Kepler-Release/Venus/Venus_Simulator/Config/_ioDefineVenusSE_MF.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

  <Dig_In>
    <DI_ITEM Index="0" Name="DI_System_CDA_Pressure_OK" Device="" Addr="w0.00" Note="System CDA Pressure ok" />
    <DI_ITEM Index="1" Name="DI_LID_DOOR_CLOSED" Device="" Addr="w0.01" Note="LID DOOR CLOSED"/>
    <DI_ITEM Index="2" Name="DI_VCE_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.02" Note="VCE SLIT DOOR OPEN ENABLE" />
    <DI_ITEM Index="3" Name="DI_PMA_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN  ENABLE" />
    <DI_ITEM Index="4" Name="DI_PMB_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN  ENABLE" />
    <DI_ITEM Index="5" Name="DI_VCE_ATM_SW" Device="" Addr="w0.05" Note="VCE大气信号" />
    <DI_ITEM Index="6" Name="DI_TM_ATM_SW" Device="" Addr="w0.06" Note="TM大气信号" />
    <DI_ITEM Index="7" Name="DI_VCE_Wafer_Senser" Device="" Addr="w0.07" Note="VCE wafer senser" />
    <DI_ITEM Index="8" Name="DI_PMA_Wafer_Senser" Device="" Addr="w0.08" Note="PMA wafer senser" />
    <DI_ITEM Index="9" Name="DI_PMB_Wafer_Senser" Device="" Addr="w0.09" Note="PMB wafer senser" />
    <DI_ITEM Index="10" Name="DI_AC_RACK_FAN_OK" Device="" Addr="w0.10" Note="AC RACK FAN OK" />
    <DI_ITEM Index="11" Name="DI_AC_RACK_Smoke_SW1" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />
    <DI_ITEM Index="12" Name="DI_AC_RACK_Smoke_SW2" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />
    <DI_ITEM Index="13" Name="DI_FA_Smoke_SW" Device="" Addr="w0.13" Note="Factory Smoke Detector Out" />
    <DI_ITEM Index="14" Name="DI_Gas_Treatment_Alarm" Device="" Addr="w0.14" Note="Abnormal exhaust gas treatment" />
    <DI_ITEM Index="15" Name="DI_SYSTEM_N2_Pressure_SW" Device="" Addr="w0.15" Note="TM N2气压表1" />
    <DI_ITEM Index="16" Name="DI_VCE_TM_Slit_Door_Open_Pos" Device="" Addr="w1.00" Note="VCE到TM门阀开信号" />
    <DI_ITEM Index="17" Name="DI_VCE_TM_Slit_Door_Close_Pos" Device="" Addr="w1.01" Note="VCE到TM门阀关信号" />
    <DI_ITEM Index="18" Name="DI_TM_PMA_Slit_Door_Open_Pos" Device="" Addr="w1.02" Note="TM到PMA门阀开信号" />
    <DI_ITEM Index="19" Name="DI_TM_PMA_Slit_Door_Close_Pos" Device="" Addr="w1.03" Note="TM到PMA门阀关信号" />
    <DI_ITEM Index="20" Name="DI_TM_PMB_Slit_Door_Open_Pos" Device="" Addr="w1.04" Note="TM到PMB门阀开信号" />
    <DI_ITEM Index="21" Name="DI_TM_PMB_Slit_Door_Close_Pos" Device="" Addr="w1.05" Note="TM到PMB门阀关信号" />
    <DI_ITEM Index="22" Name="DI_TM_N2_Pressure_SW" Device="" Addr="w1.06" Note="TM N2气压表2" />
    <DI_ITEM Index="23" Name="DI_TM_CDA_Pressure_SW" Device="" Addr="w1.07" Note="TM CDA气压表" />
    <DI_ITEM Index="24" Name="DI_TM_HE_Pressure_SW" Device="" Addr="w1.08" Note="TM He气压表" />
    <DI_ITEM Index="25" Name="DI_PCW_Leak_SW" Device="" Addr="w1.09" Note="漏液检测器" />
