SimulatorSystem.cs 87 KB

12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394959697989910010110210310410510610710810911011111211311411511611711811912012112212312412512612712812913013113213313413513613713813914014114214314414514614714814915015115215315415515615715815916016116216316416516616716816917017117217317417517617717817918018118218318418518618718818919019119219319419519619719819920020120220320420520620720820921021121221321421521621721821922022122222322422522622722822923023123223323423523623723823924024124224324424524624724824925025125225325425525625725825926026126226326426526626726826927027127227327427527627727827928028128228328428528628728828929029129229329429529629729829930030130230330430530630730830931031131231331431531631731831932032132232332432532632732832933033133233333433533633733833934034134234334434534634734834935035135235335435535635735835936036136236336436536636736836937037137237337437537637737837938038138238338438538638738838939039139239339439539639739839940040140240340440540640740840941041141241341441541641741841942042142242342442542642742842943043143243343443543643743843944044144244344444544644744844945045145245345445545645745845946046146246346446546646746846947047147247347447547647747847948048148248348448548648748848949049149249349449549649749849950050150250350450550650750850951051151251351451551651751851952052152252352452552652752852953053153253353453553653753853954054154254354454554654754854955055155255355455555655755855956056156256356456556656756856957057157257357457557657757857958058158258358458558658758858959059159259359459559659759859960060160260360460560660760860961061161261361461561661761861962062162262362462562662762862963063163263363463563663763863964064164264364464564664764864965065165265365465565665765865966066166266366466566666766866967067167267367467567667767867968068168268368468568668768868969069169269369469569669769869970070170270370470570670770870971071171271371471571671771871972072172272372472572672772872973073173273373473573673773873974074174274374474574674774874975075175275375475575675775875976076176276376476576676776876977077177277377477577677777877978078178278378478578678778878979079179279379479579679779879980080180280380480580680780880981081181281381481581681781881982082182282382482582682782882983083183283383483583683783883984084184284384484584684784884985085185285385485585685785885986086186286386486586686786886987087187287387487587687787887988088188288388488588688788888989089189289389489589689789889990090190290390490590690790890991091191291391491591691791891992092192292392492592692792892993093193293393493593693793893994094194294394494594694794894995095195295395495595695795895996096196296396496596696796896997097197297397497597697797897998098198298398498598698798898999099199299399499599699799899910001001100210031004100510061007100810091010101110121013101410151016101710181019102010211022102310241025102610271028102910301031103210331034103510361037103810391040104110421043104410451046104710481049105010511052105310541055105610571058105910601061106210631064106510661067106810691070107110721073107410751076107710781079108010811082108310841085108610871088108910901091109210931094109510961097109810991100110111021103110411051106110711081109111011111112111311141115111611171118111911201121112211231124112511261127112811291130113111321133113411351136113711381139114011411142114311441145114611471148114911501151115211531154115511561157115811591160116111621163116411651166116711681169117011711172117311741175117611771178117911801181118211831184118511861187118811891190119111921193119411951196119711981199120012011202120312041205120612071208120912101211121212131214121512161217121812191220122112221223122412251226122712281229123012311232123312341235123612371238123912401241124212431244124512461247124812491250125112521253125412551256125712581259126012611262126312641265126612671268126912701271127212731274127512761277127812791280128112821283128412851286128712881289129012911292129312941295129612971298129913001301130213031304130513061307130813091310131113121313131413151316131713181319132013211322132313241325132613271328132913301331133213331334133513361337133813391340134113421343134413451346134713481349135013511352135313541355135613571358135913601361136213631364136513661367136813691370137113721373137413751376137713781379138013811382138313841385138613871388138913901391139213931394139513961397139813991400140114021403140414051406140714081409141014111412141314141415141614171418141914201421142214231424142514261427142814291430143114321433143414351436143714381439144014411442144314441445144614471448144914501451145214531454145514561457145814591460146114621463146414651466146714681469147014711472147314741475147614771478147914801481148214831484148514861487148814891490149114921493149414951496149714981499150015011502150315041505150615071508150915101511151215131514151515161517151815191520152115221523152415251526152715281529153015311532153315341535153615371538153915401541154215431544154515461547154815491550155115521553155415551556155715581559156015611562156315641565156615671568156915701571157215731574157515761577157815791580158115821583158415851586158715881589159015911592159315941595159615971598159916001601160216031604160516061607160816091610161116121613161416151616161716181619162016211622162316241625162616271628162916301631163216331634163516361637163816391640164116421643164416451646164716481649165016511652165316541655165616571658165916601661166216631664166516661667166816691670167116721673167416751676167716781679168016811682168316841685168616871688168916901691169216931694169516961697169816991700170117021703170417051706170717081709171017111712171317141715171617171718171917201721172217231724172517261727172817291730173117321733173417351736173717381739174017411742174317441745174617471748174917501751175217531754175517561757175817591760176117621763176417651766176717681769177017711772177317741775
  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_Plate_Water_Flow_Switch"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  156. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  157. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  158. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  159. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  160. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
  161. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = true;
  162. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = false;
  163. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = false;
  168. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = false;
  171. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  172. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  173. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  174. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = true;
  175. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  176. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  177. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  178. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  179. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  180. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  190. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  194. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  195. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  200. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  201. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  202. //// pressure
  203. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  204. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  205. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  206. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  207. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  208. //// Temperature
  209. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  210. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  211. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  212. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  213. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  214. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  215. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  216. // Datetime
