VenusDispatcher.cs 87 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. namespace Venus_RT.Modules
  25. {
  26. class VCETask : ModuleTask
  27. {
  28. public VCETask(ModuleName mod) : base(mod)
  29. {
  30. }
  31. }
  32. class VenusPMTask : ModuleTask
  33. {
  34. public enum RecipeJobType
  35. {
  36. PreClean,
  37. Process,
  38. PostClean,
  39. WtwClean,
  40. }
  41. public override int TimeToReady
  42. {
  43. get
  44. {
  45. switch (Status)
  46. {
  47. case ModuleStatus.Idle:
  48. case ModuleStatus.IdleClean:
  49. case ModuleStatus.PreJobClean:
  50. case ModuleStatus.PostJobClean:
  51. case ModuleStatus.WTWClean:
  52. case ModuleStatus.Processing:
  53. {
  54. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  55. }
  56. }
  57. return int.MaxValue;
  58. }
  59. }
  60. private WaferTask _wafer;
  61. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  62. Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  63. KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  64. public VenusPMTask(ModuleName mod) : base(mod)
  65. { }
  66. public override RState Run()
  67. {
  68. if(_runingWaferTask.Value.Count == 0)
  69. {
  70. if(_pendingWaferTasks.Count > 0)
  71. {
  72. _runingWaferTask = _pendingWaferTasks.Dequeue();
  73. }
  74. else
  75. {
  76. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  77. {
  78. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  79. {
  80. if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  81. {
  82. Status = ModuleStatus.StartIdleClean;
  83. }
  84. }
  85. }
  86. }
  87. }
  88. else
  89. {
  90. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  91. {
  92. switch(_runingWaferTask.Value.First().Key)
  93. {
  94. case RecipeJobType.PreClean:
  95. {
  96. if(WaferManager.Instance.CheckNoWafer(Module,0))
  97. {
  98. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  99. {
  100. Status = ModuleStatus.StartPreJobClean;
  101. }
  102. else
  103. {
  104. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  105. TryDequeueRuningTask(Status);
  106. Status = ModuleStatus.Idle;
  107. }
  108. }
  109. }
  110. break;
  111. case RecipeJobType.Process:
  112. {
  113. if (WaferManager.Instance.CheckHasWafer(Module, 0))
  114. {
  115. if(_wafer.waferId == _runingWaferTask.Key)
  116. {
  117. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  118. Status = ModuleStatus.StartProcess;
  119. }
  120. else
  121. {
  122. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  123. }
  124. }
  125. }
  126. break;
  127. case RecipeJobType.PostClean:
  128. {
  129. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  130. {
  131. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  132. {
  133. Status = ModuleStatus.StartPostJobClean;
  134. }
  135. else
  136. {
  137. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  138. TryDequeueRuningTask(Status);
  139. Status = ModuleStatus.Idle;
  140. }
  141. }
  142. }
  143. break;
  144. case RecipeJobType.WtwClean:
  145. {
  146. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  147. {
  148. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  149. {
  150. Status = ModuleStatus.StartWTWClean;
  151. }
  152. else
  153. {
  154. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  155. TryDequeueRuningTask(Status);
  156. Status = ModuleStatus.Idle;
  157. }
  158. }
  159. }
  160. break;
  161. }
  162. }
  163. }
  164. if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  165. {
  166. if (Scheduler.IsIdle)
  167. {
  168. switch (Status)
  169. {
  170. case ModuleStatus.Processing:
  171. {
  172. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  173. if (Scheduler.IsOnline)
  174. {
  175. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  176. {
  177. _wafer.Return();
  178. TryDequeueRuningTask(Status);
  179. Status = ModuleStatus.Idle;
  180. }
  181. }
  182. else // handle offline exception situation
  183. {
  184. TryDequeueRuningTask(Status);
  185. Status = ModuleStatus.Idle;
  186. }
  187. }
  188. break;
  189. case ModuleStatus.PreJobClean:
  190. case ModuleStatus.PostJobClean:
  191. case ModuleStatus.WTWClean:
  192. {
  193. TryDequeueRuningTask(Status);
  194. Status = ModuleStatus.Idle;
  195. }
  196. break;
  197. case ModuleStatus.IdleClean:
  198. {
  199. Status = ModuleStatus.Idle;
  200. }
  201. break;
  202. case ModuleStatus.StartProcess:
  203. {
  204. if (RouteManager.IsATMMode)
  205. {
  206. Status = ModuleStatus.Processing;
  207. }
  208. }
  209. break;
  210. }
  211. }
  212. else
  213. {
  214. switch (Status)
  215. {
  216. case ModuleStatus.StartProcess:
  217. Status = ModuleStatus.Processing;
  218. break;
  219. case ModuleStatus.StartIdleClean:
  220. Status = ModuleStatus.IdleClean;
  221. break;
  222. case ModuleStatus.StartPreJobClean:
  223. Status = ModuleStatus.PreJobClean;
  224. break;
  225. case ModuleStatus.StartPostJobClean:
  226. Status = ModuleStatus.PostJobClean;
  227. break;
  228. case ModuleStatus.StartWTWClean:
  229. Status = ModuleStatus.WTWClean;
  230. break;
  231. }
  232. }
  233. }
  234. return RState.Running;
  235. }
  236. void TryDequeueRuningTask( ModuleStatus status)
  237. {
  238. bool bMatch = false;
  239. if (_runingWaferTask.Value.Count > 0)
  240. {
  241. switch(status)
  242. {
  243. case ModuleStatus.PreJobClean:
  244. if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  245. {
  246. _runingWaferTask.Value.Dequeue();
  247. bMatch = true;
  248. }
  249. break;
  250. case ModuleStatus.Processing:
  251. if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  252. {
  253. _runingWaferTask.Value.Dequeue();
  254. bMatch = true;
  255. }
  256. break;
  257. case ModuleStatus.PostJobClean:
  258. if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  259. {
  260. _runingWaferTask.Value.Dequeue();
  261. bMatch = true;
  262. }
  263. break;
  264. case ModuleStatus.WTWClean:
  265. if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  266. {
  267. _runingWaferTask.Value.Dequeue();
  268. bMatch = true;
  269. }
  270. break;
  271. case ModuleStatus.WaitPreJobClean:
  272. case ModuleStatus.WaitProcess:
  273. case ModuleStatus.WaitPostJobClean:
  274. case ModuleStatus.WaitWTWClean:
  275. case ModuleStatus.Idle:
  276. _runingWaferTask.Value.Dequeue();
  277. break;
  278. }
  279. }
  280. if(!bMatch)
  281. {
  282. string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  283. LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  284. }
  285. if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  286. {
  287. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  288. }
  289. }
  290. public override void WaferArrived(WaferTask wafer, int slot)
  291. {
  292. _wafer = wafer;
  293. }
  294. public override void WaferLeaved(WaferTask wafer, int slot)
  295. {
  296. _wafer = null;
  297. }
  298. public void SubscribeWaferTask(WaferTask waferTask)
  299. {
