OverKepler2300ViewModel.cs 68 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using Aitex.Core.RT.Log;
  20. namespace Venus_MainPages.ViewModels
  21. {
  22. internal class OverKepler2300ViewModel : BindableBase
  23. {
  24. #region 私有字段
  25. private List<string> m_CurrentModuleRecipes = new List<string>();
  26. private bool m_PVN21ValveIsOpen;
  27. private bool m_PVN22ValveIsOpen;
  28. private bool m_N2ValveIsOpen;
  29. private bool m_PV11ValveIsOpen;
  30. private bool m_PV12ValveIsOpen;
  31. private bool m_PV21ValveIsOpen;
  32. private bool m_PV22ValveIsOpen;
  33. private bool m_PV31ValveIsOpen;
  34. private bool m_PV32ValveIsOpen;
  35. private bool m_PV41ValveIsOpen;
  36. private bool m_PV42ValveIsOpen;
  37. private bool m_MFC1ValveIsOpen;
  38. private bool m_MFC2ValveIsOpen;
  39. private bool m_MFC3ValveIsOpen;
  40. private bool m_MFC4ValveIsOpen;
  41. private bool m_MFC5ValveIsOpen;
  42. private bool m_MFC6ValveIsOpen;
  43. private bool m_MFC7ValveIsOpen;
  44. private bool m_MFC8ValveIsOpen;
  45. private bool m_GasFinalValveIsOpen;
  46. private bool m_SoftPumpValveIsOpen;
  47. private bool m_FastPumpValveIsOpen;
  48. private bool m_PVHe1ValveIsOpen;
  49. private bool m_PVHe2ValveIsOpen;
  50. private bool m_TurboPumpPumpingValveIsOpen;
  51. private bool m_TurboPumpPurgeValveIsOpen;
  52. private bool m_GuageValveIsOpen;
  53. private bool m_PendulumValveIsOpen;
  54. private double m_HeGasSetpoint;
  55. private int m_HePressureSetpoint;
  56. private float m_SRFFwdPowerSetpoint;
  57. private float m_BRFFwdPowerSetpoint;
  58. private float m_SRFMatchC1;
  59. private float m_SRFMatchC2;
  60. private float m_BRFMatchC1;
  61. private float m_BRFMatchC2;
  62. private double m_MFC1SetPoint;
  63. private double m_MFC2SetPoint;
  64. private double m_MFC3SetPoint;
  65. private double m_MFC4SetPoint;
  66. private double m_MFC5SetPoint;
  67. private double m_MFC6SetPoint;
  68. private double m_MFC7SetPoint;
  69. private double m_MFC8SetPoint;
  70. private double m_N2SetPoint;
  71. private AITMfcData m_MFC1Data;
  72. private AITMfcData m_MFC2Data;
  73. private AITMfcData m_MFC3Data;
  74. private AITMfcData m_MFC4Data;
  75. private AITMfcData m_MFC5Data;
  76. private AITMfcData m_MFC6Data;
  77. private AITMfcData m_MFC7Data;
  78. private AITMfcData m_MFC8Data;
  79. private AITMfcData m_MFCHeData;
  80. private AITMfcData m_MFCN2Data;
  81. private AITHeaterData m_ValveHeaterData;
  82. private AITHeaterData m_ForelineHeaterData;
  83. private AITHeaterData m_WallHeaterData;
  84. private AITHeaterData m_PendulumHeaterData;
  85. private AITRfData m_SRFData;
  86. private AITRfData m_BRFData;
  87. private AITPendulumValveData m_PendulumValveData;
  88. private PMState m_PMCurrentState;
  89. private bool m_SourceRFFanInterlock;
  90. private bool m_IsWLK;
  91. private bool m_IsWaterFlowOk;
  92. private bool m_IsTurboPumpInterlock;
  93. private bool m_IsCDAOK;
  94. private bool m_SensorGasBoxDoor;
  95. private bool m_SensorGasBoxPressure;
  96. private bool m_PumpIsOpen;
  97. private bool m_TurboIsOpen;
  98. private bool m_IsATM;
  99. private bool m_IsVAC;
  100. private List<string> m_RtDataKeys;
  101. private Dictionary<string, object> m_RtDataValues;
  102. private int m_PositionValue;
  103. private bool m_IsPositionMode;
  104. private int m_ESCVoltage;
  105. private bool m_GasIsFlowing;
  106. private bool m_IsProcessing;
  107. private bool m_IsAutoMode;
  108. private string m_SelectedRecipe;
  109. private float m_ChillerTempSetpoint;
  110. private float m_InnerChillerTempSetpoint;
  111. private float m_OuterChillerTempSetpoint;
  112. private float m_TopChillerTempSetpoint;
  113. private float m_WallTempSetpoint;
  114. private bool m_HeIsPressureMode = true;
  115. private bool m_ChillerIsOn;
  116. private bool m_InnerChillerIsOn;
  117. private bool m_OuterChillerIsOn;
  118. private bool m_TopChillerIsOn;
  119. private float m_ChamberPressure;
  120. private float m_ProcessPressure;
  121. private float m_ForelinePressurePressure;
  122. private float m_ESCHePressure;
  123. ButterflyValveView butterflyValveMessageBox;
  124. HeaterView heaterView;
  125. private int m_TurboPumpRotationalSpeed;
  126. private bool m_LiftPinIsUp;
  127. private bool m_IsSlitDoorClosed;
  128. private bool m_IsLidClosed;
  129. private float m_ChillerTemperature;
  130. private float m_InnerTemperature;
  131. private float m_OuterTemperature;
  132. private float m_TopTemperature;
  133. private int m_ESCHVOutputVoltage;
  134. private float m_MatchC1;
  135. private float m_MatchC2;
  136. private float m_BiasMatchC1;
  137. private float m_BiasMatchC2;
  138. private float m_PendulumValvePosition;
  139. private bool m_IsTurboPumpAtSpeed;
  140. private bool m_TurboPumpWaterFlowSwitch;
  141. private bool m_IsHasWafer;
  142. private Recipe m_CurrentRecipe = new Recipe();
  143. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  144. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  145. private double m_ChamberPressureFeedBack;
  146. private double m_TurboN2FlowSetPoint;
  147. private string m_ModuleName;
  148. private string m_WaferID;
  149. private int? currentRecipeNumber;
  150. #endregion
  151. #region 属性
  152. public List<string> CurrentModuleRecipes
  153. {
  154. get { return m_CurrentModuleRecipes; }
  155. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  156. }
  157. public Recipe CurrentRecipe
  158. {
  159. get { return m_CurrentRecipe; }
  160. set { SetProperty(ref m_CurrentRecipe, value); }
  161. }
  162. public RecipeResult CurrentRecipeResult
  163. {
  164. get { return m_CurrentRecipeResult; }
  165. set { SetProperty(ref m_CurrentRecipeResult, value); }
  166. }
  167. public RecipeStep CurrentRecipeStep
  168. {
  169. get { return m_CurrentRecipeStep; }
  170. set { SetProperty(ref m_CurrentRecipeStep, value); }
  171. }
  172. public bool IsHasWafer
  173. {
  174. get { return m_IsHasWafer; }
  175. set { SetProperty(ref m_IsHasWafer, value); }
  176. }
  177. public bool IsTurboPumpAtSpeed
  178. {
  179. get { return m_IsTurboPumpAtSpeed; }
  180. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  181. }
  182. public bool TurboPumpWaterFlowSwitch
  183. {
  184. get { return m_TurboPumpWaterFlowSwitch; }
  185. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  186. }
  187. public float PendulumValvePosition
  188. {
  189. get { return m_PendulumValvePosition; }
  190. set { SetProperty(ref m_PendulumValvePosition, value); }
  191. }
  192. public float BiasMatchC1
  193. {
  194. get { return m_BiasMatchC1; }
  195. set
