OverKepler2300ViewModel.cs 67 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. namespace Venus_MainPages.ViewModels
  24. {
  25. internal class OverKepler2300ViewModel : BindableBase
  26. {
  27. #region 私有字段
  28. private List<string> m_CurrentModuleRecipes = new List<string>();
  29. private bool m_PVN21ValveIsOpen;
  30. private bool m_PVN22ValveIsOpen;
  31. private bool m_N2ValveIsOpen;
  32. private bool m_PV11ValveIsOpen;
  33. private bool m_PV12ValveIsOpen;
  34. private bool m_PV21ValveIsOpen;
  35. private bool m_PV22ValveIsOpen;
  36. private bool m_PV31ValveIsOpen;
  37. private bool m_PV32ValveIsOpen;
  38. private bool m_PV41ValveIsOpen;
  39. private bool m_PV42ValveIsOpen;
  40. private bool m_MFC1ValveIsOpen;
  41. private bool m_MFC2ValveIsOpen;
  42. private bool m_MFC3ValveIsOpen;
  43. private bool m_MFC4ValveIsOpen;
  44. private bool m_MFC5ValveIsOpen;
  45. private bool m_MFC6ValveIsOpen;
  46. private bool m_MFC7ValveIsOpen;
  47. private bool m_MFC8ValveIsOpen;
  48. private bool m_GasFinalValveIsOpen;
  49. private bool m_SoftPumpValveIsOpen;
  50. private bool m_FastPumpValveIsOpen;
  51. private bool m_PVHe1ValveIsOpen;
  52. private bool m_PVHe2ValveIsOpen;
  53. private bool m_TurboPumpPumpingValveIsOpen;
  54. private bool m_TurboPumpPurgeValveIsOpen;
  55. private bool m_GuageValveIsOpen;
  56. private bool m_PendulumValveIsOpen;
  57. //private bool m_BRFIsOn;
  58. //private bool m_SRFIsOn;
  59. private double m_HeGasSetpoint;
  60. private int m_HePressureSetpoint;
  61. private float m_SRFFwdPowerSetpoint;
  62. private float m_BRFFwdPowerSetpoint;
  63. private float m_SRFMatchC1;
  64. private float m_SRFMatchC2;
  65. private float m_BRFMatchC1;
  66. private float m_BRFMatchC2;
  67. private double m_MFC1SetPoint;
  68. private double m_MFC2SetPoint;
  69. private double m_MFC3SetPoint;
  70. private double m_MFC4SetPoint;
  71. private double m_MFC5SetPoint;
  72. private double m_MFC6SetPoint;
  73. private double m_MFC7SetPoint;
  74. private double m_MFC8SetPoint;
  75. private double m_N2SetPoint;
  76. private AITMfcData m_MFC1Data;
  77. private AITMfcData m_MFC2Data;
  78. private AITMfcData m_MFC3Data;
  79. private AITMfcData m_MFC4Data;
  80. private AITMfcData m_MFC5Data;
  81. private AITMfcData m_MFC6Data;
  82. private AITMfcData m_MFC7Data;
  83. private AITMfcData m_MFC8Data;
  84. private AITMfcData m_MFCHeData;
  85. private AITMfcData m_MFCN2Data;
  86. private AITHeaterData m_ValveHeaterData;
  87. private AITHeaterData m_ForelineHeaterData;
  88. private AITHeaterData m_WallHeaterData;
  89. private AITRfData m_SRFData;
  90. private AITRfData m_BRFData;
  91. private AITPendulumValveData m_PendulumValveData;
  92. //private AITHVData m_ESCHVData;
  93. private PMState m_PMCurrentState;
  94. private bool m_SourceRFFanInterlock;
  95. private bool m_IsWLK;
  96. private bool m_IsWaterFlowOk;
  97. private bool m_IsTurboPumpInterlock;
  98. private bool m_IsCDAOK;
  99. private bool m_SensorGasBoxDoor;
  100. private bool m_SensorGasBoxPressure;
  101. private bool m_PumpIsOpen;
  102. private bool m_TurboIsOpen;
  103. private bool m_IsATM;
  104. private bool m_IsVAC;
  105. private List<string> m_RtDataKeys;
  106. private Dictionary<string, object> m_RtDataValues;
  107. private int m_PositionValue;
  108. private bool m_IsPositionMode;
  109. private int m_ESCVoltage;
  110. private bool m_GasIsFlowing;
  111. private bool m_IsProcessing;
  112. private bool m_IsAutoMode;
  113. private string m_SelectedRecipe;
  114. private float m_ChillerTempSetpoint;
  115. private float m_InnerChillerTempSetpoint;
  116. private float m_OuterChillerTempSetpoint;
  117. private float m_TopChillerTempSetpoint;
  118. private float m_WallTempSetpoint;
  119. private bool m_HeIsPressureMode = true;
  120. private bool m_ChillerIsOn;
  121. private bool m_InnerChillerIsOn;
  122. private bool m_OuterChillerIsOn;
  123. private bool m_TopChillerIsOn;
  124. private float m_ProcessHighPressure;
  125. private float m_ProcessLowPressure;
  126. private float m_ForelinePressurePressure;
  127. private float m_ESCHePressure;
  128. ButterflyValveView butterflyValveMessageBox;
  129. HeaterView heaterView;
  130. private int m_TurboPumpRotationalSpeed;
  131. private bool m_LiftPinIsUp;
  132. private bool m_IsSlitDoorClosed;
  133. private bool m_IsLidClosed;
  134. private float m_ChillerTemperature;
  135. private float m_InnerTemperature;
  136. private float m_OuterTemperature;
  137. private float m_TopTemperature;
  138. //private float m_HVTemperature;
  139. private int m_ESCHVOutputVoltage;
  140. //private float m_SRfReflectPower;
  141. //private float m_SRfForwardPowerFeedBack;
  142. //private float m_BRfReflectPower;
  143. //private float m_BRfForwardPowerFeedBack;
  144. //private int m_MatchWorkMode;
  145. //private int m_BiasMatchWorkMode;
  146. private float m_MatchC1;
  147. private float m_MatchC2;
  148. private float m_BiasMatchC1;
  149. private float m_BiasMatchC2;
  150. private float m_PendulumValvePosition;
  151. private bool m_IsTurboPumpAtSpeed;
  152. private bool m_TurboPumpWaterFlowSwitch;
  153. private bool m_IsHasWafer;
  154. private Recipe m_CurrentRecipe = new Recipe();
  155. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  156. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  157. private double m_ChamberPressureFeedBack;
  158. private double m_TurboN2FlowSetPoint;
  159. #endregion
  160. #region 属性
  161. public List<string> CurrentModuleRecipes
  162. {
  163. get { return m_CurrentModuleRecipes; }
  164. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  165. }
  166. public Recipe CurrentRecipe
  167. {
  168. get { return m_CurrentRecipe; }
  169. set { SetProperty(ref m_CurrentRecipe, value); }
  170. }
  171. public RecipeResult CurrentRecipeResult
  172. {
  173. get { return m_CurrentRecipeResult; }
  174. set { SetProperty(ref m_CurrentRecipeResult, value); }
  175. }
  176. public RecipeStep CurrentRecipeStep
  177. {
  178. get { return m_CurrentRecipeStep; }
  179. set { SetProperty(ref m_CurrentRecipeStep, value); }
  180. }
  181. public bool IsHasWafer
  182. {
  183. get { return m_IsHasWafer; }
  184. set { SetProperty(ref m_IsHasWafer, value); }
  185. }
  186. public bool IsTurboPumpAtSpeed
  187. {
  188. get { return m_IsTurboPumpAtSpeed; }
  189. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  190. }
  191. public bool TurboPumpWaterFlowSwitch
  192. {
  193. get { return m_TurboPumpWaterFlowSwitch; }
  194. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  195. }
