OverViewModel.cs 60 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private List<string> m_CurrentModuleRecipes=new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. private bool m_MFC7ValveIsOpen;
  46. private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. private bool m_PVHe1ValveIsOpen;
  51. private bool m_PVHe2ValveIsOpen;
  52. private bool m_TurboPumpPumpingValveIsOpen;
  53. private bool m_TurboPumpPurgeValveIsOpen;
  54. private bool m_GuageValveIsOpen;
  55. private bool m_PendulumValveIsOpen;
  56. private bool m_BRFIsOn;
  57. private bool m_SRFIsOn;
  58. private double m_HeGasSetpoint;
  59. private int m_HePressureSetpoint;
  60. private float m_SRFFwdPowerSetpoint;
  61. private float m_BRFFwdPowerSetpoint;
  62. private float m_SRFMatchC1;
  63. private float m_SRFMatchC2;
  64. private float m_BRFMatchC1;
  65. private float m_BRFMatchC2;
  66. private double m_MFC1SetPoint;
  67. private double m_MFC2SetPoint;
  68. private double m_MFC3SetPoint;
  69. private double m_MFC4SetPoint;
  70. private double m_MFC5SetPoint;
  71. private double m_MFC6SetPoint;
  72. private double m_MFC7SetPoint;
  73. private double m_MFC8SetPoint;
  74. private double m_N2SetPoint;
  75. private AITMfcData m_MFC1Data;
  76. private AITMfcData m_MFC2Data;
  77. private AITMfcData m_MFC3Data;
  78. private AITMfcData m_MFC4Data;
  79. private AITMfcData m_MFC5Data;
  80. private AITMfcData m_MFC6Data;
  81. private AITMfcData m_MFC7Data;
  82. private AITMfcData m_MFC8Data;
  83. private AITMfcData m_MFCHeData;
  84. private AITMfcData m_MFCN2Data;
  85. private AITHeaterData m_ValveHeaterData;
  86. private AITHeaterData m_ForelineHeaterData;
  87. private AITHeaterData m_WallHeaterData;
  88. private AITRfData m_SRFData;
  89. private AITRfData m_BRFData;
  90. private AITPendulumValveData m_PendulumValveData;
  91. private PMState m_PMCurrentState;
  92. private bool m_SourceRFFanInterlock;
  93. private bool m_IsWLK;
  94. private bool m_IsWaterFlowOk;
  95. private bool m_IsTurboPumpInterlock;
  96. private bool m_IsCDAOK;
  97. private bool m_SensorGasBoxDoor;
  98. private bool m_SensorGasBoxPressure;
  99. private bool m_PumpIsOpen;
  100. private bool m_TurboIsOpen;
  101. private bool m_IsATM;
  102. private bool m_IsVAC;
  103. private bool m_HVIsOn;
  104. private List<string> m_RtDataKeys;
  105. private Dictionary<string, object> m_RtDataValues;
  106. private int m_PositionValue;
  107. private bool m_IsPositionMode;
  108. private int m_ESCVoltage;
  109. private bool m_GasIsFlowing;
  110. private bool m_IsAutoMode;
  111. private string m_SelectedRecipe;
  112. private float m_ChillerTempSetpoint;
  113. private float m_WallTempSetpoint;
  114. private bool m_HeIsPressureMode;
  115. private bool m_ChillerIsOn;
  116. private float m_ProcessHighPressure;
  117. private float m_ProcessLowPressure;
  118. private float m_ForelinePressurePressure;
  119. private float m_ESCHePressure;
  120. ButterflyValveView butterflyValveMessageBox;
  121. HeaterView heaterView;
  122. private int m_TurboPumpRotationalSpeed;
  123. private bool m_LiftPinIsUp;
  124. private bool m_IsSlitDoorClosed;
  125. private bool m_IsLidClosed;
  126. private float m_ChillerTemperature;
  127. private int m_ESCHVOutputVoltage;
  128. //private float m_SRfReflectPower;
  129. //private float m_SRfForwardPowerFeedBack;
  130. //private float m_BRfReflectPower;
  131. //private float m_BRfForwardPowerFeedBack;
  132. //private int m_MatchWorkMode;
  133. //private int m_BiasMatchWorkMode;
  134. private float m_MatchC1;
  135. private float m_MatchC2;
  136. private float m_BiasMatchC1;
  137. private float m_BiasMatchC2;
  138. private float m_PendulumValvePosition;
  139. private bool m_IsTurboPumpAtSpeed;
  140. private bool m_TurboPumpWaterFlowSwitch;
  141. private bool m_IsHasWafer;
  142. private Recipe m_CurrentRecipe=new Recipe ();
  143. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  144. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  145. private double m_ChamberPressureFeedBack;
  146. #endregion
  147. #region 属性
  148. public List<string> CurrentModuleRecipes
  149. {
  150. get { return m_CurrentModuleRecipes; }
  151. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  152. }
  153. public Recipe CurrentRecipe
  154. {
  155. get { return m_CurrentRecipe; }
  156. set { SetProperty(ref m_CurrentRecipe, value); }
  157. }
  158. public RecipeResult CurrentRecipeResult
  159. {
  160. get { return m_CurrentRecipeResult; }
  161. set { SetProperty(ref m_CurrentRecipeResult, value); }
  162. }
  163. public RecipeStep CurrentRecipeStep
  164. {
  165. get { return m_CurrentRecipeStep; }
  166. set { SetProperty(ref m_CurrentRecipeStep, value); }
  167. }
  168. public bool IsHasWafer
  169. {
  170. get { return m_IsHasWafer; }
  171. set { SetProperty(ref m_IsHasWafer, value); }
  172. }
  173. public bool IsTurboPumpAtSpeed
  174. {
  175. get { return m_IsTurboPumpAtSpeed; }
  176. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  177. }
  178. public bool TurboPumpWaterFlowSwitch
  179. {
  180. get { return m_TurboPumpWaterFlowSwitch; }
  181. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  182. }
  183. public float PendulumValvePosition
  184. {
  185. get { return m_PendulumValvePosition; }
  186. set{SetProperty(ref m_PendulumValvePosition, value);}
  187. }
  188. public float BiasMatchC1
  189. {
  190. get { return m_BiasMatchC1; }
  191. set
  192. {
  193. SetProperty(ref m_BiasMatchC1, value);
  194. }
  195. }
  196. public float BiasMatchC2
  197. {
  198. get { return m_BiasMatchC2; }
  199. set
  200. {
  201. SetProperty(ref m_BiasMatchC2, value);
  202. }
  203. }
  204. public float MatchC1
  205. {
  206. get { return m_MatchC1; }