  217. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  218. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  219. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  220. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  221. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  222. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  223. break;
  224. case JetChamber.Kepler2300:
  225. // chamber
  226. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  227. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  228. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  229. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  230. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  231. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  232. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  233. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  234. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  235. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  236. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  237. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  239. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  240. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  241. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  242. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  243. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  244. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  245. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  246. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  247. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  248. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  249. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  250. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  252. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  262. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  267. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  268. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  269. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  270. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  271. //// pressure
  272. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  273. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  274. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  275. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  276. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  277. //// Temperature
  278. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  279. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  280. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  281. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  282. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  283. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  284. // Datetime
  285. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  286. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  287. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  288. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  289. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  290. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  291. break;
  292. case JetChamber.Kepler2200A:
  293. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  294. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  295. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  296. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  297. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  298. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  299. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  300. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  301. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  302. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  303. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  304. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  305. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  306. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  307. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  308. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  309. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  318. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  319. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  320. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  321. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  322. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  323. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  324. //// pressure
  325. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  326. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  327. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  328. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  329. //// Temperature
  330. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  331. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  332. // Datetime
  333. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  334. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  335. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  336. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  337. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  338. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  339. break;
  340. }
  341. }
  342. private void SetTMDefaultValue()
  343. {
  344. ModuleName mod = ModuleName.TM;
  345. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  346. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  347. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  348. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  349. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  351. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  354. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  355. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  356. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  357. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  358. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  359. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  360. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  361. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  362. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  363. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  364. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  366. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  372. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  373. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  374. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  375. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  376. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  377. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  378. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  381. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  382. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  383. // Datetime
  384. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  385. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  386. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  387. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  388. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  389. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  390. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  391. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  392. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  393. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  394. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  395. }
  396. private void SetSETMDefaultValue()
  397. {
  398. ModuleName mod = ModuleName.TMSE;