  196. public float PendulumValvePosition
  197. {
  198. get { return m_PendulumValvePosition; }
  199. set { SetProperty(ref m_PendulumValvePosition, value); }
  200. }
  201. public float BiasMatchC1
  202. {
  203. get { return m_BiasMatchC1; }
  204. set
  205. {
  206. SetProperty(ref m_BiasMatchC1, value);
  207. }
  208. }
  209. public float BiasMatchC2
  210. {
  211. get { return m_BiasMatchC2; }
  212. set
  213. {
  214. SetProperty(ref m_BiasMatchC2, value);
  215. }
  216. }
  217. public float MatchC1
  218. {
  219. get { return m_MatchC1; }
  220. set
  221. {
  222. SetProperty(ref m_MatchC1, value);
  223. }
  224. }
  225. public float MatchC2
  226. {
  227. get { return m_MatchC2; }
  228. set
  229. {
  230. SetProperty(ref m_MatchC2, value);
  231. }
  232. }
  233. public AITPendulumValveData PendulumValveData
  234. {
  235. get { return m_PendulumValveData; }
  236. set
  237. {
  238. SetProperty(ref m_PendulumValveData, value);
  239. }
  240. }
  241. //public AITHVData ESCHVData
  242. //{
  243. // get { return m_ESCHVData; }
  244. // set
  245. // {
  246. // SetProperty(ref m_ESCHVData, value);
  247. // }
  248. //}
  249. public int ESCHVOutputVoltage
  250. {
  251. get { return m_ESCHVOutputVoltage; }
  252. set
  253. {
  254. SetProperty(ref m_ESCHVOutputVoltage, value);
  255. }
  256. }
  257. public float ChillerTemperature
  258. {
  259. get { return m_ChillerTemperature; }
  260. set
  261. {
  262. SetProperty(ref m_ChillerTemperature, value);
  263. }
  264. }
  265. public float InnerTemperature
  266. {
  267. get { return m_InnerTemperature; }
  268. set
  269. {
  270. SetProperty(ref m_InnerTemperature, value);
  271. }
  272. }
  273. public float OuterTemperature
  274. {
  275. get { return m_OuterTemperature; }
  276. set
  277. {
  278. SetProperty(ref m_OuterTemperature, value);
  279. }
  280. }
  281. public float TopTemperature
  282. {
  283. get { return m_TopTemperature; }
  284. set
  285. {
  286. SetProperty(ref m_TopTemperature, value);
  287. }
  288. }
  289. //public float HVTemperature
  290. //{
  291. // get { return m_HVTemperature; }
  292. // set
  293. // {
  294. // SetProperty(ref m_HVTemperature, value);
  295. // }
  296. //}
  297. public bool IsLidClosed
  298. {
  299. get { return m_IsLidClosed; }
  300. set
  301. {
  302. SetProperty(ref m_IsLidClosed, value);
  303. }
  304. }
  305. public bool IsSlitDoorClosed
  306. {
  307. get { return m_IsSlitDoorClosed; }
  308. set
  309. {
  310. SetProperty(ref m_IsSlitDoorClosed, value);
  311. }
  312. }
  313. public bool LiftPinIsUp
  314. {
  315. get { return m_LiftPinIsUp; }
  316. set
  317. {
  318. SetProperty(ref m_LiftPinIsUp, value);
  319. }
  320. }
  321. public int TurboPumpRotationalSpeed
  322. {
  323. get { return m_TurboPumpRotationalSpeed; }
  324. set
  325. {
  326. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  327. }
  328. }
  329. public float ESCHePressure
  330. {
  331. get { return m_ESCHePressure; }
  332. set
  333. {
  334. SetProperty(ref m_ESCHePressure, value);
  335. }
  336. }
  337. public float ProcessHighPressure
  338. {
  339. get { return m_ProcessHighPressure; }
  340. set
  341. {
  342. SetProperty(ref m_ProcessHighPressure, value);
  343. }
  344. }
  345. public float ProcessLowPressure
  346. {
  347. get { return m_ProcessLowPressure; }
  348. set
  349. {
  350. SetProperty(ref m_ProcessLowPressure, value);
  351. }
  352. }
  353. public float ForelinePressure
  354. {
  355. get { return m_ForelinePressurePressure; }
  356. set
  357. {
  358. SetProperty(ref m_ForelinePressurePressure, value);
  359. }
  360. }
  361. public bool SourceRFFanInterlock
  362. {
  363. get { return m_SourceRFFanInterlock; }
  364. set
  365. {
  366. SetProperty(ref m_SourceRFFanInterlock, value);
  367. }
  368. }
  369. public bool IsWLK
  370. {
  371. get { return m_IsWLK; }
  372. set
  373. {
  374. SetProperty(ref m_IsWLK, value);
  375. }
  376. }
  377. public bool IsWaterFlowOk
  378. {
  379. get { return m_IsWaterFlowOk; }
  380. set
  381. {
  382. SetProperty(ref m_IsWaterFlowOk, value);
  383. }
  384. }
  385. public bool IsCDAOK
  386. {
  387. get { return m_IsCDAOK; }
  388. set
  389. {
  390. SetProperty(ref m_IsCDAOK, value);
  391. }
  392. }
  393. public bool SensorGasBoxDoor
  394. {
  395. get { return m_SensorGasBoxDoor; }
  396. set
  397. {
  398. SetProperty(ref m_SensorGasBoxDoor, value);
  399. }
  400. }
  401. public bool SensorGasBoxPressure
  402. {
  403. get { return m_SensorGasBoxPressure; }
  404. set
  405. {
  406. SetProperty(ref m_SensorGasBoxPressure, value);
  407. }
  408. }
  409. public bool IsTurboPumpInterlock
  410. {
  411. get { return m_IsTurboPumpInterlock; }
  412. set
  413. {
  414. SetProperty(ref m_IsTurboPumpInterlock, value);
  415. }
  416. }
  417. public string ModuleName { get; set; }
  418. public double MFC1SetPoint
  419. {
  420. get { return m_MFC1SetPoint; }
  421. set { SetProperty(ref m_MFC1SetPoint, value); }
  422. }
  423. public double MFC2SetPoint
  424. {
  425. get { return m_MFC2SetPoint; }
  426. set { SetProperty(ref m_MFC2SetPoint, value); }
  427. }
  428. public double MFC3SetPoint
  429. {
  430. get { return m_MFC3SetPoint; }
  431. set { SetProperty(ref m_MFC3SetPoint, value); }
  432. }
  433. public double MFC4SetPoint
  434. {
  435. get { return m_MFC4SetPoint; }
  436. set { SetProperty(ref m_MFC4SetPoint, value); }
  437. }
  438. public double MFC5SetPoint
  439. {
  440. get { return m_MFC5SetPoint; }
  441. set { SetProperty(ref m_MFC5SetPoint, value); }
  442. }
  443. public double MFC6SetPoint
  444. {
  445. get { return m_MFC6SetPoint; }
  446. set { SetProperty(ref m_MFC6SetPoint, value); }
  447. }
  448. public double MFC7SetPoint
  449. {
  450. get { return m_MFC7SetPoint; }
  451. set { SetProperty(ref m_MFC7SetPoint, value); }
  452. }
  453. public double MFC8SetPoint
  454. {
  455. get { return m_MFC8SetPoint; }
  456. set { SetProperty(ref m_MFC8SetPoint, value); }
  457. }
  458. public double N2SetPoint
  459. {
  460. get { return m_N2SetPoint; }
  461. set { SetProperty(ref m_N2SetPoint, value); }
  462. }
  463. public double TurboN2FlowSetPoint
  464. {
  465. get { return m_TurboN2FlowSetPoint; }
  466. set
  467. {
  468. if (value != m_TurboN2FlowSetPoint)
  469. {
  470. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  471. }
  472. SetProperty(ref m_TurboN2FlowSetPoint, value);
  473. }
  474. }
  475. public AITMfcData MFC1Data
  476. {
  477. get { return m_MFC1Data; }