  207. set
  208. {
  209. SetProperty(ref m_MatchC1, value);
  210. }
  211. }
  212. public float MatchC2
  213. {
  214. get { return m_MatchC2; }
  215. set
  216. {
  217. SetProperty(ref m_MatchC2, value);
  218. }
  219. }
  220. public AITPendulumValveData PendulumValveData
  221. {
  222. get { return m_PendulumValveData; }
  223. set
  224. {
  225. SetProperty(ref m_PendulumValveData, value);
  226. }
  227. }
  228. public int ESCHVOutputVoltage
  229. {
  230. get { return m_ESCHVOutputVoltage; }
  231. set
  232. {
  233. SetProperty(ref m_ESCHVOutputVoltage, value);
  234. }
  235. }
  236. public float ChillerTemperature
  237. {
  238. get { return m_ChillerTemperature; }
  239. set
  240. {
  241. SetProperty(ref m_ChillerTemperature, value);
  242. }
  243. }
  244. public bool IsLidClosed
  245. {
  246. get { return m_IsLidClosed; }
  247. set
  248. {
  249. SetProperty(ref m_IsLidClosed, value);
  250. }
  251. }
  252. public bool IsSlitDoorClosed
  253. {
  254. get { return m_IsSlitDoorClosed; }
  255. set
  256. {
  257. SetProperty(ref m_IsSlitDoorClosed, value);
  258. }
  259. }
  260. public bool LiftPinIsUp
  261. {
  262. get { return m_LiftPinIsUp; }
  263. set
  264. {
  265. SetProperty(ref m_LiftPinIsUp, value);
  266. }
  267. }
  268. public int TurboPumpRotationalSpeed
  269. {
  270. get { return m_TurboPumpRotationalSpeed; }
  271. set
  272. {
  273. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  274. }
  275. }
  276. public float ESCHePressure
  277. {
  278. get { return m_ESCHePressure; }
  279. set
  280. {
  281. SetProperty(ref m_ESCHePressure, value);
  282. }
  283. }
  284. public float ProcessHighPressure
  285. {
  286. get { return m_ProcessHighPressure; }
  287. set
  288. {
  289. SetProperty(ref m_ProcessHighPressure, value);
  290. }
  291. }
  292. public float ProcessLowPressure
  293. {
  294. get { return m_ProcessLowPressure; }
  295. set
  296. {
  297. SetProperty(ref m_ProcessLowPressure, value);
  298. }
  299. }
  300. public float ForelinePressure
  301. {
  302. get { return m_ForelinePressurePressure; }
  303. set
  304. {
  305. SetProperty(ref m_ForelinePressurePressure, value);
  306. }
  307. }
  308. public bool SourceRFFanInterlock
  309. {
  310. get { return m_SourceRFFanInterlock; }
  311. set
  312. {
  313. SetProperty(ref m_SourceRFFanInterlock, value);
  314. }
  315. }
  316. public bool IsWLK
  317. {
  318. get { return m_IsWLK; }
  319. set
  320. {
  321. SetProperty(ref m_IsWLK, value);
  322. }
  323. }
  324. public bool IsWaterFlowOk
  325. {
  326. get { return m_IsWaterFlowOk; }
  327. set
  328. {
  329. SetProperty(ref m_IsWaterFlowOk, value);
  330. }
  331. }
  332. public bool IsCDAOK
  333. {
  334. get { return m_IsCDAOK; }
  335. set
  336. {
  337. SetProperty(ref m_IsCDAOK, value);
  338. }
  339. }
  340. public bool SensorGasBoxDoor
  341. {
  342. get { return m_SensorGasBoxDoor; }
  343. set
  344. {
  345. SetProperty(ref m_SensorGasBoxDoor, value);
  346. }
  347. }
  348. public bool SensorGasBoxPressure
  349. {
  350. get { return m_SensorGasBoxPressure; }
  351. set
  352. {
  353. SetProperty(ref m_SensorGasBoxPressure, value);
  354. }
  355. }
  356. public bool IsTurboPumpInterlock
  357. {
  358. get { return m_IsTurboPumpInterlock; }
  359. set
  360. {
  361. SetProperty(ref m_IsTurboPumpInterlock, value);
  362. }
  363. }
  364. public string ModuleName { get; set; }
  365. public double MFC1SetPoint
  366. {
  367. get { return m_MFC1SetPoint; }
  368. set { SetProperty(ref m_MFC1SetPoint, value); }
  369. }
  370. public double MFC2SetPoint
  371. {
  372. get { return m_MFC2SetPoint; }
  373. set { SetProperty(ref m_MFC2SetPoint, value); }
  374. }
  375. public double MFC3SetPoint
  376. {
  377. get { return m_MFC3SetPoint; }
  378. set { SetProperty(ref m_MFC3SetPoint, value); }
  379. }
  380. public double MFC4SetPoint
  381. {
  382. get { return m_MFC4SetPoint; }
  383. set { SetProperty(ref m_MFC4SetPoint, value); }
  384. }
  385. public double MFC5SetPoint
  386. {
  387. get { return m_MFC5SetPoint; }
  388. set { SetProperty(ref m_MFC5SetPoint, value); }
  389. }
  390. public double MFC6SetPoint
  391. {
  392. get { return m_MFC6SetPoint; }
  393. set { SetProperty(ref m_MFC6SetPoint, value); }
  394. }
  395. public double MFC7SetPoint
  396. {
  397. get { return m_MFC7SetPoint; }
  398. set { SetProperty(ref m_MFC7SetPoint, value); }
  399. }
  400. public double MFC8SetPoint
  401. {
  402. get { return m_MFC8SetPoint; }
  403. set { SetProperty(ref m_MFC8SetPoint, value); }
  404. }
  405. public double N2SetPoint
  406. {
  407. get { return m_N2SetPoint; }
  408. set { SetProperty(ref m_N2SetPoint, value); }
  409. }
  410. public AITMfcData MFC1Data
  411. {
  412. get { return m_MFC1Data; }
  413. set { SetProperty(ref m_MFC1Data, value); }
  414. }
  415. public AITMfcData MFC2Data
  416. {
  417. get { return m_MFC2Data; }
  418. set { SetProperty(ref m_MFC2Data, value); }
  419. }
  420. public AITMfcData MFC3Data
  421. {
  422. get { return m_MFC3Data; }
  423. set { SetProperty(ref m_MFC3Data, value); }
  424. }
  425. public AITMfcData MFC4Data
  426. {
  427. get { return m_MFC4Data; }
  428. set { SetProperty(ref m_MFC4Data, value); }
  429. }
  430. public AITMfcData MFC5Data
  431. {
  432. get { return m_MFC5Data; }
  433. set { SetProperty(ref m_MFC5Data, value); }
  434. }
  435. public AITMfcData MFC6Data
  436. {
  437. get { return m_MFC6Data; }
  438. set { SetProperty(ref m_MFC6Data, value); }
  439. }
  440. public AITMfcData MFC7Data
  441. {
  442. get { return m_MFC7Data; }
  443. set { SetProperty(ref m_MFC7Data, value); }
  444. }
  445. public AITMfcData MFC8Data
  446. {
  447. get { return m_MFC8Data; }