  399. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  400. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  401. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  402. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  404. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  405. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  406. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  407. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  408. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  409. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  410. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  411. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  412. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  413. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  414. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  415. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
  418. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  419. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
  420. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  421. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  422. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  423. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  424. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  425. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  426. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  427. SetAiValue($"{mod}.VCE_Vacuum_Gauge", 3000);
  428. SetAiValue($"{mod}.VCE_Pipeline_Vacuum_Gauge", 3000);
  429. SetAiValue($"{mod}.TM_Pipeline_Vacuum_Gauge", 3000);
  430. SetAiValue($"{mod}.TM_Vacuum_Gauge", 3000);
  431. }
  432. private bool OnMonitor()
  433. {
  434. try
  435. {
  436. foreach (var item in jetChambers)
  437. {
  438. switch (item.Value)
  439. {
  440. case JetChamber.Venus:
  441. MonitorSlitDoor(item.Key);
  442. MonitorPin(item.Key);
  443. MonitorPressure(item.Key);
  444. MonitorExtendAndRetract(item.Key);
  445. MonitorGas(item.Key);
  446. this.SimulateHe(item.Key);
  447. //MonitorRF(item.Key);
  448. ChangeTime(item.Key);
  449. //MonitorIOPumpCtrl(item.Key);
  450. break;
  451. case JetChamber.Kepler2300:
  452. MonitorSlitDoor(item.Key);
  453. MonitorPin(item.Key);
  454. MonitorPressure_Kepler(item.Key);
  455. //MonitorTemperature(item.Key);
  456. MonitorGas(item.Key);
  457. this.SimulateHe(item.Key);
  458. //MonitorRF(item.Key);
  459. ChangeTime(item.Key);
  460. //MonitorIOPumpCtrl(item.Key);
  461. MonitorLid(item.Key);
  462. break;
  463. case JetChamber.Kepler2200A:
  464. MonitorSlitDoor(item.Key);
  465. MonitorPressure_Kepler2200A(item.Key);
  466. //MonitorTemperature(item.Key);
  467. MonitorGas(item.Key);
  468. // MonitorRF(item.Key);
  469. ChangeTime(item.Key);
  470. //MonitorIOPumpCtrl(item.Key);
  471. MonitorLid(item.Key);
  472. MonitorIOHighTemperatureHeater(item.Key);
  473. break;
  474. case JetChamber.Kepler2200B:
  475. break;
  476. }
  477. }
  478. ChangeTime(ModuleName.TM);
  479. MonitorMFSlitDoor();
  480. MonitorSEMFSlitDoor();
  481. }
  482. catch (Exception e)
  483. {
  484. LOG.WriteExeption(e);
  485. }
  486. return true;
  487. }
  488. private void ChangeTime(ModuleName mod)
  489. {
  490. if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  491. {
  492. // Heartbeat with PLC
  493. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  494. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  495. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  496. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  497. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  498. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  499. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  500. }
  501. }
  502. void MonitorSlitDoor(ModuleName mod)
  503. {
  504. // slit door open
  505. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  506. {
  507. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  508. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  509. }
  510. // slit door close
  511. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  512. {
  513. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  514. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  515. }
  516. }
  517. void MonitorMFSlitDoor()
  518. {
  519. ModuleName mod = ModuleName.TM;
  520. // LLA T door open
  521. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  522. {
  523. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  524. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  525. }
  526. // LLB T door open
  527. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  528. {
  529. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  530. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  531. }
  532. // LLA E door open
  533. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  534. {
  535. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  536. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  537. }
  538. // LLB E door open
  539. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  540. {
  541. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  542. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  543. }
  544. // LLA T door close
  545. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  546. {
  547. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  548. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  549. }
  550. // LLB T door close
  551. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  552. {
  553. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  554. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  555. }
  556. // LLA E door close
  557. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  558. {
  559. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  560. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  561. }
  562. // LLB E door close
  563. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  564. {
  565. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  566. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  567. }
  568. }
  569. void MonitorSEMFSlitDoor()
  570. {
  571. ModuleName mod = ModuleName.TMSE;
  572. // VCE T door open
  573. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  574. {
  575. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  576. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  577. }
  578. // VCE T door Close
  579. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  580. {
  581. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  582. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  583. }
  584. // VCE T door Close
  585. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  586. {
  587. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  588. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  589. }
  590. }
  591. void MonitorPin(ModuleName mod)
  592. {
  593. // lift pin up
  594. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  595. {
  596. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  597. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  598. }
  599. }
  600. void MonitorLid(ModuleName mod)
  601. {
  602. // lift pin up
  603. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  604. {
  605. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  606. }
  607. }
  608. void MonitorExtendAndRetract(ModuleName mod)
  609. {
  610. // Extend
  611. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  612. if (_trigLLExtend.Q)
  613. {
  614. _trigLLRetract.RST = true;
  615. Thread.Sleep(500);
  616. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  617. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  618. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  619. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  620. }
  621. // Retract
  622. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  623. if (_trigLLRetract.Q)
  624. {
  625. count++;
  626. _trigLLExtend.RST = true;
  627. Thread.Sleep(500);
  628. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  629. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  630. if (count == 1)