  478. set { SetProperty(ref m_MFC1Data, value); }
  479. }
  480. public AITMfcData MFC2Data
  481. {
  482. get { return m_MFC2Data; }
  483. set { SetProperty(ref m_MFC2Data, value); }
  484. }
  485. public AITMfcData MFC3Data
  486. {
  487. get { return m_MFC3Data; }
  488. set { SetProperty(ref m_MFC3Data, value); }
  489. }
  490. public AITMfcData MFC4Data
  491. {
  492. get { return m_MFC4Data; }
  493. set { SetProperty(ref m_MFC4Data, value); }
  494. }
  495. public AITMfcData MFC5Data
  496. {
  497. get { return m_MFC5Data; }
  498. set { SetProperty(ref m_MFC5Data, value); }
  499. }
  500. public AITMfcData MFC6Data
  501. {
  502. get { return m_MFC6Data; }
  503. set { SetProperty(ref m_MFC6Data, value); }
  504. }
  505. public AITMfcData MFC7Data
  506. {
  507. get { return m_MFC7Data; }
  508. set { SetProperty(ref m_MFC7Data, value); }
  509. }
  510. public AITMfcData MFC8Data
  511. {
  512. get { return m_MFC8Data; }
  513. set { SetProperty(ref m_MFC8Data, value); }
  514. }
  515. public AITMfcData MFCHeData
  516. {
  517. get { return m_MFCHeData; }
  518. set { SetProperty(ref m_MFCHeData, value); }
  519. }
  520. public AITMfcData MFCN2Data
  521. {
  522. get { return m_MFCN2Data; }
  523. set { SetProperty(ref m_MFCN2Data, value); }
  524. }
  525. public AITHeaterData ValveHeaterData
  526. {
  527. get { return m_ValveHeaterData; }
  528. set { SetProperty(ref m_ValveHeaterData, value); }
  529. }
  530. public AITHeaterData ForelineHeaterData
  531. {
  532. get { return m_ForelineHeaterData; }
  533. set { SetProperty(ref m_ForelineHeaterData, value); }
  534. }
  535. public AITHeaterData WallHeaterData
  536. {
  537. get { return m_WallHeaterData; }
  538. set { SetProperty(ref m_WallHeaterData, value); }
  539. }
  540. public AITRfData SRFData
  541. {
  542. get { return m_SRFData; }
  543. set { SetProperty(ref m_SRFData, value); }
  544. }
  545. public AITRfData BRFData
  546. {
  547. get { return m_BRFData; }
  548. set { SetProperty(ref m_BRFData, value); }
  549. }
  550. public PMState PMCurrentState
  551. {
  552. get { return m_PMCurrentState; }
  553. set { SetProperty(ref m_PMCurrentState, value); }
  554. }
  555. #region 阀
  556. public bool GasFinalValveIsOpen
  557. {
  558. get { return m_GasFinalValveIsOpen; }
  559. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  560. }
  561. public bool PVN21ValveIsOpen
  562. {
  563. get { return m_PVN21ValveIsOpen; }
  564. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  565. }
  566. public bool PVN22ValveIsOpen
  567. {
  568. get { return m_PVN22ValveIsOpen; }
  569. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  570. }
  571. public bool N2ValveIsOpen
  572. {
  573. get { return m_N2ValveIsOpen; }
  574. set { SetProperty(ref m_N2ValveIsOpen, value); }
  575. }
  576. public bool PV11ValveIsOpen
  577. {
  578. get { return m_PV11ValveIsOpen; }
  579. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  580. }
  581. public bool PV12ValveIsOpen
  582. {
  583. get { return m_PV12ValveIsOpen; }
  584. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  585. }
  586. public bool MFC1ValveIsOpen
  587. {
  588. get { return m_MFC1ValveIsOpen; }
  589. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  590. }
  591. public bool PV21ValveIsOpen
  592. {
  593. get { return m_PV21ValveIsOpen; }
  594. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  595. }
  596. public bool PV22ValveIsOpen
  597. {
  598. get { return m_PV22ValveIsOpen; }
  599. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  600. }
  601. public bool MFC2ValveIsOpen
  602. {
  603. get { return m_MFC2ValveIsOpen; }
  604. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  605. }
  606. public bool PV31ValveIsOpen
  607. {
  608. get { return m_PV31ValveIsOpen; }
  609. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  610. }
  611. public bool PV32ValveIsOpen
  612. {
  613. get { return m_PV32ValveIsOpen; }
  614. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  615. }
  616. public bool MFC3ValveIsOpen
  617. {
  618. get { return m_MFC3ValveIsOpen; }
  619. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  620. }
  621. public bool PV41ValveIsOpen
  622. {
  623. get { return m_PV41ValveIsOpen; }
  624. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  625. }
  626. public bool PV42ValveIsOpen
  627. {
  628. get { return m_PV42ValveIsOpen; }
  629. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  630. }
  631. public bool MFC4ValveIsOpen
  632. {
  633. get { return m_MFC4ValveIsOpen; }
  634. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  635. }
  636. public bool MFC5ValveIsOpen
  637. {
  638. get { return m_MFC5ValveIsOpen; }
  639. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  640. }
  641. public bool MFC6ValveIsOpen
  642. {
  643. get { return m_MFC6ValveIsOpen; }
  644. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  645. }
  646. public bool MFC7ValveIsOpen
  647. {
  648. get { return m_MFC7ValveIsOpen; }
  649. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  650. }
  651. public bool MFC8ValveIsOpen
  652. {
  653. get { return m_MFC8ValveIsOpen; }
  654. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  655. }
  656. public bool PVHe1ValveIsOpen
  657. {
  658. get { return m_PVHe1ValveIsOpen; }
  659. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  660. }
  661. public bool PVHe2ValveIsOpen
  662. {
  663. get { return m_PVHe2ValveIsOpen; }
  664. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  665. }
  666. public bool TurboPumpPumpingValveIsOpen
  667. {
  668. get { return m_TurboPumpPumpingValveIsOpen; }
  669. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  670. }
  671. public bool TurboPumpPurgeValveIsOpen
  672. {
  673. get { return m_TurboPumpPurgeValveIsOpen; }
  674. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  675. }
  676. public bool SoftPumpValveIsOpen
  677. {
  678. get { return m_SoftPumpValveIsOpen; }
  679. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  680. }
  681. public bool FastPumpValveIsOpen
  682. {
  683. get { return m_FastPumpValveIsOpen; }
  684. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  685. }
  686. public bool GuageValveIsOpen
  687. {
  688. get { return m_GuageValveIsOpen; }
  689. set { SetProperty(ref m_GuageValveIsOpen, value); }
  690. }
  691. #endregion
  692. public Dictionary<string, object> RtDataValues
  693. {
  694. get { return m_RtDataValues; }
  695. set { SetProperty(ref m_RtDataValues, value); }
  696. }