  448. set { SetProperty(ref m_MFC8Data, value); }
  449. }
  450. public AITMfcData MFCHeData
  451. {
  452. get { return m_MFCHeData; }
  453. set { SetProperty(ref m_MFCHeData, value); }
  454. }
  455. public AITMfcData MFCN2Data
  456. {
  457. get { return m_MFCN2Data; }
  458. set { SetProperty(ref m_MFCN2Data, value); }
  459. }
  460. public AITHeaterData ValveHeaterData
  461. {
  462. get { return m_ValveHeaterData; }
  463. set { SetProperty(ref m_ValveHeaterData, value); }
  464. }
  465. public AITHeaterData ForelineHeaterData
  466. {
  467. get { return m_ForelineHeaterData; }
  468. set { SetProperty(ref m_ForelineHeaterData, value); }
  469. }
  470. public AITHeaterData WallHeaterData
  471. {
  472. get { return m_WallHeaterData; }
  473. set { SetProperty(ref m_WallHeaterData, value); }
  474. }
  475. public AITRfData SRFData
  476. {
  477. get { return m_SRFData; }
  478. set { SetProperty(ref m_SRFData, value); }
  479. }
  480. public AITRfData BRFData
  481. {
  482. get { return m_BRFData; }
  483. set { SetProperty(ref m_BRFData, value); }
  484. }
  485. public PMState PMCurrentState
  486. {
  487. get { return m_PMCurrentState; }
  488. set { SetProperty(ref m_PMCurrentState, value); }
  489. }
  490. #region 阀
  491. public bool GasFinalValveIsOpen
  492. {
  493. get { return m_GasFinalValveIsOpen; }
  494. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  495. }
  496. public bool PVN21ValveIsOpen
  497. {
  498. get { return m_PVN21ValveIsOpen; }
  499. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  500. }
  501. public bool PVN22ValveIsOpen
  502. {
  503. get { return m_PVN22ValveIsOpen; }
  504. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  505. }
  506. public bool N2ValveIsOpen
  507. {
  508. get { return m_N2ValveIsOpen; }
  509. set { SetProperty(ref m_N2ValveIsOpen, value); }
  510. }
  511. public bool PV11ValveIsOpen
  512. {
  513. get { return m_PV11ValveIsOpen; }
  514. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  515. }
  516. public bool PV12ValveIsOpen
  517. {
  518. get { return m_PV12ValveIsOpen; }
  519. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  520. }
  521. public bool MFC1ValveIsOpen
  522. {
  523. get { return m_MFC1ValveIsOpen; }
  524. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  525. }
  526. public bool PV21ValveIsOpen
  527. {
  528. get { return m_PV21ValveIsOpen; }
  529. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  530. }
  531. public bool PV22ValveIsOpen
  532. {
  533. get { return m_PV22ValveIsOpen; }
  534. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  535. }
  536. public bool MFC2ValveIsOpen
  537. {
  538. get { return m_MFC2ValveIsOpen; }
  539. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  540. }
  541. public bool PV31ValveIsOpen
  542. {
  543. get { return m_PV31ValveIsOpen; }
  544. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  545. }
  546. public bool PV32ValveIsOpen
  547. {
  548. get { return m_PV32ValveIsOpen; }
  549. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  550. }
  551. public bool MFC3ValveIsOpen
  552. {
  553. get { return m_MFC3ValveIsOpen; }
  554. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  555. }
  556. public bool PV41ValveIsOpen
  557. {
  558. get { return m_PV41ValveIsOpen; }
  559. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  560. }
  561. public bool PV42ValveIsOpen
  562. {
  563. get { return m_PV42ValveIsOpen; }
  564. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  565. }
  566. public bool MFC4ValveIsOpen
  567. {
  568. get { return m_MFC4ValveIsOpen; }
  569. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  570. }
  571. public bool MFC5ValveIsOpen
  572. {
  573. get { return m_MFC5ValveIsOpen; }
  574. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  575. }
  576. public bool MFC6ValveIsOpen
  577. {
  578. get { return m_MFC6ValveIsOpen; }
  579. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  580. }
  581. public bool MFC7ValveIsOpen
  582. {
  583. get { return m_MFC7ValveIsOpen; }
  584. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  585. }
  586. public bool MFC8ValveIsOpen
  587. {
  588. get { return m_MFC8ValveIsOpen; }
  589. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  590. }
  591. public bool PVHe1ValveIsOpen
  592. {
  593. get { return m_PVHe1ValveIsOpen; }
  594. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  595. }
  596. public bool PVHe2ValveIsOpen
  597. {
  598. get { return m_PVHe2ValveIsOpen; }
  599. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  600. }
  601. public bool TurboPumpPumpingValveIsOpen
  602. {
  603. get { return m_TurboPumpPumpingValveIsOpen; }
  604. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  605. }
  606. public bool TurboPumpPurgeValveIsOpen
  607. {
  608. get { return m_TurboPumpPurgeValveIsOpen; }
  609. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  610. }
  611. public bool SoftPumpValveIsOpen
  612. {
  613. get { return m_SoftPumpValveIsOpen; }
  614. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  615. }
  616. public bool FastPumpValveIsOpen
  617. {
  618. get { return m_FastPumpValveIsOpen; }
  619. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  620. }
  621. public bool GuageValveIsOpen
  622. {
  623. get { return m_GuageValveIsOpen; }
  624. set { SetProperty(ref m_GuageValveIsOpen, value); }
  625. }
  626. #endregion
  627. public Dictionary<string, object> RtDataValues
  628. {
  629. get { return m_RtDataValues; }
  630. set { SetProperty(ref m_RtDataValues, value); }
  631. }
  632. public bool PumpIsOpen
  633. {
  634. get { return m_PumpIsOpen; }
  635. set { SetProperty(ref m_PumpIsOpen, value); }
  636. }
