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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Simulator.Core.Driver;
- using System;
- using System.Collections.Generic;
- using Venus_Simulator.Devices;
- using System.Threading;
- using Venus_Core;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
- using System.Diagnostics.Eventing.Reader;
- using MECF.Framework.Common.CommonData;
- using MECF.Framework.Common.DataCenter;
- using System.Configuration;
- namespace Venus_Simulator.Instances
- {
- public class SimulatorSystem : Singleton<SimulatorSystem>
- {
- private PeriodicJob _thread;
- private Random _rd = new Random();
- ConfigType type;
- private RD_TRIG _trigATM = new RD_TRIG();
- private RD_TRIG _trigVAC = new RD_TRIG();
- private R_TRIG _trigLLExtend = new R_TRIG();
- private R_TRIG _trigLLRetract = new R_TRIG();
- private static int count = 0;
- private readonly float ATM_THRESHOLD = 750000;
- private readonly float ATM_PRESSURE = 760000;
- //private readonly float ATM_LoadLock_PRESSURE = 760000;
- private readonly uint VAC_SW_PRESSURE = 9500;
- private readonly uint PROCESS_GAUGE = 10000;
- private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
- private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
- public SimulatorSystem()
- {
- //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
- //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
- //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
- // TODO
- var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
- type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
- jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
- jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
- jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
- jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
- }
- ~SimulatorSystem()
- {
- _thread?.Stop();
- }
- public void Initialize()
- {
- SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
- SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
- SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
- SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
- if (type == ConfigType.Kepler2200)
- {
- SetKepler2200TMDefaultValue();
- }
- else if (type == ConfigType.Kepler2300)
- {
- SetKepler2300TMDefaultValue();
- }
- else if (type == ConfigType.VenusSE)
- {
- SetSETMDefaultValue();
- }
- else if (type == ConfigType.VenusDE)
- {
- SetDETMDefaultValue();
- }
- Singleton<DataManager>.Instance.Initialize(false);
- _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
- }
- private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
- {
- switch (jetChamber)
- {
- case JetChamber.VenusSE:
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
- IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
- //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
- //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
- IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
- IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
- IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
- IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
- IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
- IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
- IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
- IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
- //// pressure
- SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
- //// Temperature
- SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
- //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
- //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- break;
- case JetChamber.VenusDE:
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
- IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
- //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
- IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
- IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
- IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
- IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
- //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
- //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
- //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
- //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
- //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
- //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
- //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
- IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
- //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
- IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
- //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
- //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
- //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
- //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
- IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
- //// pressure
- SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
- //// Temperature
- SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
- //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
- //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
- SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
- SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
- SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- break;
- case JetChamber.Kepler2300:
- // chamber
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
- IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
- IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
- //// pressure
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
- SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- //// Temperature
- SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
- SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
- SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- break;
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- if (jetChamber == JetChamber.Kepler2200B)
- {
- IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
- }
- IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
- //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
- //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
- IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
- IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_SCRUBBER_OK"].Value = true;
- //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
- //// pressure
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
- SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- //// Temperature
- // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- break;
- }
- }
- private void SetKepler2200TMDefaultValue()
- {
- ModuleName mod = ModuleName.TM;
- IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
- IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
- SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
- SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
- if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
- {
- SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
- SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
- SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
- }
- else
- {
- SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
- SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
- SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
- }
- }
- private void SetKepler2300TMDefaultValue()
- {
- ModuleName mod = ModuleName.TM;
- IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
- IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
- SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
- SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
- if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
- {
- SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
- SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
- SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
- }
- else
- {
- SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
- SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
- SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
- }
- }
- private void SetSETMDefaultValue()
- {
- string mod = "SETM";
- IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
- IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
- IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
- IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
- IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
- IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
- IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
- IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
- IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
- IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
- IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
- IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
- IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
- IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
- IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
- IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
- SetAiValue($"{mod}.AI_MFC_Flow", 3000);
- SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
- SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
- SetAiValue($"{mod}.AI_TM_Pressure", 20);
- }
- private void SetDETMDefaultValue()
- {
- string mod = "DETM";
- IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
- IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
- IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
- IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
- IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
- IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
- IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
- IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
- IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
- IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
- IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
- IO.DI[$"{mod}.DI_LEAK"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
- IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
- IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
- IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
- IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
- IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
- IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
- IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
- IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
- IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
- IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
- IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
- IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
- IO.DI[$"{mod}.DI_EMO"].Value = false;
- IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
- IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
- SetAiValue($"{mod}.AI_MFC_Flow", 3000);
- SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
- SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
- SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
- SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
- SetAiValue($"{mod}.AI_TM_Pressure", 20);
- }
- private bool OnMonitor()
- {
- try
- {
- foreach (var item in jetChambers)
- {
- switch (item.Value)
- {
- case JetChamber.Kepler2300:
- MonitorSlitDoorInTM(item.Key);
- MonitorPin(item.Key);
- MonitorPressure_Kepler(item.Key);
- //MonitorTemperature(item.Key);
- MonitorGas(item.Key);
- this.SimulateHe(item.Key);
- //MonitorRF(item.Key);
- ChangeTime(item.Key);
- //MonitorIOPumpCtrl(item.Key);
- MonitorLid(item.Key);
- break;
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- MonitorSlitDoorInTM(item.Key);
- MonitorPressure_Kepler2200(item.Key);
- //MonitorTemperature(item.Key);
- MonitorGas(item.Key);
- MonitorKeplerTMGas();
- // MonitorRF(item.Key);
- ChangeTime(item.Key);
- //MonitorIOPumpCtrl(item.Key);
- MonitorLid(item.Key);
- MonitorIOHighTemperatureHeater(item.Key);
- MonitorKepler2200Heater(item.Key);
- break;
- case JetChamber.VenusSE:
- MonitorPin(item.Key);
- //MonitorVenuSESlitDoor(item.Key);
- MonitorSEPressure(item.Key);
- MonitorSEGas(item.Key);
- ChangeTime(item.Key);
- this.SimulateSEHe(item.Key);
- break;
- case JetChamber.VenusDE:
- MonitorPin(item.Key);
- MonitorDEGas(item.Key);
- //MonitorVenuDESlitDoor(item.Key);
- MonitorDEPressure(item.Key);
- ChangeTime(item.Key);
- MonitorLinerDoor(item.Key);
- this.SimulateDEHe(item.Key);
- break;
- }
- }
- //ChangeTime(ModuleName.TM);
- if (type == ConfigType.Kepler2200)
- {
- ChangeTime(ModuleName.TM);
- MonitorMFSlitDoor();
- MonitorMFKepler2200Pressure();
- }
- else if (type == ConfigType.Kepler2300)
- {
- ChangeTime(ModuleName.TM);
- MonitorMFSlitDoor();
- MonitorMFKepler2300Pressure();
- }
- else if (type == ConfigType.VenusSE)
- {
- MonitorSEMFSlitDoor();
- MonitorSEMFPressure();
- //MonitorDEMFSlitDoor();
- //MonitorDEMFPressure();
- }
- else if (type == ConfigType.VenusDE)
- {
- MonitorDEMFSlitDoor();
- MonitorDEMFPressure();
- }
- }
- catch (Exception e)
- {
- LOG.WriteExeption(e);
- }
- return true;
- }
- private void ChangeTime(ModuleName mod)
- {
- // Heartbeat with PLC
- SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
- SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- }
- //void MonitorVenuSESlitDoor(ModuleName mod)
- //{
- //}
- void MonitorSlitDoorInPM(ModuleName mod)
- {
- // slit door open
- if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
- }
- // slit door close
- if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- }
- }
- void MonitorLinerDoor(ModuleName mod)
- {
- // slit door open
- if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
- IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
- }
- // slit door close
- if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
- }
- }
- void MonitorSlitDoorInTM(ModuleName mod)
- {
- // slit door open
- if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
- }
- // slit door close
- if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- }
- }
- void MonitorMFSlitDoor()
- {
- ModuleName mod = ModuleName.TM;
- // LLA T door open
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
- }
- // LLB T door open
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
- }
- // LLA E door open
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
- }
- // LLB E door open
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
- }
- // LLA T door close
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
- }
- // LLB T door close
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
- }
- // LLA E door close
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
- }
- // LLB E door close
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
- }
- // PMA slitdoor door close/open
- if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
- }
- if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
- }
- // PMB slitdoor door close/open
- if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
- }
- if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
- }
- // PMC slitdoor door close/open
- if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
