1352. return;
  1353. }
  1354. //wait for pick
  1355. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1356. //ready for back
  1357. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1358. // pm ready in 20s or pm is empty
  1359. var emptyAndReadyIn40sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 40).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1360. //robot has wafer
  1361. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1362. // aligner wafer
  1363. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1364. //robot is empty
  1365. if(robotWafers.Count == 0)
  1366. {
  1367. //has need return wafer
  1368. if(readyReturnWafers.Count > 0)
  1369. {
  1370. //==1 or ready destination is no the same
  1371. if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
  1372. {
  1373. // return one wafer
  1374. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1375. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1376. }
  1377. else
  1378. {
  1379. // return two wafer
  1380. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1381. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1382. var doublePlaceActions = new List<MoveItem>
  1383. {
  1384. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1385. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1386. };
  1387. _tmSchdActions.Enqueue(doublePlaceActions);
  1388. }
  1389. }
  1390. // aligner has wafer need back
  1391. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1392. {
  1393. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1394. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1395. if (emptyAndReadyIn40sPMs.Contains(alignerWafer.destMod))
  1396. {
  1397. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1398. if(alignerWafer.destMod == pmTask.Module)
  1399. {
  1400. // move aligner wafer to PM
  1401. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1402. }
  1403. }
  1404. }
  1405. else
  1406. {
  1407. if (emptyAndReadyIn40sPMs.Count >= 2 && waitInWafers.Count >= 2)
  1408. {
  1409. var doublePickActions = new List<MoveItem>()
  1410. {
  1411. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1412. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1413. };
  1414. _tmSchdActions.Enqueue(doublePickActions);
  1415. if (aligner.Count > 0)
  1416. {
  1417. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1418. }
  1419. }
  1420. else if (emptyAndReadyIn40sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1421. {
  1422. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1423. if (waitInWafers.Count == 2)
  1424. {
  1425. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1426. }
  1427. else if (aligner.Count > 0)
  1428. {
  1429. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1430. }
  1431. }
  1432. else if (waitInWafers.Count >= 1)
  1433. {
  1434. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1435. }
  1436. }
  1437. }
  1438. else if(robotWafers.Count == 1)
  1439. {
  1440. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1441. if (readyReturnWafers.Count >= 1)
  1442. {
  1443. // return one wafer
  1444. //_tmSchdActions.Enqueue(new List<MoveItem> {
  1445. // new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand),
  1446. // new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand)
  1447. //});
  1448. if (robotWafers[0].destMod == readyReturnWafers.First().currentMod && ModuleHelper.IsPm(robotWafers[0].destMod) && string.IsNullOrEmpty(readyReturnWafers.First().wtwCleanRecipe))
  1449. {
  1450. _tmSchdActions.Enqueue(new List<MoveItem> {
  1451. new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand),
  1452. new MoveItem(ModuleName.TMRobot, freeHand == 0 ? 1:0, readyReturnWafers.First().currentMod, 0, freeHand== Hand.Blade1 ? Hand.Blade2: Hand.Blade1)
  1453. });
  1454. }
  1455. else
  1456. {
  1457. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand)});
  1458. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1459. }
  1460. }
  1461. else
  1462. {
  1463. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1464. {
  1465. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1466. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1467. if(!robotWafers.First().IsAligned)
  1468. {
  1469. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1470. }
  1471. if (emptyAndReadyIn40sPMs.Contains(alignerWafer.destMod))
  1472. {
  1473. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1474. if (alignerWafer.destMod == pmTask.Module)
  1475. {
  1476. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1477. }
  1478. }
  1479. }
  1480. else
  1481. {
  1482. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1483. {
