Kepler-Release/Venus/Venus_RT/Config/System_Kepler2200.sccfg

<?xml version="1.0" encoding="utf-8"?>
<root system="Venus">
	<configs name="System" nameView="System">
		<config default="True" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="false" Restart="1"/>
		<config default="true" name="IsOpenIOEdit" nameView="Simulator Mode" description="RT IO修改开关" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
		<config default="True" name="IsOpenDebugLog" nameView="" description="打开调试日志" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
		<config default="false" name="IsATMMode" nameView="ATM Mode" description="大气压传送测试模式" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="false" Restart="1"/>
		<!--<config default="false" name="IsCycleMode" nameView="Cycle Mode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="3" name="CycleCount" nameView="Cycle Count" description="循环次数" max="999999" min="1" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM循环测试取片延时时间" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
		<config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
		<!--<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />-->
		<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
		<!--<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />-->
		<!--<config default="15" name="PMLLMaxPressureDifference" nameView="Max PM/LL Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="15" name="TMLLMaxPressureDifference" nameView="Max TM/LL Pressure difference for open slit valve" description="TM/LL最大传片压力差" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
		<config default="15" name="PMTMMaxPressureDifference" nameView="Max PM/TM Pressure difference for open slit valve" description="PM/TM最大传片压力差" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
		<config default="LLA,PMA,EfemRobot" name="InstalledModules" description="机台安装的模块" max="" min="" paramter="" tag="" unit="N/A" visible="false" type="String" Restart="1" />
		<!--<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="N/A" visible="true" type="Integer" />-->
		<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="记录COM数据日志" max="" min="" paramter="" tag="" unit="N/A" visible="false" type="String" />
		<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库，2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
		<config default="false" name="IsEnableEthercat" nameView="Is Enable Ethercat" description="是否开启凌华Ethercat" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
		<config default="10"  name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔，单位为分钟，0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
		<config default="1000"  name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
		<config default="Kepler" name="Name" nameView="Name" description="Kepler型号" tag="" unit="N/A" type="String" />
		<config default="0" name="LoadlockSlotInOutOption"  nameView="Loadlock Slot In Out Option" description="0, All slots in All slot Out; 1, Upper slots in lower slots out; 2, Lower slots in Upper slot out " max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>
		<config default="false" name="EnableDeviceLog" nameView="" description="启用设备日志" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="0" name ="SpecialRoutingPattern" nameView="Secail system routing pattern" description="0, disable, 1, long time recipe mode;" max="99" min="0" parameter="" tag="" unit="N/A" type="Integer" visible="false"/>
		<config default="90" name="LogsSaveDays" description="Log文件保留天数" max="365" min="10" paramter="" tag="" unit="" type="Integer" />
		<!--<configs name="FDC" nameView="FDC">
			<config default="Fdc" name="DataGroupName"  nameView="FDC Data group" description="FDC data group, defined in DataGroup.xml" max="" min="" paramter="" tag="" visible="false" unit="N/A" type="String" />
			<config default="1000" name="DelayTime"  nameView="FDC Sample Delay Time" description="Step Delay time before collection FDC data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
			<config default="100" name="SampleInterval" nameView="FDC Sample Interval" description="interval time collection FDC sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		</configs>-->

		<!--<configs name="WaferThickness" nameView="WaferThickness" visible="false">
			<config default="true" name="EnableThickness" nameView="Is active thickness functions" description="是否有厚片薄片功能" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="Thin" name="LP1WaferThicknessType" nameView="LP1 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
			<config default="Thick" name="LP2WaferThicknessType" nameView="LP2 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
		</configs>-->

		<configs name="Job" nameView="Job">
			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="0" name="PPSelectFoupMode" nameView="PP-Select Foup Mode"  description="0:从下往上是1-25，1:从上往下是1-25" max="1" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="60" name="PreCleanIdleMaxTime" nameView="Pre Clean Idle Max Time"  description="PreClean 超过最大时间再做" max="86400" min="0" paramter="" tag="" unit="s" type="Integer" />

		</configs>
	</configs>

	<!--FA-->
	<configs name="FA" nameView="FA">
		<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="127.0.0.1" name="LocalIpAddress" nameView="Local Ip Address" description="FA本地连接地址 " max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="5000" name="LocalPortNumber" nameView="Local Port Number" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="127.0.0.1" name="RemoteIpAddress" nameView="Remote Ip Address" description=" FA远程连接地址" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="5001" name="RemotePortNumber" nameView="Remote Port Number" description="FA远程串口数量 " max="99999" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="45" name="T3Timeout" nameView="T3 Timeout" description="FA.T3超时设置 " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="10" name="T5Timeout" nameView="T5 Timeout" description="FA.T5超时设置 " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="5" name="T6Timeout" nameView="T6 Timeout" description=" FA.T6超时设置" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="10" name="T7Timeout" nameView="T7 Timeout" description="FA.T7超时设置 " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="5" name="T8Timeout" nameView="T8 Timeout" description=" FA.T8超时设置" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="false" name="EnableSpooling" nameView="Enable Spooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="30" name="LinkTestInterval" nameView="Link Test Interval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="0" name="DeviceId" nameView="Device Id" description="DeviceId" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="0" name="SpoolingCapability" description="Spooling Capacity" max="99999" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="0" name="SpoolingMaxTransmit" description="Spooling Max transmit" max="99999" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="true" name="SpoolingFullOverWrite" description="Spooling Full OverWrite" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="Remote" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="ASCII" name="HsmsEncoding" description="HsmsEncoding" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="ASCII" name="SerialEncoding" description="SerialEncoding" max="0" min="0" paramter="" tag="" unit="N/A" type="String" />
		<config default="true" name="EnableReWriteStatusVariable" nameView="EnableReWriteStatusVariable" description="Enable ReWrite Equipment PM Status Variable" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
	</configs>

	<!--Router-->
	<configs name="Scheduler" nameView="Scheduler" >
		<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="按sequence生成顺序跑货（ture=串行模式；false=并行模式）" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<!--<config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />-->
	</configs>

	<!--EFEM-->
	<configs name="EFEM" nameView="EFEM">
		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="EFEM动作指令运动超时时间" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
		<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="true"/>
		<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="N/A" type="Bool" visible="true"/>


		<config default="1" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川 2=Jet自制 3=Brooks" max="300" min="1" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />

		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />

		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />

		<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="0" />

		<config default="4" name="LLAutoPumpInWaferOpt" nameView="Loadlock Auto Pump Option for Raw Wafer" description="当没作工艺wafer数量大于或等于此数量时，自动开始Pump" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="0" name="LLAutoPumpOutWaferOpt" nameView="Loadlock Auto Pump Option for Processed Wafer" description="当完成工艺wafer数量小于或等于此数量时，自动开始Pump" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="false" name="LightCurtainAlarmEnable" nameView="Light Curtain Alarm Enable" description="是否开启光栅报警" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />

		<configs name="LoadPort" nameView="LoadPort" >
			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="LoadPort动作指令超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="30" name="HomeTimeout" nameView="Home Timeout"  description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="25" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
			<config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="编号顺序从下往上，最下面的是1" max="" min="" paramter="" tag="" unit="N/A" type="Bool" Restart="1" />

			<config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="是否打开扫码枪功能" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" Restart="1" />

		</configs>
		<configs name="Aligner" nameView="Aligner">
			<config default ="0" name="AlignAngle" nameView="Align Angle" description="Align转角角度" max="360" min="0" parameter="" tag="" unit="N/A" type="Integer" />
			<config default ="0" name="IncreasingAngle" nameView="Increasing Angle" description="每片wafer过Align时增加角度"  max="360" min="0" parameter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="LoadLock" nameView="LoadLock">
			<config default ="0" name="LLAAlignAngle"      nameView="LLA Align Angle"      description="LLA Align转角角度"               max="360" min="0" parameter="" tag="" unit="N/A" type="Integer" />
			<config default ="0" name="LLAIncreasingAngle" nameView="LLA Increasing Angle" description="LLA 每片wafer过Align时增加角度"  max="360" min="0" parameter="" tag="" unit="N/A" type="Integer" />
			<config default ="0" name="LLBAlignAngle"      nameView="LLB Align Angle"      description="LLB Align转角角度"               max="360" min="0" parameter="" tag="" unit="N/A" type="Integer" />
			<config default ="0" name="LLBIncreasingAngle" nameView="LLB Increasing Angle" description="LLB 每片wafer过Align时增加角度"  max="360" min="0" parameter="" tag="" unit="N/A" type="Integer" />
		</configs>
	</configs>

	<!--TM-->
	<configs name="TM" nameView="TM">
		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="运动超时" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />


		<config default="1" name="TMRobotType" nameView="TM Robot Type" description="TM 类型，1=SIASUN新松 2=HONGHU泓浒 3==Brooks" max="10" min="1" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />


		<config default="1" name="LLAStationNumber" nameView="LLA Station Number" description="LLA站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="2" name="LLBStationNumber" nameView="LLB Station Number" description="LLB站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="2" name="PMAStationNumber" nameView="PMA Station Number" description="PMA站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="3" name="PMBStationNumber" nameView="PMB Station Number" description="PMB站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="4" name="PMCStationNumber" nameView="PMC Station Number" description="PMC站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="6" name="PMDStationNumber" nameView="PMD Station Number" description="PMD站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="7" name="PMEStationNumber" nameView="PME Station Number" description="PME站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="8" name="PMFStationNumber" nameView="PMF Station Number" description="PMF站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<config default="1" name="CheckLoadStation" nameView="Check Load Station Number" description="CheckLoad站点位" max="99" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="Pump时的基础压力（抽到该压力时pump动作完成）" max="200" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="SoftPumpValve转FastPumpValve压力设置" max="300000" min="200" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60"  name="PumpingTimeout" nameView="Pumping Timeout" description="Pump抽真空超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="500" name="PumpForelinePressureLimit" nameView="ForelinePressure" description="干泵前级管压力上限" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />

		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="SoftVent转FastVent压力设定" max="30000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="Vent到大气压超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="结束Vent时延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="1000" name="ExhaustValveOffDelayTime" nameView="Exhaust Valve Off Delay Time" description="结束Vent时延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />

		<config default="2000" name="PurgeVentPressure" description="purge时vent至的压力" max="760000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="30" name="PurgeCycleCount" description="Purge循环次数" max="200" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="120" name="PurgePumpTime" description="purge时pumpdown至设定压力时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="180" name="LeakCheckPumpTime" description="Leak rate check前所需pumpdown 时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="300" name="LeakCheckWaitTime" description="Leak rate check 所需时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="30" name="LeakRate" description="Leak rate 触发上限" max="756000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />

		<config default="120" name="PickTimeout" nameView="Pick Timeout" description="取片超时时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="PlaceTimeout" nameView="Place Timeout" description="放片超时时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="ExtendTimeout" nameView="Extend Timeout" description="手指伸出超时" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="60" name="RetractTimeout" nameView="Retract Timeout" description="手指缩回超时" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="180" name="SwapTimeout" nameView="Swap Timeout" description="交换动作超时" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="TM Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, Both; 1, Blade1; 2, Blade2; 3, Blade1 In Blade2 Out; 4, Blade2 In Blade1 Out" max="4" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="0" name="QueryAWCOption"   nameView="Query AWC Option"   description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="2000" name="EnterLLAWCAlarmLimit"   nameView="Enter LL AWC Alarm Range"       description="输入LL AWC告警范围" max="2000" min="0" paramter="" tag="" unit="um" type="Integer" />
		<config default="4000" name="EnterPMAWCAlarmLimit"   nameView="Enter PM AWC Alarm Range"       description="输入PM AWC报警范围" max="4000" min="0" paramter="" tag="" unit="um" type="Integer" />
		<config default="90" name="MaxWaitTimePairingOutWafer" nameView="Max wait time for pairing out wafer in loadlock" description="LL有wafer时对别一wafer的最大等待时间" max="300" min="30" paramter="" tag="" unit="s" type="Integer" />
		<config default="1"  name="RobotPickDelayTime"         nameView="Robot Pick Delay Time" description="机器人取片延时时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />


		<config default="0" name="LLAutoVentInWaferOpt" nameView="Loadlock Aut Vent Option For Raw Wafer" description="当未做工艺wafer数量小于或等于此数量时，自动做Vent" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="4" name="LLAutoVentOutWaferOpt" nameView="Loadlock Auto Vent Option For Processed Wafer" description="当已做工艺wafer数量大于或等于此数量时，自动做Vent" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<configs name="TM_MFC1" nameView="MFC1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体最大量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超限多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC告警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超限多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description="MFC流量模式（0:Flow; 1:Percent）" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>