  631. {
  632. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  633. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  634. }
  635. else if (count == 2)
  636. {
  637. count = 0;
  638. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  639. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  640. }
  641. }
  642. }
  643. void MonitorPressure(ModuleName mod)
  644. {
  645. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  646. // Loadlock pressure
  647. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  648. // Foreline
  649. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  650. {
  651. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  652. }
  653. else
  654. {
  655. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  656. }
  657. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  658. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  659. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  660. //float chamber_pressure = GetMockChamberPressure(mod);
  661. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  662. // soft pump & fast pump
  663. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  664. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  665. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  666. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  667. {
  668. //任意泵打开
  669. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  670. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  671. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  672. {//开双泵
  673. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  674. {
  675. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  676. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  677. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  678. }
  679. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  680. {
  681. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  682. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  683. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  684. }
  685. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  686. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  687. }
  688. else if (fast_pump_vlv.Value)//开
  689. {
  690. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  691. {
  692. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  693. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  694. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  695. }
  696. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  697. {
  698. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  699. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  700. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  701. }
  702. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  703. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  704. }
  705. else if (soft_pump_vlv.Value)
  706. {
  707. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  708. {
  709. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  710. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  711. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  712. }
  713. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  714. {
  715. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  716. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  717. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  718. }
  719. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  720. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  721. }
  722. else if (turbo_pump_vlv.Value)
  723. {
  724. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  725. if ((getAiValue_ChamberPressure - 500) >= 0)
  726. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  727. else
  728. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  729. if ((getAiValue_ProcessPressure - 500) >= 0)
  730. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  731. else
  732. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  733. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  734. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  735. }
  736. }
  737. // fast vent & purge
  738. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  739. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  740. //if (vent_vlv.Value || purge_vlv.Value)
  741. //{
  742. // if (vent_vlv.Value && purge_vlv.Value)
  743. // {
  744. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  745. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  746. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  747. // {
  748. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  749. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  750. // }
  751. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  752. // {
  753. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  754. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  755. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  756. // }
  757. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  758. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  759. // }
  760. // else
  761. //
  762. if (vent_vlv.Value)
  763. {
  764. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  765. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  766. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  767. {
  768. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  769. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  770. }
  771. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  772. {
  773. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  774. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  775. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  776. }
  777. else
  778. {
  779. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  780. }
  781. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  782. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  783. }
  784. // Loadlock Pumping Valve
  785. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  786. if (Loadlock_pump_vlv.Value)
  787. {
  788. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  789. }
  790. // Loadlock vent
  791. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  792. if (Loadlock_vent_vlv.Value)
  793. {
  794. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  795. }
  796. // 压力值越界,复位
  797. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  798. if (chamber_pressure1 > ATM_PRESSURE)
  799. {
  800. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  801. }
  802. else if (chamber_pressure1 < 20)
  803. {
  804. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  805. }
  806. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  807. if (process_pressure1 > PROCESS_GAUGE)
  808. {
  809. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  810. }
  811. else if (process_pressure1 < 20)
  812. {
  813. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  814. }
  815. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  816. if (foreline_pressure > 10000)
  817. {
  818. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  819. }
  820. else if (foreline_pressure < 150)
  821. {
  822. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  823. }
  824. // 模拟压力计漂移
  825. //int p1 = (int)GetMockChamberPressure(mod);
  826. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  827. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  828. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  829. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  830. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  831. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  832. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  833. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  834. // 根据当前压力值设定信号
  835. //float chamber_pressure2 = GetMockChamberPressure(mod);
  836. // ATM switch
  837. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  838. // VAC switch
  839. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  840. // Throttle valve
  841. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  842. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  843. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  844. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  845. // 压力值
  846. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  847. //{
  848. // short increase = (short)_rd.Next(20, 30);
  849. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  850. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  851. // {
  852. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  853. // }
  854. //}
  855. //else
  856. //{
  857. // short increase = (short)_rd.Next(20, 30);
  858. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  859. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  860. // {
  861. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  862. // }
  863. //}
  864. //// 位置值
  865. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  866. //{
  867. // short increase = (short)_rd.Next(20, 30);
  868. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  869. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  870. // {
  871. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  872. // }
  873. //}
  874. //else
  875. //{
  876. // short increase = (short)_rd.Next(20, 30);
  877. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  878. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  879. // {
  880. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  881. // }
  882. //}
  883. }
  884. void MonitorPressure_Kepler(ModuleName mod)
  885. {
  886. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  887. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  888. {
  889. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  890. }
  891. else
  892. {
  893. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  894. }
  895. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  896. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  897. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  898. //float chamber_pressure = GetMockChamberPressure(mod);
  899. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  900. // soft pump & fast pump
  901. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  902. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  903. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  904. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  905. {
  906. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  907. {
  908. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  909. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  910. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  911. {
  912. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  913. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  914. }
  915. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  916. {
  917. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  918. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  919. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  920. }
  921. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  922. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  923. }
  924. else if (fast_pump_vlv.Value)
  925. {
  926. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  927. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  928. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  929. {
  930. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  931. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  932. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  933. }
  934. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  935. {
  936. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  937. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  938. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  939. }
  940. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  941. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  942. }
  943. else if (soft_pump_vlv.Value)
  944. {
  945. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  946. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  947. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  948. {
  949. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  950. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  951. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  952. }
  953. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  954. {
  955. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  956. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  957. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  958. }
  959. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  960. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  961. }
  962. else if (turbo_pump_vlv.Value)
  963. {
  964. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  965. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  966. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  967. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  968. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  969. }
  970. }
  971. // fast vent & purge
  972. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  973. if (vent_vlv.Value)
  974. {
  975. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  976. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  977. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  978. {
  979. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  980. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  981. }
  982. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  983. {
  984. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  985. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  986. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  987. }
  988. else
  989. {
  990. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  991. }
  992. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  993. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  994. }
  995. // Loadlock Pumping Valve
  996. // 压力值越界,复位
  997. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  998. if (chamber_pressure1 > ATM_PRESSURE)
  999. {
  1000. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1001. }
  1002. else if (chamber_pressure1 < 20)
  1003. {
  1004. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1005. }
  1006. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1007. if (process_pressure1 > PROCESS_GAUGE)
  1008. {
  1009. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1010. }
  1011. else if (process_pressure1 < 20)
  1012. {
  1013. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1014. }
  1015. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1016. if (foreline_pressure > 10000)
  1017. {
  1018. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1019. }
  1020. else if (foreline_pressure < 150)
  1021. {
  1022. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1023. }
  1024. // ATM switch
  1025. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1026. // VAC switch
  1027. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1028. }
  1029. void MonitorPressure_Kepler2200A(ModuleName mod)
  1030. {
  1031. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1032. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1033. {
  1034. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1035. }
  1036. else
  1037. {
  1038. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1039. }
  1040. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1041. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1042. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1043. //float chamber_pressure = GetMockChamberPressure(mod);
  1044. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1045. // soft pump & fast pump
  1046. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1047. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1048. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1049. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1050. {