  1484. if (!robotWafers.First().IsAligned)
  1485. {
  1486. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1487. }
  1488. else if (emptyAndReadyIn40sPMs.Contains(robotWafers.First().destMod))
  1489. {
  1490. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1491. if (robotWafers.First().destMod == pmTask.Module)
  1492. {
  1493. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1494. }
  1495. }
  1496. }
  1497. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1498. {
  1499. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1500. }
  1501. }
  1502. }
  1503. }
  1504. else // had better not go here
  1505. {
  1506. foreach(var wafer in robotWafers)
  1507. {
  1508. if (ModuleHelper.IsPm(wafer.destMod))
  1509. {
  1510. if (!wafer.IsAligned)
  1511. {
  1512. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod))&& _tmSchdActions.Count == 0)
  1513. {
  1514. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1515. }
  1516. }
  1517. else if (emptyAndReadyIn40sPMs.Contains(wafer.destMod))
  1518. {
  1519. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1520. if (wafer.destMod == pmTask.Module && _tmSchdActions.Count == 0)
  1521. {
  1522. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1523. }
  1524. }
  1525. }
  1526. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1527. {
  1528. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1529. }
  1530. }
  1531. }
  1532. }
  1533. private void RoutingWaferWithSingleArm()
  1534. {
  1535. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1536. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1537. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1538. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1539. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1540. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1541. if (robotWafers.Count == 0)
  1542. {
  1543. if (readyReturnWafers.Count > 0)
  1544. {
  1545. // return one wafer
  1546. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1547. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1548. }
  1549. else
  1550. {
  1551. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1552. {
  1553. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1554. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1555. {
  1556. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1557. // move aligner wafer to PM
  1558. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1559. if (alignerWafer.destMod == pmTask.Module)
  1560. {
  1561. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1562. }
  1563. }
  1564. }
  1565. else
  1566. {
  1567. foreach(var wafer in waitInWafers)
  1568. {
  1569. if (_tmSchdActions.Count > 0)
  1570. break;
  1571. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1572. {
  1573. // move one wafer from LP to aligner
  1574. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1575. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1576. }
  1577. }
  1578. }
  1579. }
  1580. }
  1581. else
  1582. {
  1583. var wafer = robotWafers[0];
  1584. if (ModuleHelper.IsPm(wafer.destMod))
  1585. {
  1586. if (!wafer.IsAligned)
  1587. {
  1588. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1589. {
  1590. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1591. }
  1592. }
  1593. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1594. {
  1595. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1596. if (wafer.destMod == pmTask.Module)
  1597. {
  1598. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1599. }
  1600. }
  1601. }
  1602. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1603. {
  1604. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1605. }
  1606. }
  1607. }
  1608. private void RunSchdTMActions()
  1609. {
  1610. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1611. {
  1612. if (_tmSchdActions.Count > 0)
  1613. {
  1614. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1615. {
  1616. bool pmswap = false;
  1617. //if (_tmSchdActions.Count == 1
  1618. // && _tmSchdActions.First().Count == 2
  1619. // && _tmSchdActions.First()[0].TransferType == EnumMoveType.Pick
  1620. // && _tmSchdActions.First()[1].TransferType == EnumMoveType.Place
  1621. // && _tmSchdActions.First()[0].SourceModule == _tmSchdActions.First()[1].DestinationModule)
  1622. //{
  1623. // pmswap = true;
  1624. //}
  1625. var nextActions = _tmSchdActions.First();
  1626. if (!pmswap && nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1627. return;
  1628. if (!pmswap && ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1629. return;
  1630. //if (_tmSchdActions.Count == 2 && _tmSchdActions[0].)
