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VenusSE
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VenusSEInterlock.xml

VenusSEInterlock.xml 25 KB
History Raw

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 

  4.   <Action do="DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    5. 

  5.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
    6. 

  6.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-59" />
    7. 

  7.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
    8. 

  8.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    9. 

  9.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    10. 

  10.   </Action>
    11. 

  11. 

  12.   <Action do="DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    13. 

  13.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    14. 

  14.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    15. 

  15.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    16. 

  16.   </Action>
    17. 

  17. 

  18.   <Action do="DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    19. 

  19.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    20. 

  20.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    21. 

  21.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    22. 

  22.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    23. 

  23.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    24. 

  24.   </Action>
    25. 

  25. 

  26.   <Action do="DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    27. 

  27.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    28. 

  28.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    29. 

  29.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    30. 

  30.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    31. 

  31.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    32. 

  32.   </Action>
    33. 

  33. 

  34.   <Action do="DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    35. 

  35.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    36. 

  36.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    37. 

  37.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    38. 

  38.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    39. 

  39.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    40. 

  40.   </Action>
    41. 

  41. 

  42.   <Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    43. 

  43.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    44. 

  44.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    45. 

  45.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    46. 

  46.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    47. 

  47.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    48. 

  48.   </Action>
    49. 

  49. 

  50.   <Action do="DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    51. 

  51.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    52. 

  52.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    53. 

  53.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    54. 

  54.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    55. 

  55.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    56. 

  56.   </Action>
    57. 

  57. 

  58.   <Action do="DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    59. 

  59.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    60. 

  60.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    61. 

  61.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    62. 

  62.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    63. 

  63.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    64. 

  64.   </Action>
    65. 

  65. 

  66.   <Action do="DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    67. 

  67.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    68. 

  68.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    69. 

  69.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    70. 

  70.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    71. 

  71.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    72. 

  72.   </Action>
    73. 

  73. 

  74.   <Action do="DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    75. 

  75.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    76. 

  76.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    77. 

  77.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    78. 

  78.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    79. 

  79.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    80. 

  80.   </Action>
    81. 

  81. 

  82.   <Action do="DO_PV51" value="true" tip="PV51" tip.zh-CN="" tip.en-US="DO-57" >
    83. 

  83.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    84. 

  84.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    85. 

  85.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    86. 

  86.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    87. 

  87.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    88. 

  88.   </Action>
    89. 

  89. 

  90.   <Action do="DO_PV52" value="true" tip="PV52" tip.zh-CN="" tip.en-US="DO-58" >
    91. 

  91.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    92. 

  92.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    93. 

  93.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    94. 

  94.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    95. 

  95.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    96. 

  96.   </Action>
    97. 

  97. 

  98.   <Action do="DO_PV61" value="true" tip="PV61" tip.zh-CN="" tip.en-US="DO-59" >
    99. 

  99.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    100. 

  100.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    101. 

  101.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    102. 

  102.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    103. 

  103.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    104. 

  104.   </Action>
    105. 

  105. 

  106.   <Action do="DO_PV62" value="true" tip="PV62" tip.zh-CN="" tip.en-US="DO-60" >
    107. 

  107.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    108. 

  108.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    109. 

  109.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    110. 

  110.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    111. 

  111.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    112. 

  112.   </Action>
    113. 

  113. 

  114.   <Action do="DO_PV71" value="true" tip="PV71" tip.zh-CN="" tip.en-US="DO-61" >
    115. 

  115.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    116. 

  116.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    117. 

  117.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    118. 

  118.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    119. 

  119.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    120. 

  120.   </Action>
    121. 

  121. 

  122.   <Action do="DO_PV72" value="true" tip="PV72" tip.zh-CN="" tip.en-US="DO-62" >
    123. 

  123.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    124. 

  124.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    125. 

  125.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    126. 

  126.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    127. 

  127.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    128. 

  128.   </Action>
    129. 

  129. 

  130.   <Action do="DO_PV81" value="true" tip="PV81" tip.zh-CN="" tip.en-US="DO-63" >
    131. 

  131.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    132. 

  132.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    133. 

  133.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    134. 

  134.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    135. 

  135.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    136. 

  136.   </Action>
    137. 

  137. 

  138.   <Action do="DO_PV82" value="true" tip="PV82" tip.zh-CN="" tip.en-US="DO-64" >
    139. 

  139.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    140. 

  140.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    141. 

  141.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    142. 

  142.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    143. 

  143.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    144. 

  144.   </Action>
    145. 

  145. 

  146.   <Action do="DO_PV91" value="true" tip="PV91" tip.zh-CN="" tip.en-US="DO-65" >
    147. 

  147.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    148. 

  148.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    149. 

  149.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    150. 

  150.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    151. 

  151.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    152. 

  152.   </Action>
    153. 

  153. 

  154.   <Action do="DO_PV92" value="true" tip="PV92" tip.zh-CN="" tip.en-US="DO-66" >
    155. 

  155.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    156. 

  156.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    157. 

  157.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    158. 

  158.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    159. 

  159.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    160. 

  160.   </Action>
    161. 

  161. 