  300. var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  301. if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  302. {
  303. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  304. }
  305. if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  306. {
  307. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  308. }
  309. if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  310. {
  311. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  312. }
  313. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  314. {
  315. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  316. }
  317. else
  318. {
  319. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  320. }
  321. }
  322. public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  323. {
  324. var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  325. if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  326. {
  327. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  328. }
  329. else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  330. {
  331. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  332. }
  333. else
  334. {
  335. return;
  336. }
  337. if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  338. {
  339. LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  340. }
  341. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  342. {
  343. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  344. }
  345. else
  346. {
  347. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  348. }
  349. }
  350. public bool ReadyMoveIn(WaferTask wafer)
  351. {
  352. return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  353. }
  354. public bool IsAllJobCompleted()
  355. {
  356. return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  357. }
  358. public override void ResetTask()
  359. {
  360. base.ResetTask();
  361. _wafer = null;
  362. _pendingWaferTasks.Clear();
  363. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  364. }
  365. }
  366. class PreAlignTask : ModuleTask
  367. {
  368. private WaferTask _wafer;
  369. public PreAlignTask(ModuleName aligner) : base(aligner)
  370. {
  371. }
  372. public override RState Run()
  373. {
  374. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  375. if (tmRobot == null || !tmRobot.IsAvailable)
  376. return RState.Running;
  377. switch (Status)
  378. {
  379. case ModuleStatus.WaitAlign:
  380. {
  381. tmRobot.Align(0);
  382. Status = ModuleStatus.Aligning;
  383. }
  384. break;
  385. case ModuleStatus.Aligning:
  386. {
  387. _wafer.IsAligned = true;
  388. Status = ModuleStatus.Idle;
  389. }
  390. break;
  391. }
  392. return RState.Running;
  393. }
  394. public override void WaferArrived(WaferTask wafer, int slot)
  395. {
  396. _wafer = wafer;
  397. Status = ModuleStatus.WaitAlign;
  398. }
  399. public override void WaferLeaved(WaferTask wafer, int slot)
  400. {
  401. _wafer = null;
  402. }
  403. }
  404. class VenusTMRobotTask : ModuleTask
  405. {
  406. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  407. public override RState Run()
  408. {
  409. return base.Run();
  410. }
  411. }
  412. class VenusDispatcher : ICycle
  413. {
  414. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  415. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  416. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  417. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  418. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  419. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  420. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  421. private List<MoveItem> _curTmAction = new List<MoveItem>();
  422. private bool _isCycleMode;
  423. private int _cycleSetPoint = 0;
  424. private int _cycledCount = 0;
  425. private int _cycledWafer = 0;
  426. private float _throughput = 0.0f;
  427. private int _tmRobotSingleArmOption = 0;
  428. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>();
  429. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>();
  430. private Stopwatch _cycleWatch = new Stopwatch();
  431. private SchedulerFACallback _faCallback;
  432. private SchedulerDBCallback _dbCallback;
  433. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  434. public bool HasJobRunning => _lstControlJobs.Count > 0;
  435. private RState _cycleState = RState.Init;
  436. public RState CycleState => _cycleState;
  437. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  438. public List<string> InUseRecipes = new List<string>();
  439. public VenusDispatcher()
  440. {
  441. _faCallback = new SchedulerFACallback();
  442. _dbCallback = new SchedulerDBCallback();
  443. InitModules();
  444. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  445. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  446. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  447. DATA.Subscribe("Scheduler.Throughput", () => _throughput, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  448. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  449. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  450. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  451. for (int i = 1; i <= 3; i++)
  452. {
  453. _loadportControlJobDic[$"LP{i}"] = null;
  454. string lp = $"LP{i}";
  455. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  456. }
  457. }
  458. #region public interface
  459. /// <summary>
  460. /// 获取lp当前的ControlJob
  461. /// </summary>
  462. /// <param name="lp"></param>
  463. /// <returns></returns>
  464. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  465. {
  466. if (ModuleHelper.IsLoadPort(lp))
  467. {
  468. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  469. }
  470. else
  471. {
  472. return null;
  473. }
  474. }
  475. public RState Start(params object[] objs)
  476. {
  477. if (WaferManager.Instance.HasDuplicatedWafer)
  478. {
  479. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  480. return RState.Failed;
  481. }
  482. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  483. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  484. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  485. _cycledWafer = 0;
  486. _cycledCount = 0;
  487. _throughput = 0;
  488. Clear();
  489. _cycleWatch.Stop();
  490. _lpCycleWafer.Clear();
  491. _lpCycleCount.Clear();
  492. return RState.Running;
  493. }
  494. public bool CreateJob(Dictionary<string, object> param, out string reason)
  495. {
  496. reason = "";
  497. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  498. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  499. string[] slotSequence = (string[])param["SlotSequence"];
  500. string jobId = (string)param["JobId"];
  501. string module = (string)param["Module"];
  502. if (string.IsNullOrEmpty(jobId))
  503. {
  504. jobId = "CJ_Local_" + module;
  505. }
  506. //bool autoStart = (bool)param["AutoStart"];
  507. string lotId = jobId;