  1631. //{
  1632. //
  1633. //}
  1634. _curTmAction = _tmSchdActions.Dequeue();
  1635. foreach (var action in _curTmAction)
  1636. {
  1637. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1638. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1639. }
  1640. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1641. }
  1642. }
  1643. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1644. {
  1645. _curTmAction.Clear();
  1646. }
  1647. }
  1648. }
  1649. private bool isReturnActionsDone(List<MoveItem> items)
  1650. {
  1651. foreach (var item in items)
  1652. {
  1653. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1654. return false;
  1655. }
  1656. return true;
  1657. }
  1658. private bool IsMovingActionsDone(List<MoveItem> actions)
  1659. {
  1660. bool CheckWaferExistence(ModuleName mod, int slot)
  1661. {
  1662. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1663. }
  1664. if (actions.Count == 1)
  1665. {
  1666. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1667. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1668. return false;
  1669. }
  1670. else
  1671. {
  1672. // initialize all the wafer existance before move
  1673. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1674. foreach (var ac in actions)
  1675. {
  1676. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1677. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1678. if (!slotWafers.ContainsKey(scrSlot))
  1679. {
  1680. slotWafers[scrSlot] = true;
  1681. }
  1682. if (!slotWafers.ContainsKey(destSlot))
  1683. {
  1684. slotWafers[destSlot] = false;
  1685. }
  1686. }
  1687. // simulate moved result
  1688. foreach (var ac in actions)
  1689. {
  1690. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1691. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1692. if (!slotWafers[scrSlot])
  1693. {
  1694. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1695. }
  1696. else
  1697. {
  1698. slotWafers[scrSlot] = false;
  1699. }
  1700. if (slotWafers[destSlot])
  1701. {
  1702. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1703. }
  1704. else
  1705. {
  1706. slotWafers[destSlot] = true;
  1707. }
  1708. }
  1709. foreach (var slot in slotWafers)
  1710. {
  1711. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1712. return false;
  1713. }
  1714. }
  1715. return true;
  1716. }
  1717. private void WaferArrived(WaferTask wafer, MoveItem item)
  1718. {
  1719. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1720. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1721. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1722. {
  1723. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1724. if (currentControlJob != null)
  1725. {
  1726. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1727. }
  1728. }
  1729. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1730. }
  1731. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1732. {
  1733. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1734. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1735. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1736. {
  1737. //(_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1738. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1739. if (currentControlJob != null)
  1740. {
  1741. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1742. }
  1743. }
  1744. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1745. }
  1746. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1747. {
  1748. bool allWaferReturn = true;
  1749. foreach (var slot in pj.SlotWafers)
  1750. {
  1751. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1752. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1753. {
  1754. allWaferReturn = false;
  1755. break;
  1756. }
  1757. }
  1758. return allWaferReturn;
  1759. }
  1760. private void ReturnInternalWafers()
  1761. {
  1762. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1763. {
  1764. RunSchdTMReturnActions();
  1765. return;
  1766. }
  1767. if (_tmRobotStatus != RState.End)
  1768. return;
  1769. for (int i = 0; i < 2; i++)
  1770. {
  1771. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1772. {
  1773. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1774. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1775. return;
  1776. }
  1777. }
  1778. foreach(var mod in _dictModuleTask)