    <DI_ITEM Index="26" Name="DI_VCE_VAC_SW" Device="" Addr="w1.10" Note="VCE真空信号" />
    <DI_ITEM Index="27" Name="DI_TM_VAC_SW" Device="" Addr="w1.11" Note="TM真空信号" />
    <DI_ITEM Index="28" Name="DI_TM_ROBOT_NOT_EXTEND_VCE" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
    <DI_ITEM Index="29" Name="DI_TM_ROBOT_NOT_EXTEND_PMA" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
    <DI_ITEM Index="30" Name="DI_TM_ROBOT_NOT_EXTEND_PMB" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
    <DI_ITEM Index="31" Name="DI_TM_ROBOT_NOT_EXTEND_PMC" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />
    <DI_ITEM Index="32" Name="DI_PMC_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w2.00" Note="PMC SLIT DOOR OPEN  ENABLE" />
    <DI_ITEM Index="33" Name="DI_PMC_Wafer_Senser" Device="" Addr="w2.01" Note="PMC wafer senser" />
    <DI_ITEM Index="34" Name="DI_TM_PMC_Slit_Door_Open_Pos" Device="" Addr="w2.02" Note="TM到PMC门阀开信号" />
    <DI_ITEM Index="35" Name="DI_TM_PMC_Slit_Door_Close_Pos" Device="" Addr="w2.03" Note="TM到PMC门阀关信号" />
  </Dig_In>
  <Dig_Out>
    <DO_ITEM Index="0" Name="" Device="" Addr="" />
    <DO_ITEM Index="1" Name="" Device="" Addr="" />
    <DO_ITEM Index="2" Name="" Device="" Addr="" />
    <DO_ITEM Index="3" Name="" Device="" Addr="" />
    <DO_ITEM Index="4" Name="" Device="" Addr="" />
    <DO_ITEM Index="5" Name="" Device="" Addr="" />
    <DO_ITEM Index="6" Name="" Device="" Addr="" />
    <DO_ITEM Index="7" Name="DO_PMC_Slit_Door_Open" Device="" Addr="w200.07" Note="TM到PMC门阀开"/>
    <DO_ITEM Index="8" Name="DO_PMC_Slit_Door_Close" Device="" Addr="w200.08" Note="TM到PMC门阀关"/>
    <DO_ITEM Index="9" Name="DO_TM_Soft_Pumping" Device="" Addr="w200.09"  Note="TM腔慢抽真空"/>
    <DO_ITEM Index="10" Name="DO_BUZZER2" Device="" Addr="w200.10" Note="蜂鸣2"/>
    <DO_ITEM Index="11" Name="DO_BUZZER1" Device="" Addr="w200.11" Note="蜂鸣1"/>
    <DO_ITEM Index="12" Name="DO_Red_Light_ON"  Device="" Addr="w200.12" Note="报警灯1(红灯)"/>
    <DO_ITEM Index="13" Name="DO_VCE_Slit_Door_Open" Device="" Addr="w200.13" Note="VCE到TM门阀开" />
    <DO_ITEM Index="14" Name="DO_VCE_Slit_Door_Close" Device="" Addr="w200.14" Note="VCE到TM门阀关" />
    <DO_ITEM Index="15" Name="DO_PMA_Slit_Door_Open" Device="" Addr="w200.15" Note="TM到PMA门阀开"/>
    <DO_ITEM Index="16" Name="DO_PMA_Slit_Door_Close" Device="" Addr="w201.00" Note="TM到PMA门阀关"/>
    <DO_ITEM Index="17" Name="DO_PMB_Slit_Door_Open" Device="" Addr="w201.01" Note="TM到PMB门阀开"/>
    <DO_ITEM Index="18" Name="DO_PMB_Slit_Door_Close" Device="" Addr="w201.02" Note="TM到PMB门阀关"/>
    <DO_ITEM Index="19" Name="DO_Orange_Light_ON" Device="" Addr="w201.03" Note="报警灯2(橙灯)"/>
    <DO_ITEM Index="20" Name="DO_Green_Light_ON" Device="" Addr="w201.04" Note="报警灯3(绿灯)"/>