  508. if (param.ContainsKey("LotId"))
  509. lotId = (string)param["LotId"];
  510. string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
  511. string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;
  512. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  513. {
  514. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  515. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  516. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  517. return false;
  518. }
  519. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  520. {
  521. reason = $"{module} should be LoadPort";
  522. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  523. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  524. return false;
  525. }
  526. if (_lstControlJobs.Exists(x => x.Name == jobId))
  527. {
  528. reason = $"{jobId} already created";
  529. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  530. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  531. return false;
  532. }
  533. ControlJobInfo cj = new ControlJobInfo();
  534. cj.Name = jobId;
  535. cj.Module = module;
  536. cj.LotName = lotId;
  537. cj.LotInnerId = Guid.NewGuid();
  538. cj.LotWafers = new List<WaferInfo>();
  539. cj.SetState(EnumControlJobState.WaitingForStart);
  540. cj.JetState = EnumJetCtrlJobState.Created;
  541. cj.PreJobClean = preCleanRecipe;
  542. cj.PostJobClean = postCleanRecipe;
  543. cj.SequenceNameList = slotSequence;
  544. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  545. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  546. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  547. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  548. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  549. {
  550. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  551. continue;
  552. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  553. indexSequence[groupName] = slotSequence[i];
  554. if (!seqSlot.ContainsKey(groupName))
  555. {
  556. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  557. }
  558. if (!seqSlotWafers.ContainsKey(groupName))
  559. {
  560. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  561. }
  562. seqSlot[groupName][i] = true;
  563. if (!WaferManager.Instance.CheckHasWafer(module, i))
  564. {
  565. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  566. return false;
  567. }
  568. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  569. {
  570. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  571. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  572. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  573. return false;
  574. }
  575. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  576. {
  577. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  578. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  579. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  580. return false;
  581. }
  582. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  583. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  584. cj.LotWafers.Add(waferInfo);
  585. waferInfo.SequenceName = slotSequence[i];
  586. waferInfo.LotId = lotId;
  587. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  588. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  589. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  590. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  591. }
  592. if (seqSlotWafers.Count == 0)
  593. {
  594. reason = $"job has not assign wafer";
  595. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  596. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  597. return false;
  598. }
  599. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  600. string[] seqs = seqSlot.Keys.ToArray();
  601. for (int i = 0; i < seqs.Length; i++)
  602. {
  603. ProcessJobInfo pj = new ProcessJobInfo();
  604. pj.Name = jobId + "_" + (i + 1);
  605. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  606. if (pj.Sequence == null)
  607. {
  608. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  609. return false;
  610. }
  611. pj.ControlJobName = cj.Name;
  612. pj.LotName = lotId;
  613. pj.SlotWafers = seqSlotWafers[seqs[i]];
  614. pj.SetState(EnumProcessJobState.Queued);
  615. if (!CheckSequencePmReady(pj.Sequence, out reason))
  616. {
  617. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  618. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  619. return false;
  620. }
  621. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  622. {
  623. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  624. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  625. return false;
  626. }
  627. pjs.Add(pj);
  628. }
  629. _dbCallback.LotUpdate(cj);
  630. foreach (var pj in pjs)
  631. {
  632. cj.ProcessJobNameList.Add(pj.Name);
  633. _lstProcessJobs.Add(pj);
  634. }
  635. _lstControlJobs.Add(cj);
  636. //AssociatedPMWithLP(cj);
  637. _loadportControlJobDic[cj.Module] = cj;
  638. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  639. return true;
  640. }
  641. public bool CheckAllJobDone()
  642. {
  643. foreach (var cj in _lstControlJobs)
  644. {
  645. if (cj.State != EnumControlJobState.Completed)
  646. return false;
  647. }
  648. InUseRecipes.Clear();
  649. return true;
  650. }
  651. public bool CheckJobJustDone(out string sJobName)
  652. {
  653. foreach (var cj in _lstControlJobs)
  654. {
  655. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  656. {
  657. //LP;WaferSize;Lot;Number;Start;End;
  658. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  659. cj.BeenPosted = true;
  660. return true;
  661. }
  662. }
  663. sJobName = "NULL";
  664. return false;
  665. }
  666. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  667. {
  668. foreach (var pj in _lstProcessJobs)
  669. {
  670. if (pj.ControlJobName == cj.Name)
  671. return pj;
  672. }
  673. return null;
  674. }
  675. public bool AbortJob(string jobName, out string reason)
  676. {
  677. reason = "";
  678. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  679. if (cj == null)
  680. {
  681. reason = $"abort job rejected, not found job with id {jobName}";
  682. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  683. return false;
  684. }
  685. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  686. foreach (var pj in _lstProcessJobs)
  687. {
  688. if (pj.ControlJobName == cj.Name)
  689. {
  690. pj.SetState(EnumProcessJobState.Aborting);
  691. pjAbortList.Add(pj);
  692. int unprocessed = 0;
  693. int aborted = 0;
  694. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  695. foreach (var waferInfo in wafers)
  696. {
  697. waferInfo.ProcessJob = null;
  698. waferInfo.NextSequenceStep = 0;
  699. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  700. unprocessed++;
  701. }
  702. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  703. }
  704. }
  705. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  706. _dbCallback.LotFinished(cj);