  162.   <Action do="DO_PVA1" value="true" tip="PVA1" tip.zh-CN="" tip.en-US="DO-67" >
    163. 

  163.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    164. 

  164.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    165. 

  165.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    166. 

  166.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    167. 

  167.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    168. 

  168.   </Action>
    169. 

  169. 

  170.   <Action do="DO_PVA2" value="true" tip="PVA2" tip.zh-CN=""	tip.en-US="DO-68" >
    171. 

  171.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    172. 

  172.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    173. 

  173.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    174. 

  174.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    175. 

  175.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    176. 

  176.   </Action>
    177. 

  177. 

  178.   <Action do="DO_PVB1" value="true" tip="PVB1" tip.zh-CN="" tip.en-US="DO-69" >
    179. 

  179.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    180. 

  180.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    181. 

  181.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    182. 

  182.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    183. 

  183.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    184. 

  184.   </Action>
    185. 

  185. 

  186.   <Action do="DO_PVB2" value="true" tip="PVB2" tip.zh-CN="" tip.en-US="DO-70" >
    187. 

  187.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    188. 

  188.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    189. 

  189.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    190. 

  190.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    191. 

  191.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    192. 

  192.   </Action>
    193. 

  193. 

  194. 

  195.   <Action do="DO_PVC1" value="true" tip="PVC1" tip.zh-CN="" tip.en-US="DO-71" >
    196. 

  196.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    197. 

  197.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    198. 

  198.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    199. 

  199.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    200. 

  200.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    201. 

  201.   </Action>
    202. 

  202. 

  203.   <Action do="DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
    204. 

  204.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    205. 

  205.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    206. 

  206.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    207. 

  207.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />    
    208. 

  208.     <Limit do="DO_Soft_Pumping_Valve"		value="false" tip="Soft Pumping Valve"		tip.zh-CN="" tip.en-US="DO-22" />
    209. 

  209.     <Limit do="DO_Fast_Pumping_Valve"	value="false" tip="Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
    210. 

  210.   </Action>
    211. 

  211. 

  212.   <Action do="DO_PVC2" value="true" tip="PVC2" tip.zh-CN="" tip.en-US="DO-72" >
    213. 

  213.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    214. 

  214.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    215. 

  215.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    216. 

  216.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    217. 

  217.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    218. 

  218.   </Action>
    219. 

  219. 

  220.   <Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    221. 

  221.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    222. 

  222.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    223. 

  223.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    224. 

  224.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    225. 

  225.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    226. 

  226.   </Action>
    227. 

  227. 

  228.   <Action do="DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    229. 

  229.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    230. 

  230.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    231. 

  231.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    232. 

  232.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    233. 

  233.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    234. 

  234.   </Action>
    235. 

  235. 

  236.   <Action do="DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    237. 

  237.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    238. 

  238.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    239. 

  239.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    240. 

  240.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    241. 

  241.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    242. 

  242.   </Action>
    243. 

  243. 

  244.   <Action do="DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    245. 

  245.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    246. 

  246.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    247. 

  247.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    248. 

  248.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    249. 

  249.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    250. 

  250.   </Action>
    251. 

  251. 

  252.   <Action do="DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    253. 

  253.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    254. 

  254.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    255. 

  255.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    256. 

  256.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    257. 

  257.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    258. 

  258.   </Action>
    259. 

  259. 

  260.   <Action do="DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    261. 

  261.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    262. 

  262.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    263. 

  263.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    264. 

  264.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    265. 

  265.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    266. 

  266.   </Action>
    267. 

  267. 

  268.   <Action do="DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    269. 

  269.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    270. 

  270.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    271. 

  271.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    272. 

  272.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    273. 

  273.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    274. 

  274.   </Action>
    275. 

  275. 

  276.   <Action do="DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    277. 

  277.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    278. 

  278.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    279. 

  279.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    280. 

  280.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    281. 

  281.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    282. 

  282.   </Action>
    283. 

  283. 

  284.   <Action do="DO_MFC9_Valve" value="true" tip="MFC9 Valve" tip.zh-CN="" tip.en-US="DO-52" >
    285. 

  285.     <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    286. 

  286.     <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
    287. 

  287.     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    288. 

  288.     <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
    289. 

  289.     <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
    290. 

  290.   </Action>
    291. 

  291.   
    292. 

  292.   <Action do="DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    293. 

  293.     <Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    294. 

  294.   </Action>
    295. 

  295. 

  296.   <Action do="DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
    297. 

  297.     <Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    298. 

  298.   </Action>
    299. 

  299. 

  300.   <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
    301. 

  301.     <Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    302. 

  302.   </Action>
    303. 

  303. 

  304.   <Action do="DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
    305. 

  305.     <Limit di="DI_CDA_Pressure_Switch"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
    306. 

  306. 

  307.   </Action>
    308. 

  308. 

  309.   <Action do="DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
    310. 

  310.     <Limit di="DI_PM_VAC_Switch"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
    311. 

  311.   </Action>
    312. 

  312. 

  313.   <Action do="DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
    314. 

  314.     <Limit di="DI_CHB_Wall_OT_Switch_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
    315. 

  315.   </Action>
    316. 

  316. 

  317. 

  318. 

  319. </Interlock>
    320.