Kepler-Release/Venus/Venus_RT/Config/DeviceModelVenus.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Venus" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  <IoValves>
	<IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
	        isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
			isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />

	<IoValve id="ValveN2" display="N2 valve" schematicId=""
            unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe1"
			diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PVHe2"
			diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
			diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
			diCloseSensor="" diOpenSensor="" />

	<IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
        unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveCHBPurge" display="CHBPurge valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CHB_Purge_Valve"
			diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveCHBVent" display="CHBVent valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CHB_Vent_Valve"
			diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
			diCloseSensor="" diOpenSensor="" />
	<IoValve id="ValveGuage" display="Guage valve" schematicId=""
			unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Guage_Valve"
			diCloseSensor="" diOpenSensor="" />
	  <IoValve id="ValveLoadlockVent" display="Loadlock Vent valve" schematicId=""
			  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Loadlock_Vent_Valve"
			  diCloseSensor="" diOpenSensor="" />
	  <IoValve id="ValveLoadlockPumping" display="Loadlock Pumping valve" schematicId=""
			  unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Loadlock_Pumping_Valve"
			  diCloseSensor="" diOpenSensor="" />
	  
    <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
            isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
		    isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
		    isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
    
  </IoValves>

  <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
    <IoMfc id="MfcGas1" display="N2" schematicId="MFC1" unit="sccm"
           aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC1_Pressure"
           scGasName="Gas1Name"
           scEnable="Gas1Enable"
           scN2Scale="Gas1MfcN2Scale"
           scScaleFactor="Gas1MfcScaleFactor"
           scAlarmRange="Gas1MfcAlarmRange"
           scEnableAlarm="Gas1MfcEnableAlarm"
           scAlarmTime="Gas1MfcAlarmTime"
           scFlowRegulationFactor="Gas1MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc id="MfcGas2" display="unKnown" schematicId="MFC2" unit="sccm"
           aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC2_Pressure"
           scGasName="Gas2Name"
           scEnable="Gas2Enable"
           scN2Scale="Gas2MfcN2Scale"
           scScaleFactor="Gas2MfcScaleFactor"
           scAlarmRange="Gas2MfcAlarmRange"
           scEnableAlarm="Gas2MfcEnableAlarm"
           scAlarmTime="Gas2MfcAlarmTime"
           scFlowRegulationFactor="Gas2MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc id="MfcGas3" display="O2" schematicId="MFC3" unit="sccm"
           aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC3_Pressure"
           scGasName="Gas3Name"
           scEnable="Gas3Enable"
           scN2Scale="Gas3MfcN2Scale"
           scScaleFactor="Gas3MfcScaleFactor"
           scAlarmRange="Gas3MfcAlarmRange"
           scEnableAlarm="Gas3MfcEnableAlarm"
           scAlarmTime="Gas3MfcAlarmTime"
           scFlowRegulationFactor="Gas3MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
          aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
          diPressureAlarm="DI_MFC4_Pressure"
          scGasName="Gas4Name"
          scEnable="Gas4Enable"
          scN2Scale="Gas4MfcN2Scale"
          scScaleFactor="Gas4MfcScaleFactor"
          scAlarmRange="Gas4MfcAlarmRange"
          scEnableAlarm="Gas4MfcEnableAlarm"
          scAlarmTime="Gas4MfcAlarmTime"
          scFlowRegulationFactor="Gas4MfcFlowRegulationFactor"
          scDefaultSetPoint="" />
    <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
           aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC5_Pressure"
           scGasName="Gas5Name"
           scEnable="Gas5Enable"
           scN2Scale="Gas5MfcN2Scale"
           scScaleFactor="Gas5MfcScaleFactor"
           scAlarmRange="Gas5MfcAlarmRange"
           scEnableAlarm="Gas5MfcEnableAlarm"
           scAlarmTime="Gas5MfcAlarmTime"
           scFlowRegulationFactor="Gas5MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
  </IoMfcs>