- }
- if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
- }
- // PMD slitdoor door close/open
- if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
- }
- if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
- }
- }
- void MonitorSEMFSlitDoor()
- {
- string mod = "SETM";
- // VCE T door open
- if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
- IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
- }
- // VCE T door Close
- if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
- }
- //pma
- if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
- }
- //pmb
- if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
- }
- //pmc
- if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
- IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
- IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
- }
- }
- void MonitorDEMFSlitDoor()
- {
- string mod = "DETM";
- // VCE L door open
- if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
- }
- // VCE R door open
- if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
- }
- // VCE L door Close
- if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
- }
- // VCE R door Close
- if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
- }
- //pma
- if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
- }
- //pmb
- if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
- }
- //pmc
- if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
- }
- if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
- {
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
- {
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true;
- }
- if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
- {
- IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
- }
- else
- {
- IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
- {
- IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
- }
- else
- {
- IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
- {
- IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
- }
- else
- {
- IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
- }
- }
- void MonitorPin(ModuleName mod)
- {
- // lift pin up
- if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
- }
- }
- void MonitorLid(ModuleName mod)
- {
- // lift pin up
- if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
- {
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
- }
- }
- void MonitorExtendAndRetract(ModuleName mod)
- {
- // Extend
- _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
- if (_trigLLExtend.Q)
- {
- _trigLLRetract.RST = true;
- Thread.Sleep(500);
- IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
- IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- }
- // Retract
- _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
- if (_trigLLRetract.Q)
- {
- count++;
- _trigLLExtend.RST = true;
- Thread.Sleep(500);
- IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
- IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
- if (count == 1)
- {
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- }
- else if (count == 2)
- {
- count = 0;
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- }
- }
- }
- void MonitorPressure(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_760t";
- // Loadlock pressure
- string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
- // Foreline
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
- }
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- //float chamber_pressure = GetMockChamberPressure(mod);
- //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- //任意泵打开
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (fast_pump_vlv.Value && soft_pump_vlv.Value)
- {//开双泵
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
- }
- else if (fast_pump_vlv.Value)//开
- {
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
- }
- else if (soft_pump_vlv.Value)
- {
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
- }
- else if (turbo_pump_vlv.Value)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- if ((getAiValue_ChamberPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
- else
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- if ((getAiValue_ProcessPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- else
- SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
- //if (vent_vlv.Value || purge_vlv.Value)
- //{
- // if (vent_vlv.Value && purge_vlv.Value)
- // {
- // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- // {
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
- // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- // }
- // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- // {
- // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
- // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
- // }
- // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
- // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
- // }
- // else
- //
- if (vent_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
- }
- // Loadlock Pumping Valve
- DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
- if (Loadlock_pump_vlv.Value)
- {
- SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
- }
- // Loadlock vent
- DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
- if (Loadlock_vent_vlv.Value)
- {
- SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
- }
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
- }
- float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (process_pressure1 > PROCESS_GAUGE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- }
- else if (process_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
- }
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 10000)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
- }
- else if (foreline_pressure < 150)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
- }
- // 模拟压力计漂移
- //int p1 = (int)GetMockChamberPressure(mod);
- //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
- //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
- //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
- //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
- //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
- // 根据当前压力值设定信号
- //float chamber_pressure2 = GetMockChamberPressure(mod);
- // ATM switch
- IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
- // Throttle valve
- //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
- //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
- ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
- //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
- // 压力值
- //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
- // }
- //}
- //else
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
- // }
- //}
- //// 位置值
- //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
- // }
- //}
- //else
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
- // }
- //}
- }
- void MonitorSEPressure(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_10t";
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- // Foreline
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
- }
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- //任意泵打开
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (fast_pump_vlv.Value && soft_pump_vlv.Value)
- {//开双泵
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- }
- else if (fast_pump_vlv.Value)//开
- {
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- }
- else if (soft_pump_vlv.Value)
- {
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- }