    <DO_ITEM Index="21" Name="DO_TM_Fast_Pumping" Device="" Addr="w201.05" Note="TM腔快抽真空"/>
    <DO_ITEM Index="22" Name="DO_Blue_Light_ON" Device="" Addr="w201.06" Note="报警灯4(蓝灯)"/>
    <DO_ITEM Index="23" Name="DO_TM_Fast_Vent" Device="" Addr="w201.07" Note="TM腔快破真空"/>
    <DO_ITEM Index="24" Name="DO_TM_Soft_Vent" Device=""  Addr="w201.08" Note="TM腔慢破真空"/>
    <DO_ITEM Index="25" Name="DO_VCE_Fast_Pumping" Device="" Addr="w201.09" Note="VCE腔快抽真空"/>
    <DO_ITEM Index="26" Name="DO_VCE_Soft_Pumping" Device="" Addr="w201.10" Note="VCE腔慢抽真空" />
    <DO_ITEM Index="27" Name="DO_VCE_Fast_Vent" Device="" Addr="w201.11" Note="VCE腔快破真空"/>
    <DO_ITEM Index="28" Name="DO_VCE_Soft_Vent" Device="" Addr="w201.12" Note="VCE腔慢破真空"/>
    <DO_ITEM Index="29" Name="DO_PCW_Valve" Device="" Addr="w201.13" Note="水阀"/>
    <DO_ITEM Index="30" Name="DO_System_Power_OFF_Enable" Device=""  Addr="w201.14" Note="系统允许断电"/>
    <DO_ITEM Index="31" Name="DO_System_Control_OUT" Device=""  Addr="w201.15" Note="备用"/>
    <DO_ITEM Index="32" Name="" Device="" Addr="" />
    <DO_ITEM Index="33" Name="" Device="" Addr="" />
    <DO_ITEM Index="34" Name="" Device="" Addr="" />
    <DO_ITEM Index="35" Name="" Device="" Addr="" />
    <DO_ITEM Index="36" Name="" Device="" Addr="" />
  </Dig_Out>
  <Ana_Out>
    <AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d1000"  Note="MFC Flow Setpoint" />
    <AO_ITEM Index="1" Name="" BufferOffset="" />
    <AO_ITEM Index="2" Name="" BufferOffset=""  />
    <AO_ITEM Index="3" Name="" BufferOffset="" />
    <AO_ITEM Index="4" Name="" BufferOffset="" />
    <AO_ITEM Index="5" Name="AO_TM_Pressure" BufferOffset="10" Device="" Addr="d1010"  Note="TM Pressure"/>
    <AO_ITEM Index="6" Name="" BufferOffset="" />
    <AO_ITEM Index="7" Name="" BufferOffset=""  />
    <AO_ITEM Index="8" Name="" BufferOffset=""/>
    <AO_ITEM Index="9" Name="" BufferOffset="" />
    <AO_ITEM Index="10" Name="" BufferOffset="" />
    <AO_ITEM Index="11" Name="" BufferOffset=""  />
    <AO_ITEM Index="12" Name="" BufferOffset="" />
    <AO_ITEM Index="13" Name="" BufferOffset="" />
    <AO_ITEM Index="14" Name="" BufferOffset="" />
    <AO_ITEM Index="15" Name="" BufferOffset="" />
    <AO_ITEM Index="16" Name="" BufferOffset="" />
    <AO_ITEM Index="17" Name="" BufferOffset="" />
    <AO_ITEM Index="18" Name="" BufferOffset="" />
    <AO_ITEM Index="19" Name="" BufferOffset="" />
    <AO_ITEM Index="20" Name="" BufferOffset="" />
    <AO_ITEM Index="21" Name="" />
    <AO_ITEM Index="22" Name="" />
    <AO_ITEM Index="23" Name="" />
    <AO_ITEM Index="24" Name="" />
    <AO_ITEM Index="25" Name="" />
    <AO_ITEM Index="26" Name="" />
    <AO_ITEM Index="27" Name="" />
