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- <?xml version="1.0" encoding="utf-8" ?>
- <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
- <Dig_In>
- <DI_ITEM Index="1" Name="DI_SYSTEM_CDA_PRESSURE_OK" Device="" Addr="w0.00" Note="" />
- <DI_ITEM Index="2" Name="DI_SYSTEM_N2_PRESSURE_OK" Device="" Addr="w0.01" Note="" />
- <DI_ITEM Index="3" Name="DI_VCE_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.02" Note="" />
- <DI_ITEM Index="4" Name="DI_PMA_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.03" Note="" />
- <DI_ITEM Index="5" Name="DI_PMB_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.04" Note="" />
- <DI_ITEM Index="6" Name="DI_PMC_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.05" Note="" />
- <DI_ITEM Index="7" Name="DI_TM_RB_EXTEND_VCE_ENABLE" Device="" Addr="w0.06" Note="" />
- <DI_ITEM Index="8" Name="DI_TM_RB_EXTEND_PMA_ENABLE" Device="" Addr="w0.07" Note="" />
- <DI_ITEM Index="9" Name="DI_TM_RB_EXTEND_PMB_ENABLE" Device="" Addr="w0.08" Note="" />
- <DI_ITEM Index="10" Name="DI_TM_RB_EXTEND_PMC_ENABLE" Device="" Addr="w0.09" Note="" />
- <DI_ITEM Index="11" Name="DI_AC_RACK_FAN OK" Device="" Addr="w0.10" Note="" />
- <DI_ITEM Index="12" Name="DI_AC_RACK_SOMKE_OUT1" Device="" Addr="w0.11" Note="" />
- <DI_ITEM Index="13" Name="DI_AC_RACK_SOMKE_OUT2" Device="" Addr="w0.12" Note="" />
- <DI_ITEM Index="14" Name="DI_FAB_SOMKE_OUT" Device="" Addr="w0.13" Note="" />
- <DI_ITEM Index="15" Name="DI_ABNORMAL_EXHAUST_GAS" Device="" Addr="w0.14" Note="" />
- <DI_ITEM Index="16" Name="DI_N2_PRESSURE_SENSOR1" Device="" Addr="w0.15" Note="" />
- <DI_ITEM Index="17" Name="DI_VCE_TO_PA_VALVE_OPEN" Device="" Addr="w1.00" Note="" />
- <DI_ITEM Index="18" Name="DI_VCE_TO_PA_VALVE_CLOSE" Device="" Addr="w1.01" Note="" />
- <DI_ITEM Index="19" Name="DI_TM_TO_PMB_VALVE_OPEN" Device="" Addr="w1.02" Note="" />
- <DI_ITEM Index="20" Name="DI_TM_TO_PMB_VALVE_CLOSE" Device="" Addr="w1.03" Note="" />
- <DI_ITEM Index="21" Name="DI_TM_ATM_SENSOR" Device="" Addr="w1.04" Note="" />
- <DI_ITEM Index="22" Name="DI_VCE_ATM_SENSOR" Device="" Addr="w1.05" Note="" />
- <DI_ITEM Index="23" Name="DI_N2_PRESSURE_SENSOR2" Device="" Addr="w1.06" Note="" />
- <DI_ITEM Index="24" Name="DI_CDA_PRESSURE_SENSOR" Device="" Addr="w1.07" Note="" />
- <DI_ITEM Index="25" Name="DI_He_PRESSURE_SENSOR" Device="" Addr="w1.08" Note="" />
- <DI_ITEM Index="26" Name="DI_LEAK_SENSOR" Device="" Addr="w1.09" Note="" />
- <DI_ITEM Index="27" Name="DI_TM_VACUUM_GAUGE" Device="" Addr="w1.10" Note="" />
- <DI_ITEM Index="28" Name="DI_VCE_VACUUM_GAUGE" Device="" Addr="w1.11" Note="" />
- <DI_ITEM Index="29" Name="DI_ROBOT_TO_VCE_RETRACT" Device="" Addr="w1.12" Note="" />
- <DI_ITEM Index="30" Name="DI_ROBOT_TO_PMA_RETRACT" Device="" Addr="w1.13" Note="" />
- <DI_ITEM Index="31" Name="DI_ROBOT_TO_PMB_RETRACT" Device="" Addr="w1.14" Note="" />
- <DI_ITEM Index="32" Name="DI_ROBOT_TO_PMC_RETRACT" Device="" Addr="w1.15" Note="" />
- </Dig_In>
- <Dig_Out>
- <DO_ITEM Index="1" Name="DO_SLIT_DOOR_CLOSED_TO_VCE" Device="" Addr="W100.00"/>
- <DO_ITEM Index="2" Name="DO_SLIT_DOOR_CLOSED_TO_PMA" Device="" Addr="W100.01"/>
- <DO_ITEM Index="3" Name="DO_SLIT_DOOR_CLOSED_TO_PMB" Device="" Addr="W100.02"/>
- <DO_ITEM Index="4" Name="DO_SLIT_DOOR_CLOSED_TO_PMC" Device="" Addr="W100.03"/>
- <DO_ITEM Index="5" Name="DO_TM_ROBOT_NOT_EXTEND_TO_VCE" Device="" Addr="W100.04"/>
- <DO_ITEM Index="6" Name="DO_TM_ROBOT_NOT_EXTEND_TO_PMA" Device="" Addr="W100.05"/>
- <DO_ITEM Index="7" Name="DO_TM_ROBOT_NOT_EXTEND_TO_PMB" Device="" Addr="W100.06"/>
- <DO_ITEM Index="8" Name="DO_TM_ROBOT_NOT_EXTEND_TO_PMC" Device="" Addr="W100.07"/>
- <DO_ITEM Index="9" Name="DO_SYSTEM_NO_WATER_LEAK" Device="" Addr="W100.08"/>
- <DO_ITEM Index="10" Name="DO_RB_EXTEND_VCE_OK" Device="" Addr="W100.09"/>
- <DO_ITEM Index="11" Name="DO_RB_EXTEND_PMA_OK" Device="" Addr="W100.10"/>
- <DO_ITEM Index="12" Name="DO_RB_EXTEND_PMB_OK" Device="" Addr="W100.11"/>
- <DO_ITEM Index="13" Name="DO_RB_EXTEND_PMC_OK" Device="" Addr="W100.12"/>
- <DO_ITEM Index="14" Name="DO_VCE_TO_TM_VALVE_OPEN" Device="" Addr="W100.13"/>
- <DO_ITEM Index="15" Name="DO_VCE_TO_TM_VALVE_CLOSED" Device="" Addr="W100.14"/>
- <DO_ITEM Index="16" Name="DO_PMA_VALVE_OPEN" Device="" Addr="W100.15"/>
- <DO_ITEM Index="17" Name="DO_PMA_VALVE_CLOSED" Device="" Addr="W101.00"/>
- <DO_ITEM Index="18" Name="DO_PMB_VALVE_OPEN" Device="" Addr="W101.01"/>
- <DO_ITEM Index="19" Name="DO_PMB_VALVE_CLOSED" Device="" Addr="W101.02"/>
- <DO_ITEM Index="20" Name="DO_PMC_VALVE_OPEN" Device="" Addr="W101.03"/>
- <DO_ITEM Index="21" Name="DO_PMC_VALVE_CLOSED" Device="" Addr="W101.04"/>
- <DO_ITEM Index="22" Name="DO_TM_FAST_PUMP" Device="" Addr="W101.05"/>
- <DO_ITEM Index="23" Name="DO_TM_SOFT_PUMP" Device="" Addr="W101.06"/>
- <DO_ITEM Index="24" Name="DO_TM_FAST_VENT" Device="" Addr="W101.07"/>
- <DO_ITEM Index="25" Name="DO_TM_SOFT_VENT" Device="" Addr="W101.08"/>
- <DO_ITEM Index="26" Name="DO_VCE_FAST_PUMP" Device="" Addr="W101.09"/>
- <DO_ITEM Index="27" Name="DO_VCE_SOFT_PUMP" Device="" Addr="W101.10"/>
- <DO_ITEM Index="28" Name="DO_VCE_FAST_VENT" Device="" Addr="W101.11"/>
- <DO_ITEM Index="29" Name="DO_VCE_SOFT_VENT" Device="" Addr="W101.12"/>
- <DO_ITEM Index="30" Name="DO_220V_COIL" Device="" Addr="W101.13"/>
- <DO_ITEM Index="31" Name="DO_CDA_PRESSURE_OK" Device="" Addr="W101.14"/>
- <DO_ITEM Index="32" Name="DO_N2_PRESSURE_OK" Device="" Addr="W101.15"/>
- </Dig_Out>
- <Ana_In>
- </Ana_In>
- <Ana_Out>
- </Ana_Out>
- </IO_DEFINE>
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