AutoCycle.cs 59 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using Venus_Core;
  20. using Venus_RT.Modules.Schedulers;
  21. using Venus_RT.Scheduler;
  22. namespace Venus_RT.Modules
  23. {
  24. enum ModulePriority
  25. {
  26. High,
  27. Middle,
  28. Low,
  29. Stop,
  30. }
  31. enum MovingStatus
  32. {
  33. Staying,
  34. Waiting,
  35. Moving,
  36. }
  37. class ModuleFlag
  38. {
  39. public ModulePriority Priority { get; set; }
  40. public MovingStatus MovingStatus { get; set; }
  41. public ModuleFlag(ModulePriority _priority)
  42. {
  43. Priority = _priority;
  44. MovingStatus = MovingStatus.Staying;
  45. }
  46. }
  47. class AutoCycle : IRoutine
  48. {
  49. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  50. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  51. private RState _cycleState = RState.Init;
  52. Dictionary<ModuleName, SchedulerModule> _atmSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  53. Dictionary<ModuleName, ModuleFlag> _atmModules = new Dictionary<ModuleName, ModuleFlag>();
  54. Dictionary<ModuleName, SchedulerModule> _vacSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  55. Dictionary<ModuleName, ModuleFlag> _vacModules = new Dictionary<ModuleName, ModuleFlag>();
  56. SchedulerTMRobot _tmRobot = new SchedulerTMRobot();
  57. SchedulerEfemRobot _efemRobot = new SchedulerEfemRobot();
  58. List<SlotItem> _vacReadyOutSlots = new List<SlotItem>();
  59. List<SlotItem> _vacReadyInSlots = new List<SlotItem>();
  60. List<SlotItem> _atmReadyOutSlots = new List<SlotItem>();
  61. List<SlotItem> _atmReadyInSlots = new List<SlotItem>();
  62. List<int> _LLAInSlot = new List<int> { 0, 1, 2, 3 };
  63. List<int> _LLAOutSlot = new List<int> { 0, 1, 2, 3 };
  64. List<int> _LLBInSlot = new List<int> { 0, 1, 2, 3 };
  65. List<int> _LLBOutSlot = new List<int> { 0, 1, 2, 3 };
  66. int _LLASlotNumber = 4;
  67. int _LLBSlotNumber = 4;
  68. List<MoveItem> _movingItems = new List<MoveItem>();
  69. List<MoveItem> _efemMovingItems = new List<MoveItem>();
  70. Dictionary<SlotItem, Guid> _vacWaferTargets = new Dictionary<SlotItem, Guid>();
  71. Dictionary<SlotItem, Guid> _atmWaferTargets = new Dictionary<SlotItem, Guid>();
  72. R_TRIG _vacMoveFinishTrig = new R_TRIG();
  73. R_TRIG _atmMoveFinishTrig = new R_TRIG();
  74. private SchedulerFACallback _faCallback;
  75. private SchedulerDBCallback _dbCallback;
  76. private bool _isCycleMode;
  77. private int _cycleSetPoint = 0;
  78. private int _cycledCount = 0;
  79. private int _cycledWafer = 0;
  80. public bool HasJobRunning => _lstControlJobs.Count > 0;
  81. #region public interface
  82. public AutoCycle()
  83. {
  84. _faCallback = new SchedulerFACallback();
  85. _dbCallback = new SchedulerDBCallback();
  86. InitModules();
  87. _LLASlotNumber = SC.GetValue<int>("LLA.SlotNumber");
  88. _LLBSlotNumber = SC.GetValue<int>("LLB.SlotNumber");
  89. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  90. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  91. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  92. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  93. }
  94. public RState Start(params object[] objs)
  95. {
  96. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  97. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  98. _cycledWafer = 0;
  99. _cycledCount = 0;
  100. return RState.Running;
  101. }
  102. public RState Monitor()
  103. {
  104. prelude();
  105. driveAtmSystem();
  106. driveVacSystem();
  107. epilogue();
  108. return _cycleState;
  109. }
  110. public void Abort()
  111. {
  112. }
  113. public void CreateJob(Dictionary<string, object> param)
  114. {
  115. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  116. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  117. string[] slotSequence = (string[])param["SlotSequence"];
  118. string jobId = (string)param["JobId"];
  119. string module = (string)param["Module"];
  120. //bool autoStart = (bool)param["AutoStart"];
  121. string lotId = jobId;
  122. if (param.ContainsKey("LotId"))
  123. lotId = (string)param["LotId"];
  124. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  125. {
  126. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}");
  127. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  128. return;
  129. }
  130. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  131. {
  132. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} should be LoadPort");
  133. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  134. return;
  135. }
  136. if (string.IsNullOrEmpty(jobId))
  137. {
  138. jobId = "CJ_Local_" + module;
  139. }
  140. if (_lstControlJobs.Exists(x => x.Name == jobId))
  141. {
  142. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{jobId} already created");
  143. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  144. return;
  145. }
  146. SchedulerLoadPort lp = _atmSchedulers[ModuleHelper.Converter(module)] as SchedulerLoadPort;
  147. if (!lp.CheckReadyRunJob())
  148. {
  149. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} not ready");
  150. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  151. return;
  152. }
  153. ControlJobInfo cj = new ControlJobInfo();
  154. cj.Name = jobId;
  155. cj.Module = module;
  156. cj.LotName = lotId;
  157. cj.LotInnerId = Guid.NewGuid();
  158. cj.LotWafers = new List<WaferInfo>();
  159. cj.SetState(EnumControlJobState.WaitingForStart);
