Kepler-Release/Venus/Venus_RT/Config/TM/SETMInterlock.xml

<?xml version="1.0" encoding="utf-8" ?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
	<Action do="DO_VCE_Slit_Door_Open"	value="true" tip="VCE Slit Door Open"	tip.zh-CN="" tip.en-US="DO-13" >
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />
	</Action>
	<Action do="DO_VCE_Slit_Door_Close"	value="true" tip="VCE Slit Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"	value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit di="DI_VCE_Wafer_Senser"			value="true" tip="VCE Wafer Senser"		tip.zh-CN="" tip.en-US="DI-07" />												  	   	    
	</Action>												  	   	    
	<Action do="DO_PMA_Slit_Door_Open"	value="true" tip="PMA Slit Door Open"	tip.zh-CN="" tip.en-US="DO-15" >
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
	</Action>												  	   	    
	<Action do="DO_PMA_Slit_Door_Close"	value="true" tip="PMA Slit Door Close"	tip.zh-CN="" tip.en-US="DO-16" >
									
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />													  	   	    
		<Limit di="DI_PMA_Wafer_Senser"			value="true" tip="PMA Wafer Senser"		tip.zh-CN="" tip.en-US="DI-08" />											  	   	    
							  	   	    
	</Action>												  	   	    
	<Action do="DO_PMB_Slit_Door_Open"	value="true" tip="PMB Slit Door Open"	tip.zh-CN="" tip.en-US="DO-17" >
				
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
														    
	</Action>
	<Action do="DO_PMB_Slit_Door_Close"	value="true" tip="PMB_Slit_Door_Close"	tip.zh-CN="" tip.en-US="DO-18" >

		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />													  	   	    
		<Limit di="DI_PMB_Wafer_Senser"			value="true" tip="PMB Wafer Senser"		tip.zh-CN="" tip.en-US="DI-09" />											  	   	    
	
	</Action>
	<Action do="DO_TM_Fast_Pumping"	value="true" tip="TM Fast Pumping"	tip.zh-CN="" tip.en-US="DO-21" >
				
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit do="DO_TM_Fast_Vent"			value="false" tip="TM Fast Vent"		tip.zh-CN="" tip.en-US="DO-23" />												  	   	    
		<Limit do="DO_TM_Soft_Vent"			value="false" tip="TM Soft Vent"		tip.zh-CN="" tip.en-US="DO-24" />												  	   	    
											 	  
	</Action>											 	  
	<Action do="DO_TM_Soft_Pumping"	value="true" tip="TM Soft Pumping"	tip.zh-CN="" tip.en-US="DO-09" >
			
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
												 	  
	</Action>											 	  
	<Action do="DO_TM_Fast_Vent"	value="true" tip="TM Fast Vent"	tip.zh-CN="" tip.en-US="DO-23" >
			
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit do="DO_TM_Fast_Pumping"		value="false" tip="TM Fast Pumping"		tip.zh-CN="" tip.en-US="DO-21" />												  	   	    
		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    
												 	  
	</Action>											 	  
	<Action do="DO_TM_Soft_Vent"	value="true" tip="TM Soft Vent"	tip.zh-CN="" tip.en-US="DO-24" >

		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit do="DO_TM_Fast_Pumping"		value="false" tip="TM Fast Pumping"		tip.zh-CN="" tip.en-US="DO-21" />												  	   	    
		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    

	</Action>
	<Action do="DO_VCE_Fast_Pumping"	value="true" tip="VCE Fast Pumping"	tip.zh-CN="" tip.en-US="DO-25" >
			
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit do="DO_VCE_Fast_Vent"		value="false" tip="VCE Fast Vent"		tip.zh-CN="" tip.en-US="DO-27" />												  	   	    
		<Limit do="DO_VCE_Soft_Vent"		value="false" tip="VCE Soft Vent"		tip.zh-CN="" tip.en-US="DO-28" />												  	   	    
												  	   
	</Action>												  	   
	<Action do="DO_VCE_Soft_Pumping"	value="true" tip="VCE Soft Pumping"	tip.zh-CN="" tip.en-US="DO-26" >

		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
	
	</Action>
	<Action do="DO_VCE_Fast_Vent"	value="true" tip="VCE Fast Vent"	tip.zh-CN="" tip.en-US="DO-27" >
			
		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"			tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit do="DO_VCE_Fast_Pumping"		value="true" tip="VCE Fast Pumping"			tip.zh-CN="" tip.en-US="DO-25" />												  	   	    
		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    
												  	   
	</Action>											  	   
	<Action do="DO_VCE_Soft_Vent"	value="true" tip="VCE Soft Vent"	tip.zh-CN="" tip.en-US="DO-28" >

		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"			tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
		<Limit do="DO_VCE_Fast_Pumping"		value="true" tip="VCE Fast Pumping"			tip.zh-CN="" tip.en-US="DO-25" />												  	   	    
		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    

	</Action>
	<Action do="DO_PCW_Valve"	value="true" tip="PCW Valve"	tip.zh-CN="" tip.en-US="DO-29" >
		<Limit di="DI_PCW_Leak_SW"			value="true" tip="PCW Leak SW"		tip.zh-CN="" tip.en-US="DI-25" />
	</Action>
</Interlock>