  1779. {
  1780. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1781. continue;
  1782. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1783. {
  1784. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1785. var freeHands = GetTMFreeHand();
  1786. if(freeHands.Count > 0)
  1787. {
  1788. var hand = freeHands[0];
  1789. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1790. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1791. return;
  1792. }
  1793. }
  1794. }
  1795. }
  1796. private List<Hand> GetTMFreeHand()
  1797. {
  1798. var lstHands = new List<Hand>();
  1799. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1800. lstHands.Add(Hand.Blade1);
  1801. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1802. lstHands.Add(Hand.Blade2);
  1803. return lstHands;
  1804. }
  1805. private void UpdateProcessJobStatus()
  1806. {
  1807. if (_tmRobotStatus == RState.Running)
  1808. return;
  1809. foreach (var pj in _lstProcessJobs)
  1810. {
  1811. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1812. {
  1813. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1814. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1815. }
  1816. }
  1817. }
  1818. private void UpdateControlJobStatus()
  1819. {
  1820. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1821. return;
  1822. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1823. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1824. if (runningJobs.Count == 0)
  1825. {
  1826. if (queueJobs.Count() > 0)
  1827. {
  1828. // start the first waiting job
  1829. RunControlJob(queueJobs.First());
  1830. }
  1831. }
  1832. else
  1833. {
  1834. foreach (var runningjob in runningJobs)
  1835. {
  1836. // update the running job
  1837. RunControlJob(runningjob);
  1838. }
  1839. foreach (var queueJob in queueJobs)
  1840. {
  1841. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1842. {
  1843. // parallelly start the not intersect job
  1844. RunControlJob(queueJob);
  1845. }
  1846. }
  1847. }
  1848. // update system cycle status
  1849. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1850. _cycleState = RState.End;
  1851. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1852. foreach (var cj in _lstControlJobs)
  1853. {
  1854. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1855. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1856. {
  1857. cjRemoveList.Add(cj);
  1858. }
  1859. }
  1860. foreach (var cj in cjRemoveList)
  1861. {
  1862. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1863. foreach (var pj in _lstProcessJobs)
  1864. {
  1865. if (pj.ControlJobName == cj.Name)
  1866. pjRemoveList.Add(pj);
  1867. }
  1868. foreach (var pj in pjRemoveList)
  1869. {
  1870. _lstProcessJobs.Remove(pj);
  1871. }
  1872. _lstControlJobs.Remove(cj);
  1873. }
  1874. }
  1875. private void RunLotCleanTasks()
  1876. {
  1877. foreach (var pm in _dictModuleTask)
  1878. {
  1879. if (!ModuleHelper.IsPm(pm.Key))
  1880. continue;
  1881. var pmTask = pm.Value as VenusPMTask;
  1882. if (pmTask.HasWafer)
  1883. {
  1884. var pmWafer = _lstWaferTasks.Find(wt => wt.currentMod == pm.Key);
  1885. if (pmWafer != null && IsProcessJobEnding(pmWafer.lotId, pm.Key) && !_postLotCleanMarks[pm.Key].Contains(pmWafer.lotId))
  1886. {
  1887. var pj = _lstProcessJobs.Find(process => process.InnerId == pmWafer.lotId);
  1888. if (pj != null)
  1889. {
  1890. //2024-10-31 15:36:19 修改postjob来源
  1891. //var postClean = pj.Sequence.GetPostCleanRecipe(pm.Key);
  1892. var postClean = FindControlJobByName(pj.ControlJobName)?.PostJobClean;
  1893. if (!string.IsNullOrWhiteSpace(postClean))
  1894. {
  1895. pmTask.InvokePostJobClean(postClean);
  1896. _postLotCleanMarks[pm.Key].Add(pmWafer.lotId);
  1897. }
  1898. }
  1899. }
  1900. }
  1901. // pre clean
  1902. var waitInWafer = GetFirstWaitInWafer(pm.Key);
  1903. if (waitInWafer != null && !_preLotCleanMarks[pm.Key].Contains(waitInWafer.lotId))
  1904. {
  1905. var pj = _lstProcessJobs.Find(process => process.InnerId == waitInWafer.lotId);
  1906. if (pj != null)
  1907. {
  1908. //2024-10-31 15:36:37 修改prejob来源
  1909. //var preClean = pj.Sequence.GetPreCleanRecipe(pm.Key);
  1910. var preClean = FindControlJobByName(pj.ControlJobName)?.PreJobClean;
  1911. if (!string.IsNullOrWhiteSpace(preClean))
  1912. {