  160. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  161. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  162. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  163. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  164. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  165. {
  166. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  167. continue;
  168. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  169. indexSequence[groupName] = slotSequence[i];
  170. if (!seqSlot.ContainsKey(groupName))
  171. {
  172. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  173. }
  174. if (!seqSlotWafers.ContainsKey(groupName))
  175. {
  176. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  177. }
  178. seqSlot[groupName][i] = true;
  179. if (!WaferManager.Instance.CheckHasWafer(module, i))
  180. {
  181. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  182. return;
  183. }
  184. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  185. {
  186. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}");
  187. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  188. return;
  189. }
  190. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  191. {
  192. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}");
  193. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  194. return;
  195. }
  196. cj.LotWafers.Add(WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i));
  197. WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).SequenceName = slotSequence[i];
  198. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  199. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  200. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  201. }
  202. if (seqSlotWafers.Count == 0)
  203. {
  204. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job has not assign wafer");
  205. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  206. return;
  207. }
  208. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  209. string[] seqs = seqSlot.Keys.ToArray();
  210. for (int i = 0; i < seqs.Length; i++)
  211. {
  212. ProcessJobInfo pj = new ProcessJobInfo();
  213. pj.Name = jobId + "_" + (i + 1);
  214. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  215. pj.ControlJobName = cj.Name;
  216. pj.LotName = lotId;
  217. pj.SlotWafers = seqSlotWafers[seqs[i]];
  218. pj.SetState(EnumProcessJobState.Queued);
  219. if (!CheckSequencePmReady(pj.Sequence, null, out _, out string reason))
  220. {
  221. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  222. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  223. return;
  224. }
  225. if (!SC.GetValue<bool>("System.IsATMMode") && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  226. {
  227. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  228. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  229. return;
  230. }
  231. pjs.Add(pj);
  232. }
  233. _dbCallback.LotUpdate(cj);
  234. foreach (var pj in pjs)
  235. {
  236. cj.ProcessJobNameList.Add(pj.Name);
  237. _lstProcessJobs.Add(pj);
  238. }
  239. _lstControlJobs.Add(cj);
  240. //AssociatedPMWithLP(cj);
  241. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  242. }
  243. public bool CheckAllJobDone()
  244. {
  245. foreach (var cj in _lstControlJobs)
  246. {
  247. if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
  248. return false;
  249. }
  250. return true;
  251. }
  252. public bool CheckJobJustDone(out string sJobName)
  253. {
  254. foreach (var cj in _lstControlJobs)
  255. {
  256. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  257. {
  258. //LP;WaferSize;Lot;Number;Start;End;
  259. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  260. cj.BeenPosted = true;
  261. return true;
  262. }
  263. }
  264. sJobName = "NULL";
  265. return false;
  266. }
  267. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  268. {
  269. foreach (var pj in _lstProcessJobs)
  270. {
  271. if (pj.ControlJobName == cj.Name)
  272. return pj;
  273. }
  274. return null;
  275. }
  276. public void AbortJob(string jobName)
  277. {
  278. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  279. if (cj == null)
  280. {
  281. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"abort job rejected, not found job with id {jobName}");
  282. return;
  283. }
  284. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  285. foreach (var pj in _lstProcessJobs)
  286. {
  287. if (pj.ControlJobName == cj.Name)
  288. {
  289. pj.SetState(EnumProcessJobState.Aborting);
  290. pjAbortList.Add(pj);
  291. int unprocessed = 0;
  292. int aborted = 0;
  293. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  294. foreach (var waferInfo in wafers)
  295. {
  296. waferInfo.ProcessJob = null;
  297. waferInfo.NextSequenceStep = 0;
  298. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  299. unprocessed++;
  300. }
  301. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  302. }
  303. }
  304. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  305. _dbCallback.LotFinished(cj);
  306. foreach (var pj in pjAbortList)
  307. {
  308. _lstProcessJobs.Remove(pj);
  309. }
  310. _lstControlJobs.Remove(cj);
  311. }
  312. public void StopJob(string jobName)
  313. {
  314. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  315. if (cj == null)
  316. {
  317. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"stop job rejected, not found job with id {jobName}");
  318. return;
  319. }
  320. foreach (var pj in _lstProcessJobs)
  321. {
  322. if (pj.ControlJobName == cj.Name)
  323. {
  324. pj.SetState(EnumProcessJobState.Stopping);
