| .. |
|
ControlJob.cs
|
ea68c5c25d
add clean for Venus SE.
|
1 year ago |
|
EnumControlJobState.cs
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
|
2 years ago |
|
EnumProcessJobState.cs
|
56cd0ab611
add framework
|
3 years ago |
|
LotInfo.cs
|
56cd0ab611
add framework
|
3 years ago |
|
ProcessJobInfo.cs
|
5888197193
1.efem 添加 foup load/unload动画
|
2 years ago |
|
ProcessJobManager.cs
|
56cd0ab611
add framework
|
3 years ago |
|
SequenceInfo.cs
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
1 year ago |
|
SequenceStepInfo.cs
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 year ago |
|
SequenceStepModuleInfo.cs
|
56cd0ab611
add framework
|
3 years ago |
zhouhr
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI