PumpDownRoutine.cs 12 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285
  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. namespace Venus_RT.Modules.PMs
  9. {
  10. class PumpDownRoutine : PMRoutineBase, IRoutine
  11. {
  12. private enum PumpStep
  13. {
  14. kDelay_2s,
  15. kCloseISOValve,
  16. kSoftPump,
  17. kFastPump,
  18. kHe2ExDelay,
  19. kPVHe2,
  20. kISOValve,
  21. kTurboN2Purge,
  22. kVATValve,
  23. kOpenTurboPumpPurgeGasFinal,
  24. kOpenTurboPump,
  25. kGasFinal,
  26. kFinalStep,
  27. kCloseValve,
  28. vFastPump,
  29. kEnd,
  30. }
  31. //private int _ventTime;
  32. private int _pump_delay = 5000;
  33. private int _roughPumpPressure = 75000;
  34. private int _vHe2FlowPressure = 200;
  35. private int _forelinePressure = 200;
  36. private int _basePressure = 10;
  37. private JetChamber jetChamber = JetChamber.None;
  38. //private bool needsoft = true;
  39. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  40. {
  41. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  42. Name = "PumpDown";
  43. //if (jetChamber == JetChamber.VenusDE)
  44. //{
  45. // needsoft = false;
  46. //}
  47. }
  48. public RState Start(params object[] objs)
  49. {
  50. if (CheckLid() &&
  51. CheckSlitDoor())
  52. {
  53. Reset();
  54. _chamber.CloseValves();
  55. if(_chamber.ChamberType == JetChamber.VenusSE || _chamber.ChamberType == JetChamber.VenusDE)
  56. _chamber.OpenValve(ValveType.TurboPumpPurge, false);
  57. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  58. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  59. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  60. if(jetChamber != JetChamber.VenusSE && jetChamber != JetChamber.VenusDE)
  61. _chamber.OpenValve(ValveType.PVN22, true);
  62. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  63. _chamber.TurnPendulumValve(false);
  64. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  65. //前端压力值高于某个数值
  66. _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
  67. if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
  68. {
  69. LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
  70. return RState.Failed;
  71. }
  72. return Runner.Start(Module, Name);
  73. }
  74. return RState.Failed;
  75. }
  76. public RState Monitor()
  77. {
  78. switch (jetChamber)
  79. {
  80. //case JetChamber.Venus:
  81. case JetChamber.VenusSE:
  82. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  83. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  84. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
  85. .Run(PumpStep.vFastPump, VenusFastPump, () => { return _chamber.ChamberPressure <= _vHe2FlowPressure; })
  86. .Delay(PumpStep.kHe2ExDelay, 3000)
  87. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  88. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  89. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  90. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  91. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  92. .Run(PumpStep.kCloseValve, CloseValve, NullFun)
  93. .End(PumpStep.kEnd, NullFun, _delay_1s);
  94. break;
  95. case JetChamber.Kepler2300:
  96. case JetChamber.Kepler2200A:
  97. case JetChamber.Kepler2200B:
  98. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  99. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  100. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), CheckToCrossPressure)
  101. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  102. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  103. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  104. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  105. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  106. .End(PumpStep.kEnd, NullFun, _delay_1s);
  107. break;
  108. case JetChamber.VenusDE:
  109. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  110. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  111. .Run(PumpStep.kFastPump, OpenDEFastPump, VenusFastPumpOver )
  112. .Delay(PumpStep.kHe2ExDelay, 3000)
  113. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  114. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  115. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  116. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  117. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  118. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  119. .Run(PumpStep.kCloseValve,CloseValve,NullFun)
  120. .End(PumpStep.kEnd, NullFun, _delay_1s);
  121. break;
  122. }
  123. //if (jetChamber == JetChamber.VenusDE)
  124. //{
  125. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  126. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  127. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  128. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  129. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  130. // .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  131. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  132. // .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  133. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  134. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  135. //}
  136. //else
  137. //{
  138. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  139. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  140. // .RunIf(PumpStep.kSoftPump, needsoft, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  141. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  142. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  143. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  144. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  145. // .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  146. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  147. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  148. //}
  149. return Runner.Status;
  150. }
  151. private bool CheckToCrossPressure()
  152. {
  153. if (_chamber.ChamberPressure < _roughPumpPressure)
  154. {
  155. _chamber.OpenValve(ValveType.SoftPump, false);
  156. return true;
  157. }
  158. else
  159. return false;
  160. }
  161. private bool CloseValve()
  162. {
  163. _chamber.OpenValve(ValveType.PVN22, false);
  164. return true;
  165. }
  166. private bool OpenTurboPumpPurgeGasFinalValve()
  167. {
  168. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  169. _chamber.OpenValve(ValveType.GasFinal, true);
  170. return true;
  171. }
  172. private bool OpenTurboValve()
  173. {
  174. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  175. return true;
  176. }
  177. private bool OpenGuageGasFinalValve()
  178. {
  179. _chamber.OpenValve(ValveType.GasFinal, true);
  180. _chamber.OpenValve(ValveType.Guage, true);
  181. return true;
  182. }
  183. private bool VenusFastPumpOver()
  184. {
  185. if (_chamber.ChamberPressure < _vHe2FlowPressure)
  186. {
  187. _chamber.OpenValve(ValveType.FastPump, false);
  188. return true;
  189. }
  190. else
  191. return false;
  192. }
  193. private bool VenusFastPump()
  194. {
  195. _chamber.OpenValve(ValveType.SoftPump, false);
  196. if (_chamber.ChamberPressure > _vHe2FlowPressure)
  197. {
  198. _chamber.OpenValve(ValveType.FastPump, true);
  199. }
  200. return true;
  201. }
  202. private bool OpenFastPump()
  203. {
  204. _chamber.OpenValve(ValveType.SoftPump, false);
  205. _chamber.OpenValve(ValveType.FastPump, true);
  206. return true;
  207. }
  208. private bool OpenDEFastPump()
  209. {
  210. _chamber.OpenValve(ValveType.PVHe2, false);
  211. //_chamber.OpenValve(ValveType.SoftPump, false);
  212. if (_chamber.ChamberPressure > _vHe2FlowPressure)
  213. {
  214. _chamber.OpenValve(ValveType.FastPump, true);
  215. }
  216. return true;
  217. }
  218. private bool OpenHe2Valve()
  219. {
  220. _chamber.OpenValve(ValveType.FastPump, false);
  221. _chamber.OpenValve(ValveType.PVHe2, true);
  222. return true;
  223. }
  224. private bool OpenISOValve()
  225. {
  226. _chamber.OpenValve(ValveType.FastPump, false);
  227. _chamber.OpenValve(ValveType.PVHe2, false);
  228. // ISO Valve
  229. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  230. return true;
  231. }
  232. private bool OpenVATValve()
  233. {
  234. return _chamber.TurnPendulumValve(true);
  235. }
  236. private bool FinalStep()
  237. {
  238. _chamber.OpenValve(ValveType.Guage, true);
  239. //2023/04/25修改
  240. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  241. //_chamber.OpenValve(ValveType.GasFinal, true);
  242. return true;
  243. }
  244. public void Abort()
  245. {
  246. CloseAllValves();
  247. }
  248. }
  249. }