  325. }
  326. }
  327. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  328. _dbCallback.LotFinished(cj);
  329. }
  330. public void ResumeJob(string jobName)
  331. {
  332. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  333. if (cj == null)
  334. {
  335. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  336. return;
  337. }
  338. if (cj.State == EnumControlJobState.Paused)
  339. {
  340. cj.SetState(EnumControlJobState.Executing);
  341. }
  342. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  343. }
  344. public void PauseJob(string jobName)
  345. {
  346. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  347. if (cj == null)
  348. {
  349. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  350. return;
  351. }
  352. if (cj.State == EnumControlJobState.Executing)
  353. {
  354. cj.SetState(EnumControlJobState.Paused);
  355. }
  356. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  357. }
  358. public void StartJob(string jobName)
  359. {
  360. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  361. if (cj == null)
  362. {
  363. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"start job rejected, not found job with id {jobName}");
  364. return;
  365. }
  366. if (cj.State == EnumControlJobState.WaitingForStart)
  367. {
  368. cj.SetState(EnumControlJobState.Executing);
  369. //PreJobClean(cj);
  370. (_atmSchedulers[ModuleHelper.Converter(cj.Module)] as SchedulerLoadPort).NoteJobStart();
  371. cj.StartTime = DateTime.Now;
  372. _dbCallback.LotCreated(cj);
  373. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  374. //if (!_blockingWatcher.IsRunning)
  375. // _blockingWatcher.Restart();
  376. //ResetTraceFlag();
  377. }
  378. _cycleState = RState.Running;
  379. }
  380. public void Clear()
  381. {
  382. _efemRobot.ResetTask();
  383. foreach (var module in _vacSchedulers)
  384. {
  385. module.Value.ResetTask();
  386. }
  387. foreach (var module in _atmSchedulers)
  388. {
  389. module.Value.ResetTask();
  390. }
  391. _lstControlJobs.Clear();
  392. _lstProcessJobs.Clear();
  393. //_mapTarget.Clear();
  394. //queMoveAction.Clear();
  395. //_curAction.state = ActionState.Done;
  396. }
  397. #endregion
  398. private void InitModules()
  399. {
  400. foreach(var module in new ModuleName[]{ ModuleName.LP1, ModuleName.LP2, ModuleName.LP3,
  401. ModuleName.Aligner1, ModuleName.Aligner2, ModuleName.Cooling1, ModuleName.Cooling2})
  402. {
  403. if(ModuleHelper.IsInstalled(module))
  404. {
  405. if(ModuleHelper.IsLoadPort(module))
  406. {
  407. _atmSchedulers[module] = new SchedulerLoadPort(module);
  408. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  409. }
  410. else if(ModuleHelper.IsAligner(module) || ModuleHelper.IsCooling(module))
  411. {
  412. _atmSchedulers[module] = new SchedulerAligner(module);
  413. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  414. }
  415. }
  416. }
  417. foreach (var module in new ModuleName[] { ModuleName.PMA, ModuleName.PMB, ModuleName.PMC,
  418. ModuleName.PMD, ModuleName.PME, ModuleName.PMF})
  419. {
  420. if (ModuleHelper.IsInstalled(module))
  421. {
  422. _vacSchedulers[module] = new SchedulerPM(module);
  423. _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
  424. }
  425. }
  426. foreach (var module in new ModuleName[] { ModuleName.LLA, ModuleName.LLB })
  427. {
  428. if (ModuleHelper.IsInstalled(module))
  429. {
  430. var llScheduler = new SchedulerLoadLock(module);
  431. _vacSchedulers[module] = llScheduler;
  432. _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
  433. _atmSchedulers[module] = llScheduler;
  434. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  435. }
  436. }
  437. }
  438. private void prelude()
  439. {
  440. }
  441. private void epilogue()
  442. {
  443. CheckWaferArrived();
  444. StartNewJob();
  445. }
  446. private void driveVacSystem()
  447. {
  448. PumpingTMRobotTask();
  449. ProcessTMRobotTask();
  450. RuningTMRobotTask();
  451. }
  452. #region Vacuum System
  453. private void PumpingTMRobotTask()
  454. {
  455. if (!_tmRobot.IsAvailable)
  456. return;
  457. foreach(var mod in _vacSchedulers)
  458. {
  459. if (mod.Value.IsAvailable && _vacModules[mod.Key].MovingStatus == MovingStatus.Staying)
  460. {
  461. if(ModuleHelper.IsLoadLock(mod.Key))
  462. {
  463. var inSlots = mod.Key == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  464. foreach(var slot in inSlots)
  465. {
  466. if(WaferManager.Instance.CheckHasWafer(mod.Key, slot) && IsVacWaferReadyOut(mod.Key, slot))
  467. {
  468. _vacReadyOutSlots.Add(new SlotItem(mod.Key, slot));
  469. }
  470. }
  471. var outSlots = mod.Key == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
  472. foreach(var slot in outSlots)
  473. {
  474. if(WaferManager.Instance.CheckNoWafer(mod.Key, slot))
  475. {
  476. _vacReadyInSlots.Add(new SlotItem(mod.Key, slot));
  477. }
  478. }
  479. }
  480. else
  481. {
  482. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0) && IsVacWaferReadyOut(mod.Key, 0)) // processed?
  483. {
  484. _vacReadyOutSlots.Add(new SlotItem(mod.Key, 0));
  485. }
  486. else if(WaferManager.Instance.CheckNoWafer(mod.Key, 0))
  487. {
  488. _vacReadyInSlots.Add(new SlotItem(mod.Key, 0));
  489. }
  490. }
  491. }
  492. }
  493. }
  494. bool SearchWaferDestination(SlotItem outSlot, out SlotItem destSlot)
  495. {
  496. destSlot = new SlotItem(ModuleName.System, -1);
  497. var wafer = WaferManager.Instance.GetWafer(outSlot.Module, outSlot.Slot);