  707. foreach (var pj in pjAbortList)
  708. {
  709. _lstProcessJobs.Remove(pj);
  710. }
  711. _lstControlJobs.Remove(cj);
  712. if (_loadportControlJobDic.ContainsKey(cj.Module))
  713. {
  714. _loadportControlJobDic[cj.Module] = null;
  715. }
  716. return true;
  717. }
  718. public bool StopJob(string jobName, out string reason)
  719. {
  720. reason = "";
  721. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  722. if (cj == null)
  723. {
  724. reason = $"stop job rejected, not found job with id {jobName}";
  725. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  726. return false;
  727. }
  728. foreach (var pj in _lstProcessJobs)
  729. {
  730. if (pj.ControlJobName == cj.Name)
  731. {
  732. pj.SetState(EnumProcessJobState.Stopping);
  733. }
  734. }
  735. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  736. _dbCallback.LotFinished(cj);
  737. if (_loadportControlJobDic.ContainsKey(cj.Module))
  738. {
  739. _loadportControlJobDic[cj.Module] = null;
  740. }
  741. return true;
  742. }
  743. public bool ResumeJob(string jobName, out string reason)
  744. {
  745. reason = "";
  746. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  747. if (cj == null)
  748. {
  749. reason = $"resume job rejected, not found job with id {jobName}";
  750. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  751. return false;
  752. }
  753. if (cj.State == EnumControlJobState.Paused)
  754. {
  755. cj.SetState(EnumControlJobState.Executing);
  756. }
  757. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  758. _cycleState = RState.Running;
  759. return true;
  760. }
  761. public bool PauseJob(string jobName, out string reason)
  762. {
  763. reason = "";
  764. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  765. if (cj == null)
  766. {
  767. reason = $"pause job rejected, not found job with id {jobName}";
  768. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  769. return false;
  770. }
  771. if (cj.State == EnumControlJobState.Executing)
  772. {
  773. cj.SetState(EnumControlJobState.Paused);
  774. }
  775. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  776. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  777. _cycleState = RState.Paused;
  778. return true;
  779. }
  780. public bool StartJob(string jobName, out string reason)
  781. {
  782. reason = "";
  783. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  784. if (cj == null)
  785. {
  786. reason = $"start job rejected, not found job with id {jobName}";
  787. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  788. return false;
  789. }
  790. if (cj.State == EnumControlJobState.WaitingForStart)
  791. {
  792. cj.SetState(EnumControlJobState.Queued);
  793. //PreJobClean(cj);
  794. cj.StartTime = DateTime.Now;
  795. _dbCallback.LotCreated(cj);
  796. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  797. //if (!_blockingWatcher.IsRunning)
  798. // _blockingWatcher.Restart();
  799. //ResetTraceFlag();
  800. }
  801. if (!_cycleWatch.IsRunning)
  802. {
  803. _cycleWatch.Restart();
  804. }
  805. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  806. {
  807. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  808. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  809. }
  810. _cycleState = RState.Running;
  811. return true;
  812. }
  813. public RState Monitor()
  814. {
  815. prelude();
  816. RunWaferTask();
  817. RunModuleTasks();
  818. RoutingWafers();
  819. epilogue();
  820. return _cycleState;
  821. }
  822. public void Abort()
  823. {
  824. }
  825. public void Clear()
  826. {
  827. foreach (var module in _dictModuleTask)
  828. {
  829. module.Value.Status = ModuleStatus.Idle;
  830. module.Value.Scheduler.ResetTask();
  831. module.Value.ResetTask();
  832. }
  833. List<string> keys = _loadportControlJobDic.Keys.ToList();
  834. foreach (var key in keys)
  835. {
  836. _loadportControlJobDic[key] = null;
  837. }
  838. _lstWaferTasks.Clear();
  839. _tmSchdActions.Clear();
  840. _curTmAction.Clear();
  841. _lstControlJobs.Clear();
  842. _lstProcessJobs.Clear();
  843. InUseRecipes.Clear();
  844. _cycleState = RState.End;
  845. }
  846. #endregion
  847. #region manual return wafer
  848. // manual return one wafer while system is auto running
  849. public bool ManualReturnWafer(object[] objs)
  850. {
  851. ModuleName SourceModule = (ModuleName)objs[0];
  852. int SourceSlot = (int)objs[1];
  853. if (!_dictModuleTask.Keys.Contains(SourceModule))
  854. {
  855. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  856. return false;
  857. }
  858. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  859. {
  860. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  861. return false;
  862. }
  863. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  864. {
  865. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  866. return false;
  867. }
  868. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  869. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  870. _qeReturnWafers.Enqueue(wafer);
  871. return true;
  872. }
  873. public RState CheckManualReturnWafer()
  874. {
  875. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  876. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  877. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  878. {
  879. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  880. return RState.Failed;
  881. }
  882. foreach (var mod in _dictModuleTask)
  883. {
  884. if (ModuleHelper.IsLoadPort(mod.Key))
  885. continue;
  886. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  887. {
  888. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  889. return RState.Failed;
  890. }
  891. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  892. for (int slot = 0; slot < nSlotNumber; slot++)
  893. {
  894. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  895. if (wafer.IsEmpty)
  896. continue;
  897. var destLP = (ModuleName)wafer.OriginStation;
  898. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  899. {
  900. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  901. return RState.Failed;
  902. }
  903. if (!ModuleHelper.IsLoadPort(destLP))
  904. {
  905. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  906. return RState.Failed;
  907. }
  908. }
  909. }
  910. Clear();
  911. return RState.Running;
  912. }
  913. public RState ReturnAllWafers()
  914. {
  915. int systemWaferCount = 0;
  916. foreach (var mod in _dictModuleTask)
  917. {
  918. if (ModuleHelper.IsLoadPort(mod.Key))
  919. continue;
  920. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  921. for (int slot = 0; slot < nSlotNumber; slot++)
  922. {
  923. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  924. if (!wafer.IsEmpty)
  925. systemWaferCount++;
  926. }
  927. }
  928. if (systemWaferCount == 0)
  929. return RState.End;
  930. ReturnInternalWafers();
  931. return RState.Running;