  697. public bool PumpIsOpen
  698. {
  699. get { return m_PumpIsOpen; }
  700. set { SetProperty(ref m_PumpIsOpen, value); }
  701. }
  702. public bool PendulumValveIsOpen
  703. {
  704. get { return m_PendulumValveIsOpen; }
  705. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  706. }
  707. public bool TurboIsOpen
  708. {
  709. get { return m_TurboIsOpen; }
  710. set { SetProperty(ref m_TurboIsOpen, value); }
  711. }
  712. public bool IsATM
  713. {
  714. get { return m_IsATM; }
  715. set { SetProperty(ref m_IsATM, value); }
  716. }
  717. public bool IsVAC
  718. {
  719. get { return m_IsVAC; }
  720. set { SetProperty(ref m_IsVAC, value); }
  721. }
  722. //public bool BRFIsOn
  723. //{
  724. // get { return m_BRFIsOn; }
  725. // set { SetProperty(ref m_BRFIsOn, value); }
  726. //}
  727. //public bool SRFIsOn
  728. //{
  729. // get { return m_SRFIsOn; }
  730. // set { SetProperty(ref m_SRFIsOn, value); }
  731. //}
  732. public int PositionValue
  733. {
  734. get { return m_PositionValue; }
  735. set { SetProperty(ref m_PositionValue, value); }
  736. }
  737. public bool IsPositionMode
  738. {
  739. get { return m_IsPositionMode; }
  740. set { SetProperty(ref m_IsPositionMode, value); }
  741. }
  742. public double HeGasSetpoint
  743. {
  744. get { return m_HeGasSetpoint; }
  745. set
  746. {
  747. SetProperty(ref m_HeGasSetpoint, value);
  748. }
  749. }
  750. public int HePressureSetpoint
  751. {
  752. get { return m_HePressureSetpoint; }
  753. set
  754. {
  755. SetProperty(ref m_HePressureSetpoint, value);
  756. }
  757. }
  758. public float SRFFwdPowerSetpoint
  759. {
  760. get { return m_SRFFwdPowerSetpoint; }
  761. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  762. }
  763. public float BRFFwdPowerSetpoint
  764. {
  765. get { return m_BRFFwdPowerSetpoint; }
  766. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  767. }
  768. public int ESCVoltage
  769. {
  770. get { return m_ESCVoltage; }
  771. set { SetProperty(ref m_ESCVoltage, value); }
  772. }
  773. public float SRFMatchC1
  774. {
  775. get { return m_SRFMatchC1; }
  776. set { SetProperty(ref m_SRFMatchC1, value); }
  777. }
  778. public float SRFMatchC2
  779. {
  780. get { return m_SRFMatchC2; }
  781. set { SetProperty(ref m_SRFMatchC2, value); }
  782. }
  783. public float BRFMatchC1
  784. {
  785. get { return m_BRFMatchC1; }
  786. set { SetProperty(ref m_BRFMatchC1, value); }
  787. }
  788. public float BRFMatchC2
  789. {
  790. get { return m_BRFMatchC2; }
  791. set { SetProperty(ref m_BRFMatchC2, value); }
  792. }
  793. public bool GasIsFlowing
  794. {
  795. get { return m_GasIsFlowing; }
  796. set { SetProperty(ref m_GasIsFlowing, value); }
  797. }
  798. public bool IsProcessing
  799. {
  800. get { return m_IsProcessing; }
  801. set { SetProperty(ref m_IsProcessing, value); }
  802. }
  803. public bool IsAutoMode
  804. {
  805. get { return m_IsAutoMode; }
  806. set { SetProperty(ref m_IsAutoMode, value); }
  807. }
  808. public string SelectedRecipe
  809. {
  810. get { return m_SelectedRecipe; }
  811. set { SetProperty(ref m_SelectedRecipe, value); }
  812. }
  813. public float ChillerTempSetpoint
  814. {
  815. get { return m_ChillerTempSetpoint; }
  816. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  817. }
  818. public float InnerChillerTempSetpoint
  819. {
  820. get { return m_InnerChillerTempSetpoint; }
  821. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  822. }
  823. public float OuterChillerTempSetpoint
  824. {
  825. get { return m_OuterChillerTempSetpoint; }
  826. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  827. }
  828. public float TopChillerTempSetpoint
  829. {
  830. get { return m_TopChillerTempSetpoint; }
  831. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  832. }
  833. public float WallTempSetpoint
  834. {
  835. get { return m_WallTempSetpoint; }
  836. set { SetProperty(ref m_WallTempSetpoint, value); }
  837. }
  838. public bool HeIsPressureMode
  839. {
  840. get { return m_HeIsPressureMode; }
  841. set { SetProperty(ref m_HeIsPressureMode, value); }
  842. }
  843. public bool ChillerIsOn
  844. {
  845. get { return m_ChillerIsOn; }
  846. set { SetProperty(ref m_ChillerIsOn, value); }
  847. }
  848. public bool InnerChillerIsOn
  849. {
  850. get { return m_InnerChillerIsOn; }
  851. set { SetProperty(ref m_InnerChillerIsOn, value); }
  852. }
  853. public bool OuterChillerIsOn
  854. {
  855. get { return m_OuterChillerIsOn; }
  856. set { SetProperty(ref m_OuterChillerIsOn, value); }
  857. }
  858. public bool TopChillerIsOn
  859. {
  860. get { return m_TopChillerIsOn; }
  861. set { SetProperty(ref m_TopChillerIsOn, value); }
  862. }
  863. public double ChamberPressureFeedBack
  864. {
  865. get { return m_ChamberPressureFeedBack; }
  866. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  867. }
  868. #endregion
  869. #region 命令
  870. private DelegateCommand _PMInitCommnad;
  871. public DelegateCommand PMInitCommnad =>
  872. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  873. private DelegateCommand _PMAbortCommnad;
  874. public DelegateCommand PMAbortCommnad =>
  875. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  876. private DelegateCommand _GasCommand;
  877. public DelegateCommand GasCommand =>
  878. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  879. private DelegateCommand _HeCommand;
  880. public DelegateCommand HeCommand =>
  881. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  882. private DelegateCommand _RfCommand;
  883. public DelegateCommand RfCommand =>
  884. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  885. private DelegateCommand _PurgeCommand;
  886. public DelegateCommand PurgeCommand =>
  887. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  888. private DelegateCommand _VentCommand;
  889. public DelegateCommand VentCommand =>
  890. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  891. private DelegateCommand _PumpCommand;
  892. public DelegateCommand PumpCommand =>
  893. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  894. private DelegateCommand _OpenPumpCommand;
  895. public DelegateCommand OpenPumpCommand =>
  896. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  897. private DelegateCommand _ClosePumpCommand;
  898. public DelegateCommand ClosePumpCommand =>
  899. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  900. private DelegateCommand _OpenTurboPumpCommand;
  901. public DelegateCommand OpenTurboPumpCommand =>
  902. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  903. private DelegateCommand _CloseTurboPumpCommand;
  904. public DelegateCommand CloseTurboPumpCommand =>
  905. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  906. private DelegateCommand _OpenPendulumValveCommand;
  907. public DelegateCommand OpenPendulumValveCommand =>
  908. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  909. private DelegateCommand _ClosePendulumValveCommand;
  910. public DelegateCommand ClosePendulumValveCommand =>
  911. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  912. private DelegateCommand<object> _PinUpDownCommand;
  913. public DelegateCommand<object> PinUpDownCommand =>
  914. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  915. private DelegateCommand<object> _LidUpDownCommand;
  916. public DelegateCommand<object> LidUpDownCommand =>
  917. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  918. private DelegateCommand _SetSRfCommand;
  919. public DelegateCommand SetSRfCommand =>
  920. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  921. private DelegateCommand _SetBRfCommand;
  922. public DelegateCommand SetBRfCommand =>
  923. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  924. private DelegateCommand _OpenButterflyValveViewCommand;
  925. public DelegateCommand OpenButterflyValveViewCommand =>
  926. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  927. //private DelegateCommand _HVCommand;
  928. //public DelegateCommand HVCommand =>
  929. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  930. private DelegateCommand _HVSetCommand;
  931. public DelegateCommand HVSetCommand =>
  932. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  933. private DelegateCommand _LoadRecipeCommand;
  934. public DelegateCommand LoadRecipeCommand =>
  935. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  936. private DelegateCommand<object> _ControlValveCommand;
  937. public DelegateCommand<object> ControlValveCommand =>
  938. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  939. private DelegateCommand<object> _RunRecipeCommand;
  940. public DelegateCommand<object> RunRecipeCommand =>
  941. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  942. private DelegateCommand<object> _SetChillerTempCommand;
  943. public DelegateCommand<object> SetChillerTempCommand =>
  944. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  945. private DelegateCommand<object> _OnOffChillerCommand;
  946. public DelegateCommand<object> OnOffChillerCommand =>
  947. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  948. private DelegateCommand<object> _HeaterCommand;
  949. public DelegateCommand<object> HeaterCommand =>
  950. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  951. private DelegateCommand _EndStepCommand;
  952. public DelegateCommand EndStepCommand =>
  953. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  954. #endregion
  955. #region 构造函数
  956. public OverKepler2300ViewModel()
  957. {
  958. m_RtDataKeys = new List<string>();
  959. m_IsATM = true;
  960. ModuleName = "PMA";
  961. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  962. DispatcherTimer timer = new DispatcherTimer();
  963. timer.Interval = TimeSpan.FromSeconds(0.5);
  964. timer.Tick += timer_Tick;
  965. timer.Start();
  966. }
  967. #endregion
  968. #region 命令方法
  969. private void OnControlValve(object obj)
  970. {
  971. CommonValveControl commonValveControl = (CommonValveControl)obj;
  972. if (commonValveControl.IsCanEdit == true)
  973. {
  974. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  975. }
  976. }
  977. private void OnPMInit()
  978. {
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  980. }
  981. private async void OnGas()
  982. {
  983. await Task.Run(async () =>
  984. {
  985. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  986. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  988. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  989. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  990. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  992. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  993. await Task.Delay(1000);
  994. object[] mfc = new object[8];
  995. string[] mfcSetPoint = new string[8];
  996. mfc[0] = MFC1Data.SetPoint;
  997. mfc[1] = MFC2Data.SetPoint;
  998. mfc[2] = MFC3Data.SetPoint;
  999. mfc[3] = MFC4Data.SetPoint;
  1000. mfc[4] = MFC5Data.SetPoint;
  1001. mfc[5] = MFC6Data.SetPoint;
  1002. mfc[6] = MFC7Data.SetPoint;
  1003. mfc[7] = MFC8Data.SetPoint;
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1005. });
  1006. }
  1007. private void OnHe()
  1008. {
  1009. if (PVHe1ValveIsOpen == true)
  1010. {
  1011. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1012. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1013. }
  1014. else
  1015. {
  1016. if (HeIsPressureMode)
  1017. {
  1018. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1019. }
  1020. else
  1021. {
  1022. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1023. }
  1024. }
  1025. }
  1026. private void OnRf()
  1027. {
  1028. if (PMCurrentState == PMState.RfPowering)
  1029. {
  1030. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1031. }
  1032. else
  1033. {
  1034. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1035. }
  1036. }
  1037. private void OnPurge()
  1038. {
  1039. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1040. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1041. //{
  1042. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1043. // await Task.Delay(1000);
  1044. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1045. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1046. //}
  1047. //else
  1048. //{
  1049. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1050. // await Task.Delay(1000);
  1051. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1052. //}
  1053. if (PMCurrentState == PMState.Purging)
  1054. {
  1055. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1056. //await Task.Delay(1000);
  1057. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1058. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1059. }
  1060. else
  1061. {
  1062. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1063. //await Task.Delay(1000);
  1064. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1065. }
  1066. }
  1067. private void OnVent()
  1068. {
  1069. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1070. if (PMCurrentState == PMState.Venting)
  1071. {
  1072. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1073. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1074. }
  1075. else
  1076. {
  1077. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1078. }
  1079. }
  1080. private void OnPump()
  1081. {
  1082. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1083. if (PMCurrentState == PMState.Pumping)
  1084. {
  1085. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1086. return;
  1087. }
  1088. //if (PMCurrentState == PMState.pum)
  1089. //{
  1090. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1091. // return;
  1092. //}
  1093. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1094. //{
  1095. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1096. //}
  1097. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1098. //{
  1099. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1100. //}
  1101. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1102. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1103. // 设置底压
  1104. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1105. if (basePressure <= 0.01 || basePressure >= 1000)
  1106. {
  1107. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1108. return;
  1109. }
  1110. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1111. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1112. {
  1113. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1114. return;
  1115. }
  1116. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1117. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1119. }
  1120. private void OnOpenPump()
  1121. {
  1122. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1123. if (PMCurrentState == PMState.LaunchingPump)
  1124. {
  1125. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1126. return;
  1127. }
  1128. //if (PumpIsOpen == true)
  1129. //{
  1130. // return;
  1131. //}
  1132. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1133. }
  1134. private void OnClosePump()
  1135. {
  1136. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1137. }
  1138. private void OnOpenTurboPump()
  1139. {
  1140. //TurboIsOpen = true;
  1141. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1142. if (PMCurrentState == PMState.LaunchingTurboPump)
  1143. {
  1144. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1145. return;
  1146. }
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1148. }
  1149. private void OnCloseTurboPump()
  1150. {
  1151. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1152. }
  1153. private void OnOpenPendulumValve()
  1154. {
  1155. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1156. }
  1157. private void OnClosePendulumValve()
  1158. {
  1159. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1160. }
  1161. private void OnPinUpDown(object upDown)
  1162. {
  1163. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1164. }
  1165. private void OnLidUpDown(object upDown)
  1166. {
  1167. //var value = (bool)upDown;
  1168. if (upDown.ToString() == "Up")
  1169. {
  1170. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1171. }
  1172. else
  1173. {
  1174. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1175. }
  1176. }
  1177. private async void OnSetSRf()
  1178. {
  1179. if (SRFData.IsRfOn == true)
  1180. {
  1181. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1182. }
  1183. else
  1184. {
  1185. if (GasIsFlowing == true)
  1186. {
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1188. await Task.Delay(100);
  1189. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1190. }
  1191. }
  1192. }
  1193. private async void OnSetBRf()
  1194. {
  1195. if (BRFData.IsRfOn == true)
  1196. {
  1197. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1198. }
  1199. else
  1200. {
  1201. if (GasIsFlowing == true)
  1202. {
  1203. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1204. await Task.Delay(100);
  1205. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1206. }
  1207. }
  1208. }
  1209. private void OnPMAbort()
  1210. {
  1211. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1212. }
  1213. private void OnOpenButterflyValveView()
  1214. {
  1215. //if (butterflyValveMessageBox == null)
  1216. //{
  1217. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1218. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1219. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1220. butterflyValveMessageBox.Left = 700;
  1221. butterflyValveMessageBox.Top = 600;
  1222. butterflyValveMessageBox.Show();
  1223. butterflyValveMessageBox.Owner = _mainWindow;
  1224. //}
  1225. }
  1226. private void OnLoadRecipe()
  1227. {
  1228. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1229. }
  1230. //private async void OnHV()
  1231. //{
  1232. // if (ESCHVData.IsOn == true)
  1233. // {
  1234. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1235. // }
  1236. // else
  1237. // {
  1238. // await Task.Run(async () =>
  1239. // {
  1240. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1241. // await Task.Delay(1000);
  1242. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1243. // });
  1244. // }
  1245. //}
  1246. private void OnHVSet()
  1247. {
  1248. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1249. }
  1250. private void OnRunRecipe(object obj)
  1251. {
  1252. string recipeName = SelectedRecipe;
  1253. if (recipeName == null)
  1254. {
  1255. return;
  1256. }
  1257. ClearData();
  1258. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1259. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1260. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName);
  1261. }
  1262. private void OnSetChillerTemp(object obj)
  1263. {
  1264. float offset;
  1265. float setPoint;
  1266. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1267. switch (chillerType)
  1268. {
  1269. case ChillerType.Chiller:
  1270. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1271. float.TryParse(value, out offset);
  1272. setPoint = ChillerTempSetpoint;
  1273. break;
  1274. case ChillerType.InnerChiller:
  1275. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1276. float.TryParse(Innervalue, out offset);
  1277. setPoint = InnerChillerTempSetpoint;
  1278. break;
  1279. case ChillerType.OuterChiller:
  1280. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1281. float.TryParse(Outervalue, out offset);
  1282. setPoint = OuterChillerTempSetpoint;
  1283. break;
  1284. case ChillerType.TopChiller:
  1285. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1286. float.TryParse(Topvalue, out offset);
  1287. setPoint = TopChillerTempSetpoint;
  1288. break;
  1289. default:
  1290. return;
  1291. }
  1292. //var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1293. //float x;
  1294. //float.TryParse(value, out x);
  1295. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1296. }
  1297. private void OnOffChiller(object obj)
  1298. {
  1299. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1300. switch (chillerType)
  1301. {
  1302. case ChillerType.Chiller:
  1303. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1304. break;
  1305. case ChillerType.InnerChiller:
  1306. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1307. break;
  1308. case ChillerType.OuterChiller:
  1309. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1310. break;
  1311. case ChillerType.TopChiller:
  1312. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1313. break;
  1314. default:
  1315. return;
  1316. }
  1317. }
  1318. private void OnHeater(object obj)
  1319. {
  1320. AITHeaterData heaterData = obj as AITHeaterData;
  1321. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1322. heaterView = new HeaterView(heaterData, ModuleName);
  1323. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1324. heaterView.Owner = _mainWindow;
  1325. heaterView.Show();
  1326. }
  1327. private void OnEndStep()
  1328. {
  1329. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1330. {
  1331. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1332. }
  1333. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1334. {
  1335. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1336. }
  1337. }
  1338. #endregion
  1339. #region 私有方法
  1340. private void ClearData()
  1341. {
  1342. ESCVoltage = 0;
  1343. SRFFwdPowerSetpoint = 0;
  1344. SRFMatchC1 = 0;
  1345. SRFMatchC2 = 0;
  1346. BRFFwdPowerSetpoint = 0;
  1347. BRFMatchC1 = 0;
  1348. BRFMatchC2 = 0;
  1349. HeGasSetpoint = 0;
  1350. MFC1SetPoint = 0;
  1351. MFC2SetPoint = 0;
  1352. MFC3SetPoint = 0;
  1353. MFC4SetPoint = 0;
  1354. MFC5SetPoint = 0;
  1355. MFC6SetPoint = 0;
  1356. MFC7SetPoint = 0;
  1357. MFC8SetPoint = 0;
  1358. }
  1359. private IEnumerable<string> GetFilesNames(string path)
  1360. {
  1361. return Directory.GetFiles(path, "*.rcp")
  1362. .Select(Path.GetFileNameWithoutExtension);
  1363. }
  1364. void timer_Tick(object sender, EventArgs e)
  1365. {
  1366. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1367. if (RtDataValues == null)
  1368. {
  1369. return;
  1370. }
  1371. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1372. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1373. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1374. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1375. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1376. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1377. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1378. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1379. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1380. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1381. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1382. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1383. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1384. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1385. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1386. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1387. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1388. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1389. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1390. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1391. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1392. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1393. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1394. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1395. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1396. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1397. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1398. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1399. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1400. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1401. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1402. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1403. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1404. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1405. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1406. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1407. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1408. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1409. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1410. IsProcessing = PMCurrentState == PMState.Processing;
  1411. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1412. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1413. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1414. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1415. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1416. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1417. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1418. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1419. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1420. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1421. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1422. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1423. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1424. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1425. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1426. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1427. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1428. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1429. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1430. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1431. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1432. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1433. InnerTemperature = float.Parse(RtDataValues[$"{ModuleName}.ChillerInnerTemp"].ToString());
  1434. OuterTemperature = float.Parse(RtDataValues[$"{ModuleName}.ChillerOuterTemp"].ToString());
  1435. TopTemperature = float.Parse(RtDataValues[$"{ModuleName}.ChillerTopTemp"].ToString());
  1436. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1437. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1438. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1439. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1440. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1441. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1442. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1443. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1444. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1445. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1446. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1447. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1448. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1449. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1450. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1451. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1452. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1453. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1454. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1455. if (PMCurrentState == PMState.Processing)
  1456. {
  1457. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1458. if (CurrentRecipeResult.RecipeStepNumber != null)
  1459. {
  1460. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1461. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1462. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1463. }
  1464. }
  1465. else
  1466. {
  1467. CurrentRecipeResult = null;
  1468. CurrentRecipeStep = null;
  1469. }
  1470. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1471. {
  1472. ChamberPressureFeedBack = ProcessLowPressure;
  1473. }
  1474. else
  1475. {
  1476. ChamberPressureFeedBack = ProcessHighPressure;
  1477. }
  1478. }
  1479. public void addDataKeys()
  1480. {
  1481. m_RtDataKeys.Clear();
  1482. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1483. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1484. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1485. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1486. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1487. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1488. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1489. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1490. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1491. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1492. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1493. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1494. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1495. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1496. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1497. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1498. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1499. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1500. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1501. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1502. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1503. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1504. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1505. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1506. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1507. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1508. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1509. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1510. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1511. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1512. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1513. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1514. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1515. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1516. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1517. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1518. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1519. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1520. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1521. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1523. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1524. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1525. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1526. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1527. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1529. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1530. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1531. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1532. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1533. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1534. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1535. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1536. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1537. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1538. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1539. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1540. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1541. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1542. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1543. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1544. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1545. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1546. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1547. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1548. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1549. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1550. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1551. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1552. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1553. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1554. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1555. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1556. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1557. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1558. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1559. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1560. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1561. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1562. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1563. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1564. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1565. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1566. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1567. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1568. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1569. }
  1570. #endregion
  1571. }
  1572. }