  498. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  499. return false;
  500. foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  501. {
  502. var validSlots = GetModuleValidSlots(next_module);
  503. foreach (var nSlot in validSlots)
  504. {
  505. if (_movingItems.Exists(mItem => mItem.DestinationModule == next_module && mItem.DestinationSlot == nSlot))
  506. continue;
  507. var ready_in = _vacReadyInSlots.Find(item => item.Module == next_module && item.Slot == nSlot);
  508. if (ready_in != null && _vacModules[ready_in.Module].MovingStatus != MovingStatus.Moving)
  509. {
  510. destSlot.Module = ready_in.Module;
  511. destSlot.Slot = nSlot;
  512. return true;
  513. }
  514. }
  515. }
  516. return false;
  517. }
  518. List<int> GetModuleValidSlots(ModuleName mod)
  519. {
  520. var validSlot = new List<int>();
  521. if(ModuleHelper.IsLoadLock(mod))
  522. {
  523. var inSlots = mod == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  524. foreach (var slot in inSlots)
  525. {
  526. if (WaferManager.Instance.CheckNoWafer(mod, slot) && !_movingItems.Exists(item => item.DestinationModule == mod && item.DestinationSlot == slot))
  527. validSlot.Add(slot);
  528. if (WaferManager.Instance.CheckHasWafer(mod, slot) && _movingItems.Exists(item => item.SourceModule == mod && item.SourceSlot == slot))
  529. validSlot.Add(slot);
  530. }
  531. }
  532. else if(ModuleHelper.IsPm(mod))
  533. {
  534. if (WaferManager.Instance.CheckNoWafer(mod, 0) && !_movingItems.Exists(item => item.DestinationModule == mod))
  535. validSlot.Add(0);
  536. if (WaferManager.Instance.CheckHasWafer(mod, 0) && _movingItems.Exists(item => item.SourceModule == mod))
  537. validSlot.Add(0);
  538. }
  539. return validSlot.Distinct().ToList();
  540. }
  541. List<MoveItem> SearchWaitInSlots(ModuleName inModule)
  542. {
  543. List<MoveItem> inSlots = new List<MoveItem>();
  544. var validSlots = GetModuleValidSlots(inModule);
  545. foreach(var slot in _vacReadyOutSlots)
  546. {
  547. if (slot.Module == inModule && _vacModules[slot.Module].MovingStatus == MovingStatus.Moving)
  548. continue;
  549. var wafer = WaferManager.Instance.GetWafer(slot.Module, slot.Slot);
  550. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  551. continue;
  552. foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  553. {
  554. if(next_module == inModule && validSlots.Count > 0 && !_movingItems.Exists(item => item.SourceModule == slot.Module && item.SourceSlot == slot.Slot))
  555. {
  556. if(!inSlots.Exists(item => item.SourceModule == slot.Module && item.SourceSlot == slot.Slot))
  557. {
  558. inSlots.Add(new MoveItem(slot.Module, slot.Slot, inModule, validSlots.First(), Hand.None));
  559. }
  560. validSlots.RemoveAt(0);
  561. }
  562. }
  563. }
  564. return inSlots;
  565. }
  566. private void UpdateItemMovingStatus(MoveItem moveItem, MovingStatus status = MovingStatus.Moving)
  567. {
  568. if(!ModuleHelper.IsTMRobot(moveItem.DestinationModule))
  569. {
  570. _vacModules[moveItem.DestinationModule].MovingStatus = status;
  571. }
  572. if(!ModuleHelper.IsTMRobot(moveItem.SourceModule))
  573. {
  574. _vacModules[moveItem.SourceModule].MovingStatus = status;
  575. }
  576. }
  577. private void UpdateModuleMovingStatus(ModuleName module, MovingStatus status = MovingStatus.Moving)
  578. {
  579. if (!ModuleHelper.IsTMRobot(module))
  580. {
  581. _vacModules[module].MovingStatus = status;
  582. }
  583. }
  584. private void ProcessTMRobotTask()
  585. {
  586. if(_tmRobot.IsAvailable)
  587. {
  588. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) || WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1))
  589. {
  590. return;
  591. }
  592. foreach(var slot in _vacReadyOutSlots)
  593. {
  594. if (_vacModules[slot.Module].MovingStatus == MovingStatus.Moving)
  595. continue;
  596. if (ModuleHelper.IsLoadLock(slot.Module))
  597. {
  598. if(SearchWaferDestination(slot, out SlotItem destSlot))
  599. {
  600. _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));
  601. UpdateModuleMovingStatus(slot.Module);
  602. UpdateModuleMovingStatus(destSlot.Module);
  603. // check whether match double pick pattern
  604. var out_slot_2 = _vacReadyOutSlots.Find(item => item.Module == slot.Module && item.Slot != slot.Slot);
  605. if (out_slot_2 != null)
  606. {
  607. if(SearchWaferDestination(out_slot_2, out SlotItem destSlot_2))
  608. {
  609. _movingItems.Add(new MoveItem(out_slot_2.Module, out_slot_2.Slot, destSlot_2.Module, destSlot_2.Slot, Hand.None));
  610. UpdateModuleMovingStatus(out_slot_2.Module);
  611. UpdateModuleMovingStatus(destSlot_2.Module);
  612. }
  613. }
  614. // check whether match swap pattern
  615. var in_slots = SearchWaitInSlots(slot.Module);
  616. foreach(var in_slot in in_slots)
  617. {
  618. _movingItems.Add(in_slot);
  619. UpdateItemMovingStatus(in_slot);
  620. }
  621. return;
  622. }
  623. }
  624. else // PM
  625. {
  626. if(SearchWaferDestination(slot, out SlotItem destSlot))
  627. {
  628. _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));
  629. UpdateModuleMovingStatus(slot.Module);
  630. UpdateModuleMovingStatus(destSlot.Module);
  631. // check whether match swap pattern
  632. var in_slots = SearchWaitInSlots(slot.Module);
  633. if(in_slots.Count >= 1)
  634. {
  635. _movingItems.Add(in_slots.First());
  636. UpdateItemMovingStatus(in_slots.First());
  637. }
  638. else
  639. {
  640. // check whether match double move pattern