  1913. pmTask.InvokePreJobClean(preClean);
  1914. _preLotCleanMarks[pm.Key].Add(waitInWafer.lotId);
  1915. }
  1916. }
  1917. }
  1918. }
  1919. }
  1920. ControlJobInfo FindControlJobByName(string CJName)
  1921. {
  1922. return _lstControlJobs.Find(x=>x.Name == CJName);
  1923. }
  1924. bool IsProcessJobEnding(Guid pjId, ModuleName pm)
  1925. {
  1926. if (!_lstWaferTasks.Exists(wt => wt.lotId == pjId && wt.destMod == pm && !ModuleHelper.IsPm(wt.currentMod)))
  1927. {
  1928. var processJob = _lstProcessJobs.Find(pj => pj.InnerId == pjId);
  1929. if (processJob == null)
  1930. return false;
  1931. foreach (var slot in processJob.SlotWafers)
  1932. {
  1933. if (WaferManager.Instance.CheckHasWafer(slot.Item1, slot.Item2))
  1934. {
  1935. if (WaferManager.Instance.GetWafer(slot.Item1, slot.Item2).NextSequenceStep == 0)
  1936. return false;
  1937. }
  1938. }
  1939. return true;
  1940. }
  1941. return false;
  1942. }
  1943. WaferTask GetFirstWaitInWafer(ModuleName pm)
  1944. {
  1945. int distance(WaferTask wafer)
  1946. {
  1947. if (ModuleHelper.IsTMRobot(wafer.currentMod))
  1948. return 0;
  1949. else if (ModuleHelper.IsLoadLock(wafer.currentMod))
  1950. {
  1951. return (_dictModuleTask[wafer.currentMod] as LoadlockTask).Distance;
  1952. }
  1953. else if (ModuleHelper.IsEFEMRobot(wafer.currentMod))
  1954. {
  1955. if (wafer.IsAligned)
  1956. return 15;
  1957. else
  1958. return 19;
  1959. }
  1960. return 17;
  1961. }
  1962. var waitInWafers = _lstWaferTasks.Where(wt => (wt.destMod == pm) && !ModuleHelper.IsPm(wt.currentMod) && !ModuleHelper.IsLoadPort(wt.currentMod)).OrderBy(wt => distance(wt));
  1963. if (waitInWafers.Count() > 0)
  1964. return waitInWafers.First();
  1965. return null;
  1966. }
  1967. private bool RunControlJob(ControlJobInfo cj)
  1968. {
  1969. switch (cj.JetState)
  1970. {
  1971. //case EnumJetCtrlJobState.Quequed:
  1972. // {
  1973. // if (IsCtrlJobNeedPreClean(cj))
  1974. // {
  1975. // cj.JetState = EnumJetCtrlJobState.PreJobClean;
  1976. // var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1977. // foreach (var pm in PMs)
  1978. // {
  1979. // var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1980. // if (pmTask != null && pmTask.Scheduler.IsOnline)
  1981. // {
  1982. // pmTask.InvokePreJobClean(cj.PreJobClean);
  1983. // //pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  1984. // }
  1985. // }
  1986. // }
  1987. // else
  1988. // {
  1989. // ActiveControlJob(cj);
  1990. // }
  1991. // cj.SetState(EnumControlJobState.Executing);
  1992. // }
  1993. // break;
  1994. //case EnumJetCtrlJobState.PreJobClean:
  1995. // {
  1996. // if (IsPreJobCleanDone(cj))
  1997. // {
  1998. // ActiveControlJob(cj);
  1999. // }
  2000. // }
  2001. // break;
  2002. //case EnumJetCtrlJobState.Processing:
  2003. // {
  2004. // if (IsCtrlJobNeedPostClean(cj))
  2005. // {
  2006. // if (IsAllJobWaferProcessedOrProcessing(cj))
  2007. // {
  2008. // cj.JetState = EnumJetCtrlJobState.PostJobClean;
  2009. // var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  2010. // foreach (var pm in PMs)
  2011. // {
  2012. // var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2013. // if (pmTask != null && pmTask.Scheduler.IsOnline)
  2014. // {
  2015. // pmTask.InvokePostJobClean(cj.PostJobClean);
  2016. // //pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  2017. // }
  2018. // }
  2019. // }
  2020. // }
  2021. // else
  2022. // {
  2023. // if (IsAllProcessJobComplete(cj))
  2024. // {
  2025. // cj.JetState = EnumJetCtrlJobState.Completed;
  2026. // }
  2027. // }
  2028. // }
  2029. // break;
  2030. //case EnumJetCtrlJobState.PostJobClean:
  2031. // {
  2032. // if (IsPostJobCleanDone(cj))
  2033. // {
  2034. // cj.JetState = EnumJetCtrlJobState.Completed;
  2035. // }
  2036. // }
  2037. // break;
  2038. case EnumJetCtrlJobState.Quequed:
  2039. {
  2040. ActiveControlJob(cj);
  2041. }
  2042. break;
  2043. case EnumJetCtrlJobState.Processing:
  2044. {
  2045. if (IsAllProcessJobComplete(cj))
  2046. {
  2047. cj.JetState = EnumJetCtrlJobState.Completed;
  2048. }
  2049. }
  2050. break;
  2051. }
  2052. // caculate processed wafer by control job
  2053. var lp = ModuleHelper.Converter(cj.Module);
  2054. int countProcessed = 0;
  2055. foreach (var pjName in cj.ProcessJobNameList)
  2056. {