		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM24" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="10000" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="PreRotation" nameView="Pre Rotation definition">
			<config default="PMA" name="PMA" nameView="PMA" description="PMA预旋转站" max="" min="" paramter="" tag="" visible="true" unit="N/A" type="String" />
			<config default="PMB" name="PMB" nameView="PMB" description="PMB预旋转站" max="" min="" paramter="" tag="" visible="true" unit="N/A" type="String" />
			<config default="PMC" name="PMC" nameView="PMC" description="PMC预旋转站" max="" min="" paramter="" tag="" visible="true" unit="N/A" type="String" />
			<config default="PMD" name="PMD" nameView="PMD" description="PMD预旋转站" max="" min="" paramter="" tag="" visible="true" unit="N/A" type="String" />
			<config default="LLA" name="LLA" nameView="LLA" description="LLA预旋转站" max="" min="" paramter="" tag="" visible="true" unit="N/A" type="String" />
			<config default="LLB" name="LLB" nameView="LLB" description="LLB预旋转站" max="" min="" paramter="" tag="" visible="true" unit="N/A" type="String" />
		</configs>

	</configs>

	<!--LLA-->
	<configs name="LLA" nameView="LLA">
		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="压力PUM到低于设定值时pump down 完成" max="2000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="SoftPumpValve转FastPumpValve压力设置" max="500000" min="200" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="Pump抽真空超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="500" name="PumpForelinePressureLimit" nameView="ForelinePressure" description="干泵前级管压力上限" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />

		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="Vent到大气压超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="SoftVent转FastVent压力设定" max="100000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="500" name="SwitchLLPumpDelay" nameView="Switch LL Pump Delay" description="让渡LL Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />

		<config default="2000" name="PurgeVentPressure" description="purge时vent至压力" max="760000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="30" name="PurgeCycleCount" description="Purge循环次数" max="200" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="120" name="PurgePumpTime" description="purge时pumpdown至设定压力时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="180" name="LeakCheckPumpTime" description="Leak rate check前所需pumpdown 时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="300" name="LeakCheckWaitTime" description="Leak rate check 所需时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="30" name="LeakRate" description="Leak rate 触发上限" max="756000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
		<config default="2" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="Vent完成后延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer"/>
		<config default="1000" name="ExhaustValveOffDelayTime" nameView="Exhaust Valve Off Delay Time" description="关闭Exhaust Valve延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<!--<config default="3000" name="OverVentFlow" nameView="Over Vent Flow" description="" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" />-->

		<!--<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="LLA Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="LLA Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<!--<config default="90"  name="LLACoolingTime"   nameView="Cooling Time"   description="LLA 冷却吹扫时间" max="200" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="90"  name="LLBCoolingTime"   nameView="Cooling Time"   description="LLB 冷却吹扫时间" max="200" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1000"  name="LLAMFCFlow"   nameView="Cooling MFC Flow"   description="LLA 冷却吹扫流量" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
		<config default="1000"  name="LLBMFCFlow"   nameView="Cooling MFC Flow"   description="LLB 冷却吹扫流量" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" />-->
		<config default="200000" name="PressureAlarmUpperLimit"         description="压力报警上限"         max="200000" min="1" paramter="" tag="" unit="Pa" type="Integer" Restart="1" />
		<config default="5"      name="PressureAlarmUpperLimitDuration"  description="压力报警上限持续时间" max="100"    min="0" paramter="" tag="" unit="s" type="Integer" Restart="1" />



		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM26" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="10000" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="LLA_MFC1" nameView="MFC1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体最大量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超限多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC告警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超限多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC流量模式（0:Flow; 1:Percent）" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="Cooling" nameView="Cooling" >
			<config default="100"  name="MFCFlow"     nameView="MFCFlow"       description="气体流量" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
			<config default="150"  name="CoolingTime" nameView="Cooling Time"  description="吹扫时间" max="3000"  min="0" paramter="" tag="" unit="s"    type="Integer" />
			<!--<config default="20"   name="LLMaxCoolingWaitTime" nameView="Cooling Time"  description="" max="100"  min="0" paramter="" tag="" unit="s"    type="Integer" />-->

		</configs>
	</configs>

	<!--LLB-->
	<configs name="LLB" nameView="LLB">
		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="压力PUM到低于设定值时pump down 完成" max="2000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="SoftPumpValve转FastPumpValve压力设置" max="500000" min="200" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="Pump抽真空超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="500" name="PumpForelinePressureLimit" nameView="ForelinePressure" description="干泵前级管压力上限" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />

		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="Vent到大气压超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="SoftVent转FastVent压力设定" max="100000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="500" name="SwitchLLPumpDelay" nameView="Switch LL Pump Delay" description="让渡LL Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />

		<config default="2000" name="PurgeVentPressure" description="purge功能执行时vent至设定压力" max="760000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="30" name="PurgeCycleCount" description="Purge循环次数" max="200" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="120" name="PurgePumpTime" description="purge时pumpdown至设定压力时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="180" name="LeakCheckPumpTime" description="Leak rate check前所需pumpdown 时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="300" name="LeakCheckWaitTime" description="Leak rate check 所需时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="30" name="LeakRate" description="Leak rate 触发上限" max="756000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
		<config default="4" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="Vent完成后延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="1000" name="ExhaustValveOffDelayTime" nameView="Exhaust Valve Off Delay Time" description="关闭Exhaust Valve延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<!--<config default="3000" name="OverVentFlow" nameView="Over Vent Flow" description="" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" />-->

		<!--<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="LLA Chamber 控压 检测值" max="300" min="1" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="LLA Chamber 控压 设定值" max="200" min="1" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="200000" name="PressureAlarmUpperLimit"          description="压力报警上限"         max="200000" min="1" paramter="" tag="" unit="Pa" type="Integer" Restart="1" />
		<config default="5"      name="PressureAlarmUpperLimitDuration"  description="压力报警上限持续时间" max="100"    min="0" paramter="" tag="" unit="s" type="Integer" Restart="1" />
		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM26" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="10000" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="LLB_MFC1" nameView="MFC1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体最大量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超限多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC告警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超限多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC流量模式（0:Flow; 1:Percent）" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="Cooling" nameView="Cooling" >
			<config default="100"  name="MFCFlow"     nameView="MFCFlow"       description="气体流量" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
			<config default="150"  name="CoolingTime" nameView="Cooling Time"  description="吹扫时间" max="3000"  min="0" paramter="" tag="" unit="s"    type="Integer" />
			<!--<config default="20"   name="LLMaxCoolingWaitTime" nameView="Cooling Time"  description="" max="100"  min="0" paramter="" tag="" unit="s"    type="Integer" />-->