  <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
    <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
    <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
    <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
    <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
    <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  </IoGasSticks>

  <IoSensors>
    <IoSensor id="SensorATMSwitch" display="ATM Switch"  schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorVacSwitch" display="VAC Switch"  schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorWaterFlowOk" display="Water Flow OK"  schematicId="" unit="" di="DI_Cooling_Water_Flow_SW" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="sensor water flow abnormal" alarmText="" />
    <IoSensor id="SensorCoolantInletTCOK" display="Coolant Inlet TC OK"  schematicId="" unit="" di="DI_Coolant_Inlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Inlet TC Broken Alarm" />
    <IoSensor id="SensorCoolantOutletTCOK" display="Coolant Outlet TC OK"  schematicId="" unit="" di="DI_Coolant_Outlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Outlet TC Broken Alarm" />
    <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok"  schematicId="" unit="" di="DI_Water_Leak" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor water leak" />
    <IoSensor id="N2PressureOk" display="N2 Pressure OK"  schematicId="" unit="" di="DI_N2_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="N2 Pressure Warning" alarmText="" />
 
    <IoSensor id="LE_OT" display="LE OT"  schematicId="" unit="" di="DI_LE_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="LE OT SW Alarm" />
    <IoSensor id="GB_Pressure" display="GB Pressure"  schematicId="" unit="" di="DI_GB_Pressure_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Pressure SW Alarm" />
    <IoSensor id="GB_Door" display="GB Door"  schematicId="" unit="" di="DI_GB_Door_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Door SW Alarm" />
    <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK"  schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor CDA pressure abnormal" />
    <IoSensor id="SensorArmNotExtend" display="Arm not Extend"  schematicId="" unit="" di="DI_ARM_Not_Extend_to_PM" isLowAsNormal="" textOutTrigValue="true" infoText="Sensor arm extended" warningText="" alarmText="" />
    <IoSensor id="SourceFan1" display="Source Fan1"  schematicId="" unit="" di="DI_SourceFan1" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="Source Fan1 Warning" alarmText="" />
    <IoSensor id="SourceFan2" display="Source Fan2"  schematicId="" unit="" di="DI_SourceFan2" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="Source Fan2 Warning" alarmText="" />
    <IoSensor id="GeneratorInterlock" display="RF hardware interlock"  unit="" schematicId="" di="DI_Generator_Hardware_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="Generator interlock" warningText="" alarmText="" />
  </IoSensors>
	
    <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
	    <IoPressureMeter id="ProcessGauge" display="process Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Process_pressure" diGaugeFail="DI_Process_pressure_Alarm" scPrecision="" scOffset=""/>
	    <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Chamber_pressure"
						    diGaugeFail="DI_Chamber_pressure_Alarm"
						    scPrecision="ChamberPressureGaugePrecision"
						    scOffset=""/>
	    <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
						    aiValue="AI_Foreline_pressure" diGaugeFail="DI_Foreline_pressure_Alarm" scPrecision="" scOffset=""/>
    </IoPressureMeters>
	
  <IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
    <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
            diBreakerState=""
            diRunning="DI_Pump_Running"
            diStart=""
            diStop=""
            diAlarm="DI_Pump_Alarm"
            diWarning="DI_Pump_Warning"
            diPumpTempAlarm=""
            diN2Alarm="DI_Pump_N2_Purge_Alarm"
            diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
            diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"

            doStart="DO_Pump_Start"
            doStop="DO_Pump_Stop"
            doWaterFlowAlarm=""
            doN2PressureAlarm=""

            aiWaterFlow=""
            aiN2Pressure=""
            aoN2PressureAlarmMaxValue=""
            aoN2PressureAlarmMinValue=""
            aoWaterFlowAlarmMaxValue=""
            aoWaterFlowAlarmMinValue=""

            scEnableDryPump="EnableDryPump"
            scEnableWaterFlow="PumpEnableWaterFlow"
            scWaterFlowMinValue="PumpWaterFlowMinValue"
            scWaterFlowMaxValue="PumpWaterFlowMaxValue"
            scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
            scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
            scEnableN2Pressure="PumpEnableN2Pressure"
            scN2PressureMinValue="PumpN2PressureMinValue"
            scN2PressureMaxValue="PumpN2PressureMaxValue"
            scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
            scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  </IoPumps>