  932. }
  933. #endregion
  934. #region internal implementation
  935. private void InitModules()
  936. {
  937. foreach (var module in ModuleHelper.InstalledModules)
  938. {
  939. if (ModuleHelper.IsInstalled(module))
  940. {
  941. if (ModuleHelper.IsPm(module))
  942. {
  943. _dictModuleTask[module] = new VenusPMTask(module);
  944. }
  945. else if (ModuleHelper.IsTMRobot(module))
  946. {
  947. _dictModuleTask[module] = new VenusTMRobotTask(module);
  948. }
  949. else if (ModuleHelper.IsAligner(module))
  950. {
  951. _dictModuleTask[module] = new PreAlignTask(module);
  952. }
  953. else if (ModuleHelper.IsLoadPort(module))
  954. {
  955. _dictModuleTask[module] = new LoadPortTask(module);
  956. }
  957. }
  958. }
  959. }
  960. private void prelude()
  961. {
  962. bool available = true;
  963. foreach (var mod in _dictModuleTask)
  964. {
  965. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  966. }
  967. }
  968. private void epilogue()
  969. {
  970. UpdateProcessJobStatus();
  971. UpdateControlJobStatus();
  972. CreateNewWaferTask();
  973. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  974. }
  975. private void RunWaferTask()
  976. {
  977. foreach (var task in _lstWaferTasks)
  978. {
  979. task.Run();
  980. }
  981. }
  982. private void RunModuleTasks()
  983. {
  984. foreach (var task in _dictModuleTask)
  985. {
  986. task.Value.Run();
  987. }
  988. }
  989. private void RoutingWafers()
  990. {
  991. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  992. {
  993. RunSchdTMActions();
  994. return;
  995. }
  996. if (_tmRobotStatus != RState.End)
  997. return;
  998. if (_tmRobotSingleArmOption != 0)
  999. {
  1000. RoutingWaferWithSingleArm();
  1001. return;
  1002. }
  1003. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1004. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1005. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1006. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1007. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1008. if(robotWafers.Count == 0)
  1009. {
  1010. if(readyReturnWafers.Count > 0)
  1011. {
  1012. if(readyReturnWafers.Count == 1)
  1013. {
  1014. // return one wafer
  1015. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1016. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1017. }
  1018. else
  1019. {
  1020. // return two wafer
  1021. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1022. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1023. var doublePlaceActions = new List<MoveItem>
  1024. {
  1025. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1026. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1027. };
  1028. _tmSchdActions.Enqueue(doublePlaceActions);
  1029. }
  1030. }
  1031. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1032. {
  1033. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1034. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1035. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1036. {
  1037. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1038. if(pmTask.ReadyMoveIn(alignerWafer))
  1039. {
  1040. // move aligner wafer to PM
  1041. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1042. }
  1043. }
  1044. }
  1045. else
  1046. {
  1047. if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2)
  1048. {
  1049. var doublePickActions = new List<MoveItem>()
  1050. {
  1051. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1052. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1053. };
  1054. _tmSchdActions.Enqueue(doublePickActions);
  1055. if(aligner.Count > 0)
  1056. {
  1057. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1058. }
  1059. }
  1060. else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1061. {
  1062. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1063. if (aligner.Count > 0)
  1064. {
  1065. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1066. }
  1067. }
  1068. }
  1069. }
  1070. else if(robotWafers.Count == 1)
  1071. {
  1072. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1073. if (readyReturnWafers.Count >= 1)
  1074. {
  1075. // return one wafer
  1076. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1077. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1078. }
  1079. else
  1080. {
  1081. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1082. {
  1083. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1084. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1085. if(!robotWafers.First().IsAligned)
  1086. {
  1087. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1088. }
  1089. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1090. {
  1091. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1092. if (pmTask.ReadyMoveIn(alignerWafer))
  1093. {
  1094. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1095. }
  1096. }
  1097. }
  1098. else
  1099. {
  1100. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1101. {
  1102. if (!robotWafers.First().IsAligned)
  1103. {
  1104. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1105. }
  1106. else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
  1107. {
  1108. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1109. if (pmTask.ReadyMoveIn(robotWafers.First()))
  1110. {
  1111. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1112. }
  1113. }
  1114. }
  1115. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1116. {
  1117. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1118. }
  1119. }
  1120. }
  1121. }
  1122. else // had better not go here
  1123. {
  1124. foreach(var wafer in robotWafers)
  1125. {
  1126. if (ModuleHelper.IsPm(wafer.destMod))
  1127. {
  1128. if (!wafer.IsAligned)
  1129. {
  1130. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1131. {
  1132. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1133. }
  1134. }
  1135. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1136. {
  1137. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1138. if (pmTask.ReadyMoveIn(wafer))
  1139. {
  1140. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1141. }
  1142. }
  1143. }
  1144. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1145. {
  1146. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1147. }
  1148. }
  1149. }
  1150. }
  1151. private void RoutingWaferWithSingleArm()
  1152. {
  1153. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1154. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1155. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1156. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1157. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1158. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1159. if (robotWafers.Count == 0)
  1160. {
  1161. if (readyReturnWafers.Count > 0)
  1162. {
  1163. // return one wafer
  1164. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1165. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1166. }
