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PM
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fd27ba4304
handle some bug.
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8 months ago |
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TM
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b67769ec2c
ui优化
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11 months ago |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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1 year ago |
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DBModel.sql
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a9d8e56970
1.扩展alarm list
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10 months ago |
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DESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 year ago |
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DataGroup.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 years ago |
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EquipmentVariables.xml
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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2 years ago |
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IoProviderConfig.xml
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
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LogDefine.json
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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RecipeFormat.xml
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9760d40cf7
port simulator
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2 years ago |
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SESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 year ago |
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SVID.xls
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25954d684c
update EquipmentVariables.xml and Secsgem dll
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1 year ago |
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SequenceFormat.xml
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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SignalTower.xml
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 months ago |
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System.sccfg
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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System_Kepler2200.sccfg
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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System_Kepler2300.sccfg
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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System_VenusDE.sccfg
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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8 months ago |
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System_VenusSE.sccfg
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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8 months ago |
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VenusPreProcess.py
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64c7ef574e
log
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2 years ago |
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VenusSignalTower.xml
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b6309f712c
upload for Venus SE/DE
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8 months ago |
lixiang
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息