  1051. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1052. {
  1053. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1054. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1055. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1056. {
  1057. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1058. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1059. }
  1060. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1061. {
  1062. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1063. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1064. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1065. }
  1066. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1067. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1068. }
  1069. else if (fast_pump_vlv.Value)
  1070. {
  1071. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1072. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1073. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1074. {
  1075. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1076. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1077. }
  1078. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1079. {
  1080. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1081. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1082. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1083. }
  1084. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1085. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1086. }
  1087. else if (soft_pump_vlv.Value)
  1088. {
  1089. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1090. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1091. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1092. {
  1093. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1094. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1095. }
  1096. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1097. {
  1098. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1099. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1100. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1101. }
  1102. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1103. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1104. }
  1105. else if (turbo_pump_vlv.Value)
  1106. {
  1107. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1108. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1109. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1110. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1111. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1112. }
  1113. }
  1114. // fast vent & purge
  1115. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1116. if (vent_vlv.Value)
  1117. {
  1118. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1119. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1120. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1121. {
  1122. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1123. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1124. }
  1125. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1126. {
  1127. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1128. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1129. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1130. }
  1131. else
  1132. {
  1133. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1134. }
  1135. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1136. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1137. }
  1138. // Loadlock Pumping Valve
  1139. // 压力值越界,复位
  1140. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1141. if (chamber_pressure1 > ATM_PRESSURE)
  1142. {
  1143. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1144. }
  1145. else if (chamber_pressure1 < 20)
  1146. {
  1147. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1148. }
  1149. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1150. if (process_pressure1 > PROCESS_GAUGE)
  1151. {
  1152. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1153. }
  1154. else if (process_pressure1 < 20)
  1155. {
  1156. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1157. }
  1158. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1159. if (foreline_pressure > 10000)
  1160. {
  1161. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1162. }
  1163. else if (foreline_pressure < 150)
  1164. {
  1165. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1166. }
  1167. // ATM switch
  1168. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1169. // VAC switch
  1170. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1171. }
  1172. void MonitorMFPressure()
  1173. {
  1174. if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1175. {
  1176. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1177. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1178. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1179. ModuleName mod = ModuleName.TM;
  1180. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1181. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1182. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1183. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1184. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1185. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1186. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1187. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1188. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1189. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1190. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1191. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1192. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1193. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1194. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1195. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1196. {
  1197. if (getAiValue_LLA_ChamberPressure > 10000)
  1198. {
  1199. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1200. }
  1201. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1202. {
  1203. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1204. }
  1205. }
  1206. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1207. {
  1208. if (getAiValue_LLB_ChamberPressure > 10000)
  1209. {
  1210. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1211. }
  1212. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1213. {
  1214. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1215. }
  1216. }
  1217. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1218. {
  1219. if (getAiValue_TM_ChamberPressure > 10000)
  1220. {
  1221. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1222. }
  1223. else if (getAiValue_TM_ChamberPressure <= 10000)
  1224. {
  1225. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1226. }
  1227. }
  1228. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1229. {
  1230. if (getAiValue_LLA_ChamberPressure > 10000)
  1231. {
  1232. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1233. }
  1234. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1235. {
  1236. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1237. }
  1238. }
  1239. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1240. {
  1241. if (getAiValue_LLB_ChamberPressure > 10000)
  1242. {
  1243. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1244. }
  1245. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1246. {
  1247. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1248. }
  1249. }
  1250. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1251. {
  1252. if (getAiValue_TM_ChamberPressure > 10000)
  1253. {
  1254. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1255. }
  1256. else if (getAiValue_TM_ChamberPressure <= 10000)
  1257. {
  1258. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1259. }
  1260. }
  1261. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1262. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1263. {
  1264. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1265. }
  1266. else if (getAiValue_LLA_ChamberPressure < 20)
  1267. {