  641. var same_dest = SearchWaitInSlots(destSlot.Module);
  642. foreach (var item in same_dest)
  643. {
  644. _movingItems.Add(item);
  645. UpdateItemMovingStatus(item);
  646. }
  647. }
  648. return;
  649. }
  650. }
  651. }
  652. _vacReadyOutSlots.Clear();
  653. _vacReadyInSlots.Clear();
  654. }
  655. }
  656. private void RuningTMRobotTask()
  657. {
  658. if(_tmRobot.IsAvailable)
  659. {
  660. if(_tmRobot.PostMoveItems(_movingItems.ToArray()))
  661. {
  662. foreach(var item in _movingItems)
  663. {
  664. var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
  665. if (wafer.IsEmpty)
  666. {
  667. // post alarm
  668. _cycleState = RState.Failed;
  669. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run TM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
  670. return;
  671. }
  672. var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
  673. _vacWaferTargets[slot] = wafer.InnerId;
  674. }
  675. }
  676. }
  677. }
  678. private Hand GetTMRobotFreeHand()
  679. {
  680. var blade1HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
  681. var blade2HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
  682. if (blade1HasWafer && blade2HasWafer)
  683. return Hand.None;
  684. else if (!blade1HasWafer && !blade2HasWafer)
  685. return Hand.Both;
  686. else if (blade1HasWafer)
  687. return Hand.Blade2;
  688. else
  689. return Hand.Blade1;
  690. }
  691. private bool IsVacWaferReadyOut(ModuleName mod, int slot)
  692. {
  693. var wafer = WaferManager.Instance.GetWafer(mod, slot);
  694. if (wafer.IsEmpty)
  695. return false;
  696. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  697. return false;
  698. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  699. {
  700. // should not go here
  701. //LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  702. return false;
  703. }
  704. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  705. return false;
  706. foreach(var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  707. {
  708. if (ModuleHelper.IsLoadLock(module) || ModuleHelper.IsPm(module))
  709. return true;
  710. }
  711. return false;
  712. }
  713. #endregion Vacuum System
  714. #region Atm System
  715. private void driveAtmSystem()
  716. {
  717. PumpingEFEMRobotTask();
  718. RuningEFEMRobotTask();
  719. }
  720. private void PumpingEFEMRobotTask()
  721. {
  722. if (!_efemRobot.IsAvailable)
  723. return;
  724. foreach(var scheduler in _atmSchedulers)
  725. {
  726. if (!scheduler.Value.IsAvailable)
  727. continue;
  728. if(ModuleHelper.IsLoadLock(scheduler.Key))
  729. {
  730. if (ProcessLLEFEMRobotTask(scheduler.Key))
  731. return;
  732. }
  733. else if(ModuleHelper.IsAligner(scheduler.Key))
  734. {
  735. if (ProcessAlignerEFEMRobotTask(scheduler.Key))
  736. return;
  737. }
  738. else if(ModuleHelper.IsCooling(scheduler.Key))
  739. {
  740. if (ProcessCoolingEFEMRobotTask(scheduler.Key))
  741. return;
  742. }
  743. else if (ModuleHelper.IsLoadPort(scheduler.Key))
  744. {
  745. if (ProcessLPEFEMRobotTask(scheduler.Key))
  746. return;
  747. }
  748. else
  749. {
  750. // should not go here
  751. LOG.Write(eEvent.ERR_ROUTER, $"Wrong Module: {scheduler.Key} in ATM System");
  752. }
  753. }
  754. }
  755. List<int> GetEfemRobotWaferReadyInHands(ModuleName mod)
  756. {
  757. var slots = new List<int>();
  758. for(int i = 0; i < 2; i++)
  759. {
  760. var wafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
  761. if (wafer.IsEmpty)
  762. continue;
  763. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  764. continue;
  765. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  766. {
  767. // should not go here
  768. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  769. continue;
  770. }
  771. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  772. {
  773. slots.Add(i);
  774. }
  775. }
  776. return slots;
  777. }
  778. bool IsAtmWaferReadyOut(ModuleName mod, int slot)
  779. {
  780. var wafer = WaferManager.Instance.GetWafer(mod, slot);
  781. if (wafer.IsEmpty)
  782. return false;
  783. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  784. return false;
  785. if (wafer.NextSequenceStep == wafer.ProcessJob.Sequence.Steps.Count)
  786. {
  787. // need return
  788. return true;
  789. }
  790. else if(wafer.NextSequenceStep > wafer.ProcessJob.Sequence.Steps.Count)
  791. {
  792. // should not go here
  793. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  794. return false;
  795. }
  796. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  797. return false;
  798. if(ModuleHelper.IsLoadLock(mod))
  799. {
  800. foreach (var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  801. {
  802. if (ModuleHelper.IsPm(module))
  803. return false;
  804. }
  805. }
  806. return true;
  807. }
  808. private bool ProcessLLEFEMRobotTask(ModuleName ll)
  809. {
  810. if (_vacModules[ll].MovingStatus != MovingStatus.Staying)
  811. return false;
  812. var robotSlots = GetEfemRobotWaferReadyInHands(ll);
  813. var inSlots = ll == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  814. foreach(var slot in inSlots)
  815. {
  816. if(robotSlots.Count >= 1)
  817. {
  818. if(WaferManager.Instance.CheckNoWafer(ll, slot))
  819. {
  820. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), ll, slot, (Hand)robotSlots.First()));
  821. robotSlots.RemoveAt(0);
  822. }
  823. }
  824. }
  825. var outSlots = ll == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
  826. foreach(var slot in outSlots)