  196. {
  197. SetProperty(ref m_BiasMatchC1, value);
  198. }
  199. }
  200. public float BiasMatchC2
  201. {
  202. get { return m_BiasMatchC2; }
  203. set
  204. {
  205. SetProperty(ref m_BiasMatchC2, value);
  206. }
  207. }
  208. public float MatchC1
  209. {
  210. get { return m_MatchC1; }
  211. set
  212. {
  213. SetProperty(ref m_MatchC1, value);
  214. }
  215. }
  216. public float MatchC2
  217. {
  218. get { return m_MatchC2; }
  219. set
  220. {
  221. SetProperty(ref m_MatchC2, value);
  222. }
  223. }
  224. public AITPendulumValveData PendulumValveData
  225. {
  226. get { return m_PendulumValveData; }
  227. set
  228. {
  229. SetProperty(ref m_PendulumValveData, value);
  230. }
  231. }
  232. //public AITHVData ESCHVData
  233. //{
  234. // get { return m_ESCHVData; }
  235. // set
  236. // {
  237. // SetProperty(ref m_ESCHVData, value);
  238. // }
  239. //}
  240. public int ESCHVOutputVoltage
  241. {
  242. get { return m_ESCHVOutputVoltage; }
  243. set
  244. {
  245. SetProperty(ref m_ESCHVOutputVoltage, value);
  246. }
  247. }
  248. public float ChillerTemperature
  249. {
  250. get { return m_ChillerTemperature; }
  251. set
  252. {
  253. SetProperty(ref m_ChillerTemperature, value);
  254. }
  255. }
  256. public float InnerTemperature
  257. {
  258. get { return m_InnerTemperature; }
  259. set
  260. {
  261. SetProperty(ref m_InnerTemperature, value);
  262. }
  263. }
  264. public float OuterTemperature
  265. {
  266. get { return m_OuterTemperature; }
  267. set
  268. {
  269. SetProperty(ref m_OuterTemperature, value);
  270. }
  271. }
  272. public float TopTemperature
  273. {
  274. get { return m_TopTemperature; }
  275. set
  276. {
  277. SetProperty(ref m_TopTemperature, value);
  278. }
  279. }
  280. //public float HVTemperature
  281. //{
  282. // get { return m_HVTemperature; }
  283. // set
  284. // {
  285. // SetProperty(ref m_HVTemperature, value);
  286. // }
  287. //}
  288. public bool IsLidClosed
  289. {
  290. get { return m_IsLidClosed; }
  291. set
  292. {
  293. SetProperty(ref m_IsLidClosed, value);
  294. }
  295. }
  296. public bool IsSlitDoorClosed
  297. {
  298. get { return m_IsSlitDoorClosed; }
  299. set
  300. {
  301. SetProperty(ref m_IsSlitDoorClosed, value);
  302. }
  303. }
  304. public bool LiftPinIsUp
  305. {
  306. get { return m_LiftPinIsUp; }
  307. set
  308. {
  309. SetProperty(ref m_LiftPinIsUp, value);
  310. }
  311. }
  312. public int TurboPumpRotationalSpeed
  313. {
  314. get { return m_TurboPumpRotationalSpeed; }
  315. set
  316. {
  317. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  318. }
  319. }
  320. public float ESCHePressure
  321. {
  322. get { return m_ESCHePressure; }
  323. set
  324. {
  325. SetProperty(ref m_ESCHePressure, value);
  326. }
  327. }
  328. public float ChamberPressure
  329. {
  330. get { return m_ChamberPressure; }
  331. set
  332. {
  333. SetProperty(ref m_ChamberPressure, value);
  334. }
  335. }
  336. public float ProcessPressure
  337. {
  338. get { return m_ProcessPressure; }
  339. set
  340. {
  341. SetProperty(ref m_ProcessPressure, value);
  342. }
  343. }
  344. public float ForelinePressure
  345. {
  346. get { return m_ForelinePressurePressure; }
  347. set
  348. {
  349. SetProperty(ref m_ForelinePressurePressure, value);
  350. }
  351. }
  352. public bool SourceRFFanInterlock
  353. {
  354. get { return m_SourceRFFanInterlock; }
  355. set
  356. {
  357. SetProperty(ref m_SourceRFFanInterlock, value);
  358. }
  359. }
  360. public bool IsWLK
  361. {
  362. get { return m_IsWLK; }
  363. set
  364. {
  365. SetProperty(ref m_IsWLK, value);
  366. }
  367. }
  368. public bool IsWaterFlowOk
  369. {
  370. get { return m_IsWaterFlowOk; }
  371. set
  372. {
  373. SetProperty(ref m_IsWaterFlowOk, value);
  374. }
  375. }
  376. public bool IsCDAOK
  377. {
  378. get { return m_IsCDAOK; }
  379. set
  380. {
  381. SetProperty(ref m_IsCDAOK, value);
  382. }
  383. }
  384. public bool SensorGasBoxDoor
  385. {
  386. get { return m_SensorGasBoxDoor; }
  387. set
  388. {
  389. SetProperty(ref m_SensorGasBoxDoor, value);
  390. }
  391. }
  392. public bool SensorGasBoxPressure
  393. {
  394. get { return m_SensorGasBoxPressure; }
  395. set
  396. {
  397. SetProperty(ref m_SensorGasBoxPressure, value);
  398. }
  399. }
  400. public bool IsTurboPumpInterlock
  401. {
  402. get { return m_IsTurboPumpInterlock; }
  403. set
  404. {
  405. SetProperty(ref m_IsTurboPumpInterlock, value);
  406. }
  407. }
  408. public string ModuleName
  409. {
  410. get { return m_ModuleName; }
  411. set
  412. {
  413. SetProperty(ref m_ModuleName, value);
  414. }
  415. }
  416. public double MFC1SetPoint
  417. {
  418. get { return m_MFC1SetPoint; }
  419. set { SetProperty(ref m_MFC1SetPoint, value); }
  420. }
  421. public double MFC2SetPoint
  422. {
  423. get { return m_MFC2SetPoint; }
  424. set { SetProperty(ref m_MFC2SetPoint, value); }
  425. }
  426. public double MFC3SetPoint
  427. {
  428. get { return m_MFC3SetPoint; }
  429. set { SetProperty(ref m_MFC3SetPoint, value); }
  430. }
  431. public double MFC4SetPoint
  432. {
  433. get { return m_MFC4SetPoint; }
  434. set { SetProperty(ref m_MFC4SetPoint, value); }
  435. }
  436. public double MFC5SetPoint
  437. {
  438. get { return m_MFC5SetPoint; }
  439. set { SetProperty(ref m_MFC5SetPoint, value); }
  440. }
  441. public double MFC6SetPoint
  442. {
  443. get { return m_MFC6SetPoint; }
  444. set { SetProperty(ref m_MFC6SetPoint, value); }
  445. }
  446. public double MFC7SetPoint
  447. {
  448. get { return m_MFC7SetPoint; }
  449. set { SetProperty(ref m_MFC7SetPoint, value); }
  450. }
  451. public double MFC8SetPoint
  452. {
  453. get { return m_MFC8SetPoint; }
  454. set { SetProperty(ref m_MFC8SetPoint, value); }
  455. }
  456. public double N2SetPoint
  457. {
  458. get { return m_N2SetPoint; }
  459. set { SetProperty(ref m_N2SetPoint, value); }
  460. }
  461. public double TurboN2FlowSetPoint
  462. {
  463. get { return m_TurboN2FlowSetPoint; }
  464. set
  465. {
  466. if (value != m_TurboN2FlowSetPoint)
  467. {
  468. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  469. }
  470. SetProperty(ref m_TurboN2FlowSetPoint, value);
  471. }
  472. }
  473. public AITMfcData MFC1Data
  474. {
  475. get { return m_MFC1Data; }
  476. set { SetProperty(ref m_MFC1Data, value); }
  477. }
  478. public AITMfcData MFC2Data
  479. {
  480. get { return m_MFC2Data; }
  481. set { SetProperty(ref m_MFC2Data, value); }
  482. }
  483. public AITMfcData MFC3Data