		</configs>
	</configs>

	<!--PMA-->
	<configs name="PMA" nameView="PMA" >
		<config default="2" name="ChamberType"  nameView="Chamber Type" description="1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="N/A" type="Integer" visible="false" Restart="1"/>
		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="Turbo氮气流量设置" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="准备传片超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="晶圆传送超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="关阀超时" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="开关slit 阀超时时间" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="gasbox内气体供气压力偏差报警范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="gasbox内气体供气压力偏差持续多久后触发报警" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="gasbox内气体供气压力偏差提示范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="gasbox内气体供气压力偏差持续多久后触提示" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="开启钟摆阀" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<!--<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="阀门加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="Forline加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="载台温度检查超时" max="3600" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="大气状态检查超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="腔体充气时间延时" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="腔体底压判定线" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="腔体基础温度判定线" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
		<!--<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="腔体工艺压力计读值补偿" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="腔体内取片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="腔体内放片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<!--<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="N/A" type="String" />
		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="WallHeater功能设定温度最大值" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="钟摆阀温度范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<!--<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="启用WallHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="启用GridHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />-->
		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="recipe忽略公差超限时间" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="recipe运行模式（0，只运行当前配方;1、包括chuck/dechuck配方）" max="5" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<!--<config default="100" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="前级管压力互锁" max="300" min="60" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="启用配方扩展" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="80"   name="ControlPressureSetPoint"       nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
		<config default="0"    name="ScrubberMode" nameView="Scrubber Mode" description="0:warning,1:stop transfer,continue process,2:stop transfer,stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>
		<config default="0"    name="WaterFlowMode" nameView="Water Flow Mode" description="0:warning,1:立即stop process,2:下一片stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>


		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM22" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="Rf" nameView="Source RF" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM38" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="允许Source RF最大偏差（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="允许Source RF最大偏差持续使时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="允许Source RF最大偏差（提示）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="允许Source RF最大偏差持续使时间（提示）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="允许Source RF最大反射功率（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="允许Source RF最大反射功率持续时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="Source RF最大输出功率" max="30000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="Source RF输出比例系数（默认=1）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="开启Source RF 脉冲 功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="开启Source RF反射功率" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="开启Source RF 电压功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="功率调节系数" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="射频功率报警范围" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="射频功率报警时间" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="射频开启超时" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="N/A" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

			<config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="rf物理最大功率" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double"  visible="false"/>
			<config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="当前射频最大功率（操作人员可编辑值）" max="3300" min="1000" paramter="" tag="" unit="N/A" type="Double" />
			<config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="射频校准最大功率值" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

		</configs>
		<configs name="Match" nameView="Source Match" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="match控制模式（）" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="启用“源C1 C2位置”" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="启用反射C1 C2位置" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="启用C1 C2 偏移值" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="RFBox" nameView="RF Box" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="0" name="CalculationParameterA" nameView="Calculation Parameter A" description="" max="100" min="-100" paramter="" tag="" unit="N/A" type="Integer"/>
			<config default="1" name="CalculationParameterK" nameView="Calculation Parameter K" description="" max="10" min="0"     paramter="" tag="" unit="N/A" type="Double"/>

		</configs>
		<configs name="MfcGas1" nameView="MFC Gas1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="MfcGas2" nameView="MFC Gas2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas3" nameView="MFC Gas3" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas4" nameView="MFC Gas4" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas5" nameView="MFC Gas5" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas6" nameView="MFC Gas6" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas7" nameView="MFC Gas7" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas7" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas8" nameView="MFC Gas8" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas8" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcN2" nameView="MFC N2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="Pump" nameView="Pump">
			<config default="30" name="LeakRate" nameView="Leak Rate" description="chamber Leak rate 触发上限" max="100000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="chamber Leak rate check前所需pumpdown 时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="chamber Leak rate check 所需时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1" name="PumpBasePressure" nameView="Pump Base Pressure" description="低于设定值时chamber pump down 完成" max="5" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="压力值低于设定值开始捡漏" max="100" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="用于泄漏检查的气体管路编号" tag="" unit="N/A" type="String" />
			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="chamber pump down 至底压所需最大时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="pumpdown延迟" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="130" name="PumpCrossingPressure" description="SoftPumpValve转FastPumpValve压力设置" max="200000" min="120" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="30" name="PumpOpenISOPressure" nameView="Open ISO Pressure" description="FastPumpValve转换钟摆阀Pump压力设置" max="120" min="6" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="检查前级管压力" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		</configs>
		<configs name="Purge" nameView="Purge" >
			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="Purge循环次数设定" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="purge功能执行时vent至设定压力" max="1300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="purge功能执行时pumpdown至设定压力" max="30" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="purge功能执行时vent至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="purge功能执行时pumpdown至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="purge功能执行时vent至设定压力后保压多久" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="purge功能执行时pumpdown至设定压力后保压多久" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="气体吹扫循环次数" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="5"  name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="气体吹扫时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="气体吹扫泵时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="PendulumHeater" nameView="Heater Pendulum" >
			<config default="false" name="IsOn"                          nameView="Is On"         description="钟摆阀加热器开启" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="温度设定值"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="开启chamber加热超差侦测功能" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="chamber 加热上限温度（报警）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="chamber温度超出上限持续多少时间后报警" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="chamber 加热上限温度（提示）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="chamber温度超出上限持续多少时间后发出提示" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<!--<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />-->
		</configs>

		<configs name="TurboPump" nameView="Turbo Pump">
			<config default="COM62" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="前级管压力阈值" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="前级管压力超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="PendulumValve" nameView="Pendulum Valve">
			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="NoCheck" nameView="No Check" description="解除所有互锁" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<!--Clean-->
		<configs name="IdleClean" nameView="Idle Clean" visible="false">
			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="chamber idle clean功能对应Recipe" max="" min="" paramter="" tag="" unit="N/A" type="String" />
			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="大于设定之后自动执行chamber idle clean 功能" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="触发闲置清洁的晶圆片计数" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="自上次运行清洁以来晶圆片计数" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="chamber的最后一次运行时间" max="" min="" paramter="" tag="" unit="N/A" type="String" />
		</configs>

		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="升降伺服位置1"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="升降伺服位置2"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="升降伺服位置3"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="升降伺服位置4"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="升降伺服位置5"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="0"  name="LiftServoPositionOffset" nameView="Lift Servo Position Offset"     description="升降伺服位置偏移值"        max="5"  min="-5" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="原点搜索高点速度"    max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="原点搜索低点速度"     max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="伺服移动速度"              max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="伺服最大移动速度"          max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="伺服移动下限位"             max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="伺服移动上限位"               max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="20" name="Temperature"           nameView="Temperature"              description="Heater温度设定"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" visible="false"/>
			<config default="130" name="Ratio"                 nameView="Ratio"                    description="Heater升温比率"                      max="260"  min="50"     paramter="" tag="" unit="N/A" type="Double" visible="false"/>
			<config default="true" name="IsOn" nameView="Is On" description="开启N2报警后设置温度模式" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default="50" name="N2WarningTemperatureLimit"           nameView="N2 Warning Temperature Limit"              description="N2warning后Heater设置温度"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="IsEnableAutoRatio"        nameView="Is Enable Auto Ratio"                      description="是否开启Auto Ratio" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default=""   name="AutoRatioValue"           nameView="Auto Ratio Value"              description="Auto Ratio Value"                 max="" min=""    paramter="" tag="" unit="N/A" type="String" visible="false"/>

		</configs>
	</configs>

	<!--PMB-->
	<configs name="PMB" nameView="PMB" >
		<config default="2" name="ChamberType"  nameView="Chamber Type" description="1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="N/A" type="Integer" visible="false" Restart="1"/>
		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="Turbo氮气流量设置" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="准备传片超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="晶圆传送超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="关阀超时" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="开关slit 阀超时时间" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="gasbox内气体供气压力偏差报警范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="gasbox内气体供气压力偏差持续多久后触发报警" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="gasbox内气体供气压力偏差提示范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="gasbox内气体供气压力偏差持续多久后触提示" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="开启钟摆阀" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<!--<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="阀门加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="Forline加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="载台温度检查超时" max="3600" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="大气状态检查超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="腔体充气时间延时" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="腔体底压判定线" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="腔体基础温度判定线" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
		<!--<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="腔体工艺压力计读值补偿" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="腔体内取片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="腔体内放片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<!--<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="N/A" type="String" />-->
		<!--<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="WallHeater功能设定温度最大值" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="钟摆阀温度范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<!--<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="启用WallHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="启用GridHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />-->
		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="recipe忽略公差超限时间" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="recipe运行模式（0，只运行当前配方;1、包括chuck/dechuck配方）" max="5" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<!--<config default="100" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="前级管压力互锁" max="300" min="60" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="启用配方扩展" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="80"   name="ControlPressureSetPoint"       nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
		<config default="0"    name="ScrubberMode" nameView="Scrubber Mode" description="0:warning,1:stop transfer,continue process,2:stop transfer,stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>
		<config default="0"    name="WaterFlowMode" nameView="Water Flow Mode" description="0:warning,1:立即stop process,2:下一片stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>


		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM22" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="Rf" nameView="Source RF" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM38" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="允许Source RF最大偏差（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="允许Source RF最大偏差持续使时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="允许Source RF最大偏差（提示）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="允许Source RF最大偏差持续使时间（提示）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="允许Source RF最大反射功率（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="允许Source RF最大反射功率持续时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="Source RF最大输出功率" max="30000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="Source RF输出比例系数（默认=1）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="开启Source RF 脉冲 功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="开启Source RF反射功率" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="开启Source RF 电压功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="功率调节系数" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="射频功率报警范围" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="射频功率报警时间" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="射频开启超时" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="N/A" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

			<config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="rf物理最大功率" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double"  visible="false"/>
			<config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="当前射频最大功率（操作人员可编辑值）" max="3300" min="1000" paramter="" tag="" unit="N/A" type="Double" />
			<config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="射频校准最大功率值" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

		</configs>
		<configs name="Match" nameView="Source Match" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="match控制模式（）" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="启用“源C1 C2位置”" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="启用反射C1 C2位置" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="启用C1 C2 偏移值" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="RFBox" nameView="RF Box" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1"  />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="0" name="CalculationParameterA" nameView="Calculation Parameter A" description="" max="100" min="-100" paramter="" tag="" unit="N/A" type="Integer"/>
			<config default="1" name="CalculationParameterK" nameView="Calculation Parameter K" description="" max="10" min="0"     paramter="" tag="" unit="N/A" type="Double"/>
		</configs>
		<configs name="MfcGas1" nameView="MFC Gas1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="MfcGas2" nameView="MFC Gas2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas3" nameView="MFC Gas3" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas4" nameView="MFC Gas4" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas5" nameView="MFC Gas5" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas6" nameView="MFC Gas6" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas7" nameView="MFC Gas7" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas7" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas8" nameView="MFC Gas8" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas8" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcN2" nameView="MFC N2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="Pump" nameView="Pump">
			<config default="30" name="LeakRate" nameView="Leak Rate" description="chamber Leak rate 触发上限" max="100000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="chamber Leak rate check前所需pumpdown 时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="chamber Leak rate check 所需时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1" name="PumpBasePressure" nameView="Pump Base Pressure" description="低于设定值时chamber pump down 完成" max="5" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="压力值低于设定值开始捡漏" max="100" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="用于泄漏检查的气体管路编号" tag="" unit="N/A" type="String" />
			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="chamber pump down 至底压所需最大时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="pumpdown延迟" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="130" name="PumpCrossingPressure" description="SoftPumpValve转FastPumpValve压力设置" max="200000" min="120" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="30" name="PumpOpenISOPressure" nameView="Open ISO Pressure" description="FastPumpValve转换钟摆阀Pump压力设置" max="120" min="6" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="检查前级管压力" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		</configs>
		<configs name="Purge" nameView="Purge" >
			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="Purge循环次数设定" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="purge功能执行时vent至设定压力" max="1300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="purge功能执行时pumpdown至设定压力" max="30" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="purge功能执行时vent至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="purge功能执行时pumpdown至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="purge功能执行时vent至设定压力后保压多久" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="purge功能执行时pumpdown至设定压力后保压多久" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="气体吹扫循环次数" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="5"  name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="气体吹扫时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="气体吹扫泵时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="PendulumHeater" nameView="Heater Pendulum" >
			<config default="false" name="IsOn"                          nameView="Is On"         description="钟摆阀加热器开启" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="温度设定值"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="开启chamber加热超差侦测功能" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="chamber 加热上限温度（报警）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="chamber温度超出上限持续多少时间后报警" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="chamber 加热上限温度（提示）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="chamber温度超出上限持续多少时间后发出提示" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<!--<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />-->
		</configs>