  827. {
  828. if(IsAtmWaferReadyOut(ll, slot))
  829. {
  830. var robotHand = GetEFEMRobotFreeHand();
  831. if(robotHand != Hand.None)
  832. {
  833. _efemMovingItems.Add(new MoveItem(ll, slot, ModuleName.EfemRobot, (int)robotHand, robotHand));
  834. }
  835. }
  836. }
  837. return _efemMovingItems.Count > 0;
  838. }
  839. private Tuple<int, int> GetPMWaferExistence()
  840. {
  841. int exist = 0;
  842. int empty = 0;
  843. foreach (var module in _vacModules)
  844. {
  845. if (ModuleHelper.IsPm(module.Key))
  846. {
  847. if (WaferManager.Instance.CheckHasWafer(module.Key, 0))
  848. exist++;
  849. else
  850. empty++;
  851. }
  852. }
  853. return new Tuple<int, int>(exist, empty);
  854. }
  855. private int GetTMRobotWaferCount()
  856. {
  857. return (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  858. }
  859. private int GetEfemRoborWaferCount()
  860. {
  861. return (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1) ? 1 : 0);
  862. }
  863. private Tuple<int, int> GetLLProcessStatusCount(ModuleName ll)
  864. {
  865. int processedCount = 0;
  866. int unprocessCount = 0;
  867. int slotCount = ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber;
  868. if(ModuleHelper.IsLoadLock(ll))
  869. {
  870. for(int i = 0; i < slotCount;i++)
  871. {
  872. if(WaferManager.Instance.CheckHasWafer(ll, i))
  873. {
  874. if(CheckWaferNeedProcessAndPMAvailable(ll, i))
  875. unprocessCount++;
  876. else
  877. processedCount++;
  878. }
  879. }
  880. }
  881. return new Tuple<int, int>(processedCount, unprocessCount);
  882. }
  883. private int GetAtmInerWaferCount()
  884. {
  885. int nCount = 0;
  886. foreach(var atmModule in _atmModules)
  887. {
  888. if (!ModuleHelper.IsEFEMRobot(atmModule.Key) && WaferManager.Instance.CheckHasWafer(atmModule.Key, 0))
  889. nCount++;
  890. }
  891. return nCount;
  892. }
  893. private bool IsReadyPushWaferIn()
  894. {
  895. var llaWaferStatus = GetLLProcessStatusCount(ModuleName.LLA);
  896. var llbWaferStatus = GetLLProcessStatusCount(ModuleName.LLB);
  897. var pmWaferStatus = GetPMWaferExistence();
  898. if (llaWaferStatus.Item1 + llbWaferStatus.Item1 > 0)
  899. return false;
  900. if (_LLAInSlot.Count + _LLBInSlot.Count + pmWaferStatus.Item2 - llaWaferStatus.Item2 - llbWaferStatus.Item2 <= 2)
  901. return false;
  902. if (GetEfemRoborWaferCount() >= 1 && GetAtmInerWaferCount() > 0)
  903. return false;
  904. return true;
  905. }
  906. private bool ProcessLPEFEMRobotTask(ModuleName lp)
  907. {
  908. // check return
  909. for(int i = 0; i < 2; i++)
  910. {
  911. if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i))
  912. {
  913. var returnWafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
  914. if (returnWafer.IsEmpty)
  915. continue;
  916. if (returnWafer.ProcessJob == null || returnWafer.ProcessJob.Sequence == null)
  917. continue;
  918. if (returnWafer.NextSequenceStep >= returnWafer.ProcessJob.Sequence.Steps.Count && lp == (ModuleName)returnWafer.OriginStation) // need return
  919. {
  920. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, i, lp, returnWafer.OriginSlot, (Hand)i));
  921. }
  922. }
  923. }
  924. if(_efemMovingItems.Count == 0 && IsReadyPushWaferIn())
  925. {
  926. var outSlots = GetNextWaferInJobQueue(lp);
  927. foreach (var slot in outSlots)
  928. {
  929. var hand = GetEFEMRobotFreeHand();
  930. if (hand != Hand.None)
  931. {
  932. _efemMovingItems.Add(new MoveItem(lp, slot, ModuleName.EfemRobot, (int)hand, hand));
  933. }
  934. }
  935. }
  936. return _efemMovingItems.Count > 0;
  937. }
  938. private List<int> GetNextWaferInJobQueue(ModuleName lp)
  939. {
  940. var inSlots = new List<int>();
  941. foreach (var cj in _lstControlJobs)
  942. {
  943. if (lp != ModuleName.System && (cj.Module != lp.ToString()))
  944. continue;
  945. if (cj.State == EnumControlJobState.Executing)
  946. {
  947. foreach (var pj in _lstProcessJobs)
  948. {
  949. if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
  950. {
  951. foreach (var pjSlotWafer in pj.SlotWafers)
  952. {
  953. if (CheckWaferNeedProcessAndPMAvailable(pjSlotWafer.Item1, pjSlotWafer.Item2))
  954. {
  955. //return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
  956. inSlots.Add(pjSlotWafer.Item2);
  957. }
  958. }
  959. }
  960. }
  961. }
  962. }
  963. return inSlots;
  964. }
  965. private bool ProcessAlignerEFEMRobotTask(ModuleName aligner)
  966. {
  967. if(WaferManager.Instance.CheckHasWafer(aligner, 0) && IsAtmWaferReadyOut(aligner, 0))
  968. {
  969. var hand = GetEFEMRobotFreeHand();
  970. if(hand != Hand.None)
  971. {
  972. _efemMovingItems.Add(new MoveItem(aligner, 0, ModuleName.EfemRobot, (int)hand, hand));
  973. }
  974. //// check with whether another robot arm wafer wait go to aligner
  975. //var robotSlots = GetEfemRobotWaferReadyInHands(aligner);
  976. //if (robotSlots.Count > 0)
  977. //{
  978. // _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), aligner, 0, (Hand)robotSlots.First()));
  979. //}
  980. }
  981. else if(WaferManager.Instance.CheckNoWafer(aligner, 0))
  982. {
  983. var robotSlots = GetEfemRobotWaferReadyInHands(aligner);
  984. if(robotSlots.Count > 0)
  985. {
  986. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), aligner, 0, (Hand)robotSlots.First()));
  987. }
  988. }
  989. return _efemMovingItems.Count > 0;
  990. }
  991. private bool ProcessCoolingEFEMRobotTask(ModuleName cooling)
  992. {
  993. if (WaferManager.Instance.CheckHasWafer(cooling, 0) && IsAtmWaferReadyOut(cooling, 0))