  1268. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1269. }
  1270. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1271. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1272. {
  1273. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1274. }
  1275. else if (getAiValue_LLB_ChamberPressure < 20)
  1276. {
  1277. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1278. }
  1279. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1280. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1281. {
  1282. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1283. }
  1284. else if (getAiValue_TM_ChamberPressure < 20)
  1285. {
  1286. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1287. }
  1288. // ATM switch
  1289. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1290. // VAC switch
  1291. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1292. // ATM switch
  1293. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1294. // VAC switch
  1295. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1296. // ATM switch
  1297. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1298. // VAC switch
  1299. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1300. }
  1301. else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1302. {
  1303. ModuleName mod = ModuleName.TM;
  1304. //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1305. //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1306. //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1307. }
  1308. }
  1309. void SetAiValue(string name, float value)
  1310. {
  1311. byte[] flow = BitConverter.GetBytes(value);
  1312. short high1 = BitConverter.ToInt16(flow, 0);
  1313. short low1 = BitConverter.ToInt16(flow, 2);
  1314. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1315. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1316. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1317. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1318. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1319. }
  1320. float GetAiValue(string name)
  1321. {
  1322. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1323. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1324. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1325. return flow;
  1326. }
  1327. float GetAoValue(string name)
  1328. {
  1329. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1330. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1331. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1332. return flow;
  1333. }
  1334. void MonitorTemperature(ModuleName mod)
  1335. {
  1336. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1337. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1338. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1339. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1340. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1341. // 底座
  1342. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1343. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1344. //{
  1345. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1346. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1347. //}
  1348. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1349. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1350. //{
  1351. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1352. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1353. //}
  1354. // Foreline
  1355. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1356. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1357. {
  1358. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1359. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1360. }
  1361. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1362. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1363. {
  1364. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1365. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1366. }
  1367. // Wall
  1368. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1369. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1370. {
  1371. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1372. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1373. }
  1374. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1375. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1376. {
  1377. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1378. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1379. }
  1380. }
  1381. void MonitorGas(ModuleName mod)
  1382. {
  1383. // gas
  1384. this.SimulateMFC(mod, 1);
  1385. this.SimulateMFC(mod, 2);
  1386. this.SimulateMFC(mod, 3);
  1387. this.SimulateMFC(mod, 4);
  1388. this.SimulateMFC(mod, 5);
  1389. this.SimulateMFC(mod, 6);
  1390. this.SimulateMFC(mod, 7);
  1391. this.SimulateMFC(mod, 8);
  1392. this.SimulateN2(mod);
  1393. }
  1394. private void SimulateMFC(ModuleName mod, byte gasNum)
  1395. {
  1396. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1397. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1398. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1399. }
  1400. private void SimulateN2(ModuleName mod)
  1401. {
  1402. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1403. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1404. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1405. }
  1406. private void SimulateHe(ModuleName mod)
  1407. {
  1408. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1409. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1410. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1411. }
  1412. void MonitorRF(ModuleName mod)
  1413. {
  1414. // RF generator
  1415. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1416. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1417. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1418. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1419. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1420. }
  1421. void MonitorIOPumpCtrl(ModuleName mod)
  1422. {
  1423. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1424. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1425. }
  1426. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1427. {
  1428. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1429. {
  1430. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1431. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1432. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1433. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1434. }
  1435. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1436. {
  1437. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1438. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1439. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1440. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1441. }
  1442. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1443. {
  1444. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1445. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1446. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1447. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1448. }
  1449. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1450. {
  1451. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1452. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1453. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1454. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1455. }
  1456. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_H-HT_Heater_On"].Value;
  1457. var sp = GetAoValue($"{mod}.AO_CHB_H-HT_Temperature_Setpoint");
  1458. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1459. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1460. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", (float)mock_fb);
  1461. }
  1462. public void Terminate()
  1463. {
  1464. _thread.Stop();
  1465. }
  1466. public void SetCoolantOutletTemp(string module, int Temp)
  1467. {
  1468. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1469. //{
  1470. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1471. //}
  1472. }
  1473. }
  1474. }