  637. public bool PendulumValveIsOpen
  638. {
  639. get { return m_PendulumValveIsOpen; }
  640. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  641. }
  642. public bool TurboIsOpen
  643. {
  644. get { return m_TurboIsOpen; }
  645. set { SetProperty(ref m_TurboIsOpen, value); }
  646. }
  647. public bool IsATM
  648. {
  649. get { return m_IsATM; }
  650. set { SetProperty(ref m_IsATM, value); }
  651. }
  652. public bool IsVAC
  653. {
  654. get { return m_IsVAC; }
  655. set { SetProperty(ref m_IsVAC, value); }
  656. }
  657. public bool BRFIsOn
  658. {
  659. get { return m_BRFIsOn; }
  660. set { SetProperty(ref m_BRFIsOn, value); }
  661. }
  662. public bool SRFIsOn
  663. {
  664. get { return m_SRFIsOn; }
  665. set { SetProperty(ref m_SRFIsOn, value); }
  666. }
  667. public int PositionValue
  668. {
  669. get { return m_PositionValue; }
  670. set { SetProperty(ref m_PositionValue, value); }
  671. }
  672. public bool IsPositionMode
  673. {
  674. get { return m_IsPositionMode; }
  675. set { SetProperty(ref m_IsPositionMode, value); }
  676. }
  677. public double HeGasSetpoint
  678. {
  679. get { return m_HeGasSetpoint; }
  680. set
  681. {
  682. SetProperty(ref m_HeGasSetpoint, value);
  683. }
  684. }
  685. public int HePressureSetpoint
  686. {
  687. get { return m_HePressureSetpoint; }
  688. set
  689. {
  690. SetProperty(ref m_HePressureSetpoint, value);
  691. }
  692. }
  693. public float SRFFwdPowerSetpoint
  694. {
  695. get { return m_SRFFwdPowerSetpoint; }
  696. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  697. }
  698. public float BRFFwdPowerSetpoint
  699. {
  700. get { return m_BRFFwdPowerSetpoint; }
  701. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  702. }
  703. public int ESCVoltage
  704. {
  705. get { return m_ESCVoltage; }
  706. set { SetProperty(ref m_ESCVoltage, value); }
  707. }
  708. public bool HVIsOn
  709. {
  710. get { return m_HVIsOn; }
  711. set { SetProperty(ref m_HVIsOn, value); }
  712. }
  713. public float SRFMatchC1
  714. {
  715. get { return m_SRFMatchC1; }
  716. set { SetProperty(ref m_SRFMatchC1, value); }
  717. }
  718. public float SRFMatchC2
  719. {
  720. get { return m_SRFMatchC2; }
  721. set { SetProperty(ref m_SRFMatchC2, value); }
  722. }
  723. public float BRFMatchC1
  724. {
  725. get { return m_BRFMatchC1; }
  726. set { SetProperty(ref m_BRFMatchC1, value); }
  727. }
  728. public float BRFMatchC2
  729. {
  730. get { return m_BRFMatchC2; }
  731. set { SetProperty(ref m_BRFMatchC2, value); }
  732. }
  733. public bool GasIsFlowing
  734. {
  735. get { return m_GasIsFlowing; }
  736. set { SetProperty(ref m_GasIsFlowing, value); }
  737. }
  738. public bool IsAutoMode
  739. {
  740. get { return m_IsAutoMode; }
  741. set { SetProperty(ref m_IsAutoMode, value); }
  742. }
  743. public string SelectedRecipe
  744. {
  745. get { return m_SelectedRecipe; }
  746. set { SetProperty(ref m_SelectedRecipe, value); }
  747. }
  748. public float ChillerTempSetpoint
  749. {
  750. get { return m_ChillerTempSetpoint; }
  751. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  752. }
  753. public float WallTempSetpoint
  754. {
  755. get { return m_WallTempSetpoint; }
  756. set { SetProperty(ref m_WallTempSetpoint, value); }
  757. }
  758. public bool HeIsPressureMode
  759. {
  760. get { return m_HeIsPressureMode; }
  761. set { SetProperty(ref m_HeIsPressureMode, value); }
  762. }
  763. public bool ChillerIsOn
  764. {
  765. get { return m_ChillerIsOn; }
  766. set { SetProperty(ref m_ChillerIsOn, value); }
  767. }
  768. public double ChamberPressureFeedBack
  769. {
  770. get { return m_ChamberPressureFeedBack; }
  771. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  772. }
  773. #endregion
  774. #region 命令
  775. private DelegateCommand _PMInitCommnad;
  776. public DelegateCommand PMInitCommnad =>
  777. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  778. private DelegateCommand _PMAbortCommnad;
  779. public DelegateCommand PMAbortCommnad =>
  780. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  781. private DelegateCommand _GasCommand;
  782. public DelegateCommand GasCommand =>
  783. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  784. private DelegateCommand _HeCommand;
  785. public DelegateCommand HeCommand =>
  786. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  787. private DelegateCommand _RfCommand;
  788. public DelegateCommand RfCommand =>
  789. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  790. private DelegateCommand _PurgeCommand;
  791. public DelegateCommand PurgeCommand =>
  792. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  793. private DelegateCommand _VentCommand;
  794. public DelegateCommand VentCommand =>
  795. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  796. private DelegateCommand _PumpCommand;
  797. public DelegateCommand PumpCommand =>
  798. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  799. private DelegateCommand _OpenPumpCommand;
  800. public DelegateCommand OpenPumpCommand =>
  801. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  802. private DelegateCommand _ClosePumpCommand;
  803. public DelegateCommand ClosePumpCommand =>
  804. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  805. private DelegateCommand _OpenTurboPumpCommand;
  806. public DelegateCommand OpenTurboPumpCommand =>
  807. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  808. private DelegateCommand _CloseTurboPumpCommand;
  809. public DelegateCommand CloseTurboPumpCommand =>
  810. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  811. private DelegateCommand _OpenPendulumValveCommand;
  812. public DelegateCommand OpenPendulumValveCommand =>
