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TM
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SETMInterlock.xml

SETMInterlock.xml 5.9 KB
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  1. <?xml version="1.0" encoding="utf-8" ?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 	<Action do="DO_VCE_Slit_Door_Open"	value="true" tip="VCE Slit Door Open"	tip.zh-CN="" tip.en-US="DO-13" >
    4. 

  4. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    5. 

  5. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />
    6. 

  6. 	</Action>
    7. 

  7. 	<Action do="DO_VCE_Slit_Door_Close"	value="true" tip="VCE Slit Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
    8. 

  8. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    9. 

  9. 		<Limit di="DI_System_CDA_Pressure_OK"	value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    10. 

  10. 		<Limit di="DI_VCE_Wafer_Senser"			value="true" tip="VCE Wafer Senser"		tip.zh-CN="" tip.en-US="DI-07" />												  	   	    
    11. 

  11. 	</Action>												  	   	    
    12. 

  12. 	<Action do="DO_PMA_Slit_Door_Open"	value="true" tip="PMA Slit Door Open"	tip.zh-CN="" tip.en-US="DO-15" >
    13. 

  13. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    14. 

  14. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    15. 

  15. 	</Action>												  	   	    
    16. 

  16. 	<Action do="DO_PMA_Slit_Door_Close"	value="true" tip="PMA Slit Door Close"	tip.zh-CN="" tip.en-US="DO-16" >
    17. 

  17. 									
    18. 

  18. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    19. 

  19. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />													  	   	    
    20. 

  20. 		<Limit di="DI_PMA_Wafer_Senser"			value="true" tip="PMA Wafer Senser"		tip.zh-CN="" tip.en-US="DI-08" />											  	   	    
    21. 

  21. 							  	   	    
    22. 

  22. 	</Action>												  	   	    
    23. 

  23. 	<Action do="DO_PMB_Slit_Door_Open"	value="true" tip="PMB Slit Door Open"	tip.zh-CN="" tip.en-US="DO-17" >
    24. 

  24. 				
    25. 

  25. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    26. 

  26. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    27. 

  27. 														    
    28. 

  28. 	</Action>
    29. 

  29. 	<Action do="DO_PMB_Slit_Door_Close"	value="true" tip="PMB_Slit_Door_Close"	tip.zh-CN="" tip.en-US="DO-18" >
    30. 

  30. 

  31. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    32. 

  32. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />													  	   	    
    33. 

  33. 		<Limit di="DI_PMB_Wafer_Senser"			value="true" tip="PMB Wafer Senser"		tip.zh-CN="" tip.en-US="DI-09" />											  	   	    
    34. 

  34. 	
    35. 

  35. 	</Action>
    36. 

  36. 	<Action do="DO_TM_Fast_Pumping"	value="true" tip="TM Fast Pumping"	tip.zh-CN="" tip.en-US="DO-21" >
    37. 

  37. 				
    38. 

  38. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    39. 

  39. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    40. 

  40. 		<Limit do="DO_TM_Fast_Vent"			value="false" tip="TM Fast Vent"		tip.zh-CN="" tip.en-US="DO-23" />												  	   	    
    41. 

  41. 		<Limit do="DO_TM_Soft_Vent"			value="false" tip="TM Soft Vent"		tip.zh-CN="" tip.en-US="DO-24" />												  	   	    
    42. 

  42. 											 	  
    43. 

  43. 	</Action>											 	  
    44. 

  44. 	<Action do="DO_TM_Soft_Pumping"	value="true" tip="TM Soft Pumping"	tip.zh-CN="" tip.en-US="DO-09" >
    45. 

  45. 			
    46. 

  46. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    47. 

  47. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    48. 

  48. 												 	  
    49. 

  49. 	</Action>											 	  
    50. 

  50. 	<Action do="DO_TM_Fast_Vent"	value="true" tip="TM Fast Vent"	tip.zh-CN="" tip.en-US="DO-23" >
    51. 

  51. 			
    52. 

  52. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    53. 

  53. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    54. 

  54. 		<Limit do="DO_TM_Fast_Pumping"		value="false" tip="TM Fast Pumping"		tip.zh-CN="" tip.en-US="DO-21" />												  	   	    
    55. 

  55. 		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    
    56. 

  56. 												 	  
    57. 

  57. 	</Action>											 	  
    58. 

  58. 	<Action do="DO_TM_Soft_Vent"	value="true" tip="TM Soft Vent"	tip.zh-CN="" tip.en-US="DO-24" >
    59. 

  59. 

  60. 		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
    61. 

  61. 		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
    62. 

  62. 		<Limit do="DO_TM_Fast_Pumping"		value="false" tip="TM Fast Pumping"		tip.zh-CN="" tip.en-US="DO-21" />												  	   	    
    63. 

  63. 		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    
    64. 

  64. 

  65. 	</Action>
    66. 

  66. 	<Action do="DO_VCE_Fast_Pumping"	value="true" tip="VCE Fast Pumping"	tip.zh-CN="" tip.en-US="DO-25" >
    67. 

  67. 													  	   	    
    68. 

  68. 												  	   
    69. 

  69. 	</Action>												  	   
    70. 

  70. 	<Action do="DO_VCE_Soft_Pumping"	value="true" tip="VCE Soft Pumping"	tip.zh-CN="" tip.en-US="DO-26" >
    71. 

  71. 									  	   	    
    72. 

  72. 	
    73. 

  73. 	</Action>
    74. 

  74. 	<Action do="DO_VCE_Fast_Vent"	value="true" tip="VCE Fast Vent"	tip.zh-CN="" tip.en-US="DO-27" >
    75. 

  75. 													  	   	    
    76. 

  76. 												  	   
    77. 

  77. 	</Action>											  	   
    78. 

  78. 	<Action do="DO_VCE_Soft_Vent"	value="true" tip="VCE Soft Vent"	tip.zh-CN="" tip.en-US="DO-28" >
    79. 

  79. 							  	   	    
    80. 

  80. 

  81. 	</Action>
    82. 

  82. 	<Action do="DO_PCW_Valve"	value="true" tip="PCW Valve"	tip.zh-CN="" tip.en-US="DO-29" >
    83. 

  83. 		<Limit di="DI_PCW_Leak_SW"			value="true" tip="PCW Leak SW"		tip.zh-CN="" tip.en-US="DI-25" />
    84. 

  84. 	</Action>
    85. 

  85. </Interlock>
    86.