| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778 | <?xml version="1.0" encoding="utf-8" ?><IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>	<Dig_In>		<DI_ITEM Index="1"  Name="DI_SYSTEM_CDA_PRESSURE_OK" Device="" Addr="w0.00" Note="" />		<DI_ITEM Index="2"	Name="DI_SYSTEM_N2_PRESSURE_OK" Device="" Addr="w0.01" Note="" />		<DI_ITEM Index="3"	Name="DI_VCE_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.02" Note="" />		<DI_ITEM Index="4"	Name="DI_PMA_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.03" Note="" />		<DI_ITEM Index="5"	Name="DI_PMB_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.04" Note="" />		<DI_ITEM Index="6"	Name="DI_PMC_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.05" Note="" />		<DI_ITEM Index="7"	Name="DI_TM_RB_EXTEND_VCE_ENABLE" Device="" Addr="w0.06" Note="" />		<DI_ITEM Index="8"	Name="DI_TM_RB_EXTEND_PMA_ENABLE" Device="" Addr="w0.07" Note="" />		<DI_ITEM Index="9"	Name="DI_TM_RB_EXTEND_PMB_ENABLE" Device="" Addr="w0.08" Note="" />		<DI_ITEM Index="10"	Name="DI_TM_RB_EXTEND_PMC_ENABLE" Device="" Addr="w0.09" Note="" />		<DI_ITEM Index="11"	Name="DI_AC_RACK_FAN OK" Device="" Addr="w0.10" Note="" />		<DI_ITEM Index="12"	Name="DI_AC_RACK_SOMKE_OUT1" Device="" Addr="w0.11" Note="" />		<DI_ITEM Index="13"	Name="DI_AC_RACK_SOMKE_OUT2" Device="" Addr="w0.12" Note="" />		<DI_ITEM Index="14"	Name="DI_FAB_SOMKE_OUT" Device="" Addr="w0.13" Note="" />		<DI_ITEM Index="15"	Name="DI_ABNORMAL_EXHAUST_GAS" Device="" Addr="w0.14" Note="" />		<DI_ITEM Index="16"	Name="DI_N2_PRESSURE_SENSOR1" Device="" Addr="w0.15" Note="" />		<DI_ITEM Index="17"	Name="DI_VCE_TO_PA_VALVE_OPEN" Device="" Addr="w1.00" Note="" />		<DI_ITEM Index="18"	Name="DI_VCE_TO_PA_VALVE_CLOSE" Device="" Addr="w1.01" Note="" />		<DI_ITEM Index="19"	Name="DI_TM_TO_PMB_VALVE_OPEN" Device="" Addr="w1.02" Note="" />		<DI_ITEM Index="20"	Name="DI_TM_TO_PMB_VALVE_CLOSE" Device="" Addr="w1.03" Note="" />		<DI_ITEM Index="21"	Name="DI_TM_ATM_SENSOR" Device="" Addr="w1.04" Note="" />		<DI_ITEM Index="22"	Name="DI_VCE_ATM_SENSOR" Device="" Addr="w1.05" Note="" />		<DI_ITEM Index="23"	Name="DI_N2_PRESSURE_SENSOR2" Device="" Addr="w1.06" Note="" />		<DI_ITEM Index="24"	Name="DI_CDA_PRESSURE_SENSOR" Device="" Addr="w1.07" Note="" />		<DI_ITEM Index="25"	Name="DI_He_PRESSURE_SENSOR" Device="" Addr="w1.08" Note="" />		<DI_ITEM Index="26"	Name="DI_LEAK_SENSOR" Device="" Addr="w1.09" Note="" />		<DI_ITEM Index="27"	Name="DI_TM_VACUUM_GAUGE" Device="" Addr="w1.10" Note="" />		<DI_ITEM Index="28"	Name="DI_VCE_VACUUM_GAUGE" Device="" Addr="w1.11" Note="" />		<DI_ITEM Index="29"	Name="DI_ROBOT_TO_VCE_RETRACT" Device="" Addr="w1.12" Note="" />		<DI_ITEM Index="30"	Name="DI_ROBOT_TO_PMA_RETRACT" Device="" Addr="w1.13" Note="" />		<DI_ITEM Index="31"	