  2057. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  2058. if (pj == null)
  2059. {
  2060. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  2061. continue;
  2062. }
  2063. // caculate process wafer by process
  2064. if (_lpCycleCount[lp] < cj.CycleNumber)
  2065. {
  2066. foreach (var pjSlotWafer in pj.SlotWafers)
  2067. {
  2068. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2069. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  2070. countProcessed++;
  2071. }
  2072. }
  2073. }
  2074. int lpCycleWafer = 0;
  2075. if (cj.JetState == EnumJetCtrlJobState.Completed)
  2076. {
  2077. cj.EndTime = DateTime.Now;
  2078. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  2079. _dbCallback.LotFinished(cj);
  2080. if (_lpCycleCount[lp] >= cj.CycleNumber - 1 || !_isCycleMode)
  2081. {
  2082. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  2083. if(_VceAutoUnLoad)
  2084. Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(ModuleHelper.Converter(cj.Module))).PostMsg(VceMSG.SafeUnload);
  2085. }
  2086. _lpCycleCount[lp]++;
  2087. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  2088. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  2089. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  2090. if (_lpCycleCount[lp] < cj.CycleNumber)
  2091. {
  2092. cj.SetState(EnumControlJobState.Executing);
  2093. cj.JetState = EnumJetCtrlJobState.Quequed;
  2094. cj.LotInnerId = Guid.NewGuid();
  2095. _dbCallback.LotCreated(cj);
  2096. foreach (var pj in _lstProcessJobs)
  2097. {
  2098. if (pj.ControlJobName == cj.Name)
  2099. {
  2100. foreach (var marks in _preLotCleanMarks)
  2101. {
  2102. if (marks.Value.Contains(pj.InnerId))
  2103. marks.Value.Remove(pj.InnerId);
  2104. }
  2105. foreach (var marks in _postLotCleanMarks)
  2106. {
  2107. if (marks.Value.Contains(pj.InnerId))
  2108. marks.Value.Remove(pj.InnerId);
  2109. }
  2110. pj.SetState(EnumProcessJobState.Queued);
  2111. pj.InnerId = Guid.NewGuid();
  2112. foreach (var pjSlotWafer in pj.SlotWafers)
  2113. {
  2114. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2115. wafer.ProcessJob = null;
  2116. wafer.NextSequenceStep = 0;
  2117. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  2118. }
  2119. }
  2120. }
  2121. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  2122. }
  2123. else
  2124. {
  2125. cj.SetState(EnumControlJobState.Completed);
  2126. }
  2127. }
  2128. else
  2129. {
  2130. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  2131. }
  2132. if (lpCycleWafer != _lpCycleWafer[lp])
  2133. {
  2134. _lpCycleWafer[lp] = lpCycleWafer;
  2135. if (_lpCycleCount[lp] > 0)
  2136. {
  2137. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  2138. }
  2139. }
  2140. return cj.State == EnumControlJobState.Completed;
  2141. }
  2142. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  2143. {
  2144. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  2145. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  2146. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  2147. }
  2148. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  2149. {
  2150. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  2151. }
  2152. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  2153. {
  2154. return !string.IsNullOrWhiteSpace(cj.PostJobClean?.Trim());
  2155. }
  2156. private bool IsPreJobCleanDone(ControlJobInfo cj)
  2157. {
  2158. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  2159. foreach (var pm in pms)
  2160. {
  2161. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2162. if (pmTask.Scheduler.IsOnline && !pmTask.IsPreJobCleanDone())
  2163. return false;
  2164. }
  2165. return true;
  2166. }
  2167. private bool IsPostJobCleanDone(ControlJobInfo cj)
  2168. {
  2169. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  2170. foreach (var pm in pms)
  2171. {
  2172. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2173. if (pmTask.Scheduler.IsOnline && !pmTask.IsPostJobCleanDone())
  2174. return false;
  2175. }
  2176. return true;
  2177. }
  2178. private bool ActiveProcessJob(ProcessJobInfo pj)
  2179. {
  2180. foreach (var pjSlotWafer in pj.SlotWafers)
  2181. {
  2182. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2183. wafer.ProcessJob = pj;
  2184. wafer.NextSequenceStep = 0;
  2185. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  2186. }