  484. {
  485. get { return m_MFC3Data; }
  486. set { SetProperty(ref m_MFC3Data, value); }
  487. }
  488. public AITMfcData MFC4Data
  489. {
  490. get { return m_MFC4Data; }
  491. set { SetProperty(ref m_MFC4Data, value); }
  492. }
  493. public AITMfcData MFC5Data
  494. {
  495. get { return m_MFC5Data; }
  496. set { SetProperty(ref m_MFC5Data, value); }
  497. }
  498. public AITMfcData MFC6Data
  499. {
  500. get { return m_MFC6Data; }
  501. set { SetProperty(ref m_MFC6Data, value); }
  502. }
  503. public AITMfcData MFC7Data
  504. {
  505. get { return m_MFC7Data; }
  506. set { SetProperty(ref m_MFC7Data, value); }
  507. }
  508. public AITMfcData MFC8Data
  509. {
  510. get { return m_MFC8Data; }
  511. set { SetProperty(ref m_MFC8Data, value); }
  512. }
  513. public AITMfcData MFCHeData
  514. {
  515. get { return m_MFCHeData; }
  516. set { SetProperty(ref m_MFCHeData, value); }
  517. }
  518. public AITMfcData MFCN2Data
  519. {
  520. get { return m_MFCN2Data; }
  521. set { SetProperty(ref m_MFCN2Data, value); }
  522. }
  523. public AITHeaterData ValveHeaterData
  524. {
  525. get { return m_ValveHeaterData; }
  526. set { SetProperty(ref m_ValveHeaterData, value); }
  527. }
  528. public AITHeaterData ForelineHeaterData
  529. {
  530. get { return m_ForelineHeaterData; }
  531. set { SetProperty(ref m_ForelineHeaterData, value); }
  532. }
  533. public AITHeaterData WallHeaterData
  534. {
  535. get { return m_WallHeaterData; }
  536. set { SetProperty(ref m_WallHeaterData, value); }
  537. }
  538. public AITHeaterData PendulumHeaterData
  539. {
  540. get { return m_PendulumHeaterData; }
  541. set { SetProperty(ref m_PendulumHeaterData, value); }
  542. }
  543. public AITRfData SRFData
  544. {
  545. get { return m_SRFData; }
  546. set { SetProperty(ref m_SRFData, value); }
  547. }
  548. public AITRfData BRFData
  549. {
  550. get { return m_BRFData; }
  551. set { SetProperty(ref m_BRFData, value); }
  552. }
  553. public PMState PMCurrentState
  554. {
  555. get { return m_PMCurrentState; }
  556. set { SetProperty(ref m_PMCurrentState, value); }
  557. }
  558. #region 阀
  559. public bool GasFinalValveIsOpen
  560. {
  561. get { return m_GasFinalValveIsOpen; }
  562. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  563. }
  564. public bool PVN21ValveIsOpen
  565. {
  566. get { return m_PVN21ValveIsOpen; }
  567. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  568. }
  569. public bool PVN22ValveIsOpen
  570. {
  571. get { return m_PVN22ValveIsOpen; }
  572. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  573. }
  574. public bool N2ValveIsOpen
  575. {
  576. get { return m_N2ValveIsOpen; }
  577. set { SetProperty(ref m_N2ValveIsOpen, value); }
  578. }
  579. public bool PV11ValveIsOpen
  580. {
  581. get { return m_PV11ValveIsOpen; }
  582. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  583. }
  584. public bool PV12ValveIsOpen
  585. {
  586. get { return m_PV12ValveIsOpen; }
  587. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  588. }
  589. public bool MFC1ValveIsOpen
  590. {
  591. get { return m_MFC1ValveIsOpen; }
  592. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  593. }
  594. public bool PV21ValveIsOpen
  595. {
  596. get { return m_PV21ValveIsOpen; }
  597. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  598. }
  599. public bool PV22ValveIsOpen
  600. {
  601. get { return m_PV22ValveIsOpen; }
  602. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  603. }
  604. public bool MFC2ValveIsOpen
  605. {
  606. get { return m_MFC2ValveIsOpen; }
  607. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  608. }
  609. public bool PV31ValveIsOpen
  610. {
  611. get { return m_PV31ValveIsOpen; }
  612. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  613. }
  614. public bool PV32ValveIsOpen
  615. {
  616. get { return m_PV32ValveIsOpen; }
  617. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  618. }
  619. public bool MFC3ValveIsOpen
  620. {
  621. get { return m_MFC3ValveIsOpen; }
  622. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  623. }
  624. public bool PV41ValveIsOpen
  625. {
  626. get { return m_PV41ValveIsOpen; }
  627. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  628. }
  629. public bool PV42ValveIsOpen
  630. {
  631. get { return m_PV42ValveIsOpen; }
  632. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  633. }
  634. public bool MFC4ValveIsOpen
  635. {
  636. get { return m_MFC4ValveIsOpen; }
  637. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  638. }
  639. public bool MFC5ValveIsOpen
  640. {
  641. get { return m_MFC5ValveIsOpen; }
  642. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  643. }
  644. public bool MFC6ValveIsOpen
  645. {
  646. get { return m_MFC6ValveIsOpen; }
  647. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  648. }
  649. public bool MFC7ValveIsOpen
  650. {
  651. get { return m_MFC7ValveIsOpen; }
  652. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  653. }
  654. public bool MFC8ValveIsOpen
  655. {
  656. get { return m_MFC8ValveIsOpen; }
  657. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  658. }
  659. public bool PVHe1ValveIsOpen
  660. {
  661. get { return m_PVHe1ValveIsOpen; }
  662. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  663. }
  664. public bool PVHe2ValveIsOpen
  665. {
  666. get { return m_PVHe2ValveIsOpen; }
  667. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  668. }
  669. public bool TurboPumpPumpingValveIsOpen
  670. {
  671. get { return m_TurboPumpPumpingValveIsOpen; }
  672. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  673. }
  674. public bool TurboPumpPurgeValveIsOpen
  675. {
  676. get { return m_TurboPumpPurgeValveIsOpen; }
  677. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  678. }
  679. public bool SoftPumpValveIsOpen
  680. {
  681. get { return m_SoftPumpValveIsOpen; }
  682. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  683. }
  684. public bool FastPumpValveIsOpen
  685. {
  686. get { return m_FastPumpValveIsOpen; }
  687. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  688. }
  689. public bool GuageValveIsOpen
  690. {
  691. get { return m_GuageValveIsOpen; }
  692. set { SetProperty(ref m_GuageValveIsOpen, value); }
  693. }
  694. #endregion
  695. public Dictionary<string, object> RtDataValues
  696. {
  697. get { return m_RtDataValues; }
  698. set { SetProperty(ref m_RtDataValues, value); }
  699. }
  700. public bool PumpIsOpen
  701. {
  702. get { return m_PumpIsOpen; }
  703. set { SetProperty(ref m_PumpIsOpen, value); }