    <AO_ITEM Index="28" Name="" />
    <AO_ITEM Index="29" Name="" />
    <AO_ITEM Index="30" Name="" />
    <AO_ITEM Index="31" Name="" />
    <AO_ITEM Index="32" Name="" />
    <AO_ITEM Index="33" Name="" />
    <AO_ITEM Index="34" Name="" />
    <AO_ITEM Index="35" Name="" />
    <AO_ITEM Index="36" Name="" />
    <AO_ITEM Index="37" Name="" />
    <AO_ITEM Index="38" Name="" />
    <AO_ITEM Index="39" Name="" />
    <AO_ITEM Index="40" Name="" />
    <AO_ITEM Index="41" Name="" />
    <AO_ITEM Index="42" Name="" />
    <AO_ITEM Index="43" Name="" />
    <AO_ITEM Index="44" Name="" />
    <AO_ITEM Index="45" Name="" />
    <AO_ITEM Index="46" Name="" />
    <AO_ITEM Index="47" Name="" />
    <AO_ITEM Index="48" Name="" />
    <AO_ITEM Index="49" Name="" />
  </Ana_Out>
  <Ana_In>
    <AI_ITEM Index="0" Name="AI_VCE_Pressure"  BufferOffset="0" Device="" Addr="d2000" />
    <AI_ITEM Index="1" Name="AI_TM_Pressure"  BufferOffset="2" Device="" Addr="d2002" />
    <AI_ITEM Index="2" Name="AI_Foreline_Pressure"  BufferOffset="4" Device="" Addr="d2004"/>
    <AI_ITEM Index="3" Name="AI_MFC_Flow"  BufferOffset="6" Device="" Addr="d2006"/>
    <AI_ITEM Index="4" Name=""/>
    <AI_ITEM Index="5" Name=""/>
    <AI_ITEM Index="6" Name="" />
    <AI_ITEM Index="7" Name=""/>
    <AI_ITEM Index="8" Name=""/>
    <AI_ITEM Index="9" Name=""/>
    <AI_ITEM Index="10" Name="" />
    <AI_ITEM Index="11" Name=""/>
    <AI_ITEM Index="12" Name=""/>
    <AI_ITEM Index="13" Name=""/>
    <AI_ITEM Index="14" Name=""/>
    <AI_ITEM Index="15" Name=""/>
    <AI_ITEM Index="16" Name=""/>
    <AI_ITEM Index="17" Name=""/>
    <AI_ITEM Index="18" Name=""/>
    <AI_ITEM Index="19" Name=""/>
    <AI_ITEM Index="20" Name=""/>
    <AI_ITEM Index="21" Name="" />
    <AI_ITEM Index="22" Name=""/>
    <AI_ITEM Index="23" Name=""/>
    <AI_ITEM Index="24" Name=""/>
    <AI_ITEM Index="25" Name=""/>
    <AI_ITEM Index="26" Name="" />
    <AI_ITEM Index="27" Name="" />
    <AI_ITEM Index="28" Name="" />
    <AI_ITEM Index="29" Name="" />
    <AI_ITEM Index="30" Name="" />
    <AI_ITEM Index="31" Name="" />
    <AI_ITEM Index="32" Name="" />
    <AI_ITEM Index="33" Name="" />
    <AI_ITEM Index="34" Name="" />
    <AI_ITEM Index="35" Name="" />
    <AI_ITEM Index="36" Name="" />
    <AI_ITEM Index="37" Name="" />
    <AI_ITEM Index="38" Name="" />
    <AI_ITEM Index="39" Name="" />
    <AI_ITEM Index="40" Name="" />
    <AI_ITEM Index="41" Name="" />
    <AI_ITEM Index="42" Name="" />
    <AI_ITEM Index="43" Name="" />
    <AI_ITEM Index="44" Name="" />
    <AI_ITEM Index="45" Name="" />
    <AI_ITEM Index="46" Name="" />
    <AI_ITEM Index="47" Name="" />
    <AI_ITEM Index="48" Name="" />
    <AI_ITEM Index="49" Name="" />
  </Ana_In>
</IO_DEFINE>