  813. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  814. private DelegateCommand _ClosePendulumValveCommand;
  815. public DelegateCommand ClosePendulumValveCommand =>
  816. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  817. private DelegateCommand<object> _PinUpDownCommand;
  818. public DelegateCommand<object> PinUpDownCommand =>
  819. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  820. private DelegateCommand _SetSRfCommand;
  821. public DelegateCommand SetSRfCommand =>
  822. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  823. private DelegateCommand _SetBRfCommand;
  824. public DelegateCommand SetBRfCommand =>
  825. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  826. private DelegateCommand _OpenButterflyValveViewCommand;
  827. public DelegateCommand OpenButterflyValveViewCommand =>
  828. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  829. private DelegateCommand _HVCommand;
  830. public DelegateCommand HVCommand =>
  831. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  832. private DelegateCommand _HVSetCommand;
  833. public DelegateCommand HVSetCommand =>
  834. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  835. private DelegateCommand _LoadRecipeCommand;
  836. public DelegateCommand LoadRecipeCommand =>
  837. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  838. private DelegateCommand<object> _ControlValveCommand;
  839. public DelegateCommand<object> ControlValveCommand =>
  840. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  841. private DelegateCommand<object> _RunRecipeCommand;
  842. public DelegateCommand<object> RunRecipeCommand =>
  843. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  844. private DelegateCommand _SetChillerTempCommand;
  845. public DelegateCommand SetChillerTempCommand =>
  846. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  847. private DelegateCommand _OnOffChillerCommand;
  848. public DelegateCommand OnOffChillerCommand =>
  849. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  850. private DelegateCommand<object> _HeaterCommand;
  851. public DelegateCommand<object> HeaterCommand =>
  852. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  853. private DelegateCommand _EndStepCommand;
  854. public DelegateCommand EndStepCommand =>
  855. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  856. #endregion
  857. #region 构造函数
  858. public OverViewModel()
  859. {
  860. m_RtDataKeys = new List<string>();
  861. m_IsATM = true;
  862. ModuleName = "PMA";
  863. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  864. DispatcherTimer timer = new DispatcherTimer();
  865. timer.Interval = TimeSpan.FromSeconds(0.5);
  866. timer.Tick += timer_Tick;
  867. timer.Start();
  868. }
  869. #endregion
  870. #region 命令方法
  871. private void OnControlValve(object obj)
  872. {
  873. CommonValveControl commonValveControl = (CommonValveControl)obj;
  874. if (commonValveControl.IsCanEdit == true)
  875. {
  876. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  877. }
  878. }
  879. private void OnPMInit()
  880. {
  881. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  882. }
  883. private async void OnGas()
  884. {
  885. await Task.Run(async () =>
  886. {
  887. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  888. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  889. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  890. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  891. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  892. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  893. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  894. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  895. await Task.Delay(1000);
  896. object[] mfc = new object[8];
  897. string[] mfcSetPoint = new string[8];
  898. mfc[0] = MFC1Data.SetPoint;
  899. mfc[1] = MFC2Data.SetPoint;
  900. mfc[2] = MFC3Data.SetPoint;
  901. mfc[3] = MFC4Data.SetPoint;
  902. mfc[4] = MFC5Data.SetPoint;
  903. mfc[5] = MFC6Data.SetPoint;
  904. mfc[6] = MFC7Data.SetPoint;
  905. mfc[7] = MFC8Data.SetPoint;
  906. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  907. });
  908. }
  909. private void OnHe()
  910. {
  911. if (PVHe1ValveIsOpen == true)
  912. {
  913. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  914. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  915. }
  916. else
  917. {
  918. if (HeIsPressureMode)
  919. {
  920. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  921. }
  922. else
  923. {
  924. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  925. }
  926. }
  927. }
  928. private void OnRf()
  929. {
  930. if (PMCurrentState == PMState.RfPowering)
  931. {
  932. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  933. }
  934. else
  935. {
  936. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  937. }
  938. }
  939. private void OnPurge()
  940. {
  941. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  942. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  943. //{
  944. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  945. // await Task.Delay(1000);
  946. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  947. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  948. //}
  949. //else
  950. //{
  951. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  952. // await Task.Delay(1000);
  953. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  954. //}
  955. if (PMCurrentState == PMState.Purging)
  956. {
  957. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  958. //await Task.Delay(1000);
  959. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  960. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  961. }
  962. else
  963. {
