Kepler-Release/Venus/Venus_RT/Modules/PMs/PMLeakCheckRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Venus_RT.Devices;
using MECF.Framework.Common.Routine;
using System.Diagnostics;
using Venus_Core;
using System;
using Venus_Unity;
using MECF.Framework.Common.DBCore;

namespace Venus_RT.Modules.PMs
{
    class PMLeakCheckRoutine : PMRoutineBase, IRoutine
    {
        private enum LeakCheckStep
        {
            kPumpToBasePressure,
            kPumpingDelay,
            kLeakCheckDelay,
            kEnd,
        }
        public double LeakRate { get; private set; }

        private int _basePressure = 100;
        private int _leakcheckPumpTime = 180;
        private int _leakcheckHoldTime = 300;

        private double _startPressure = 0;
        private double _endPressure = 0;
        private double _leakRate = 30.0;
        private double _leakCheckBasePressure = 1;
        public string CurrentStep;
        private JetChamber jetChamber = JetChamber.None;
        Stopwatch _leakCheckTimer = new Stopwatch();
        PMLeakCheckResult pMLeakCheckResult;
        Stopwatch _routineTimer = new Stopwatch();
        PressureType _pressureType = PressureType.mTorr;
        public PMLeakCheckRoutine(JetPMBase chamber) : base(chamber)
        {
            jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
            Name = "PM Leakcheck";
            if (chamber.ChamberType == JetChamber.Kepler2200A || chamber.ChamberType == JetChamber.Kepler2200B)
            {
                _pressureType = PressureType.Pa;
            }
        }

        public RState Start(params object[] objs)
        {
            if (CheckLid() &&
                CheckSlitDoor() &&
                CheckTurboPump())
            {
                CurrentStep = "Pump To BasePressure";

                Reset();

                _basePressure = SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
                //_leakcheckPumpTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckPumpingTime");
                //_leakcheckHoldTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckHoldTime");
                //_leakRate = SC.GetValue<double>($"{Module}.Pump.LeakRate");

                _leakcheckPumpTime = (int)(objs[0]);
                _leakcheckHoldTime = (int)(objs[1]);
                _leakRate = (double)(objs[2]);

                _leakCheckBasePressure = SC.GetValue<double>($"{Module}.Pump.LeakCheckBasePressure");

                PreSetValves();
                pMLeakCheckResult = new PMLeakCheckResult();
                pMLeakCheckResult.CheckDate = DateTime.Now.ToString("yyyyMMddHHmm");
                pMLeakCheckResult.CheckMode = "ChamberOnly";
                _routineTimer.Restart();
                return Runner.Start(Module, Name);
            }
            return RState.Failed;
        }

        public RState Monitor()
        {
            Runner.Wait(LeakCheckStep.kPumpToBasePressure,  PumpingToBasePressure)
                .Run(LeakCheckStep.kPumpingDelay,           StartPumpDelay,         PumpingDelay)
                .Run(LeakCheckStep.kLeakCheckDelay,         StartLeakCheck,         _leakcheckHoldTime * 1000)
                .End(LeakCheckStep.kEnd,                    CalcLeakCheckResult,    _delay_50ms);

            return Runner.Status;
        }

        public void Abort()
        {
            CloseAllValves();
        }

        private bool PumpingToBasePressure()
        {
            if (_chamber.ProcessPressure <= _basePressure)
            {
                _leakCheckTimer.Restart();
                return true;
            }
            else
                return false;
        }

        private bool PumpingDelay()
        {
            if (_leakCheckTimer.ElapsedMilliseconds >= _leakcheckPumpTime * 1000)
            {
                if (_chamber.ProcessPressure <= _leakCheckBasePressure)
                    return true;
                else
                {
                    Runner.Stop($"PM Leakcheck失败， 工艺压力 [{_chamber.ProcessPressure}]{_pressureType}, 高于LeakCheck Base Pressure: [{_leakCheckBasePressure}] {_pressureType}");
                }
            }

            return false;
        }
        private bool StartPumpDelay()
        {
            _chamber.OpenValve(ValveType.GasFinal, false);
            CurrentStep = "Check Pump";
            return true;
        }
        private bool StartLeakCheck()
        {
            CurrentStep = "Leak Check";
            _startPressure = _chamber.ProcessPressure;
            pMLeakCheckResult.StartPressure = _startPressure;

            Notify($"PM 压力开始值 {_startPressure} {_pressureType}");

            _chamber.TurnPendulumValve(false);
            return true;
        }

        private bool CalcLeakCheckResult()
        {
            _endPressure = _chamber.ProcessPressure;
            pMLeakCheckResult.EndPressure = _endPressure;
            LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckHoldTime;
            pMLeakCheckResult.LeakRate = LeakRate;
            if (LeakRate < _leakRate)
            {
                Notify($"PM Leakcheck完成， 压力结束值: {_startPressure} {_pressureType}， 漏率：{LeakRate} {_pressureType}/min");
                pMLeakCheckResult.Result = "Success";

            }
            else
            {
                Stop($"PM Leakcheck失败， 腔体漏率 [{LeakRate}] {_pressureType}/min, 高于 [{_leakRate}] {_pressureType}/min");
                pMLeakCheckResult.Result = "Fail";
            }
            LeakCheckDataRecorder.Add(_leakcheckHoldTime, Math.Round(_startPressure,1) , Math.Round(_endPressure, 1) , LeakRate, pMLeakCheckResult.Result, "ChamberOnly", _chamber.Name);
            _chamber.OpenValve(ValveType.GasFinal, true);
            _chamber.TurnPendulumValve(true);
            pMLeakCheckResult.LeakCheckTime = (int)_routineTimer.ElapsedMilliseconds / 1000;


            //SerializeHelper.Instance.WriteToJsonFile<PMLeakCheckResult>(pMLeakCheckResult, $"LeakCheck/PM/{DateTime.Now.ToString("yyyyMMddHHmm")}.json");
            return true;
        }

        private void PreSetValves()
        {
            _chamber.OpenValve(ValveType.FastPump, false);
            
            
            if (jetChamber != JetChamber.VenusDE)
            {
                _chamber.OpenValve(ValveType.SoftPump, false);
            }
            
            _chamber.OpenValve(ValveType.TurboPumpPumping, true);
            _chamber.OpenValve(ValveType.Guage, true);
            _chamber.OpenValve(ValveType.GasFinal, true);
            _chamber.TurnPendulumValve(true);

        }
    }
}