	<IoRfs assembly="Venus_RT" classType="Venus_RT.Devices.IoRf" IsEnabled = "False">
		<IoRf  id="Rf"
				display="RF Generator"
				schematicId=""
				unit=""
				doOnOff="DO_Generator_Power_ON"
				diOnOffFeedback="DI_Generator_Power_Status"
				diInterlock="DI_Generator_Hardware_Interlock"
				diOverTemp =""
				aiCurrent=""
				aiVoltage=""
				diBreakerState=""
				diIArc=""
				diOffline=""
				diVArc=""
				doWaterFlowAlarm=""
				doWaterFlowWarning=""

				aoMatchMode=""
				aoMatchPositionC1=""
				aoMatchPositionC2=""
				aoWorkMode=""
				aoFrequency=""
				aoDuty=""
				aoPower="AO_Generator_Power_Setpoint"
				aoCoefficient=""
				aiWaterFlow=""
				aiForwardPower="AI_Generator_Forward_Power"
				aiReflectPower="AI_Generator_Reflect_Power"
				aiMatchMode =""
				aiMatchPositionC1=""
				aiMatchPositionC2=""

				scMatchMode="MatchMode"
				scMatchPositionC1="MatchPositionC1"
				scMatchPositionC2="MatchPositionC2"
				scPowerAlarmRange="RfPowerAlarmRange"
				scPowerAlarmTime="RfPowerAlarmTime"
				scReflectPowerAlarmRange="RfReflectPowerAlarmRange"
				scReflectPowerAlarmTime="RfReflectPowerAlarmTime"
				scPowerRange="PowerRange"
				scCoefficient="Coefficient"
				scEnablePulsingFunction="EnablePulsingFunction"
				scEnableC1C2Position="EnableC1C2Position"
				scEnableReflectPower="EnableReflectPower"
				scEnableVoltageCurrent="EnableVoltageCurrent"
				scPowerRegulationFactor="PowerRegulationFactor" />
	</IoRfs>
	
  <IoThrottleValves assembly="Venus_RT" classType="Venus_RT.Devices.IoThrottleValve">
    <IoThrottleValve  id="ThrottleValve" display="" schematicId="" unit=""
                      aiPositionFeedback="AI_Throttle_Valve_Real_Position"
                      aiPressureFeedback="AI_Throttle_Valve_Real_Pressure"
                      aiState=""
                      aoPositionSetPoint="AO_Throttle_Valve_Position_Setpoint"
                      aoPressureSetPoint="AO_Throttle_Valve_Pressure_Setpoint"
                      aoPressureMode="AO_Throttle_Valve_Work_Mode" />
  </IoThrottleValves>

  <IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
    <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
                       diLogicProcessGasFlowing=""
                       scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
                       scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
                       scIsIndependentControl="IsIndependentControl"
                       scIsBoostPumpInstalled="EnableBoosterPump"
                       scTvInstalled="EnableThrottleValve"
                       boost="" tv="ThrottleValve" drypump="MainPump"
                       pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" />
  </IoPressureControls>