  964. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  965. //await Task.Delay(1000);
  966. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  967. }
  968. }
  969. private void OnVent()
  970. {
  971. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  972. if (PMCurrentState == PMState.Venting)
  973. {
  974. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  975. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  976. }
  977. else
  978. {
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  980. }
  981. }
  982. private void OnPump()
  983. {
  984. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  985. if (PMCurrentState==PMState.Pumping)
  986. {
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  988. return;
  989. }
  990. //if (PMCurrentState == PMState.pum)
  991. //{
  992. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  993. // return;
  994. //}
  995. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  996. //{
  997. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  998. //}
  999. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1000. //{
  1001. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1002. //}
  1003. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1004. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1005. // 设置底压
  1006. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1007. if (basePressure <= 0.01 || basePressure >= 1000)
  1008. {
  1009. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1010. return;
  1011. }
  1012. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1013. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1014. {
  1015. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1016. return;
  1017. }
  1018. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1019. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1020. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1021. }
  1022. private void OnOpenPump()
  1023. {
  1024. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1025. if (PMCurrentState==PMState.LaunchingPump)
  1026. {
  1027. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1028. return;
  1029. }
  1030. //if (PumpIsOpen == true)
  1031. //{
  1032. // return;
  1033. //}
  1034. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1035. }
  1036. private void OnClosePump()
  1037. {
  1038. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1039. }
  1040. private void OnOpenTurboPump()
  1041. {
  1042. //TurboIsOpen = true;
  1043. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1044. if (PMCurrentState == PMState.LaunchingTurboPump)
  1045. {
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1047. return;
  1048. }
  1049. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1050. }
  1051. private void OnCloseTurboPump()
  1052. {
  1053. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1054. }
  1055. private void OnOpenPendulumValve()
  1056. {
  1057. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1058. }
  1059. private void OnClosePendulumValve()
  1060. {
  1061. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1062. }
  1063. private void OnPinUpDown(object upDown)
  1064. {
  1065. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1066. }
  1067. private async void OnSetSRf()
  1068. {
  1069. if (SRFIsOn == true)
  1070. {
  1071. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1072. }
  1073. else
  1074. {
  1075. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1076. await Task.Delay(100);
  1077. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1078. }
  1079. }
  1080. private async void OnSetBRf()
  1081. {
  1082. if (BRFIsOn == true)
  1083. {
  1084. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1085. }
  1086. else
  1087. {
  1088. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1,BRFMatchC2);
  1089. await Task.Delay(100);
  1090. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1091. }
  1092. }
  1093. private void OnPMAbort()
  1094. {
  1095. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1096. }
  1097. private void OnOpenButterflyValveView()
  1098. {
  1099. //if (butterflyValveMessageBox == null)
  1100. //{
  1101. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1102. butterflyValveMessageBox = new ButterflyValveView();
  1103. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1104. butterflyValveMessageBox.Left = 700;
  1105. butterflyValveMessageBox.Top = 600;
  1106. butterflyValveMessageBox.Show();
  1107. butterflyValveMessageBox.Owner = _mainWindow;
  1108. //}
  1109. }
  1110. private void OnLoadRecipe()
  1111. {
  1112. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1113. }
  1114. private async void OnHV()
  1115. {
  1116. if (HVIsOn == true)
  1117. {
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1119. }
  1120. else
  1121. {
  1122. await Task.Run(async () =>
  1123. {
  1124. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1125. await Task.Delay(1000);
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1127. });
  1128. }
  1129. }
  1130. private void OnHVSet()
  1131. {
  1132. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1133. }
  1134. private void OnRunRecipe(object obj)
  1135. {
  1136. string recipeName = SelectedRecipe;
  1137. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1138. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1139. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1140. }
  1141. private void OnSetChillerTemp()
  1142. {
  1143. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1144. float x;
  1145. float.TryParse(value, out x);
  1146. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1147. }
  1148. private void OnOffChiller()
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1151. }