- else if (turbo_pump_vlv.Value)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- if ((getAiValue_ChamberPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
- else
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- if ((getAiValue_ProcessPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- else
- SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- if (vent_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- }
- }
- // Loadlock Pumping Valve
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
- }
- float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (process_pressure1 > PROCESS_GAUGE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- }
- else if (process_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
- }
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 1999)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
- }
- else if (foreline_pressure < 150)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
- }
- void MonitorDEPressure(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_10t";
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- // Foreline
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
- }
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- //任意泵打开
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (fast_pump_vlv.Value)
- {//开双泵
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- }
- else if (turbo_pump_vlv.Value)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- if ((getAiValue_ChamberPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
- else
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- if ((getAiValue_ProcessPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- else
- SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- if (vent_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- }
- }
- // Loadlock Pumping Valve
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
- }
- float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (process_pressure1 > PROCESS_GAUGE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- }
- else if (process_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
- }
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 10000)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
- }
- else if (foreline_pressure < 150)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
- }
- void MonitorPressure_Kepler(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_10t";
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
- }
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- //float chamber_pressure = GetMockChamberPressure(mod);
- //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- //任意泵打开
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (fast_pump_vlv.Value && soft_pump_vlv.Value)
- {//开双泵
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
- }
- else if (fast_pump_vlv.Value)//开
- {
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
- }
- else if (soft_pump_vlv.Value)
- {
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
- }
- else if (turbo_pump_vlv.Value)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- if ((getAiValue_ChamberPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
- else
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- if ((getAiValue_ProcessPressure - 500) >= 0)
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- else
- SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- if (vent_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
- }
- // Loadlock Pumping Valve
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 1);
- }
- float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (process_pressure1 > PROCESS_GAUGE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- }
- else if (process_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
- }
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 10000)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
- }
- else if (foreline_pressure < 150)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
- }
- void MonitorPressure_Kepler2200(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_10t";
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
- }
- //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- //float chamber_pressure = GetMockChamberPressure(mod);
- //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- //任意泵打开
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (fast_pump_vlv.Value && soft_pump_vlv.Value)
- {
- //开双泵
- if ((getAiValue_ChamberPressure - 12000) >= 0)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- }
- //if (getAiValue_ChamberPressure > 1000)
- //{
- // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- //}
- //else if ( getAiValue_ChamberPressure <= 1000)
- //{
- // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- //}
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
- }
- else if (fast_pump_vlv.Value)//开
- {
- if ((getAiValue_ChamberPressure - 8000) >= 0)
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
- else
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- }
- else if (soft_pump_vlv.Value)
- {
- if ((getAiValue_ChamberPressure - 4000) >= 0)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- }
- //if (getAiValue_ChamberPressure > 5000)
- //{
- // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- //}
- //else if (getAiValue_ChamberPressure <= 1000)
- //{
- // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
- // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
- //}
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
- }
- else if (turbo_pump_vlv.Value)
- {
- if ((getAiValue_ChamberPressure - 50) >= 0)
- SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
- else
- SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
- if (vent_vlv.Value && gas_final_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ChamberPressure > 1000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ChamberPressure <= 1000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
- }
- // Loadlock Pumping Valve
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 0.5F);
- }
- //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
- //{
- // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- //}
- //else if (process_pressure1 < 20)
- //{
- // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
- //}
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 1000)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
- }
- else if (foreline_pressure < 15)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
- // VAC switch
- IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
- SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
- //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
- //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
- SetAiValue($"{mod}.{sAI_Foreline}",200);
- }
- void MonitorSEMFPressure()
- {
- string mod = "SETM";
- string VCE_ChamberPressure = "AI_VCE_Pressure";
- string TM_AI_ChamberPressure = "AI_TM_Pressure";
- DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
- DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
- DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
- DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
- DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
- DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
- DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
- DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
- float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
- float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
- }
- }
- if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
- }
- }
- if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
