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EFEMAlignRoutine.cs
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c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 year ago |
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EfemEntity.cs
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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EfemHomeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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EfemPickRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
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EfemPlaceRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
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EfemSwapRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
sangwq
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.