  704. }
  705. public bool PendulumValveIsOpen
  706. {
  707. get { return m_PendulumValveIsOpen; }
  708. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  709. }
  710. public bool TurboIsOpen
  711. {
  712. get { return m_TurboIsOpen; }
  713. set { SetProperty(ref m_TurboIsOpen, value); }
  714. }
  715. public bool IsATM
  716. {
  717. get { return m_IsATM; }
  718. set { SetProperty(ref m_IsATM, value); }
  719. }
  720. public bool IsVAC
  721. {
  722. get { return m_IsVAC; }
  723. set { SetProperty(ref m_IsVAC, value); }
  724. }
  725. //public bool BRFIsOn
  726. //{
  727. // get { return m_BRFIsOn; }
  728. // set { SetProperty(ref m_BRFIsOn, value); }
  729. //}
  730. //public bool SRFIsOn
  731. //{
  732. // get { return m_SRFIsOn; }
  733. // set { SetProperty(ref m_SRFIsOn, value); }
  734. //}
  735. public int PositionValue
  736. {
  737. get { return m_PositionValue; }
  738. set { SetProperty(ref m_PositionValue, value); }
  739. }
  740. public bool IsPositionMode
  741. {
  742. get { return m_IsPositionMode; }
  743. set { SetProperty(ref m_IsPositionMode, value); }
  744. }
  745. public double HeGasSetpoint
  746. {
  747. get { return m_HeGasSetpoint; }
  748. set
  749. {
  750. SetProperty(ref m_HeGasSetpoint, value);
  751. }
  752. }
  753. public int HePressureSetpoint
  754. {
  755. get { return m_HePressureSetpoint; }
  756. set
  757. {
  758. SetProperty(ref m_HePressureSetpoint, value);
  759. }
  760. }
  761. public float SRFFwdPowerSetpoint
  762. {
  763. get { return m_SRFFwdPowerSetpoint; }
  764. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  765. }
  766. public float BRFFwdPowerSetpoint
  767. {
  768. get { return m_BRFFwdPowerSetpoint; }
  769. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  770. }
  771. public int ESCVoltage
  772. {
  773. get { return m_ESCVoltage; }
  774. set { SetProperty(ref m_ESCVoltage, value); }
  775. }
  776. public float SRFMatchC1
  777. {
  778. get { return m_SRFMatchC1; }
  779. set { SetProperty(ref m_SRFMatchC1, value); }
  780. }
  781. public float SRFMatchC2
  782. {
  783. get { return m_SRFMatchC2; }
  784. set { SetProperty(ref m_SRFMatchC2, value); }
  785. }
  786. public float BRFMatchC1
  787. {
  788. get { return m_BRFMatchC1; }
  789. set { SetProperty(ref m_BRFMatchC1, value); }
  790. }
  791. public float BRFMatchC2
  792. {
  793. get { return m_BRFMatchC2; }
  794. set { SetProperty(ref m_BRFMatchC2, value); }
  795. }
  796. public bool GasIsFlowing
  797. {
  798. get { return m_GasIsFlowing; }
  799. set { SetProperty(ref m_GasIsFlowing, value); }
  800. }
  801. public bool IsProcessing
  802. {
  803. get { return m_IsProcessing; }
  804. set { SetProperty(ref m_IsProcessing, value); }
  805. }
  806. public bool IsAutoMode
  807. {
  808. get { return m_IsAutoMode; }
  809. set { SetProperty(ref m_IsAutoMode, value); }
  810. }
  811. public string SelectedRecipe
  812. {
  813. get { return m_SelectedRecipe; }
  814. set { SetProperty(ref m_SelectedRecipe, value); }
  815. }
  816. public float ChillerTempSetpoint
  817. {
  818. get { return m_ChillerTempSetpoint; }
  819. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  820. }
  821. public float InnerChillerTempSetpoint
  822. {
  823. get { return m_InnerChillerTempSetpoint; }
  824. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  825. }
  826. public float OuterChillerTempSetpoint
  827. {
  828. get { return m_OuterChillerTempSetpoint; }
  829. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  830. }
  831. public float TopChillerTempSetpoint
  832. {
  833. get { return m_TopChillerTempSetpoint; }
  834. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  835. }
  836. public float WallTempSetpoint
  837. {
  838. get { return m_WallTempSetpoint; }
  839. set { SetProperty(ref m_WallTempSetpoint, value); }
  840. }
  841. public bool HeIsPressureMode
  842. {
  843. get { return m_HeIsPressureMode; }
  844. set { SetProperty(ref m_HeIsPressureMode, value); }
  845. }
  846. public bool ChillerIsOn
  847. {
  848. get { return m_ChillerIsOn; }
  849. set { SetProperty(ref m_ChillerIsOn, value); }
  850. }
  851. public bool InnerChillerIsOn
  852. {
  853. get { return m_InnerChillerIsOn; }
  854. set { SetProperty(ref m_InnerChillerIsOn, value); }
  855. }
  856. public bool OuterChillerIsOn
  857. {
  858. get { return m_OuterChillerIsOn; }
  859. set { SetProperty(ref m_OuterChillerIsOn, value); }
  860. }
  861. public bool TopChillerIsOn
  862. {
  863. get { return m_TopChillerIsOn; }
  864. set { SetProperty(ref m_TopChillerIsOn, value); }
  865. }
  866. public double ChamberPressureFeedBack
  867. {
  868. get { return m_ChamberPressureFeedBack; }
  869. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  870. }
  871. public string WaferID
  872. {
  873. get { return m_WaferID; }
  874. set { SetProperty(ref m_WaferID, value); }
  875. }
  876. #endregion
  877. #region 命令
  878. private DelegateCommand _PMInitCommnad;
  879. public DelegateCommand PMInitCommnad =>
  880. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  881. private DelegateCommand _PMAbortCommnad;
  882. public DelegateCommand PMAbortCommnad =>
  883. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  884. private DelegateCommand _GasCommand;
  885. public DelegateCommand GasCommand =>
  886. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  887. private DelegateCommand _HeCommand;
  888. public DelegateCommand HeCommand =>
  889. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  890. private DelegateCommand _RfCommand;
  891. public DelegateCommand RfCommand =>
  892. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  893. private DelegateCommand _PurgeCommand;
  894. public DelegateCommand PurgeCommand =>
  895. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  896. private DelegateCommand _VentCommand;
  897. public DelegateCommand VentCommand =>
  898. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  899. private DelegateCommand _PumpCommand;
  900. public DelegateCommand PumpCommand =>
  901. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  902. private DelegateCommand _OpenPumpCommand;
  903. public DelegateCommand OpenPumpCommand =>
  904. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  905. private DelegateCommand _ClosePumpCommand;
  906. public DelegateCommand ClosePumpCommand =>
  907. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  908. private DelegateCommand _OpenTurboPumpCommand;
  909. public DelegateCommand OpenTurboPumpCommand =>
