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VenusSE
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afc3b9494f
VenusSE TM pressurecontrol update
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2 years ago |
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DeviceModelVenusDE_MF.xml
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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1 year ago |
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DeviceModelVenusSE_MF.xml
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d331213da1
1.SETM Pressure Control update
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1 year ago |
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DeviceModelVenus_MF.xml
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 year ago |
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SETMInterlock.xml
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1b165a2e61
Venus DE update && Venus SE simulator update
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1 year ago |
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TMInterlock.xml
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 year ago |
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_ioDefineVenusDE_MF.xml
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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1 year ago |
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_ioDefineVenusSETest_MF.xml
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9d9b666ea4
Venus SE Update
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1 year ago |
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_ioDefineVenusSE_MF.xml
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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_ioDefineVenus_MF.xml
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9163903164
Kepler2200优化
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1 year ago |
zhouhr
253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator