ManualTransfer.cs 15 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using Venus_Core;
  20. using Venus_RT.Modules.Schedulers;
  21. using Venus_RT.Scheduler;
  22. namespace Venus_RT.Modules
  23. {
  24. public class ManualTransfer : IRoutine
  25. {
  26. SchedulerTMRobot _tmRobot = (SchedulerTMRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot);
  27. SchedulerEfemRobot _efemRobot = (SchedulerEfemRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot);
  28. private Queue<MoveItem> _moveTaskQueue = new Queue<MoveItem>();
  29. private MoveItem _move_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  30. private MoveItem _current_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  31. private Guid _wafer_id;
  32. private R_TRIG _wafer_arrive_trig = new R_TRIG();
  33. private MovingStatus _moving_status = MovingStatus.Idle;
  34. public RState Start(params object[] objs)
  35. {
  36. // RESET
  37. _moveTaskQueue.Clear();
  38. _moving_status = MovingStatus.Idle;
  39. _wafer_arrive_trig.RST = true ;
  40. _move_item.SourceModule = (ModuleName)objs[0];
  41. _move_item.SourceSlot = (int)objs[1];
  42. _move_item.DestinationModule = (ModuleName)objs[2];
  43. _move_item.DestinationSlot = (int)objs[3];
  44. _wafer_id = WaferManager.Instance.GetWafer(_move_item.SourceModule, _move_item.SourceSlot).InnerId;
  45. if(IsCrossTransfer(_move_item))
  46. {
  47. var slot = SelectLLFreeSlot();
  48. if (slot.Module == ModuleName.System)
  49. return RState.Failed;
  50. // vac to atm
  51. if (ModuleHelper.IsPm(_move_item.SourceModule) || ModuleHelper.IsTMRobot(_move_item.SourceModule))
  52. {
  53. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, Hand.Blade1));
  54. if(ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  55. {
  56. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  57. }
  58. else
  59. {
  60. Hand hand = SelectEfemRobotFreeHand();
  61. if(hand == Hand.None)
  62. {
  63. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  64. return RState.Failed;
  65. }
  66. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, ModuleName.EfemRobot, (int)hand, hand));
  67. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  68. }
  69. }
  70. // atm to vac
  71. else
  72. {
  73. if (ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  74. {
  75. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, (Hand)_move_item.SourceSlot));
  76. }
  77. else
  78. {
  79. Hand hand = SelectEfemRobotFreeHand();
  80. if (hand == Hand.None)
  81. {
  82. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  83. return RState.Failed;
  84. }
  85. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  86. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, slot.Module, slot.Slot, hand));
  87. }
  88. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, Hand.Blade1));
  89. }
  90. }
  91. else if(IsVacTransfer(_move_item))
  92. {
  93. _moveTaskQueue.Enqueue(_move_item);
  94. }
  95. else // atm transfer
  96. {
  97. if(ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  98. {
  99. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.SourceSlot));
  100. }
  101. else if (ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  102. {
  103. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  104. }
  105. else
  106. {
  107. Hand hand = SelectEfemRobotFreeHand();
  108. if (hand == Hand.None)
  109. {
  110. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  111. return RState.Failed;
  112. }
  113. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  114. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  115. }
  116. }
  117. _current_item = _moveTaskQueue.Dequeue();
  118. _moving_status = MovingStatus.Waiting;
  119. return RState.Running;
  120. }
  121. public RState Monitor()
  122. {
  123. return MoveWaferForward();
  124. }
  125. public void Abort()
  126. {
  127. }
  128. public void Clear()
  129. {
  130. _moveTaskQueue.Clear();
  131. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  132. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  133. }
  134. private RState MoveWaferForward()
  135. {
  136. switch(_moving_status)
  137. {
  138. case MovingStatus.Waiting:
  139. {
  140. if(IsCurrentModuleReady())
  141. {
  142. // Post current item
  143. if(IsVacTransfer(_current_item))
  144. {
  145. _tmRobot.PostMoveItems(new MoveItem[1] { _current_item });
  146. }
  147. else
  148. {
  149. _efemRobot.PostMoveItems(new MoveItem[1] { _current_item });
  150. }
  151. _moving_status = MovingStatus.Moving;
  152. }
  153. }
  154. break;
  155. case MovingStatus.Moving:
  156. {
  157. _wafer_arrive_trig.CLK = IsArriveCurrentTarget();
  158. if (_wafer_arrive_trig.Q)
  159. {
  160. _moving_status = MovingStatus.Idle;
  161. }
  162. }
  163. break;
  164. case MovingStatus.Idle:
  165. {
  166. if(IsCurrentModuleReady())
  167. {
  168. if(_moveTaskQueue.Count > 0)
  169. {
  170. _current_item = _moveTaskQueue.Dequeue();
  171. _moving_status = MovingStatus.Waiting;
  172. }
  173. }
  174. break;
  175. }
  176. }
  177. return TransferStatus();
  178. }
  179. private bool IsVacTransfer(MoveItem item)
  180. {
  181. return ModuleHelper.IsPm(item.SourceModule) ||
  182. ModuleHelper.IsTMRobot(item.SourceModule) ||
  183. ModuleHelper.IsPm(item.DestinationModule) ||
  184. ModuleHelper.IsTMRobot(item.DestinationModule);
  185. }
  186. private bool IsCrossTransfer(MoveItem item)
  187. {
  188. if (ModuleHelper.IsLoadLock(item.DestinationModule) || ModuleHelper.IsLoadLock(item.SourceModule))
  189. return false;
  190. if (((ModuleHelper.IsPm(item.SourceModule) || ModuleHelper.IsTMRobot(item.SourceModule)) &&
  191. !ModuleHelper.IsPm(item.DestinationModule) && !ModuleHelper.IsTMRobot(item.DestinationModule)) ||
  192. ((ModuleHelper.IsPm(item.DestinationModule) || ModuleHelper.IsTMRobot(item.DestinationModule)) &&
  193. !ModuleHelper.IsPm(item.SourceModule) && !ModuleHelper.IsTMRobot(item.SourceModule)))
  194. return true;
  195. return false;
  196. }
  197. private bool IsArriveCurrentTarget()
  198. {
  199. var wafer = WaferManager.Instance.GetWafer(_current_item.DestinationModule, _current_item.DestinationSlot);
  200. return !wafer.IsEmpty && wafer.InnerId == _wafer_id;
  201. }
  202. private bool IsCurrentModuleReady()
  203. {
  204. return (IsVacTransfer(_current_item) ? _tmRobot.IsAvailable : _efemRobot.IsAvailable) &&
  205. _isModuleReady(_current_item.SourceModule) &&
  206. _isModuleReady(_current_item.DestinationModule);
  207. }
  208. private bool IsTransferError()
  209. {
  210. return (IsVacTransfer(_current_item) ? _tmRobot.IsError : _efemRobot.IsError) ||
  211. _isModuleError(_current_item.SourceModule) ||
  212. _isModuleError(_current_item.DestinationModule);
  213. }
  214. private bool _isModuleReady(ModuleName module)
  215. {
  216. return Singleton<TransferModule>.Instance.GetScheduler(module).IsAvailable;
  217. }
  218. private bool _isModuleError(ModuleName module)
  219. {
  220. return Singleton<TransferModule>.Instance.GetScheduler(module).IsError;
  221. }
  222. private Hand SelectEfemRobotFreeHand()
  223. {
  224. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  225. return Hand.Blade1;
  226. else if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  227. return Hand.Blade2;
  228. else
  229. return Hand.None;
  230. }
  231. private SlotItem SelectLLFreeSlot()
  232. {
  233. foreach(var ll in new ModuleName[2] { ModuleName.LLA, ModuleName.LLB})
  234. {
  235. if (ModuleHelper.IsInstalled(ll) && _isModuleReady(ll))
  236. {
  237. for (int i = 0; i < 4; i++)
  238. {
  239. if (WaferManager.Instance.CheckNoWafer(ll, i))
  240. return new SlotItem(ll, i);
  241. }
  242. }
  243. }
  244. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, "Cannot move wafer as no valid Loadlock slot");
  245. return new SlotItem(ModuleName.System, -1);
  246. }
  247. private RState TransferStatus()
  248. {
  249. if (IsTransferError())
  250. return RState.Failed;
  251. if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Idle)
  252. return RState.End;
  253. return RState.Running;
  254. }
  255. }
  256. public class ReturnAllWafer : IRoutine
  257. {
  258. private List<ModuleName> _moduleList = new List<ModuleName> { ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner, ModuleName.LLA, ModuleName.LLB, ModuleName.TMRobot, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD };
  259. private ManualTransfer _manualTransfer;
  260. private Queue<MoveItem> _returnTaskQueue = new Queue<MoveItem>();
  261. private MoveItem _current_item;
  262. public ReturnAllWafer(ManualTransfer manualTransfer)
  263. {
  264. _manualTransfer = manualTransfer;
  265. }
  266. public RState Start(params object[] objs)
  267. {
  268. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  269. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  270. foreach(var mod in _moduleList)
  271. {
  272. if (ModuleHelper.IsInstalled(mod) && Singleton<TransferModule>.Instance.GetScheduler(mod).IsAvailable)
  273. {
  274. PushWaferToReturnQueqe(mod, 0);
  275. if (ModuleHelper.IsEFEMRobot(mod) || ModuleHelper.IsTMRobot(mod))
  276. {
  277. PushWaferToReturnQueqe(mod, 1);
  278. }
  279. else if (ModuleHelper.IsLoadLock(mod))
  280. {
  281. int nSlotNumber = SC.GetValue<int>($"{mod}.SlotNumber");
  282. for (int i = 1; i < nSlotNumber; i++)
  283. {
  284. PushWaferToReturnQueqe(mod, i);
  285. }
  286. }
  287. }
  288. }
  289. if (_returnTaskQueue.Count == 0)
  290. return RState.Failed;
  291. _current_item = _returnTaskQueue.Dequeue();
  292. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  293. return RState.Running;
  294. }
  295. public RState Monitor()
  296. {
  297. var ret = _manualTransfer.Monitor();
  298. if (ret == RState.End)
  299. {
  300. if (_returnTaskQueue.Count > 0)
  301. {
  302. _current_item = _returnTaskQueue.Dequeue();
  303. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  304. }
  305. else
  306. return RState.End;
  307. }
  308. else if (ret == RState.Failed || ret == RState.Timeout)
  309. {
  310. LOG.Write(eEvent.ERR_ROUTINE_FAILED, ModuleName.System,"Manual Transfer", $"Return Wafer {_current_item.SourceModule}{_current_item.SourceSlot} failed");
  311. return RState.Failed;
  312. }
  313. return RState.Running;
  314. }
  315. public void Abort()
  316. {
  317. }
  318. public void Clear()
  319. {
  320. _returnTaskQueue.Clear();
  321. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  322. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  323. }
  324. private void PushWaferToReturnQueqe(ModuleName mod, int nSlot)
  325. {
  326. var wafer = WaferManager.Instance.GetWafer(mod, nSlot);
  327. if (!wafer.IsEmpty)
  328. {
  329. _returnTaskQueue.Enqueue(new MoveItem(mod, nSlot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, Hand.Blade1));
  330. }
  331. }
  332. }
  333. }