  910. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  911. private DelegateCommand _CloseTurboPumpCommand;
  912. public DelegateCommand CloseTurboPumpCommand =>
  913. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  914. private DelegateCommand _OpenPendulumValveCommand;
  915. public DelegateCommand OpenPendulumValveCommand =>
  916. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  917. private DelegateCommand _ClosePendulumValveCommand;
  918. public DelegateCommand ClosePendulumValveCommand =>
  919. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  920. private DelegateCommand<object> _PinUpDownCommand;
  921. public DelegateCommand<object> PinUpDownCommand =>
  922. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  923. private DelegateCommand<object> _LidUpDownCommand;
  924. public DelegateCommand<object> LidUpDownCommand =>
  925. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  926. private DelegateCommand _SetSRfCommand;
  927. public DelegateCommand SetSRfCommand =>
  928. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  929. private DelegateCommand _SetBRfCommand;
  930. public DelegateCommand SetBRfCommand =>
  931. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  932. private DelegateCommand _OpenButterflyValveViewCommand;
  933. public DelegateCommand OpenButterflyValveViewCommand =>
  934. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  935. //private DelegateCommand _HVCommand;
  936. //public DelegateCommand HVCommand =>
  937. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  938. private DelegateCommand _HVSetCommand;
  939. public DelegateCommand HVSetCommand =>
  940. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  941. private DelegateCommand _LoadRecipeCommand;
  942. public DelegateCommand LoadRecipeCommand =>
  943. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  944. private DelegateCommand<object> _ControlValveCommand;
  945. public DelegateCommand<object> ControlValveCommand =>
  946. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  947. private DelegateCommand<object> _RunRecipeCommand;
  948. public DelegateCommand<object> RunRecipeCommand =>
  949. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  950. private DelegateCommand<object> _SetChillerTempCommand;
  951. public DelegateCommand<object> SetChillerTempCommand =>
  952. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  953. private DelegateCommand<object> _OnOffChillerCommand;
  954. public DelegateCommand<object> OnOffChillerCommand =>
  955. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  956. private DelegateCommand<object> _HeaterCommand;
  957. public DelegateCommand<object> HeaterCommand =>
  958. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  959. private DelegateCommand _EndStepCommand;
  960. public DelegateCommand EndStepCommand =>
  961. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  962. private DelegateCommand _OnlineCommand;
  963. public DelegateCommand OnlineCommand =>
  964. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  965. private DelegateCommand _OfflineCommand;
  966. public DelegateCommand OfflineCommand =>
  967. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  968. private DelegateCommand<object> _AbortRecipeCommnad;
  969. public DelegateCommand<object> AbortRecipeCommnad =>
  970. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  971. #endregion
  972. #region 构造函数
  973. public OverKepler2300ViewModel()
  974. {
  975. m_RtDataKeys = new List<string>();
  976. m_IsATM = true;
  977. ModuleName = "PMA";
  978. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  979. DispatcherTimer timer = new DispatcherTimer();
  980. timer.Interval = TimeSpan.FromSeconds(0.5);
  981. timer.Tick += timer_Tick;
  982. timer.Start();
  983. }
  984. #endregion
  985. #region 命令方法
  986. private void OnControlValve(object obj)
  987. {
  988. CommonValveControl commonValveControl = (CommonValveControl)obj;
  989. if (commonValveControl.IsCanEdit == true)
  990. {
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  992. string operation = commonValveControl.Status ? "关闭" : "打开";
  993. LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀");
  994. }
  995. }
  996. private void OnPMInit()
  997. {
  998. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  999. }
  1000. private async void OnGas()
  1001. {
  1002. await Task.Run(async () =>
  1003. {
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  1005. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  1006. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1008. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1009. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1010. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1011. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1012. await Task.Delay(1000);
  1013. object[] mfc = new object[8];
  1014. string[] mfcSetPoint = new string[8];
  1015. mfc[0] = MFC1Data.SetPoint;
  1016. mfc[1] = MFC2Data.SetPoint;
  1017. mfc[2] = MFC3Data.SetPoint;
  1018. mfc[3] = MFC4Data.SetPoint;
  1019. mfc[4] = MFC5Data.SetPoint;
  1020. mfc[5] = MFC6Data.SetPoint;
  1021. mfc[6] = MFC7Data.SetPoint;
  1022. mfc[7] = MFC8Data.SetPoint;
  1023. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1024. string operation = GasIsFlowing ? "关闭" : "打开";
  1025. LOG.Info($"{ModuleName},{operation}GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})");
  1026. });
  1027. }
  1028. private void OnHe()
  1029. {
  1030. if (PVHe1ValveIsOpen == true)
  1031. {
  1032. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1033. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1034. }
  1035. else
  1036. {
  1037. if (HeIsPressureMode)
  1038. {
  1039. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1040. }
  1041. else
  1042. {
  1043. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1044. }
  1045. }
  1046. }
  1047. private void OnRf()
  1048. {
  1049. if (PMCurrentState == PMState.RfPowering)
  1050. {
  1051. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1052. }
  1053. else
  1054. {
  1055. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1056. }
  1057. }
  1058. private void OnPurge()
  1059. {
  1060. if (PMCurrentState == PMState.Purging)
  1061. {
  1062. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1063. }
  1064. else
  1065. {
  1066. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1067. }
  1068. }
  1069. private void OnVent()
  1070. {
  1071. if (PMCurrentState == PMState.Venting)
  1072. {
  1073. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1074. }
  1075. else
  1076. {
  1077. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1078. }