  1167. else
  1168. {
  1169. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1170. {
  1171. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1172. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1173. {
  1174. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1175. // move aligner wafer to PM
  1176. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1177. if (pmTask.ReadyMoveIn(alignerWafer))
  1178. {
  1179. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1180. }
  1181. }
  1182. }
  1183. else
  1184. {
  1185. foreach(var wafer in waitInWafers)
  1186. {
  1187. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1188. {
  1189. // move one wafer from LP to aligner
  1190. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1191. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1192. }
  1193. }
  1194. }
  1195. }
  1196. }
  1197. else
  1198. {
  1199. var wafer = robotWafers[0];
  1200. if (ModuleHelper.IsPm(wafer.destMod))
  1201. {
  1202. if (!wafer.IsAligned)
  1203. {
  1204. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1205. {
  1206. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1207. }
  1208. }
  1209. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1210. {
  1211. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1212. if (pmTask.ReadyMoveIn(wafer))
  1213. {
  1214. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1215. }
  1216. }
  1217. }
  1218. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1219. {
  1220. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1221. }
  1222. }
  1223. }
  1224. private void RunSchdTMActions()
  1225. {
  1226. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1227. {
  1228. if (_tmSchdActions.Count > 0)
  1229. {
  1230. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1231. {
  1232. var nextActions = _tmSchdActions.First();
  1233. if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1234. return;
  1235. if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1236. return;
  1237. _curTmAction = _tmSchdActions.Dequeue();
  1238. foreach (var action in _curTmAction)
  1239. {
  1240. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1241. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1242. }
  1243. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1244. }
  1245. }
  1246. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1247. {
  1248. _curTmAction.Clear();
  1249. }
  1250. }
  1251. }
  1252. private bool isReturnActionsDone(List<MoveItem> items)
  1253. {
  1254. foreach (var item in items)
  1255. {
  1256. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1257. return false;
  1258. }
  1259. return true;
  1260. }
  1261. private bool IsMovingActionsDone(List<MoveItem> actions)
  1262. {
  1263. bool CheckWaferExistence(ModuleName mod, int slot)
  1264. {
  1265. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1266. }
  1267. if (actions.Count == 1)
  1268. {
  1269. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1270. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1271. return false;
  1272. }
  1273. else
  1274. {
  1275. // initialize all the wafer existance before move
  1276. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1277. foreach (var ac in actions)
  1278. {
  1279. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1280. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1281. if (!slotWafers.ContainsKey(scrSlot))
  1282. {
  1283. slotWafers[scrSlot] = true;
  1284. }
  1285. if (!slotWafers.ContainsKey(destSlot))
  1286. {
  1287. slotWafers[destSlot] = false;
  1288. }
  1289. }
  1290. // simulate moved result
  1291. foreach (var ac in actions)
  1292. {
  1293. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1294. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1295. if (!slotWafers[scrSlot])
  1296. {
  1297. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1298. }
  1299. else
  1300. {
  1301. slotWafers[scrSlot] = false;
  1302. }
  1303. if (slotWafers[destSlot])
  1304. {
  1305. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1306. }
  1307. else
  1308. {
  1309. slotWafers[destSlot] = true;
  1310. }
  1311. }
  1312. foreach (var slot in slotWafers)
  1313. {
  1314. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1315. return false;
  1316. }
  1317. }
  1318. return true;
  1319. }
  1320. private void WaferArrived(WaferTask wafer, MoveItem item)
  1321. {
  1322. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1323. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1324. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1325. {
  1326. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1327. if (currentControlJob != null)
  1328. {
  1329. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1330. }
  1331. }
  1332. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1333. }
  1334. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1335. {
  1336. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1337. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1338. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1339. {
  1340. (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1341. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1342. if (currentControlJob != null)
  1343. {
  1344. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1345. }
  1346. }
  1347. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1348. }
  1349. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1350. {
  1351. bool allWaferReturn = true;
  1352. foreach (var slot in pj.SlotWafers)
  1353. {
  1354. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1355. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1356. {
  1357. allWaferReturn = false;
  1358. break;
  1359. }
  1360. }
  1361. return allWaferReturn;
  1362. }
  1363. private void ReturnInternalWafers()
  1364. {
  1365. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1366. {
  1367. RunSchdTMReturnActions();
  1368. return;
  1369. }
  1370. if (_tmRobotStatus != RState.End)
  1371. return;
  1372. for (int i = 0; i < 2; i++)
  1373. {
  1374. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1375. {
  1376. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1377. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1378. return;
  1379. }
  1380. }
  1381. foreach(var mod in _dictModuleTask)
  1382. {
  1383. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1384. continue;
  1385. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1386. {
  1387. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1388. var freeHands = GetTMFreeHand();
  1389. if(freeHands.Count > 0)
  1390. {
  1391. var hand = freeHands[0];
  1392. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1393. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1394. return;
  1395. }
  1396. }
  1397. }
  1398. }
  1399. private List<Hand> GetTMFreeHand()
  1400. {
  1401. var lstHands = new List<Hand>();
  1402. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1403. lstHands.Add(Hand.Blade1);
  1404. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1405. lstHands.Add(Hand.Blade2);
  1406. return lstHands;
  1407. }
  1408. private void UpdateProcessJobStatus()
  1409. {
  1410. if (_tmRobotStatus == RState.Running)
  1411. return;
  1412. foreach (var pj in _lstProcessJobs)
  1413. {
  1414. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1415. {
  1416. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1417. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1418. }
  1419. }
  1420. }
  1421. private void UpdateControlJobStatus()
  1422. {
  1423. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1424. return;
  1425. bool allControlJobComplete = true;
  1426. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1427. var runingJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1428. foreach(var runingjob in runingJobs)
  1429. {
  1430. int countProcessed = 0;
  1431. foreach (var pjName in runingjob.ProcessJobNameList)
  1432. {
  1433. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1434. if (pj == null)
  1435. {
  1436. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {runingjob.Name}");
  1437. continue;
  1438. }
  1439. // caculate process wafer by process
  1440. if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
  1441. {
  1442. foreach (var pjSlotWafer in pj.SlotWafers)
  1443. {
  1444. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1445. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  1446. countProcessed++;
  1447. }
  1448. }
  1449. }
  1450. int lpCycleWafer = _lpCycleCount[ModuleHelper.Converter(runingjob.Module)] * runingjob.LotWafers.Count + (runingjob.State == EnumControlJobState.Completed&& runingjob.LotWafers.Count == countProcessed ? 0 : countProcessed);
  1451. if (_lpCycleCount[ModuleHelper.Converter(runingjob.Module)] != _cycledCount || lpCycleWafer != _lpCycleWafer[ModuleHelper.Converter(runingjob.Module)])
  1452. {
  1453. _lpCycleWafer[ModuleHelper.Converter(runingjob.Module)] = lpCycleWafer;
  1454. }
  1455. if (IsAllProcessJobComplete(runingjob))
  1456. {
  1457. var PMs = GetWaitPreCleanPMsByCtrlJob(runingjob);
  1458. if (runingjob.JetState == EnumJetCtrlJobState.Processing)
  1459. {
  1460. // subscribe clean task
  1461. foreach (var pm in PMs)
  1462. {
  1463. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1464. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1465. {
  1466. pmTask.SubscribeLotCleanTask(runingjob, VenusPMTask.RecipeJobType.PostClean);
  1467. }
  1468. }
  1469. runingjob.JetState = EnumJetCtrlJobState.PostJobClean;
  1470. }
  1471. else if (runingjob.JetState == EnumJetCtrlJobState.PostJobClean)
  1472. {
  1473. foreach (var pm in PMs)
  1474. {
  1475. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1476. if (pmTask != null && pmTask.Scheduler.IsOnline && !pmTask.IsAllJobCompleted())
  1477. return;
  1478. }
  1479. runingjob.JetState = EnumJetCtrlJobState.Completed;
  1480. runingjob.SetState(EnumControlJobState.Completed);
  1481. runingjob.EndTime = DateTime.Now;
  1482. _faCallback.JobFinished(runingjob, GetFirstProcessJob(runingjob));
  1483. _dbCallback.LotFinished(runingjob);
  1484. if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
  1485. (Singleton<TransferModule>.Instance.GetScheduler(ModuleHelper.Converter(runingjob.Module)) as SchedulerLoadPort).NoteJobComplete();
  1486. _lpCycleCount[ModuleHelper.Converter(runingjob.Module)]++;
  1487. }
  1488. }
  1489. }
  1490. var pendingJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1491. if(pendingJobs.Count() > 0)
  1492. {
  1493. if (runingJobs.Count == 0)
  1494. {
  1495. pendingJobs.First().JetState = EnumJetCtrlJobState.Processing;
  1496. ActiveControlJob(pendingJobs.First());
  1497. // subscribe clean task
  1498. var PMs = GetWaitPreCleanPMsByCtrlJob(pendingJobs.First());
  1499. foreach (var pm in PMs)
  1500. {
  1501. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1502. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1503. {
  1504. pmTask.SubscribeLotCleanTask(pendingJobs.First(), VenusPMTask.RecipeJobType.PreClean);
  1505. }
  1506. }
  1507. }
  1508. }
  1509. foreach(var cj in _lstControlJobs)
  1510. {
  1511. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1512. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1513. {
  1514. cjRemoveList.Add(cj);
  1515. }
  1516. allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
  1517. }
  1518. if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
  1519. {
  1520. int totolCycleWafer = _lpCycleWafer.Sum(item => item.Value);
  1521. if (totolCycleWafer != _cycledWafer || _lpCycleCount.Sum(item => item.Value) > 0 && _throughput < 0.01) // refresh _throughput in time
  1522. {
  1523. _cycledWafer = totolCycleWafer;
  1524. if (_cycledCount > 0 || allControlJobComplete)
  1525. {
  1526. _throughput = (float)(_cycledWafer / _cycleWatch.Elapsed.TotalHours);
  1527. }
  1528. else
  1529. {
  1530. _throughput = 0;
  1531. }
  1532. }
  1533. if (allControlJobComplete)
  1534. {
  1535. _cycledCount++;
  1536. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Cycle Count: {_cycledCount}, Total Processed Wafer: {_cycledWafer}, Throughput: {_throughput}");
  1537. if (_cycledCount < _cycleSetPoint)
  1538. {
  1539. foreach (var cj in _lstControlJobs)
  1540. {
  1541. cj.SetState(EnumControlJobState.Queued);
  1542. cj.LotInnerId = Guid.NewGuid();
  1543. _dbCallback.LotCreated(cj);
  1544. }
  1545. foreach (var pj in _lstProcessJobs)
  1546. {
  1547. pj.SetState(EnumProcessJobState.Queued);
  1548. pj.InnerId = Guid.NewGuid();
  1549. foreach (var pjSlotWafer in pj.SlotWafers)
  1550. {
  1551. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1552. wafer.ProcessJob = null;
  1553. wafer.NextSequenceStep = 0;
  1554. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1555. }
  1556. }
  1557. _lstWaferTasks.Clear();
  1558. }
  1559. else
  1560. {
  1561. _cycleState = RState.End;
  1562. }
  1563. }
  1564. }
  1565. foreach (var cj in cjRemoveList)
  1566. {
  1567. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1568. foreach (var pj in _lstProcessJobs)
  1569. {
  1570. if (pj.ControlJobName == cj.Name)
  1571. pjRemoveList.Add(pj);
  1572. }
  1573. foreach (var pj in pjRemoveList)
  1574. {
  1575. _lstProcessJobs.Remove(pj);
  1576. }
  1577. _lstControlJobs.Remove(cj);
  1578. }
  1579. }
  1580. private bool ActiveProcessJob(ProcessJobInfo pj)
  1581. {
  1582. foreach (var pjSlotWafer in pj.SlotWafers)
  1583. {
  1584. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1585. wafer.ProcessJob = pj;
  1586. wafer.NextSequenceStep = 0;
  1587. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1588. }
  1589. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1590. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1591. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1592. pj.SetState(EnumProcessJobState.Processing);