		<configs name="TurboPump" nameView="Turbo Pump">
			<config default="COM62" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="前级管压力阈值" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="前级管压力超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="PendulumValve" nameView="Pendulum Valve">
			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="NoCheck" nameView="No Check" description="解除所有互锁" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<!--Clean-->
		<configs name="IdleClean" nameView="Idle Clean" visible="false">
			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="chamber idle clean功能对应Recipe" max="" min="" paramter="" tag="" unit="N/A" type="String" />
			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="大于设定之后自动执行chamber idle clean 功能" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="触发闲置清洁的晶圆片计数" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="自上次运行清洁以来晶圆片计数" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="chamber的最后一次运行时间" max="" min="" paramter="" tag="" unit="N/A" type="String" />
		</configs>

		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="升降伺服位置1"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="升降伺服位置2"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="升降伺服位置3"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="升降伺服位置4"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="升降伺服位置5"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="0"  name="LiftServoPositionOffset" nameView="Lift Servo Position Offset"     description="升降伺服位置偏移值"        max="5"  min="-5" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="原点搜索高点速度"    max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="原点搜索低点速度"     max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="伺服移动速度"              max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="伺服最大移动速度"          max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="伺服移动下限位"             max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="伺服移动上限位"               max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="20" name="Temperature"           nameView="Temperature"              description="Heater温度设定"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" visible="false"/>
			<config default="130" name="Ratio"                 nameView="Ratio"                    description="Heater升温比率"                      max="260"  min="50"     paramter="" tag="" unit="N/A" type="Double" visible="false"/>
			<config default="true" name="IsOn" nameView="Is On" description="开启N2报警后设置温度模式" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default="50" name="N2WarningTemperatureLimit"           nameView="N2 Warning Temperature Limit"              description="N2warning后Heater设置温度"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="IsEnableAutoRatio"        nameView="Is Enable Auto Ratio"                      description="是否开启Auto Ratio" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default=""   name="AutoRatioValue"           nameView="Auto Ratio Value"              description="Auto Ratio Value"                 max="" min=""    paramter="" tag="" unit="N/A" type="String" visible="false"/>
		</configs>
	</configs>

	<!--PMC-->
	<configs name="PMC" nameView="PMC" >
		<config default="2" name="ChamberType"  nameView="Chamber Type" description="1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="N/A" type="Integer" visible="false" Restart="1"/>
		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="Turbo氮气流量设置" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="准备传片超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="晶圆传送超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="关阀超时" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="开关slit 阀超时时间" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="gasbox内气体供气压力偏差报警范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="gasbox内气体供气压力偏差持续多久后触发报警" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="gasbox内气体供气压力偏差提示范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="gasbox内气体供气压力偏差持续多久后触提示" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="开启钟摆阀" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<!--<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="阀门加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="Forline加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="载台温度检查超时" max="3600" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="大气状态检查超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="腔体充气时间延时" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="腔体底压判定线" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="腔体基础温度判定线" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
		<!--<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="腔体工艺压力计读值补偿" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="腔体内取片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="腔体内放片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<!--<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="N/A" type="String" />
		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="WallHeater功能设定温度最大值" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="钟摆阀温度范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<!--<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="启用WallHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="启用GridHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />-->
		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="recipe忽略公差超限时间" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="recipe运行模式（0，只运行当前配方;1、包括chuck/dechuck配方）" max="5" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<!--<config default="100" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="前级管压力互锁" max="300" min="60" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="启用配方扩展" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="80"   name="ControlPressureSetPoint"       nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
		<config default="0"    name="ScrubberMode" nameView="Scrubber Mode" description="0:warning,1:stop transfer,continue process,2:stop transfer,stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>
		<config default="0"    name="WaterFlowMode" nameView="Water Flow Mode" description="0:warning,1:立即stop process,2:下一片stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>


		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM22" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="Rf" nameView="Source RF" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM38" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="允许Source RF最大偏差（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="允许Source RF最大偏差持续使时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="允许Source RF最大偏差（提示）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="允许Source RF最大偏差持续使时间（提示）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="允许Source RF最大反射功率（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="允许Source RF最大反射功率持续时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="Source RF最大输出功率" max="30000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="Source RF输出比例系数（默认=1）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="开启Source RF 脉冲 功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="开启Source RF反射功率" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="开启Source RF 电压功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="功率调节系数" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="射频功率报警范围" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="射频功率报警时间" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="射频开启超时" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="N/A" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

			<config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="rf物理最大功率" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double"  visible="false"/>
			<config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="当前射频最大功率（操作人员可编辑值）" max="3300" min="1000" paramter="" tag="" unit="N/A" type="Double" />
			<config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="射频校准最大功率值" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

		</configs>
		<configs name="Match" nameView="Source Match" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="match控制模式（）" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="启用“源C1 C2位置”" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="启用反射C1 C2位置" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="启用C1 C2 偏移值" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="RFBox" nameView="RF Box" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="0" name="CalculationParameterA" nameView="Calculation Parameter A" description="" max="100" min="-100" paramter="" tag="" unit="N/A" type="Integer"/>
			<config default="1" name="CalculationParameterK" nameView="Calculation Parameter K" description="" max="10" min="0"     paramter="" tag="" unit="N/A" type="Double"/>
		</configs>
		<configs name="MfcGas1" nameView="MFC Gas1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="MfcGas2" nameView="MFC Gas2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas3" nameView="MFC Gas3" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas4" nameView="MFC Gas4" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas5" nameView="MFC Gas5" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas6" nameView="MFC Gas6" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas7" nameView="MFC Gas7" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas7" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas8" nameView="MFC Gas8" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas8" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcN2" nameView="MFC N2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="Pump" nameView="Pump">
			<config default="30" name="LeakRate" nameView="Leak Rate" description="chamber Leak rate 触发上限" max="100000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="chamber Leak rate check前所需pumpdown 时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="chamber Leak rate check 所需时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1" name="PumpBasePressure" nameView="Pump Base Pressure" description="低于设定值时chamber pump down 完成" max="5" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="压力值低于设定值开始捡漏" max="100" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="用于泄漏检查的气体管路编号" tag="" unit="N/A" type="String" />
			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="chamber pump down 至底压所需最大时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="pumpdown延迟" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="130" name="PumpCrossingPressure" description="SoftPumpValve转FastPumpValve压力设置" max="200000" min="120" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="30" name="PumpOpenISOPressure" nameView="Open ISO Pressure" description="FastPumpValve转换钟摆阀Pump压力设置" max="120" min="6" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="检查前级管压力" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		</configs>
		<configs name="Purge" nameView="Purge" >
			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="Purge循环次数设定" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="purge功能执行时vent至设定压力" max="1300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="purge功能执行时pumpdown至设定压力" max="30" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="purge功能执行时vent至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="purge功能执行时pumpdown至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="purge功能执行时vent至设定压力后保压多久" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="purge功能执行时pumpdown至设定压力后保压多久" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="气体吹扫循环次数" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="5"  name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="气体吹扫时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="气体吹扫泵时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="PendulumHeater" nameView="Heater Pendulum" >
			<config default="false" name="IsOn"                          nameView="Is On"         description="钟摆阀加热器开启" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="温度设定值"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="开启chamber加热超差侦测功能" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="chamber 加热上限温度（报警）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="chamber温度超出上限持续多少时间后报警" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="chamber 加热上限温度（提示）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="chamber温度超出上限持续多少时间后发出提示" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<!--<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />-->
		</configs>

		<configs name="TurboPump" nameView="Turbo Pump">
			<config default="COM62" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="前级管压力阈值" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="前级管压力超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="PendulumValve" nameView="Pendulum Valve">
			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="NoCheck" nameView="No Check" description="解除所有互锁" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<!--Clean-->
		<configs name="IdleClean" nameView="Idle Clean" visible="false">
			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="chamber idle clean功能对应Recipe" max="" min="" paramter="" tag="" unit="N/A" type="String" />
			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="大于设定之后自动执行chamber idle clean 功能" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="触发闲置清洁的晶圆片计数" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="自上次运行清洁以来晶圆片计数" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="chamber的最后一次运行时间" max="" min="" paramter="" tag="" unit="N/A" type="String" />
		</configs>

		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="升降伺服位置1"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="升降伺服位置2"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="升降伺服位置3"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="升降伺服位置4"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="升降伺服位置5"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="0"  name="LiftServoPositionOffset" nameView="Lift Servo Position Offset"     description="升降伺服位置偏移值"        max="5"  min="-5" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="原点搜索高点速度"    max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="原点搜索低点速度"     max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="伺服移动速度"              max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="伺服最大移动速度"          max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="伺服移动下限位"             max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="伺服移动上限位"               max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="20" name="Temperature"           nameView="Temperature"              description="Heater温度设定"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" visible="false"/>
			<config default="130" name="Ratio"                 nameView="Ratio"                    description="Heater升温比率"                      max="260"  min="50"     paramter="" tag="" unit="N/A" type="Double" visible="false"/>
			<config default="true" name="IsOn" nameView="Is On" description="开启N2报警后设置温度模式" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default="50" name="N2WarningTemperatureLimit"           nameView="N2 Warning Temperature Limit"              description="N2warning后Heater设置温度"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="IsEnableAutoRatio"        nameView="Is Enable Auto Ratio"                      description="是否开启Auto Ratio" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default=""   name="AutoRatioValue"           nameView="Auto Ratio Value"              description="Auto Ratio Value"                 max="" min=""    paramter="" tag="" unit="N/A" type="String" visible="false"/>
		</configs>
	</configs>

	<!--PMD-->
	<configs name="PMD" nameView="PMD" >
		<config default="2" name="ChamberType"  nameView="Chamber Type" description="1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="N/A" type="Integer" visible="false" Restart="1"/>
		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="Turbo氮气流量设置" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="准备传片超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="晶圆传送超时" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="关阀超时" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="开关slit 阀超时时间" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="gasbox内气体供气压力偏差报警范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="gasbox内气体供气压力偏差持续多久后触发报警" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="gasbox内气体供气压力偏差提示范围" max="10138" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="gasbox内气体供气压力偏差持续多久后触提示" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="开启钟摆阀" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<!--<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="阀门加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="Forline加热范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="载台温度检查超时" max="3600" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="大气状态检查超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="腔体充气时间延时" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="腔体底压判定线" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="腔体基础温度判定线" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
		<!--<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="腔体工艺压力计读值补偿" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="腔体内取片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="腔体内放片时pin延时多久下降" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
		<!--<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="N/A" type="String" />
		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="WallHeater功能设定温度最大值" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="钟摆阀温度范围设定" max="500" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		<!--<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="启用WallHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="启用GridHeater功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />-->
		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="recipe忽略公差超限时间" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="recipe运行模式（0，只运行当前配方;1、包括chuck/dechuck配方）" max="5" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		<!--<config default="100" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="前级管压力互锁" max="300" min="60" paramter="" tag="" unit="Pa" type="Double" />-->
		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="启用配方扩展" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		<config default="80"   name="ControlPressureSetPoint"       nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
		<config default="0"    name="ScrubberMode" nameView="Scrubber Mode" description="0:warning,1:stop transfer,continue process,2:stop transfer,stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>
		<config default="0"    name="WaterFlowMode" nameView="Water Flow Mode" description="0:warning,1:立即stop process,2:下一片stop process" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer"/>


		<configs name="DryPump" nameView="Dry Pump" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM22" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="腔体forline压力最大偏差" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="允许腔体forline压力超过最大偏差持续时间" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="false" name="EnableSwitch" nameView="Enable Pump Switch Function" description="启用干泵的开关功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<configs name="Rf" nameView="Source RF" >
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM38" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="允许Source RF最大偏差（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="允许Source RF最大偏差持续使时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="允许Source RF最大偏差（提示）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="允许Source RF最大偏差持续使时间（提示）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="允许Source RF最大反射功率（报警）" max="1000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="允许Source RF最大反射功率持续时间（报警）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="3000" name="PowerRange" nameView="Power Range" description="Source RF最大输出功率" max="30000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="1" name="Coefficient" nameView="Coefficient" description="Source RF输出比例系数（默认=1）" max="10" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="开启Source RF 脉冲 功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="开启Source RF反射功率" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="开启Source RF 电压功能" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="功率调节系数" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="射频功率报警范围" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="射频功率报警时间" max="10000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="射频开启超时" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="N/A" visible="true" type="Bool" />
			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

			<config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="N/A" type="String" />
			<config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="rf物理最大功率" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double"  visible="false"/>
			<config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="当前射频最大功率（操作人员可编辑值）" max="3300" min="1000" paramter="" tag="" unit="N/A" type="Double" />
			<config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="射频校准最大功率值" max="9999" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="N/A" visible="false" type="String" />

		</configs>
		<configs name="Match" nameView="Source Match" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="1" name="MatchMode" nameView="Match Mode" description="match控制模式（）" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="启用“源C1 C2位置”" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="启用反射C1 C2位置" max="10" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="启用C1 C2 偏移值" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="RFBox" nameView="RF Box" >
			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="启用Match功能" max="1" min="0" tag="" unit="N/A" type="Bool" Restart="1" />
			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
			<config default="COM40" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="IP地址" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="0" name="CalculationParameterA" nameView="Calculation Parameter A" description="" max="100" min="-100" paramter="" tag="" unit="N/A" type="Integer"/>
			<config default="1" name="CalculationParameterK" nameView="Calculation Parameter K" description="" max="10" min="0"     paramter="" tag="" unit="N/A" type="Double"/>
		</configs>
		<configs name="MfcGas1" nameView="MFC Gas1" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />
		</configs>
		<configs name="MfcGas2" nameView="MFC Gas2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas3" nameView="MFC Gas3" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas4" nameView="MFC Gas4" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas4" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas5" nameView="MFC Gas5" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas5" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas6" nameView="MFC Gas6" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="AR" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas7" nameView="MFC Gas7" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas7" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcGas8" nameView="MFC Gas8" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="Gas8" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="MfcN2" nameView="MFC N2" >
			<config default="true" name="Enable" nameView="Enable" description="启用气路功能" tag="" unit="N/A" type="Bool" />
			<config default="N2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="气体量程" max="10000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="MFC比例因子" max="10" min="0" tag="" unit="sccm" type="Double" />
			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="MFC默认设定值" max="1000" min="0" tag="" unit="sccm" type="Integer" />
			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="流量调节因子" max="10" min="0" tag="" unit="sccm" type="Integer" />
			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="启用MFC报警功能" max="1" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC报警触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC持续超标多久触发报警" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="MFC提示触发范围" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="MFC持续超标多久触发提示" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" MFC写入模式(0:Flow; 1:Percent)" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />

		</configs>
		<configs name="Pump" nameView="Pump">
			<config default="30" name="LeakRate" nameView="Leak Rate" description="chamber Leak rate 触发上限" max="100000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="chamber Leak rate check前所需pumpdown 时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="chamber Leak rate check 所需时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="1" name="PumpBasePressure" nameView="Pump Base Pressure" description="低于设定值时chamber pump down 完成" max="5" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="压力值低于设定值开始捡漏" max="100" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="用于泄漏检查的气体管路编号" tag="" unit="N/A" type="String" />
			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="chamber pump down 至底压所需最大时间" max="3000" min="0" paramter="" tag="" unit="N/A" type="Double" />
			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="pumpdown延迟" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
			<config default="130" name="PumpCrossingPressure" description="SoftPumpValve转FastPumpValve压力设置" max="200000" min="120" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="30" name="PumpOpenISOPressure" nameView="Open ISO Pressure" description="FastPumpValve转换钟摆阀Pump压力设置" max="120" min="6" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="检查前级管压力" max="2000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
		</configs>
		<configs name="Purge" nameView="Purge" >
			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="Purge循环次数设定" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="purge功能执行时vent至设定压力" max="1300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="purge功能执行时pumpdown至设定压力" max="30" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="purge功能执行时vent至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="purge功能执行时pumpdown至设定压力所需最大时间" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="purge功能执行时vent至设定压力后保压多久" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="purge功能执行时pumpdown至设定压力后保压多久" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="气体吹扫循环次数" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
			<config default="5"  name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="气体吹扫时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="气体吹扫泵时间" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
		</configs>
		<configs name="PendulumHeater" nameView="Heater Pendulum" >
			<config default="false" name="IsOn"                          nameView="Is On"         description="钟摆阀加热器开启" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="温度设定值"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="开启chamber加热超差侦测功能" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="chamber 加热上限温度（报警）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="chamber温度超出上限持续多少时间后报警" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="chamber 加热上限温度（提示）" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="chamber温度超出上限持续多少时间后发出提示" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />

			<!--<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />-->
		</configs>

		<configs name="TurboPump" nameView="Turbo Pump">
			<config default="COM62" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="前级管压力阈值" max="1300" min="0" paramter="" tag="" unit="Pa" type="Double" />
			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="前级管压力超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
		</configs>
		<configs name="PendulumValve" nameView="Pendulum Valve">
			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="false" name="NoCheck" nameView="No Check" description="解除所有互锁" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" />
		</configs>
		<!--Clean-->
		<configs name="IdleClean" nameView="Idle Clean" visible="false">
			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" />
			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="chamber idle clean功能对应Recipe" max="" min="" paramter="" tag="" unit="N/A" type="String" />
			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="大于设定之后自动执行chamber idle clean 功能" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="触发闲置清洁的晶圆片计数" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="自上次运行清洁以来晶圆片计数" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="chamber的最后一次运行时间" max="" min="" paramter="" tag="" unit="N/A" type="String" />
		</configs>

		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="升降伺服位置1"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="升降伺服位置2"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="升降伺服位置3"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="升降伺服位置4"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="升降伺服位置5"        max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="0"  name="LiftServoPositionOffset" nameView="Lift Servo Position Offset"     description="升降伺服位置偏移值"        max="5"  min="-5" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="原点搜索高点速度"    max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="原点搜索低点速度"     max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="伺服移动速度"              max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="伺服最大移动速度"          max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="伺服移动下限位"             max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="伺服移动上限位"               max="600"  min="-600" paramter="" tag="" unit="mm" type="Double" />
			<config default="20" name="Temperature"           nameView="Temperature"              description="Heater温度设定"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" visible="false"/>
			<config default="130" name="Ratio"                 nameView="Ratio"                    description="Heater升温比率"                      max="260"  min="50"     paramter="" tag="" unit="N/A" type="Double" visible="false"/>
			<config default="true" name="IsOn" nameView="Is On" description="开启N2报警后设置温度模式" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default="50" name="N2WarningTemperatureLimit"           nameView="N2 Warning Temperature Limit"              description="N2warning后Heater设置温度"                 max="1000" min="20"    paramter="" tag="" unit="℃" type="Double" />
			<config default="false" name="IsEnableAutoRatio"        nameView="Is Enable Auto Ratio"                      description="是否开启Auto Ratio" max="0" min="0" paramter="" tag="" unit="N/A" type="Bool" visible="false"/>
			<config default=""   name="AutoRatioValue"           nameView="Auto Ratio Value"              description="Auto Ratio Value"                 max="" min=""    paramter="" tag="" unit="N/A" type="String" visible="false"/>
		</configs>
	</configs>

</root>