  994. {
  995. var hand = GetEFEMRobotFreeHand();
  996. if (hand != Hand.None)
  997. {
  998. _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, (int)hand, hand));
  999. }
  1000. }
  1001. else
  1002. {
  1003. var robotSlots = GetEfemRobotWaferReadyInHands(cooling);
  1004. if (robotSlots.Count > 0)
  1005. {
  1006. _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, robotSlots.First(), (Hand)robotSlots.First()));
  1007. }
  1008. }
  1009. return _efemMovingItems.Count > 0;
  1010. }
  1011. private void RuningEFEMRobotTask()
  1012. {
  1013. if (_efemRobot.IsAvailable && _efemMovingItems.Count > 0)
  1014. {
  1015. if (_efemRobot.PostMoveItems(_efemMovingItems.ToArray()))
  1016. {
  1017. foreach (var item in _efemMovingItems)
  1018. {
  1019. var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
  1020. if (wafer.IsEmpty)
  1021. {
  1022. // post alarm
  1023. _cycleState = RState.Failed;
  1024. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run EFEM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
  1025. return;
  1026. }
  1027. var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
  1028. _atmWaferTargets[slot] = wafer.InnerId;
  1029. if(ModuleHelper.IsLoadLock(item.Module))
  1030. {
  1031. _vacModules[item.Module].MovingStatus = MovingStatus.Moving;
  1032. }
  1033. }
  1034. }
  1035. }
  1036. }
  1037. private Hand GetEFEMRobotFreeHand()
  1038. {
  1039. for(int i = 0; i < 2; i++)
  1040. {
  1041. if ((WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, i) &&
  1042. !_efemMovingItems.Exists(item => item.DestinationModule == ModuleName.EfemRobot && item.DestinationSlot == i)) ||
  1043. (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i) &&
  1044. _efemMovingItems.Exists(item => item.SourceModule == ModuleName.EfemRobot && item.SourceSlot == i) &&
  1045. !_efemMovingItems.Exists(item => item.DestinationModule == ModuleName.EfemRobot && item.DestinationSlot == i)))
  1046. return (Hand)i;
  1047. }
  1048. return Hand.None;
  1049. }
  1050. #endregion Atm System
  1051. #region Sequence validation
  1052. private bool CheckSequencePmReady(SequenceInfo seq, List<ModuleName> pmOccupied, out List<ModuleName> pmUsed, out string reason)
  1053. {
  1054. pmUsed = new List<ModuleName>();
  1055. reason = "";
  1056. bool pmIsReady = true;
  1057. for (int i = 0; i < seq.Steps.Count; i++)
  1058. {
  1059. SequenceStepInfo stepInfo = seq.Steps[i];
  1060. bool hasPm = false;
  1061. foreach (var module in stepInfo.StepModules)
  1062. {
  1063. if (!ModuleHelper.IsPm(module))
  1064. {
  1065. hasPm = true;
  1066. break;
  1067. }
  1068. if (ModuleHelper.IsInstalled(module) && (pmOccupied == null || !pmOccupied.Contains(module)))
  1069. {
  1070. hasPm = true;
  1071. }
  1072. if (!pmUsed.Contains(module))
  1073. pmUsed.Add(module);
  1074. }
  1075. if (pmIsReady && !hasPm)
  1076. {
  1077. reason = $"Step {i + 1} no valid PM, " + string.Join("|", stepInfo.StepModules);
  1078. pmIsReady = false;
  1079. }
  1080. }
  1081. return pmIsReady;
  1082. }
  1083. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1084. {
  1085. for (int i = 0; i < seq.Steps.Count; i++)
  1086. {
  1087. SequenceStepInfo stepInfo = seq.Steps[i];
  1088. foreach (var module in stepInfo.StepModules)
  1089. {
  1090. if (ModuleHelper.IsPm(module))
  1091. {
  1092. string attr = $"{module}Recipe";
  1093. if (stepInfo.StepParameter.ContainsKey(attr)
  1094. && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
  1095. {
  1096. var recipeName = (string)stepInfo.StepParameter[attr];
  1097. if (!string.IsNullOrEmpty(recipeName))
  1098. {
  1099. var recipeContent =
  1100. RecipeFileManager.Instance.LoadRecipe($"", recipeName, false);
  1101. if (string.IsNullOrEmpty(recipeContent))
  1102. {
  1103. reason = $"Can not find recipe file{recipeName}";
  1104. return false;
  1105. }
  1106. }
  1107. }
  1108. }
  1109. }
  1110. }
  1111. reason = "";
  1112. return true;
  1113. }
  1114. private bool CheckWaferNeedProcessAndPMAvailable(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  1115. {
  1116. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  1117. if (wafer.IsEmpty)
  1118. return false;
  1119. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  1120. return false;
  1121. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  1122. return false;
  1123. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  1124. {
  1125. var hasPmAvailable = false;
  1126. foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
  1127. {
  1128. if (!ModuleHelper.IsPm(stepModule))
  1129. break;
  1130. if (!_vacSchedulers.Keys.Contains(stepModule))
  1131. continue;
  1132. var pm = _vacSchedulers[stepModule] as SchedulerPM;
  1133. if (pm != null)
  1134. {
  1135. if (pm.IsAvailable || (pm.IsOnline && pm.Task != SchedulerModule.TaskType.PreJobProcess))
  1136. {
  1137. hasPmAvailable = true;
  1138. break;
  1139. }
  1140. }
  1141. }
  1142. if (!hasPmAvailable)
  1143. continue;
  1144. if (processIn == ModuleName.System)
  1145. return true;
  1146. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  1147. .Contains(processIn))
  1148. return true;
  1149. }
  1150. return false;
  1151. }
  1152. private List<ModuleName> GetPmUsedInRunningPj()
  1153. {
  1154. var pmUsed = new List<ModuleName>();
  1155. foreach (var cj in _lstControlJobs)
  1156. {
  1157. if (cj.State != EnumControlJobState.Executing && cj.State != EnumControlJobState.Paused)
  1158. continue;