  1079. }
  1080. private void OnPump()
  1081. {
  1082. if (PMCurrentState == PMState.Pumping)
  1083. {
  1084. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1085. return;
  1086. }
  1087. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1088. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1089. // 设置底压
  1090. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1091. if (basePressure <= 0.01 || basePressure >= 1000)
  1092. {
  1093. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1094. return;
  1095. }
  1096. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1097. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1098. {
  1099. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1100. return;
  1101. }
  1102. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1103. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1104. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1105. }
  1106. private void OnOpenPump()
  1107. {
  1108. if (PMCurrentState == PMState.LaunchingPump)
  1109. {
  1110. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1111. return;
  1112. }
  1113. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1114. }
  1115. private void OnClosePump()
  1116. {
  1117. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1118. }
  1119. private void OnOpenTurboPump()
  1120. {
  1121. if (PMCurrentState == PMState.LaunchingTurboPump)
  1122. {
  1123. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1124. return;
  1125. }
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1127. }
  1128. private void OnCloseTurboPump()
  1129. {
  1130. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1131. }
  1132. private void OnOpenPendulumValve()
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1135. }
  1136. private void OnClosePendulumValve()
  1137. {
  1138. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1139. }
  1140. private void OnPinUpDown(object upDown)
  1141. {
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1143. }
  1144. private void OnLidUpDown(object upDown)
  1145. {
  1146. //var value = (bool)upDown;
  1147. if (upDown.ToString() == "Up")
  1148. {
  1149. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1150. }
  1151. else
  1152. {
  1153. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1154. }
  1155. }
  1156. private void OnSetSRf()
  1157. {
  1158. if (SRFData.IsRfOn == true)
  1159. {
  1160. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1161. }
  1162. else
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1165. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1166. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1167. }
  1168. }
  1169. private void OnSetBRf()
  1170. {
  1171. if (BRFData.IsRfOn == true)
  1172. {
  1173. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1174. }
  1175. else
  1176. {
  1177. if (GasIsFlowing == true)
  1178. {
  1179. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1180. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1181. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1182. }
  1183. }
  1184. }
  1185. private void OnPMAbort()
  1186. {
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1188. }
  1189. private void OnOpenButterflyValveView()
  1190. {
  1191. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1192. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1193. {
  1194. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1195. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1196. butterflyValveMessageBox.Left = 700;
  1197. butterflyValveMessageBox.Top = 600;
  1198. butterflyValveMessageBox.Show();
  1199. butterflyValveMessageBox.Owner = _mainWindow;
  1200. }
  1201. }
  1202. private void OnLoadRecipe()
  1203. {
  1204. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1205. }
  1206. private void OnHVSet()
  1207. {
  1208. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1209. }
  1210. private void OnRunRecipe(object obj)
  1211. {
  1212. string recipeName = SelectedRecipe;
  1213. if (recipeName == null)
  1214. {
  1215. return;
  1216. }
  1217. ClearData();
  1218. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1219. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1220. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1221. }
  1222. private void OnSetChillerTemp(object obj)
  1223. {
  1224. float offset;
  1225. float setPoint;
  1226. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1227. switch (chillerType)
  1228. {
  1229. case ChillerType.Chiller:
  1230. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1231. float.TryParse(value, out offset);
  1232. setPoint = ChillerTempSetpoint;
  1233. break;
  1234. case ChillerType.InnerChiller:
  1235. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1236. float.TryParse(Innervalue, out offset);
  1237. setPoint = InnerChillerTempSetpoint;
  1238. break;
  1239. case ChillerType.OuterChiller:
  1240. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1241. float.TryParse(Outervalue, out offset);
  1242. setPoint = OuterChillerTempSetpoint;
  1243. break;
  1244. case ChillerType.TopChiller:
  1245. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1246. float.TryParse(Topvalue, out offset);
  1247. setPoint = TopChillerTempSetpoint;
  1248. break;
  1249. default:
  1250. return;
  1251. }
  1252. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1253. }
  1254. private void OnOffChiller(object obj)
  1255. {
  1256. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1257. switch (chillerType)
  1258. {
  1259. case ChillerType.Chiller:
  1260. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1261. break;
  1262. case ChillerType.InnerChiller:
  1263. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1264. break;
  1265. case ChillerType.OuterChiller:
  1266. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1267. break;
  1268. case ChillerType.TopChiller:
  1269. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1270. break;
  1271. default:
  1272. return;
  1273. }
  1274. }
  1275. private void OnHeater(object obj)
  1276. {
  1277. if (IsAutoMode == true)
  1278. {
  1279. return;
  1280. }
  1281. AITHeaterData heaterData = obj as AITHeaterData;
  1282. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1283. if (heaterView == null || heaterView.IsVisible == false)
  1284. {
  1285. heaterView = new HeaterView(heaterData, ModuleName);
  1286. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1287. heaterView.Owner = _mainWindow;
  1288. heaterView.Show();
  1289. }
  1290. }
  1291. private void OnEndStep()