  2187. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  2188. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  2189. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  2190. pj.SetState(EnumProcessJobState.Processing);
  2191. return true;
  2192. }
  2193. private bool ActiveControlJob(ControlJobInfo cj)
  2194. {
  2195. cj.JetState = EnumJetCtrlJobState.Processing;
  2196. foreach (var pjName in cj.ProcessJobNameList)
  2197. {
  2198. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  2199. if (pj == null)
  2200. {
  2201. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  2202. continue;
  2203. }
  2204. if (pj.State == EnumProcessJobState.Queued)
  2205. {
  2206. ActiveProcessJob(pj);
  2207. }
  2208. }
  2209. return true;
  2210. }
  2211. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  2212. {
  2213. foreach (var pj in _lstProcessJobs)
  2214. {
  2215. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  2216. {
  2217. return false;
  2218. }
  2219. }
  2220. return true;
  2221. }
  2222. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  2223. {
  2224. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  2225. int original = (int)ModuleHelper.Converter(cj.Module);
  2226. foreach (var mod in allModules)
  2227. {
  2228. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  2229. continue;
  2230. var wafers = WaferManager.Instance.GetWafers(mod);
  2231. foreach (var wafer in wafers)
  2232. {
  2233. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  2234. continue;
  2235. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  2236. return false; ;
  2237. }
  2238. }
  2239. return true;
  2240. }
  2241. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  2242. {
  2243. var lstInProcessPMs = new List<ModuleName>();
  2244. foreach (var wafer in cj.LotWafers)
  2245. {
  2246. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  2247. {
  2248. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  2249. {
  2250. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  2251. lstInProcessPMs.Add(pm);
  2252. }
  2253. }
  2254. }
  2255. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  2256. foreach (var mod in _dictModuleTask)
  2257. {
  2258. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  2259. {
  2260. pmAssociatedWaferCount[mod.Key] = 0;
  2261. }
  2262. }
  2263. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  2264. foreach (var wafer in unprocessedWafer)
  2265. {
  2266. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  2267. {
  2268. pmAssociatedWaferCount[wafer.destMod]++;
  2269. }
  2270. }
  2271. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  2272. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  2273. return oderedPMCount.First().Key;
  2274. return ModuleName.System;
  2275. }
  2276. private void CreateNewWaferTask()
  2277. {
  2278. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  2279. var onDutyPms = new Dictionary<ModuleName, int>();
  2280. foreach (var job in runningJobs)
  2281. {
  2282. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  2283. foreach (var pm in pms)
  2284. {
  2285. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  2286. {
  2287. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  2288. }
  2289. }
  2290. }
  2291. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  2292. return;
  2293. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  2294. if (oderedPMs.First().Value <= 1)
  2295. {
  2296. foreach (var runningJob in runningJobs)
  2297. {
  2298. foreach (var wafer in runningJob.LotWafers)
  2299. {
  2300. if (wafer.IsEmpty || wafer.ProcessJob == null)
  2301. continue;
  2302. if (_lstWaferTasks.Count >= oderedPMs.Count() * 2)
  2303. return;
  2304. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  2305. {
  2306. if (oderedPMs.First().Key != oderedPMs.Last().Key)
  2307. {
  2308. if (oderedPMs.First().Value % 2 == 0 && Is1stPMFirst(oderedPMs.First().Key, oderedPMs.Last().Key))
  2309. CreateWaferTasks(wafer, oderedPMs.First().Key);
  2310. else
  2311. CreateWaferTasks(wafer, oderedPMs.Last().Key);
  2312. }
  2313. else
  2314. {
  2315. CreateWaferTasks(wafer, oderedPMs.First().Key);
  2316. }
  2317. }
  2318. if (_lstWaferTasks.Count >= oderedPMs.Count() * 2)
  2319. return;
  2320. }
  2321. }
  2322. }
  2323. }