- {
- if (getAiValue_VCE_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
- }
- else if (getAiValue_VCE_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
- }
- }
- if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
- {
- if (getAiValue_VCE_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
- }
- else if (getAiValue_VCE_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
- }
- }
- getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
- if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_VCE_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
- }
- getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_TM_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
- }
- IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
- // VAC switch
- IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- }
- void MonitorDEMFPressure()
- {
- string mod = "DETM";
- string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
- string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
- string TM_AI_ChamberPressure = "AI_TM_Pressure";
- DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
- DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
- DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
- DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
- DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
- DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
- DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
- DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
- DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
- DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
- DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
- DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
- float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
- float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
- float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
- {
- if (getAiValue_AI_Left_VCE_Pressure > 10000)
- {
- SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
- }
- else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
- {
- SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
- }
- }
- if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
- {
- if (getAiValue_AI_Right_VCE_Pressure > 10000)
- {
- SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
- }
- else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
- {
- SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
- }
- }
- if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
- }
- }
- if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
- {
- if (getAiValue_AI_Left_VCE_Pressure > 10000)
- {
- SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
- }
- else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
- {
- SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
- }
- }
- if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
- {
- if (getAiValue_AI_Right_VCE_Pressure > 10000)
- {
- SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
- }
- else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
- {
- SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
- }
- }
- if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
- }
- }
- getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
- if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
- }
- else if (getAiValue_AI_Left_VCE_Pressure < 20)
- {
- SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
- }
- getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
- if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
- }
- else if (getAiValue_AI_Right_VCE_Pressure < 20)
- {
- SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
- }
- getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_TM_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- // ATM switch
- IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
- // ATM switch
- IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
- }
- void MonitorMFKepler2200Pressure()
- {
- string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
- string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
- string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
- ModuleName mod = ModuleName.TM;
- DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
- DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
- DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
- DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
- DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
- DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
- DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
- DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
- DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
- DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
- DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
- DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
- float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
- {
- if (getAiValue_LLA_ChamberPressure > 20000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 12000);
- }
- else if(getAiValue_LLA_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 3000);
- }
- else if (getAiValue_LLA_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 500);
- }
- }
- if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
- {
- if (getAiValue_LLB_ChamberPressure > 20000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 12000);
- }
- else if (getAiValue_LLB_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 3000);
- }
- else if (getAiValue_LLB_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 500);
- }
- }
- if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
- }
- }
- if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
- {
- if (getAiValue_LLA_ChamberPressure > 20000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 13000);
- }
- else if (getAiValue_LLA_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 2100);
- }
- else if (getAiValue_LLA_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 500);
- }
- }
- if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
- {
- if (getAiValue_LLB_ChamberPressure > 20000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 13000);
- }
- else if (getAiValue_LLB_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 2100);
- }
- else if (getAiValue_LLB_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 500);
- }
- }
- if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
- }
- }
- getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
- }
- else if (getAiValue_LLA_ChamberPressure < 3)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 0.5F);
- }
- getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
- }
- else if (getAiValue_LLB_ChamberPressure < 3)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 0.5F);
- }
- getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
- }
- else if (getAiValue_TM_ChamberPressure < 3)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
- // VAC switch
- IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
- // ATM switch
- IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
- // VAC switch
- IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
- // ATM switch
- IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
- // VAC switch
- IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
- }
- void MonitorMFKepler2300Pressure()
- {
- //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
- //{
- string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
- string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
