Kepler-Release/Venus/Venus_RT/Modules/TM/MFSwapRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using Venus_RT.Devices;
using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using Venus_Core;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using System;
using System.Text;
using System.Collections.Generic;
using MECF.Framework.Common.Schedulers;
using System.Linq;
using MECF.Framework.Common.DBCore;

namespace Venus_RT.Modules.TM
{
    class MFSwapRoutine : ModuleRoutineBase, IRoutine
    {
        private enum SwapStep
        {
            WaitModuleReady,
            PreRotation,
            ModulePrepare,
            WaitPressreStable,
            OpenSlitDoor,
            MoveWafer,
            WaitMaferMoved,
            QueryAwc,
            CheckAwc,
            MoveEnd,
            CloseSlitDoor,
            NotifyDone,
        }

        private readonly JetTM _JetTM;
        private readonly ITransferRobot _robot;

        private int _moveTimeout = 30 * 1000;
        private ModuleName _targetModule;
        private LLEntity _llModule;

        //private int _autoVentOptInWafer = 0;
        //private int _autoVentOptOutWafer = 4;

        private SequenceLLInOutPath _sequencePattern = SequenceLLInOutPath.DInDOut;
        //private bool _bAutoMode = true;
        private bool _isAWC;

        Queue<MoveItem> _actionList = new Queue<MoveItem>();
        MoveItem _currentAction;
        double maxPressureDifference;
        List<MoveItem> _currentactionList=new List<MoveItem>();
        private DateTime _starttime;
        int awcAlarmRange;
        private bool _pickQueryAWC;
        private bool _placeQueryAWC;
        public MFSwapRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)
        {
            _JetTM = tm;
            _robot = robot;

            Name = "Swap";
        }
        public RState Start(params object[] objs)
        {
            if (!_robot.IsHomed)
            {
                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
                return RState.Failed;
            }

            _actionList.Clear();
            foreach (var item in (Queue<MoveItem>)objs[0])
            {
                _actionList.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, item.DestinationModule, item.DestinationSlot, item.RobotHand));
            }

            if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(_actionList))
                return RState.Failed;

            var firtItem = _actionList.Peek();
            if (ModuleHelper.IsLoadLock(firtItem.SourceModule))
                _targetModule = firtItem.SourceModule;
            else if (ModuleHelper.IsLoadLock(firtItem.DestinationModule))
                _targetModule = firtItem.DestinationModule;
            else
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Invalid move parameter: {firtItem.SourceModule},{firtItem.SourceSlot + 1} => {firtItem.DestinationModule},{firtItem.DestinationSlot + 1} ");
                return RState.Failed;
            }

            _llModule = Singleton<RouteManager>.Instance.GetLL(_targetModule);
            if (_llModule == null)
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Invalid Loadlock: {_targetModule}, maybe not installed");
                return RState.Failed;
            }

            Reset();

            //_autoVentOptInWafer = SC.GetValue<int>("TM.LLAutoVentInWaferOpt");
            //_autoVentOptOutWafer = SC.GetValue<int>("TM.LLAutoVentOutWaferOpt");

            _sequencePattern = Singleton<RouteManager>.Instance.LLInOutPath;
            //_bAutoMode = Singleton<RouteManager>.Instance.IsAutoMode;
            maxPressureDifference = SC.GetValue<double>("System.TMLLMaxPressureDifference");
            _currentactionList = _actionList.ToList();
            awcAlarmRange = SC.GetValue<int>($"TM.EnterLLAWCAlarmLimit");
            int queryAWCType = SC.GetValue<int>($"TM.QueryAWCOption");
            if (queryAWCType == 0)
            {
                _pickQueryAWC = false;
                _placeQueryAWC = false;
            }
            else if(queryAWCType == 1)
            {
                _pickQueryAWC = true;
            }
            else if (queryAWCType == 2)
            {
                _placeQueryAWC = true;
            }
            else if (queryAWCType == 3)
            {
                _pickQueryAWC = true;
                _placeQueryAWC = true;
            }
            return Runner.Start(Module, $"Swap with {_targetModule}");
        }

        public RState Monitor()
        {
            Runner.Wait(SwapStep.WaitModuleReady, () => _llModule.IsIdle, _delay_3m)
                .RunIf(SwapStep.PreRotation,      _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone, _delay_30s)
                .Run(SwapStep.ModulePrepare,      ModulePrepare, IsModulePrepareReady)
                .Wait(SwapStep.WaitPressreStable, TMLLPressureIsOK, _delay_60s)
                .Run(SwapStep.OpenSlitDoor,       OpenSlitDoor,  IsSlitDoorOpen, _delay_30s)
                .LoopStart(SwapStep.MoveWafer,    loopName(),    _actionList.Count, MoveWafer)
                .LoopRun(SwapStep.WaitMaferMoved, NullFun,       WaitWaferMoved)
                .LoopRunIf(SwapStep.QueryAwc,     _isAWC,        QueryAwc,      WaitQueryDoneAndRecord,_delay_30s)
                .LoopRunIf(SwapStep.CheckAwc,     _isAWC,        CheckAwc)
                .LoopEnd(SwapStep.MoveEnd,        NullFun)

