SEMFPMPickRoutine.cs 11 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using System.Windows;
  19. using System.Windows.Interop;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Devices.IODevices;
  23. using Venus_RT.Modules.PMs;
  24. namespace Venus_RT.Modules.TM.VenusEntity
  25. {
  26. public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
  27. {
  28. private enum PickStep
  29. {
  30. WaitPMReady,
  31. WaitforControlPressure,
  32. PMPrepare,
  33. ArmExtend,
  34. QueryAWC,
  35. DropDownWafer,
  36. PickDelay,
  37. ArmRetract,
  38. SavePickeData,
  39. NotifyDone,
  40. CloseSlitDoor,
  41. EndDelay
  42. }
  43. private readonly HongHuTM _tm;
  44. private readonly ITransferRobot _robot;
  45. private int _picktimeout = 60 * 1000;//1 min
  46. private int _pickdelay = 0;
  47. private ModuleName _targetModule;
  48. private Hand _hand;
  49. private int _targetSlot;
  50. private PMEntity _pmModule;
  51. private int _ExtendTimeout = 120 * 1000;
  52. private int _RetractTimeout = 120 * 1000;
  53. private JetPMBase _chamber;
  54. private bool NeedControlPressure;
  55. private int _controlPressureSetPoint = 90;
  56. private int _controlFlowSetPoint = 10;
  57. string _chambertype;
  58. //private DateTime _starttime;
  59. private bool _queryAwc;
  60. public SEMFPMPickRoutine(HongHuTM honghutm, ITransferRobot robot) : base(ModuleName.TMRobot)
  61. {
  62. _tm = honghutm;
  63. _robot = robot;
  64. _queryAwc = false;
  65. }
  66. public RState Start(params object[] objs)
  67. {
  68. //_starttime = DateTime.Now;
  69. if (!_robot.IsHomed)
  70. {
  71. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  72. return RState.Failed;
  73. }
  74. var pickItem = (Queue<MoveItem>)objs[0];
  75. _targetModule = pickItem.Peek().SourceModule;
  76. _targetSlot = pickItem.Peek().SourceSlot;
  77. _hand = pickItem.Peek().RobotHand;
  78. //_chamber = (JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
  79. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  80. {
  81. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  82. }
  83. else
  84. {
  85. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
  86. return RState.Failed;
  87. }
  88. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  89. {
  90. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  91. return RState.Failed;
  92. }
  93. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  94. {
  95. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  96. return RState.Failed;
  97. }
  98. var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
  99. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
  100. _ExtendTimeout = SC.GetValue<int>("SETM.ExtendTimeout") * 1000;
  101. _RetractTimeout = SC.GetValue<int>("SETM.RetractTimeout") * 1000;
  102. _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  103. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  104. {
  105. NeedControlPressure = true;
  106. }
  107. else
  108. {
  109. NeedControlPressure = false;
  110. }
  111. Reset();
  112. return Runner.Start(Module, $"Pick from {_targetModule}");
  113. }
  114. public RState Monitor()
  115. {
  116. Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
  117. .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
  118. .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
  119. .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
  120. .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
  121. .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  122. .Delay(PickStep.PickDelay, _pickdelay)
  123. .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
  124. .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
  125. .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
  126. .Delay(PickStep.PickDelay, _delay_50ms)
  127. .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
  128. .End(PickStep.EndDelay, NullFun, _delay_50ms);
  129. return Runner.Status;
  130. }
  131. private bool ModulePrepare()
  132. {
  133. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  134. //_tm.TurnSlitDoor(_targetModule, true);
  135. return true;
  136. }
  137. private bool IsModulePrepareReady()
  138. {
  139. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  140. }
  141. private bool ArmExtend()
  142. {
  143. if (!_pmModule.IsSlitDoorOpen)
  144. {
  145. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
  146. return false;
  147. }
  148. return _robot.PickExtend(_targetModule, _targetSlot, _hand);
  149. }
  150. private bool ArmRetract()
  151. {
  152. return _robot.PickRetract(_targetModule, _targetSlot, _hand);
  153. }
  154. private bool WaitRobotExtendDone()
  155. {
  156. if (_robot.Status == RState.Running)
  157. {
  158. return false;
  159. }
  160. else if (_robot.Status == RState.End)
  161. {
  162. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  163. return true;
  164. }
  165. else
  166. {
  167. Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
  168. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  169. return true;
  170. }
  171. }
  172. private bool IsPressureReady()
  173. {
  174. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  175. //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
  176. double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
  177. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  178. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  179. {
  180. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
  181. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
  182. //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
  183. //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  184. return true;
  185. }
  186. else return false;
  187. }
  188. private bool StartControlPressure()
  189. {
  190. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
  191. _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  192. _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
  193. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  194. return true;
  195. }
  196. private bool QueryAWC()
  197. {
  198. if (!_queryAwc)
  199. return true;
  200. else
  201. return _robot.QueryAwc(); ;
  202. }
  203. private bool WaitRobotQueryDone()
  204. {
  205. if (!_queryAwc)
  206. return true;
  207. if (_robot.Status == RState.Running)
  208. {
  209. return false;
  210. }
  211. else if (_robot.Status == RState.End)
  212. {
  213. return true;
  214. }
  215. else
  216. {
  217. Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
  218. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  219. return true;
  220. }
  221. }
  222. private bool RecordAWCData()
  223. {
  224. if (!_queryAwc)
  225. return true;
  226. return true;
  227. }
  228. private bool NotifyPMPickWafer()
  229. {
  230. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  231. return true;
  232. }
  233. private bool WaitPMWaferDropDown()
  234. {
  235. return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
  236. }
  237. private bool WaitRobotRetractDone()
  238. {
  239. if (_robot.Status == RState.Running)
  240. {
  241. return false;
  242. }
  243. else if (_robot.Status == RState.End)
  244. {
  245. return true;
  246. }
  247. else
  248. {
  249. Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
  250. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  251. return true;
  252. }
  253. }
  254. private bool NotifyPMDone()
  255. {
  256. _pmModule.PostMsg(PMEntity.MSG.PickReady);
  257. return true;
  258. }
  259. private bool PMDoorClose()
  260. {
  261. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
  262. return _tm.TurnSlitDoor(_targetModule, false);
  263. }
  264. private bool WaitPMDoorClose()
  265. {
  266. if (_tm.CheckSlitValveClose(_targetModule))
  267. {
  268. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
  269. return true;
  270. }
  271. else
  272. {
  273. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
  274. return false;
  275. }
  276. }
  277. public void Abort()
  278. {
  279. _robot.Halt();
  280. }
  281. }
  282. }