SEMFPickRoutine.cs 11 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Modules.VCE;
  18. namespace Venus_RT.Modules.TM.VenusEntity
  19. {
  20. public class SEMFPickRoutine : ModuleRoutineBase, IRoutine
  21. {
  22. private enum PickStep
  23. {
  24. seWaitModuleReady,
  25. sePrepareModule,
  26. seDoorOpen,
  27. sePAQuery,
  28. sePicking,
  29. seNotifyDone,
  30. }
  31. private HongHuTM _tm;
  32. private IPreAlign _vpa;
  33. private ITransferRobot _robot;
  34. private VceEntity _vceModule;
  35. private ModuleName _targetModule;
  36. private int _targetSlot;
  37. private int _pickingTimeout;
  38. public int currentStepNo;
  39. Hand _hand;
  40. /// <summary>
  41. /// 完整pick动作仅可vce vpa取片
  42. /// </summary>
  43. /// <param name="tm"></param>
  44. /// <param name="robot"></param>
  45. /// <param name="vpa"></param>
  46. public SEMFPickRoutine(HongHuTM tm, ITransferRobot robot, IPreAlign vpa) : base(ModuleName.SETM)
  47. {
  48. _tm = tm;
  49. _robot = robot;
  50. _vpa = vpa;
  51. }
  52. public RState Start(params object[] objs)
  53. {
  54. if (!_robot.IsHomed)
  55. {
  56. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  57. return RState.Failed;
  58. }
  59. //MoveItem pickItem = new MoveItem() { SourceModule = , };
  60. var pickItem = (Queue<MoveItem>)objs[0];
  61. _targetModule = pickItem.Peek().SourceModule;
  62. _targetSlot = pickItem.Peek().SourceSlot;
  63. _hand = pickItem.Peek().RobotHand;
  64. //如果目标是Vce 否则是vpa
  65. if (ModuleHelper.IsVCE(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  66. {
  67. _vceModule = Singleton<RouteManager>.Instance.GetVCE(_targetModule);
  68. //如果vce有错误 报错
  69. if (_vceModule.IsError)
  70. {
  71. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  72. return RState.Failed;
  73. }
  74. if (_targetSlot < 0)
  75. {
  76. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  77. return RState.Failed;
  78. }
  79. //if (_tm.VCESlitDoorClosed)
  80. //{
  81. // LOG.Write(eEvent.ERR_TM, Module, $"cannot pick cause vce slitdoor not open.");
  82. // return RState.Failed;
  83. //}
  84. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  85. //if (_tm.VCESlitDoorClosed)
  86. //{
  87. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  88. // return RState.Failed;
  89. //}
  90. }
  91. //如果目标又不是VPA 报错
  92. else if (!ModuleHelper.IsVPA(_targetModule))
  93. {
  94. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for pick action");
  95. return RState.Failed;
  96. }
  97. //检查目标手臂上没有wafer
  98. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  99. {
  100. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  101. return RState.Failed;
  102. }
  103. //检查目标槽位上有wafer
  104. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  105. {
  106. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  107. return RState.Failed;
  108. }
  109. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  110. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  111. //{
  112. // if (!_tm.IsVCEATM)
  113. // {
  114. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  115. // return RState.Failed;
  116. // }
  117. //
  118. // if (!_tm.IsTMATM)
  119. // {
  120. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  121. // return RState.Failed;
  122. // }
  123. //}
  124. //else
  125. //{
  126. // if (_tm.IsVCEATM)
  127. // {
  128. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  129. // return RState.Failed;
  130. // }
  131. //
  132. // if (_tm.IsTMATM)
  133. // {
  134. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  135. // return RState.Failed;
  136. // }
  137. //}
  138. Reset();
  139. _pickingTimeout = SC.GetValue<int>("SETM.PickTimeout") * 1000;
  140. return Runner.Start(Module, $"Pick from {_targetModule}");
  141. }
  142. public RState Monitor()
  143. {
  144. Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  145. .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
  146. .RunIf(PickStep.seDoorOpen, _targetModule == ModuleName.VCE1, VCEDoorOpen, CheckVCEDoorOpen)