  1152. private void OnHeater(object obj)
  1153. {
  1154. AITHeaterData heaterData = obj as AITHeaterData;
  1155. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1156. heaterView = new HeaterView(heaterData);
  1157. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1158. heaterView.Owner = _mainWindow;
  1159. heaterView.Show();
  1160. }
  1161. private void OnEndStep()
  1162. {
  1163. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1164. {
  1165. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1166. }
  1167. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1168. {
  1169. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1170. }
  1171. }
  1172. #endregion
  1173. #region 私有方法
  1174. private IEnumerable<string> GetFilesNames(string path)
  1175. {
  1176. return Directory.GetFiles(path, "*.rcp")
  1177. .Select(Path.GetFileNameWithoutExtension);
  1178. }
  1179. void timer_Tick(object sender, EventArgs e)
  1180. {
  1181. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1182. if (RtDataValues==null)
  1183. {
  1184. return;
  1185. }
  1186. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1188. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1189. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1190. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1191. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1192. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1193. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1194. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1195. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1196. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1197. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1198. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1199. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1200. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1201. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1202. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1203. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1204. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1205. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1206. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1207. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1208. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1209. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1210. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1211. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1212. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1213. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1214. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1215. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1216. HVIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ESCHV.IsOn");
  1217. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1218. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1219. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1220. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1221. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1222. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1223. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1224. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1225. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1226. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1227. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1228. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1229. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1230. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1231. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1232. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1233. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1234. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1235. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1236. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1237. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1238. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1239. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1240. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1241. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1242. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1243. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1244. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1245. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1246. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1247. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1248. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1249. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1250. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1251. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1252. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1253. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1254. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1255. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1256. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1257. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1258. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1259. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1260. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1261. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1262. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1263. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1264. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1265. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1266. if (PMCurrentState == PMState.Processing)
  1267. {
  1268. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1269. if (CurrentRecipeResult.RecipeStepNumber != null)