  1159. foreach (var pj in _lstProcessJobs)
  1160. {
  1161. if (pj.ControlJobName == cj.Name && (pj.State == EnumProcessJobState.Processing || pj.State == EnumProcessJobState.Paused))
  1162. {
  1163. for (int i = 0; i < pj.Sequence.Steps.Count; i++)
  1164. {
  1165. SequenceStepInfo stepInfo = pj.Sequence.Steps[i];
  1166. foreach (var module in stepInfo.StepModules)
  1167. {
  1168. if (ModuleHelper.IsPm(module) && !pmUsed.Contains(module))
  1169. pmUsed.Add(module);
  1170. }
  1171. }
  1172. }
  1173. }
  1174. }
  1175. return pmUsed;
  1176. }
  1177. private List<SchedulerPM> GetPmNeeded(ControlJobInfo cj)
  1178. {
  1179. List<SchedulerPM> result = new List<SchedulerPM>();
  1180. foreach (var pj in _lstProcessJobs)
  1181. {
  1182. if (pj.ControlJobName != cj.Name)
  1183. continue;
  1184. var seq = pj.Sequence;
  1185. for (int i = 0; i < seq.Steps.Count; i++)
  1186. {
  1187. SequenceStepInfo stepInfo = seq.Steps[i];
  1188. foreach (var module in stepInfo.StepModules)
  1189. {
  1190. if (ModuleHelper.IsPm(module) && _vacSchedulers.ContainsKey(module))
  1191. {
  1192. var pm = _vacSchedulers[module] as SchedulerPM;
  1193. if (pm != null && !result.Contains(pm))
  1194. {
  1195. result.Add(pm);
  1196. }
  1197. }
  1198. }
  1199. }
  1200. }
  1201. return result;
  1202. }
  1203. private void CheckWaferArrived()
  1204. {
  1205. if (_cycleState != RState.Running)
  1206. return;
  1207. foreach (var mod in _vacSchedulers.Append(new KeyValuePair<ModuleName, SchedulerModule>( ModuleName.TMRobot, _tmRobot)))
  1208. {
  1209. //if (mod.Value.IsAvailable)
  1210. {
  1211. var tars = _vacWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
  1212. foreach (var tar in tars)
  1213. {
  1214. var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
  1215. if (wafer.IsEmpty)
  1216. continue;
  1217. if (wafer.InnerId == tar.Value)
  1218. {
  1219. // wafer arrive
  1220. _vacWaferTargets.Remove(tar.Key);
  1221. if(!ModuleHelper.IsTMRobot(tar.Key.Module))
  1222. wafer.NextSequenceStep++;
  1223. }
  1224. }
  1225. }
  1226. }
  1227. _vacMoveFinishTrig.CLK = _vacWaferTargets.Count == 0;
  1228. if (_vacMoveFinishTrig.Q)
  1229. {
  1230. foreach(var item in _movingItems)
  1231. {
  1232. if(!ModuleHelper.IsTMRobot(item.DestinationModule))
  1233. {
  1234. _vacModules[item.DestinationModule].MovingStatus = MovingStatus.Staying;
  1235. }
  1236. if(!ModuleHelper.IsTMRobot(item.SourceModule))
  1237. {
  1238. _vacModules[item.SourceModule].MovingStatus = MovingStatus.Staying;
  1239. }
  1240. }
  1241. _movingItems.Clear();
  1242. }
  1243. foreach (var mod in _atmSchedulers.Append(new KeyValuePair<ModuleName, SchedulerModule>(ModuleName.EfemRobot, _efemRobot)))
  1244. {
  1245. //if (mod.Value.IsAvailable)
  1246. {
  1247. var tars = _atmWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
  1248. foreach (var tar in tars)
  1249. {
  1250. var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
  1251. if (wafer.IsEmpty)
  1252. continue;
  1253. if (wafer.InnerId == tar.Value)
  1254. {
  1255. // wafer arrive
  1256. _atmWaferTargets.Remove(tar.Key);
  1257. if (!ModuleHelper.IsEFEMRobot(tar.Key.Module))
  1258. wafer.NextSequenceStep++;
  1259. }
  1260. }
  1261. }
  1262. }
  1263. _atmMoveFinishTrig.CLK = _atmWaferTargets.Count == 0;
  1264. if(_atmMoveFinishTrig.Q)
  1265. {
  1266. foreach(var item in _efemMovingItems)
  1267. {
  1268. if(ModuleHelper.IsLoadLock(item.Module))
  1269. {
  1270. _vacModules[item.Module].MovingStatus = MovingStatus.Staying;
  1271. }
  1272. }
  1273. _efemMovingItems.Clear();
  1274. }
  1275. }
  1276. private void PreJobClean(ControlJobInfo cj)
  1277. {
  1278. if (cj.IsPreJobCleanDone)
  1279. return;
  1280. cj.IsPreJobCleanDone = true;
  1281. List<SchedulerPM> pms = GetPmNeeded(cj);
  1282. foreach (var pm in pms)
  1283. {
  1284. pm.PreJobClean();
  1285. }
  1286. }
  1287. private bool ActiveProcessJob(ProcessJobInfo pj)
  1288. {
  1289. foreach (var pjSlotWafer in pj.SlotWafers)
  1290. {
  1291. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1292. wafer.ProcessJob = pj;
  1293. wafer.NextSequenceStep = 0;
  1294. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1295. }
  1296. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1297. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1298. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1299. pj.SetState(EnumProcessJobState.Processing);
  1300. PreJobClean(cj);
  1301. return true;
  1302. }
  1303. private void StartNewJob()
  1304. {
  1305. ControlJobInfo cjActived = null;
  1306. List<ModuleName> pmOccupied = GetPmUsedInRunningPj();
  1307. foreach (var cj in _lstControlJobs)
  1308. {
  1309. if (cj.State != EnumControlJobState.Executing)
  1310. continue;
  1311. cjActived = cj;
  1312. foreach (var pjName in cjActived.ProcessJobNameList)
  1313. {
  1314. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1315. if (pj == null)
  1316. {
  1317. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cjActived.Name}");
  1318. continue;
  1319. }
  1320. if (pj.State == EnumProcessJobState.Queued)
  1321. {
  1322. if (CheckSequencePmReady(pj.Sequence, pmOccupied, out var pmUsed, out string reason))
  1323. {
  1324. ActiveProcessJob(pj);
  1325. foreach (var moduleName in pmUsed)
  1326. {
  1327. if (!pmOccupied.Contains(moduleName))
  1328. pmOccupied.Add(moduleName);
  1329. }
  1330. }
  1331. break;
  1332. }
  1333. }
  1334. }
  1335. }
  1336. #endregion
  1337. }
  1338. }