                .Run(SwapStep.CloseSlitDoor,      CloseSlitDoor, IsSlitDoorClosed, _delay_30s)
                .End(SwapStep.NotifyDone,         NotifyLLDone, _delay_50ms);

            return Runner.Status;
        }
        private bool TMLLPressureIsOK()
        {
            if (RouteManager.IsATMMode)
            {
                return _JetTM.IsTMATM && _JetTM.IsModuleATM(_targetModule);
            }
            else
            {
                double llPressure = 0;
                if (_targetModule == ModuleName.LLA)
                {
                    llPressure = _JetTM.LLAPressure;
                }
                else if (_targetModule == ModuleName.LLB)
                {
                    llPressure = _JetTM.LLBPressure;
                }
                if (Math.Abs((llPressure - _JetTM.ChamberPressure)) < maxPressureDifference - 2)
                {
                    return true;
                }
                else
                {
                    return false;
                }
            }
        }
        private bool ModulePrepare()
        {
            _llModule.PostMsg(LLEntity.MSG.Prepare_TM);
            return true;
        }

        private string loopName()
        {
            return "LoadLock Swap";
        }

        private bool IsModulePrepareReady()
        {
            return _llModule.Status == LLEntity.LLStatus.Ready_For_TM;
        }

        private bool OpenSlitDoor()
        {
            return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);
        }

        private bool CloseSlitDoor()
        {
            return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);
        }

        private bool IsSlitDoorOpen()
        {
            //if (_targetModule == ModuleName.LLA)
            //    return _JetTM.IsLLASlitDoorOpen;
            //else
            //    return _JetTM.IsLLBSlitDoorOpen;
            if (_targetModule == ModuleName.LLA)
            {
                if (_JetTM.IsLLASlitDoorOpen)
                {
                    //_llModule.IsDoorsAllClosed = false;
                    return true;
                }
                return false;
            }
            else
            {
                if (_JetTM.IsLLBSlitDoorOpen)
                {
                    //_llModule.IsDoorsAllClosed = false;
                    return true;
                }
                return false;
            }
        }

        private bool IsSlitDoorClosed()
        {
            if (_targetModule == ModuleName.LLA)
            {
                if (_JetTM.IsLLASlitDoorClosed)
                {
                    //_llModule.IsDoorsAllClosed = true;
                    return true;
                }
                return false;
            }
            else
            {
                if (_JetTM.IsLLBSlitDoorClosed)
                {
                    //_llModule.IsDoorsAllClosed = true;
                    return true;
                }
                return false;
            }
            //if (_targetModule == ModuleName.LLA)
            //    return _JetTM.IsLLASlitDoorClosed;
            //else
            //    return _JetTM.IsLLBSlitDoorClosed;
        }

        private bool VerifyWaferExistence(MoveItem item)
        {
            if (WaferManager.Instance.CheckHasWafer(item.DestinationModule, item.DestinationSlot))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot move wafer as desitination {_currentAction.DestinationModule},{_currentAction.DestinationSlot + 1} already a wafer: ");
                return false;
            }

            if (WaferManager.Instance.CheckNoWafer(_currentAction.SourceModule, _currentAction.SourceSlot))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot move wafer as source {_currentAction.SourceModule}, {_currentAction.SourceSlot + 1} has no wafer");
                return false;
            }

            return true;
        }

        private bool MoveWafer()
        {
            _currentAction = _actionList.Dequeue();
            _starttime=DateTime.Now;
            _isAWC= (_currentAction.TransferType == EnumMoveType.Pick && _pickQueryAWC == true) || (_currentAction.TransferType == EnumMoveType.Place && _placeQueryAWC == true);
            if (!VerifyWaferExistence(_currentAction))
                return false;

            var wafer = WaferManager.Instance.GetWafer(_currentAction.SourceModule, _currentAction.SourceSlot);
            LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_currentAction.SourceModule} {_currentAction.SourceSlot + 1}  to {_currentAction.DestinationModule} {_currentAction.DestinationSlot + 1}");

            if (ModuleHelper.IsLoadLock(_currentAction.SourceModule) && ModuleHelper.IsTMRobot(_currentAction.DestinationModule))
            {
                return _robot.Pick(_currentAction.SourceModule, _currentAction.SourceSlot, (Hand)_currentAction.DestinationSlot);
            }
            else if (ModuleHelper.IsTMRobot(_currentAction.SourceModule) && ModuleHelper.IsLoadLock(_currentAction.DestinationModule))
            {
                //if (ModuleHelper.IsLoadLock(_targetModule))
                //{
                //    _llModule.PostMsg(LLEntity.MSG.Transfer_TM_SlotInfo, _currentAction.DestinationSlot);
                //}

                return _robot.Place(_currentAction.DestinationModule, _currentAction.DestinationSlot, (Hand)_currentAction.SourceSlot);
            }
            else
            {
                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Invalid move parameter, source:{_currentAction.SourceModule},{_currentAction.SourceSlot}, destination: {_currentAction.DestinationModule}, {_currentAction.DestinationSlot}");
                return false;
            }
        }

        private bool WaitWaferMoved()
        {
            if (_robot.Status == RState.Running)
            {
                if (Runner.StepElapsedMS > _moveTimeout)
                {
                    WaferManager.Instance.CreateDuplicatedWafer(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);
                    Runner.Stop($"TM Robot moving wafer from {_currentAction.SourceModule}.{_currentAction.SourceSlot + 1} to {_currentAction.DestinationModule}.{_currentAction.DestinationSlot + 1} timeout, {_moveTimeout}ms");
                    return true;
                }

                return false;
            }
            else if (_robot.Status == RState.End)
            {
                WaferManager.Instance.WaferMoved(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);
                return true;
            }
            else
            {
                WaferManager.Instance.CreateDuplicatedWafer(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);
                Runner.Stop($"TM Robot moving wafer failed, {_robot.Status}");
                return true;
            }
        }

        private bool RotateArm()
        {
            ModuleName preModule = _targetModule;
            Hand rotateHand = Hand.Blade1;
            if (ModuleHelper.IsLoadLock(_actionList.Peek().DestinationModule) && ModuleHelper.IsTMRobot(_actionList.Peek().SourceModule))
            {
                rotateHand = (Hand)_actionList.Peek().SourceSlot;
                preModule = _JetTM.PreRotateModules[_targetModule];
            }
            else
            {
                rotateHand = (Hand)_actionList.Peek().DestinationSlot;
            }

            _llModule.PostMsg(LLEntity.MSG.Prepare_TM); // Notify Loadlock to Serv pressure in advance for throughput enhancement
            return _robot.Goto(preModule, 0, rotateHand);
        }

        private bool WaitRotateDone()
        {
            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
                return true;
            }
        }

        private bool NotifyLLDone()
        {
            _llModule.PostMsg(LLEntity.MSG.TM_Exchange_Ready, _currentactionList.Exists(ac => ModuleHelper.IsLoadLock(ac.DestinationModule)));
            return true;
        }
        private bool QueryAwc()
        {
            if (_robot.QueryAwc())
                return true;
            else
                return false;
        }
        private bool WaitQueryDoneAndRecord()
        {

            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                var wafer = WaferManager.Instance.GetWafer(_currentAction.DestinationModule, _currentAction.DestinationSlot);
                string _origin_module = $"LP{wafer.OriginStation}";
                int _origin_slot = wafer.OriginSlot;
                //查询完毕 插入数据
                OffsetDataRecorder.RecordOffsetData(
                    Guid.NewGuid().ToString(),
                    _currentAction.SourceModule, _currentAction.SourceSlot,
                    _currentAction.DestinationModule, _currentAction.DestinationSlot,
                    _origin_module, _origin_slot,
                    _currentAction.RobotHand, RobotArmPan.None,
                    _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D,
                    _starttime, DateTime.Now);

                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
                return true;
            }
        }

        private bool CheckAwc()
        {
            if (Math.Abs(_robot.Offset_X) > awcAlarmRange)
            {
                Stop($"Wafer from {_currentAction.SourceModule} {_currentAction.SourceSlot} to {_currentAction.DestinationModule} {_currentAction.DestinationSlot} {_currentAction.TransferType},Check  AWC 失败， 当前 X AWC [{_robot.Offset_X}]um, 高于Alarm最大值: [{awcAlarmRange}]um");
                return false;
            }
            if (Math.Abs(_robot.Offset_Y) > awcAlarmRange)
            {
                Stop($"Wafer from {_currentAction.SourceModule} {_currentAction.SourceSlot} to {_currentAction.DestinationModule} {_currentAction.DestinationSlot} {_currentAction.TransferType},Check  AWC 失败， 当前 Y AWC [{_robot.Offset_Y}]um, 高于Alarm最大值: [{awcAlarmRange}]um");
                return false;
            }
            return true;
        }
        public void Abort()
        {
            //_robot.Halt();
        }
    }
}