  2324. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  2325. {
  2326. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  2327. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  2328. Recipe recipe = Recipe.Load(recipeContent);
  2329. int temperature = 0;
  2330. if (int.TryParse(recipe.Header.Temperature, out int temp))
  2331. {
  2332. temperature = temp;
  2333. }
  2334. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  2335. wafer.OriginSlot,
  2336. pm,
  2337. 0,
  2338. temperature,
  2339. wafer.InnerId,
  2340. wafer.ProcessJob.InnerId,
  2341. recipeName,
  2342. wafer.ProcessJob.Sequence.WTWCleanRecipe,
  2343. wafer.ProcessJob.Sequence.LLInOutPath,
  2344. wafer.ProcessJob.Sequence.LLDelayTime,
  2345. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  2346. waferTask.OnWaferArrived += WaferArrived;
  2347. waferTask.OnWaferLeaved += WaferLeaved;
  2348. _lstWaferTasks.Add(waferTask);
  2349. }
  2350. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  2351. {
  2352. // check wether need align
  2353. foreach (var step in sequence.Steps)
  2354. {
  2355. foreach (var mod in step.StepModules)
  2356. {
  2357. if (ModuleHelper.IsAligner(mod))
  2358. return true;
  2359. }
  2360. }
  2361. return false;
  2362. }
  2363. private void RunSchdTMReturnActions()
  2364. {
  2365. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  2366. if (tmRobot == null || !tmRobot.IsAvailable)
  2367. return;
  2368. if (_tmSchdActions.Count > 0)
  2369. {
  2370. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  2371. {
  2372. var nextActions = _tmSchdActions.First();
  2373. var nextModule = nextActions.First().Module;
  2374. if (!_dictModuleTask[nextModule].IsIdle)
  2375. return;
  2376. _curTmAction = _tmSchdActions.Dequeue();
  2377. tmRobot.SendMoveItems(_curTmAction.ToArray());
  2378. }
  2379. }
  2380. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  2381. {
  2382. _curTmAction.Clear();
  2383. }
  2384. }
  2385. #endregion internal implementation
  2386. #region sequence/recipe validation
  2387. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  2388. {
  2389. reason = "";
  2390. foreach (var pm in seq.PMs)
  2391. {
  2392. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  2393. return true;
  2394. }
  2395. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  2396. return false;
  2397. }
  2398. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  2399. {
  2400. for (int i = 0; i < seq.Steps.Count; i++)
  2401. {
  2402. SequenceStepInfo stepInfo = seq.Steps[i];
  2403. foreach (var module in stepInfo.StepModules)
  2404. {
  2405. if (ModuleHelper.IsPm(module))
  2406. {
  2407. string attr = $"{module}Recipe";
  2408. if (stepInfo.StepParameter.ContainsKey(attr)
  2409. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  2410. {
  2411. var recipeName = (string)stepInfo.StepParameter[attr];
  2412. if (!string.IsNullOrWhiteSpace(recipeName))
  2413. {
  2414. var recipeContent =
  2415. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  2416. if (string.IsNullOrWhiteSpace(recipeContent))
  2417. {
  2418. reason = $"Can not find recipe file{recipeName}";
  2419. return false;
  2420. }
  2421. }
  2422. }
  2423. }
  2424. }
  2425. }
  2426. reason = "";
  2427. return true;
  2428. }
  2429. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  2430. {
  2431. var pmlist = new List<ModuleName>();
  2432. foreach (var pj in _lstProcessJobs)
  2433. {
  2434. if (pj.ControlJobName == cj.Name)
  2435. {
  2436. foreach (var pm in pj.Sequence.PMs)
  2437. {
  2438. if (!pmlist.Contains(pm))
  2439. pmlist.Add(pm);
  2440. }
  2441. }
  2442. }
  2443. return pmlist;
  2444. }
  2445. private bool Is1stPMFirst(ModuleName firstpm, ModuleName secondpm)
  2446. {
  2447. if (firstpm == secondpm)
  2448. return true;
  2449. if(_dictModuleTask[firstpm].HasWafer && !_dictModuleTask[secondpm].HasWafer)
  2450. return false;
  2451. if (!_dictModuleTask[firstpm].HasWafer && _dictModuleTask[secondpm].HasWafer)
  2452. return true;
  2453. if (_dictModuleTask[firstpm].HasWafer && _dictModuleTask[secondpm].HasWafer)
  2454. {
  2455. if (_dictModuleTask[firstpm].TimeToReady <= _dictModuleTask[secondpm].TimeToReady)
  2456. return true;
  2457. else
  2458. return false;
  2459. }
  2460. return true;
  2461. }
  2462. #endregion
  2463. }
  2464. }