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					| LoadPrepareRoutine.cs | 253fcb8be2
					add CassetteArrive,CurrentSlot in UI,RT,Simulator | 1 year ago | 
		
			
			
			
				
					| LoadRoutine.cs | 253fcb8be2
					add CassetteArrive,CurrentSlot in UI,RT,Simulator | 1 year ago | 
		
			
			
			
				
					| LoadWithSMIFRoutine.cs | 0bea20360b
					add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM | 1 year ago | 
		
			
			
			
				
					| UnloadRoutine.cs | 6748e4b29b
					fix the bug in UnloadRoutine as the name of vce InnerDoor is fixed. | 1 year ago | 
		
			
			
			
				
					| UnloadWithSMIFRoutine.cs | 0bea20360b
					add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM | 1 year ago | 
		
			
			
			
				
					| VCEHomeRoutine.cs | 253fcb8be2
					add CassetteArrive,CurrentSlot in UI,RT,Simulator | 1 year ago | 
		
			
			
			
				
					| VceEntity.cs | 253fcb8be2
					add CassetteArrive,CurrentSlot in UI,RT,Simulator | 1 year ago |