  <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
    <IoHeater id="HeaterChamber" display="Chamber Heater" schematicId="VCHTR" unit="℃"
           doPowerOn="DO_Substrate_Heater_On"
           diDeviation="DI_Substrate_TC_Deviation_out_of_range"
           diPowerOnFeedback="DI_Substrate_Heater_On_FB"
           diControlTcBroken="DI_Substrate_Control_TC_Broken_Alarm"
           diMonitorTcBroken="DI_Substrate_Monitor_TC_Broken_Alarm"
           aoSetPoint="AO_Substrate_Temperature_Setpoint"
           aoSetPointLimit="AO_Substrate_Temp_Limit_Setpoint"
           aiFeedback="AI_Substrate_Control_TC_Temp"
           aiMonitor="AI_Substrate_Monitor_TC_Temp"
           aiCoolantInletTemp="AI_Coolant_Inlet_Temp"
           aiCoolantOutletTemp="AI_Coolant_Outlet_Temp"
           scSetPointLimit="ChamberHeaterSetPointLimit" />

    <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
         doPowerOn="DO_Forline_Heater_On"
         diDeviation="DI_Foreline_TC_Deviation_out_of_range"
         diPowerOnFeedback="DI_Foreline_Heater_On_FB"
         diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
         diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
         aoSetPoint="AO_Foreline_Temperature_Setpoint"
         aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
         aiFeedback="AI_Foreline_Control_TC_Temp"
         aiMonitor="AI_Foreline_Monitor_TC_Temp"
         scSetPointLimit="ForeLineHeaterSetPointLimit" />

    <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
              doPowerOn="DO_CHB_Wall_Heater_On"

              diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
              diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
              diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
              diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"

              aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
              aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"

              aiFeedback="AI_CHB_Wall_Control_TC_Temp"
              aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"

              scSetPointLimit="WallHeaterSetPointLimit" />


    <IoHeater id="GridHeater" display="Grid Heater" schematicId="" unit="℃"
              doPowerOn=""

              diDeviation=""
              diPowerOnFeedback=""
              diControlTcBroken="DI_Grid_TC_Broken_Alarm"
              diMonitorTcBroken=""

              aoSetPoint=""
              aoSetPointLimit=""

              aiFeedback="AI_Grid_TC_Temp"
              aiMonitor=""
              scSetPointLimit="" />
  </IoHeaters>

	<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
    <IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  </IoHeartbeats>

  <IoResets>
    <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  </IoResets>

  <IoSetConfigs>
    <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  </IoSetConfigs>

  <IoStatisticss>
    <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Generator_Power_Status"
                  scLastPMTime="RfOnTimeLastPMTime"
                  scTimeFromLastPM="RfOnTimeFromLastPM"
                  scTimeTotal="RfOnTimeTotal"
                  scEnableAlarm="RfOnTimeEnableAlarm"
                  scPMInterval="RfOnTimePMInterval" />

    <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Pump_Running"
                  scLastPMTime="PumpOnTimeLastPMTime"
                  scTimeFromLastPM="PumpOnTimeFromLastPM"
                  scTimeTotal="PumpOnTimeTotal"
                  scEnableAlarm="PumpOnTimeEnableAlarm"
                  scPMInterval="PumpOnTimePMInterval" />
  </IoStatisticss>

  <IoPlcDateTimes>
    <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
                  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  </IoPlcDateTimes>

  <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
    <IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
                doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up" diOFF="DI_Lift_Pin_Down" />

    <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
                doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_Pos" diOFF="DI_Slit_Door_Close_Pos" />

    <IoCylinder id="SmallPin" display="Small Pin" schematicId="" unit=""
                doON="DO_Guide_Pin_Small_Lifter_Up" doOFF="DO_Guide_Pin_Small_Lifter_Down"
                diON="DI_Guide_Pin_Small_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Small_Lifter_Down_Pos" />

    <IoCylinder id="MediumPin" display="Medium Pin" schematicId="" unit=""
                doON="DO_Guide_Pin_Medium_Lifter_Up" doOFF="DO_Guide_Pin_Medium_Lifter_Down"
                diON="DI_Guide_Pin_Medium_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Medium_Lifter_Down_Pos" />
  </IoCylinders>

  <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
    <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
  </IoLids>
  
  <IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
    <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
  </IoMessages>

	<IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
		<IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
	</IoPumpCtrls>
  
</DeviceModelDefine>