- string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
- ModuleName mod = ModuleName.TM;
- DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
- DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
- DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
- DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
- DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
- DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
- DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
- DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
- DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
- DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
- DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
- DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
- float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
- {
- if (getAiValue_LLA_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_LLA_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
- }
- }
- if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
- {
- if (getAiValue_LLB_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_LLB_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
- }
- }
- if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
- }
- }
- if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
- {
- if (getAiValue_LLA_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_LLA_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
- }
- }
- if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
- {
- if (getAiValue_LLB_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_LLB_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
- }
- }
- if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
- }
- }
- getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_LLA_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
- }
- getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_LLB_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
- }
- getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_TM_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- // ATM switch
- IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- // ATM switch
- IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- // }
- //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
- //{
- // ModuleName mod = ModuleName.TM;
- // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- //}
- }
- void SetAiValue(string name, float value)
- {
- byte[] flow = BitConverter.GetBytes(value);
- short high1 = BitConverter.ToInt16(flow, 0);
- short low1 = BitConverter.ToInt16(flow, 2);
- IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
- IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
- byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
- byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
- float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
- }
- float GetAiValue(string name)
- {
- byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
- byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
- float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
- return flow;
- }
- float GetAoValue(string name)
- {
- byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
- byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
- float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
- return flow;
- }
- void MonitorTemperature(ModuleName mod)
- {
- //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
- // 底座
- //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
- // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
- //{
- // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
- // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
- //}
- //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
- // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
- //{
- // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
- // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
- //}
- // Foreline
- if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
- }
- else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
- }
- // Wall
- if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
- }
- else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
- }
- }
- void MonitorGas(ModuleName mod)
- {
- // gas
- this.SimulateMFC(mod, 1);
- this.SimulateMFC(mod, 2);
- this.SimulateMFC(mod, 3);
- this.SimulateMFC(mod, 4);
- this.SimulateMFC(mod, 5);
- this.SimulateMFC(mod, 6);
- this.SimulateMFC(mod, 7);
- this.SimulateMFC(mod, 8);
- this.SimulateN2(mod);
- }
- void MonitorKeplerTMGas()
- {
- this.SimulateKeplerMFC(ModuleName.LLA, 1);
- this.SimulateKeplerMFC(ModuleName.LLB, 1);
- this.SimulateKeplerMFC(ModuleName.TM, 1);
- }
- void MonitorSEGas(ModuleName mod)
- {
- SimulateMFC(mod, 1);
- SimulateMFC(mod, 2);
- SimulateMFC(mod, 3);
- SimulateMFC(mod, 4);
- SimulateMFC(mod, 5);
- SimulateMFC(mod, 6);
- SimulateMFC(mod, 7);
- SimulateMFC(mod, 8);
- SimulateMFC(mod, 9);
- SimulateMFC(mod, 10);
- SimulateMFC(mod, 11);
- SimulateMFC(mod, 12);
- }
- void MonitorDEGas(ModuleName mod)
- {
- SimulateMFC(mod, 1);
- SimulateMFC(mod, 2);
- SimulateMFC(mod, 3);
- SimulateMFC(mod, 4);
- SimulateMFC(mod, 5);
- SimulateMFC(mod, 6);
- SimulateMFC(mod, 7);
- SimulateMFC(mod, 8);
- SimulateMFC(mod, 9);
- SimulateMFC(mod, 10);
- SimulateMFC(mod, 11);
- SimulateMFC(mod, 12);
- }
- private void SimulateMFC(ModuleName mod, byte gasNum)
- {
- var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
- SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
- }
- private void SimulateKeplerMFC(ModuleName mod, byte gasNum)
- {
- var sp = GetAoValue($"TM.AO_{mod}_MFC{gasNum}_Flow_Setpoint");
- SetAiValue($"TM.AI_{mod}_MFC{gasNum}_Flow", (float)sp);
- }
- private void SimulateN2(ModuleName mod)
- {
- var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
- //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
- }
- private void SimulateSEHe(ModuleName mod)
- {
- var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
- }
- private void SimulateDEHe(ModuleName mod)
- {
- var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
- }
- private void SimulateHe(ModuleName mod)
- {
- var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
- }
- void MonitorRF(ModuleName mod)
- {
- // RF generator
- var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- //var mock_sp = _rd.Next(sp - 3, sp + 3);
- SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
- //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
- }
- void MonitorIOPumpCtrl(ModuleName mod)
- {
- if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
- if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
- }
- void MonitorIOHighTemperatureHeater(ModuleName mod)
- {
- if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
- }
- if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
- }
- IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
- var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
- var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
- //var mock_sp = _rd.Next(sp - 3, sp + 3);
- SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
- }
- void MonitorKepler2200Heater(ModuleName mod)
- {
- var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
- SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
- }
- public void Terminate()
- {
- _thread.Stop();
- }
- public void SetCoolantOutletTemp(string module, int Temp)
- {
- //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
- //{
- //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
- //}
- }
- }
- }
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