  1270. {
  1271. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
  1272. }
  1273. }
  1274. else
  1275. {
  1276. CurrentRecipeResult = null;
  1277. CurrentRecipeStep = null;
  1278. }
  1279. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1280. {
  1281. ChamberPressureFeedBack = ProcessLowPressure;
  1282. }
  1283. else
  1284. {
  1285. ChamberPressureFeedBack = ProcessHighPressure;
  1286. }
  1287. }
  1288. public void addDataKeys()
  1289. {
  1290. m_RtDataKeys.Clear();
  1291. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1292. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1293. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1294. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1295. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1296. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1297. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1298. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1299. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1300. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1301. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1302. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1303. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1304. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1305. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1306. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1307. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1308. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1309. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1310. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1311. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1312. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1313. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1314. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1315. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1316. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1317. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1318. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1319. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1320. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1321. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1322. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1323. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1324. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1325. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1326. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1327. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1328. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1329. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1330. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1331. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1332. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1333. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1334. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1335. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1336. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1337. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1338. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1339. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1340. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1341. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1342. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1343. //m_RtDataKeys.Add($"{ModuleName}.SRfIsOn");
  1344. //m_RtDataKeys.Add($"{ModuleName}.SRfForwardPowerFeedBack");
  1345. //m_RtDataKeys.Add($"{ModuleName}.SRfReflectPower");
  1346. //m_RtDataKeys.Add($"{ModuleName}.BRfIsOn");
  1347. //m_RtDataKeys.Add($"{ModuleName}.BRfForwardPowerFeedBack");
  1348. //m_RtDataKeys.Add($"{ModuleName}.BRfReflectPower");
  1349. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1350. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1351. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1352. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1353. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1354. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1355. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1356. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode");
  1357. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1358. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1359. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1360. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1361. m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1362. m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1363. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1364. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1365. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1366. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1367. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1368. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1369. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1370. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1371. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1372. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1373. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1374. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1375. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1376. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1377. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1378. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1379. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1380. }
  1381. #endregion
  1382. }
  1383. }