  1593. return true;
  1594. }
  1595. private bool ActiveControlJob(ControlJobInfo cj)
  1596. {
  1597. cj.SetState(EnumControlJobState.Executing);
  1598. foreach (var pjName in cj.ProcessJobNameList)
  1599. {
  1600. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1601. if (pj == null)
  1602. {
  1603. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1604. continue;
  1605. }
  1606. if (pj.State == EnumProcessJobState.Queued)
  1607. {
  1608. ActiveProcessJob(pj);
  1609. }
  1610. }
  1611. return true;
  1612. }
  1613. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  1614. {
  1615. foreach (var pj in _lstProcessJobs)
  1616. {
  1617. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  1618. {
  1619. return false;
  1620. }
  1621. }
  1622. return true;
  1623. }
  1624. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  1625. {
  1626. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  1627. int original = (int)ModuleHelper.Converter(cj.Module);
  1628. foreach (var mod in allModules)
  1629. {
  1630. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  1631. continue;
  1632. var wafers = WaferManager.Instance.GetWafers(mod);
  1633. foreach (var wafer in wafers)
  1634. {
  1635. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  1636. continue;
  1637. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  1638. return false; ;
  1639. }
  1640. }
  1641. return true;
  1642. }
  1643. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  1644. {
  1645. var lstInProcessPMs = new List<ModuleName>();
  1646. foreach (var wafer in cj.LotWafers)
  1647. {
  1648. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  1649. {
  1650. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  1651. {
  1652. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  1653. lstInProcessPMs.Add(pm);
  1654. }
  1655. }
  1656. }
  1657. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  1658. foreach (var mod in _dictModuleTask)
  1659. {
  1660. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  1661. {
  1662. pmAssociatedWaferCount[mod.Key] = 0;
  1663. }
  1664. }
  1665. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  1666. foreach (var wafer in unprocessedWafer)
  1667. {
  1668. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  1669. {
  1670. pmAssociatedWaferCount[wafer.destMod]++;
  1671. }
  1672. }
  1673. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  1674. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  1675. return oderedPMCount.First().Key;
  1676. return ModuleName.System;
  1677. }
  1678. private void CreateNewWaferTask()
  1679. {
  1680. var cj = _lstControlJobs.Find(job => job.State == EnumControlJobState.Executing);
  1681. if (cj != null)
  1682. {
  1683. var pm = GetComingAvailablePM(cj);
  1684. if (pm != ModuleName.System)
  1685. {
  1686. foreach (var wafer in cj.LotWafers)
  1687. {
  1688. if (wafer.IsEmpty || wafer.ProcessJob == null)
  1689. continue;
  1690. if (wafer.ProcessJob.Sequence.PMs.Contains(pm) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  1691. {
  1692. CreateWaferTasks(wafer, pm);
  1693. return;
  1694. }
  1695. }
  1696. }
  1697. }
  1698. }
  1699. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  1700. {
  1701. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  1702. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  1703. Recipe recipe = Recipe.Load(recipeContent);
  1704. int temperature = 0;
  1705. if (int.TryParse(recipe.Header.Temperature, out int temp))
  1706. {
  1707. temperature = temp;
  1708. }
  1709. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  1710. wafer.OriginSlot,
  1711. pm,
  1712. 0,
  1713. temperature,
  1714. wafer.InnerId,
  1715. recipeName,
  1716. wafer.ProcessJob.Sequence.WTWCleanRecipe,
  1717. wafer.ProcessJob.Sequence.LLInOutPath,
  1718. wafer.ProcessJob.Sequence.LLDelayTime,
  1719. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  1720. waferTask.OnWaferArrived += WaferArrived;
  1721. waferTask.OnWaferLeaved += WaferLeaved;
  1722. _lstWaferTasks.Add(waferTask);
  1723. }
  1724. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  1725. {
  1726. // check wether need align
  1727. foreach (var step in sequence.Steps)
  1728. {
  1729. foreach (var mod in step.StepModules)
  1730. {
  1731. if (ModuleHelper.IsAligner(mod))
  1732. return true;
  1733. }
  1734. }
  1735. return false;
  1736. }
  1737. private void RunSchdTMReturnActions()
  1738. {
  1739. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  1740. if (tmRobot == null || !tmRobot.IsAvailable)
  1741. return;
  1742. if (_tmSchdActions.Count > 0)
  1743. {
  1744. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  1745. {
  1746. var nextActions = _tmSchdActions.First();
  1747. var nextModule = nextActions.First().Module;
  1748. if (!_dictModuleTask[nextModule].IsIdle)
  1749. return;
  1750. _curTmAction = _tmSchdActions.Dequeue();
  1751. tmRobot.SendMoveItems(_curTmAction.ToArray());
  1752. }
  1753. }
  1754. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  1755. {
  1756. _curTmAction.Clear();
  1757. }
  1758. }
  1759. #endregion internal implementation
  1760. #region sequence/recipe validation
  1761. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  1762. {
  1763. reason = "";
  1764. foreach (var pm in seq.PMs)
  1765. {
  1766. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  1767. return true;
  1768. }
  1769. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  1770. return false;
  1771. }
  1772. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1773. {
  1774. for (int i = 0; i < seq.Steps.Count; i++)
  1775. {
  1776. SequenceStepInfo stepInfo = seq.Steps[i];
  1777. foreach (var module in stepInfo.StepModules)
  1778. {
  1779. if (ModuleHelper.IsPm(module))
  1780. {
  1781. string attr = $"{module}Recipe";
  1782. if (stepInfo.StepParameter.ContainsKey(attr)
  1783. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  1784. {
  1785. var recipeName = (string)stepInfo.StepParameter[attr];
  1786. if (!string.IsNullOrWhiteSpace(recipeName))
  1787. {
  1788. var recipeContent =
  1789. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  1790. if (string.IsNullOrWhiteSpace(recipeContent))
  1791. {
  1792. reason = $"Can not find recipe file{recipeName}";
  1793. return false;
  1794. }
  1795. }
  1796. }
  1797. }
  1798. }
  1799. }
  1800. reason = "";
  1801. return true;
  1802. }
  1803. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  1804. {
  1805. var pmlist = new List<ModuleName>();
  1806. foreach (var pj in _lstProcessJobs)
  1807. {
  1808. if (pj.ControlJobName == cj.Name)
  1809. {
  1810. foreach (var pm in pj.Sequence.PMs)
  1811. {
  1812. if (!pmlist.Contains(pm))
  1813. pmlist.Add(pm);
  1814. }
  1815. }
  1816. }
  1817. return pmlist;
  1818. }
  1819. #endregion
  1820. }
  1821. }