  1292. {
  1293. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1294. {
  1295. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1296. }
  1297. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1298. {
  1299. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1300. }
  1301. }
  1302. private void OnOnline()
  1303. {
  1304. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1305. }
  1306. private void OnOffline()
  1307. {
  1308. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1309. }
  1310. private async void OnAbortRecipe(object obj)
  1311. {
  1312. if (PMCurrentState != PMState.Processing)
  1313. {
  1314. return;
  1315. }
  1316. switch (obj.ToString())
  1317. {
  1318. case "0":
  1319. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1320. break;
  1321. case "1":
  1322. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1323. //if (ESCHVData.IsOn == true)
  1324. //{
  1325. // await Task.Delay(3000);
  1326. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1327. //}
  1328. break;
  1329. case "2":
  1330. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1331. await Task.Delay(3000);
  1332. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1333. break;
  1334. }
  1335. }
  1336. #endregion
  1337. #region 私有方法
  1338. private void ClearData()
  1339. {
  1340. ESCVoltage = 0;
  1341. SRFFwdPowerSetpoint = 0;
  1342. SRFMatchC1 = 0;
  1343. SRFMatchC2 = 0;
  1344. BRFFwdPowerSetpoint = 0;
  1345. BRFMatchC1 = 0;
  1346. BRFMatchC2 = 0;
  1347. HeGasSetpoint = 0;
  1348. MFC1SetPoint = 0;
  1349. MFC2SetPoint = 0;
  1350. MFC3SetPoint = 0;
  1351. MFC4SetPoint = 0;
  1352. MFC5SetPoint = 0;
  1353. MFC6SetPoint = 0;
  1354. MFC7SetPoint = 0;
  1355. MFC8SetPoint = 0;
  1356. }
  1357. private IEnumerable<string> GetFilesNames(string path)
  1358. {
  1359. if (Directory.Exists(path))
  1360. {
  1361. return Directory.GetFiles(path, "*.rcp")?
  1362. .Select(Path.GetFileNameWithoutExtension);
  1363. }
  1364. else
  1365. {
  1366. return new List<string>();
  1367. }
  1368. }
  1369. void timer_Tick(object sender, EventArgs e)
  1370. {
  1371. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1372. if (RtDataValues == null)
  1373. {
  1374. return;
  1375. }
  1376. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1377. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1378. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1379. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1380. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1381. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1382. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1383. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1384. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1385. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1386. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1387. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1388. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1389. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1390. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1391. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1392. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1393. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1394. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1395. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1396. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1397. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1398. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1399. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1400. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1401. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1402. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1403. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1404. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1405. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1406. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1407. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1408. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1409. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1410. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1411. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1412. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1413. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1414. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1415. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1416. IsProcessing = PMCurrentState == PMState.Processing;
  1417. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1418. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1419. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1420. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1421. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1422. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1423. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1424. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1425. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1426. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1427. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1428. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1429. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1430. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1431. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1432. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1433. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1434. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1435. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1436. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1437. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1438. ESCHePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ESCHePressure");
  1439. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1440. InnerTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerInnerTemp");
  1441. OuterTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerOuterTemp");
  1442. TopTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerTopTemp");
  1443. InnerChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.InnerChiller.IsOn");
  1444. OuterChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.OuterChiller.IsOn");
  1445. TopChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TopChiller.IsOn");
  1446. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1447. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1448. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1449. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1450. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1451. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1452. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1453. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1454. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1455. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1456. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1457. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1458. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1459. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1460. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1461. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1462. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1463. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1464. {
  1465. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1466. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1467. {
  1468. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1469. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1470. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1471. }
  1472. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1473. }
  1474. else
  1475. {
  1476. CurrentRecipeResult = null;
  1477. CurrentRecipeStep = null;
  1478. }
  1479. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 100)
  1480. {
  1481. ChamberPressureFeedBack = ProcessPressure;
  1482. }
  1483. else
  1484. {
  1485. ChamberPressureFeedBack = ChamberPressure;
  1486. }
  1487. IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1488. }
  1489. public void addDataKeys()
  1490. {
  1491. m_RtDataKeys.Clear();
  1492. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1493. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1494. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1495. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1496. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1497. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1498. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1499. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1500. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1501. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1502. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1503. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1504. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1505. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1506. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1507. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1508. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1509. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1510. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1511. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1512. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1513. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1514. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1515. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1516. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1517. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1518. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1519. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1520. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1521. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1523. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1524. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1525. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1526. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1527. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1529. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1530. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1531. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1532. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1533. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1534. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1535. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1536. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1537. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1538. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1539. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1540. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1541. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1542. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1543. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1544. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1545. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1546. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1547. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1548. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1549. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1550. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1551. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1552. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1553. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1554. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1555. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1556. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1557. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1558. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1559. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1560. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1561. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1562. m_RtDataKeys.Add($"{ModuleName}.InnerChiller.IsOn");
  1563. m_RtDataKeys.Add($"{ModuleName}.OuterChiller.IsOn");
  1564. m_RtDataKeys.Add($"{ModuleName}.TopChiller.IsOn");
  1565. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1566. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1567. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1568. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1569. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1570. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1571. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1572. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1573. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1574. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1575. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1576. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1577. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1578. }
  1579. #endregion
  1580. }
  1581. }