  147. .RunIf(PickStep.sePAQuery, _targetModule == ModuleName.VPA, QueryOffset, VPAIsIdle, _pickingTimeout)
  148. .Run (PickStep.sePicking, Picking, WaitPickDone, _pickingTimeout)
  149. .End (PickStep.seNotifyDone, NullFun, 500);
  150. return Runner.Status;
  151. }
  152. private bool PrepareModule()
  153. {
  154. switch (_targetModule)
  155. {
  156. case ModuleName.VCE1:
  157. return _vceModule.CheckToPostMessage((int)VceMSG.Goto, _targetSlot);//移动到目标槽位
  158. case ModuleName.VPA:
  159. return true;//10/17暂时为true 后可能要求旋转到0
  160. default:
  161. return false;
  162. }
  163. }
  164. private bool WaitPickDone()
  165. {
  166. if (_robot.Status == RState.Running)
  167. {
  168. return false;
  169. }
  170. else if (_robot.Status == RState.End)
  171. {
  172. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  173. return true;
  174. }
  175. else
  176. {
  177. Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
  178. return true;
  179. }
  180. }
  181. private bool VCEDoorOpen()
  182. {
  183. return _tm.TurnSlitDoor(_targetModule, true);
  184. }
  185. private bool CheckVCEDoorOpen()
  186. {
  187. return _tm.CheckSlitValveOpen(_targetModule);
  188. }
  189. private bool CheckIsPA() => _targetModule == ModuleName.VPA;
  190. private bool QueryOffset()
  191. {
  192. return _vpa.QueryOffset();
  193. }
  194. private bool VPAIsIdle()
  195. {
  196. if (_vpa.Status == RState.Running)
  197. {
  198. return false;
  199. }
  200. else if (_vpa.Status == RState.End)
  201. {
  202. return true;
  203. }
  204. else
  205. {
  206. Runner.Stop($"VPA Query Offset failed, {_vpa.Status}");
  207. return true;
  208. }
  209. }
  210. private bool WaitRobotIsIdle()
  211. {
  212. if (_robot.Status == RState.Running)
  213. {
  214. return false;
  215. }
  216. else if (_robot.Status == RState.End)
  217. {
  218. return true;
  219. }
  220. else
  221. {
  222. Runner.Stop($"TM Robot QueryOffset failed, {_robot.Status}");
  223. return true;
  224. }
  225. }
  226. private bool Picking()
  227. {
  228. //到达目标点位 pick固定槽位点的wafer
  229. if (_targetModule == ModuleName.VPA && (_vpa.ROffset!=0 || _vpa.TOffset!=0))
  230. {
  231. int[] RT = calculateRT(_vpa.ROffset, _vpa.TOffset);
  232. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"will pick from PA with R:{RT[1]} D:{RT[0]}");
  233. return _robot.PickWithOffset(_targetModule, 0, _hand, RT[1], RT[0]);
  234. }
  235. else
  236. return _robot.Pick(_targetModule, 0, _hand);
  237. }
  238. private int[] calculateRT(int OriginR,int OriginS)
  239. {
  240. int[] RT = new int[2];
  241. try
  242. {
  243. bool desflag = false;
  244. double angle = 0;
  245. if (OriginR / 10 < 90)
  246. angle = OriginR / 10;
  247. if (OriginR / 10 < 270 && OriginR / 10 > 90)
  248. {
  249. desflag = true;
  250. angle = OriginR / 10 - 90;
  251. }
  252. if (OriginR / 10 > 270)
  253. angle = 450 - OriginR / 10;
  254. double angleInRadians = angle * Math.PI / 180;
  255. //OriginS * 25.4 inch 转化为 mm
  256. double Robot2PA = OriginS * 25.4 / 10000;
  257. double Robot2Wafer = Math.Sqrt(Robot2PA * Robot2PA + 402.5 * 402.5 - 2 * Robot2PA * 402.5 * Math.Cos(angleInRadians));
  258. //距离(mm)
  259. double distance = Robot2Wafer - 402.5;
  260. //角度(度)
  261. double angleA = Math.Asin(Robot2PA * Math.Sin(angleInRadians) / Robot2Wafer) * 180 / Math.PI;
  262. if (desflag)
  263. angleA = -angleA;
  264. RT[0] = (int)(angleA * 1000);
  265. RT[1] = (int)(distance * 1000);
  266. }
  267. catch
  268. {
  269. LOG.Write(eEvent.ERR_TM_ROBOT,ModuleName.TMRobot,"错误纠偏计算");
  270. RT[0] = 0;
  271. RT[1] = 0;
  272. }
  273. return RT;
  274. }
  275. private bool CheckModuleReady()
  276. {
  277. switch (_targetModule)
  278. {
  279. case ModuleName.VCE1:
  280. return _vceModule.IsIdle;
  281. case ModuleName.VPA:
  282. return _vpa.Status == RState.End;
  283. default:
  284. return false;
  285. }
  286. }
  287. public void Abort()
  288. {
  289. _robot.Halt();
  290. }
  291. }
  292. }