Name="DI_ROBOT_TO_PMB_RETRACT" Device="" Addr="w1.14" Note="" />		<DI_ITEM Index="32"	Name="DI_ROBOT_TO_PMC_RETRACT" Device="" Addr="w1.15" Note="" />	</Dig_In>	<Dig_Out>		<DO_ITEM Index="1"	Name="DO_SLIT_DOOR_CLOSED_TO_VCE"		Device="" Addr="W100.00"/>		<DO_ITEM Index="2"	Name="DO_SLIT_DOOR_CLOSED_TO_PMA"		Device="" Addr="W100.01"/>		<DO_ITEM Index="3"	Name="DO_SLIT_DOOR_CLOSED_TO_PMB"		Device="" Addr="W100.02"/>		<DO_ITEM Index="4"	Name="DO_SLIT_DOOR_CLOSED_TO_PMC"		Device="" Addr="W100.03"/>		<DO_ITEM Index="5"	Name="DO_TM_ROBOT_NOT_EXTEND_TO_VCE"	Device="" Addr="W100.04"/>		<DO_ITEM Index="6"	Name="DO_TM_ROBOT_NOT_EXTEND_TO_PMA"	Device="" Addr="W100.05"/>		<DO_ITEM Index="7"	Name="DO_TM_ROBOT_NOT_EXTEND_TO_PMB"	Device="" Addr="W100.06"/>		<DO_ITEM Index="8"	Name="DO_TM_ROBOT_NOT_EXTEND_TO_PMC"	Device="" Addr="W100.07"/>		<DO_ITEM Index="9"	Name="DO_SYSTEM_NO_WATER_LEAK"		Device="" Addr="W100.08"/>		<DO_ITEM Index="10"	Name="DO_RB_EXTEND_VCE_OK"				Device="" Addr="W100.09"/>		<DO_ITEM Index="11"	Name="DO_RB_EXTEND_PMA_OK"				Device="" Addr="W100.10"/>		<DO_ITEM Index="12"	Name="DO_RB_EXTEND_PMB_OK"				Device="" Addr="W100.11"/>		<DO_ITEM Index="13"	Name="DO_RB_EXTEND_PMC_OK"				Device="" Addr="W100.12"/>		<DO_ITEM Index="14"	Name="DO_VCE_TO_TM_VALVE_OPEN"				Device="" Addr="W100.13"/>		<DO_ITEM Index="15"	Name="DO_VCE_TO_TM_VALVE_CLOSED"				Device="" Addr="W100.14"/>		<DO_ITEM Index="16"	Name="DO_PMA_VALVE_OPEN"				Device="" Addr="W100.15"/>		<DO_ITEM Index="17"	Name="DO_PMA_VALVE_CLOSED"				Device="" Addr="W101.00"/>		<DO_ITEM Index="18"	Name="DO_PMB_VALVE_OPEN"					Device="" Addr="W101.01"/>		<DO_ITEM Index="19"	Name="DO_PMB_VALVE_CLOSED"					Device="" Addr="W101.02"/>		<DO_ITEM Index="20"	Name="DO_PMC_VALVE_OPEN"				Device="" Addr="W101.03"/>		<DO_ITEM Index="21"	Name="DO_PMC_VALVE_CLOSED"				Device="" Addr="W101.04"/>		<DO_ITEM Index="22"	Name="DO_TM_FAST_PUMP"					Device="" Addr="W101.05"/>		<DO_ITEM Index="23"	Name="DO_TM_SOFT_PUMP"					Device="" Addr="W101.06"/>		<DO_ITEM Index="24"	Name="DO_TM_FAST_VENT"					Device="" Addr="W101.07"/>		<DO_ITEM Index="25"	Name="DO_TM_SOFT_VENT"					Device="" Addr="W101.08"/>		<DO_ITEM Index="26"	Name="DO_VCE_FAST_PUMP"				Device="" Addr="W101.09"/>		<DO_ITEM Index="27"	Name="DO_VCE_SOFT_PUMP"				Device="" Addr="W101.10"/>		<DO_ITEM Index="28"	Name="DO_VCE_FAST_VENT"				Device="" Addr="W101.11"/>		<DO_ITEM Index="29"	Name="DO_VCE_SOFT_VENT"				Device="" Addr="W101.12"/>		<DO_ITEM Index="30"	Name="DO_220V_COIL"						Device="" Addr="W101.13"/>		<DO_ITEM Index="31"	Name="DO_CDA_PRESSURE_OK"					Device="" Addr="W101.14"/>		<DO_ITEM Index="32"	Name="DO_N2_PRESSURE_OK"					Device="" Addr="W101.15"/>	</Dig_Out>	<Ana_In>	</Ana_In>	<Ana_Out>	</Ana_Out></IO_DEFINE>
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