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							- using System;
 
- using Aitex.Core.Util;
 
- using Aitex.Core.RT.Fsm;
 
- using Aitex.Core.RT.Log;
 
- using MECF.Framework.Common.Equipment;
 
- using MECF.Framework.Common.SubstrateTrackings;
 
- using Venus_RT.Modules.TM;
 
- using Venus_RT.Devices;
 
- using Venus_Core;
 
- using Aitex.Core.RT.DataCenter;
 
- using Aitex.Core.RT.OperationCenter;
 
- using Aitex.Core.RT.Device;
 
- using Aitex.Core.RT.SCCore;
 
- namespace Venus_RT.Modules
 
- {
 
-     class LLEntity : Entity, IEntity, IModuleEntity
 
-     {
 
-         public enum LLStatus
 
-         {
 
-             Not_Ready,
 
-             Ready_For_TM,
 
-             Ready_For_EFEM,
 
-         }
 
-         public enum STATE
 
-         {
 
-             Unknown,
 
-             Init,
 
-             Initializing,
 
-             Idle,
 
-             Error,
 
-             Pumping,
 
-             Venting,
 
-             Purging,
 
-             LeakCheck,
 
-             Prepare_For_TM,
 
-             Prepare_For_EFEM,
 
-             Ready_For_TM,
 
-             Ready_For_EFEM,
 
-         }
 
-         public enum MSG
 
-         {
 
-             Home,
 
-             Online,
 
-             Offline,
 
-             Pump,
 
-             Vent,
 
-             Purge,
 
-             CyclePurge,
 
-             LeakCheck,
 
-             Prepare_TM,
 
-             Prepare_EFEM,
 
-             TM_Exchange_Ready,
 
-             EFEM_Exchange_Ready,
 
-             Error,
 
-             Abort,
 
-         }
 
-         public ModuleName Module { get; private set; }
 
-         public LLStatus Status { get; private set; }
 
-         public bool Check(int msg, out string reason, params object[] args)
 
-         {
 
-             throw new NotImplementedException();
 
-         }
 
-         public bool IsIdle
 
-         {
 
-             get { return fsm.State == (int)STATE.Idle; }
 
-         }
 
-         public bool IsError
 
-         {
 
-             get { return fsm.State == (int)STATE.Error; }
 
-         }
 
-         public bool IsInit
 
-         {
 
-             get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
 
-         }
 
-         public bool IsBusy
 
-         {
 
-             get { return !IsInit && !IsError && !IsIdle; }
 
-         }
 
-         public bool IsOnline { get; internal set; }
 
-         private readonly JetTM _JetTM;
 
-         private readonly MFPumpRoutine _pumpingRoutine;
 
-         private readonly MFVentRoutine _ventingRoutine;
 
-         private readonly MFLeakCheckRoutine _leakCheckRoutine;
 
-         private readonly MFPurgeRoutine _purgeRoutine;
 
-         public LLEntity(ModuleName module)
 
-         {
 
-             Module = module;
 
-             //_JetTM = Singleton<JetTM>.Instance;
 
-             _JetTM= DEVICE.GetDevice<JetTM>("TM");
 
-             _pumpingRoutine     = new MFPumpRoutine(_JetTM, Module);
 
-             _ventingRoutine     = new MFVentRoutine(_JetTM, Module);
 
-             _leakCheckRoutine   = new MFLeakCheckRoutine(_JetTM, Module);
 
-             _purgeRoutine       = new MFPurgeRoutine(_JetTM, Module);
 
-             var soltCount= SC.GetValue<int>($"{module.ToString()}.SlotNumber");
 
-             WaferManager.Instance.SubscribeLocation(Module, soltCount);
 
-             InitFsmMap();
 
-         }
 
-         protected override bool Init()
 
-         {
 
-             OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
 
-             OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
 
-             OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
 
-             OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
 
-             OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
 
-             DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()));
 
-             DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()));
 
-             DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()));
 
-             return true;
 
-         }
 
-         private void InitFsmMap()
 
-         {
 
-             fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
 
-             fsm.EnableRepeatedMsg(true);
 
-             EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM,     fnEnterTMReady,     FSM_MSG.NONE,   fnExitTMReady);
 
-             EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM,   fnEnterEFEMReady,   FSM_MSG.NONE,   fnExitEFEMReady);
 
-             //AnyStateTransition(FSM_MSG.TIMER,   fnMonitor,          FSM_STATE.SAME);
 
-             AnyStateTransition(MSG.Error,       fnError,            STATE.Error);
 
-             AnyStateTransition(MSG.Online,      fnOnline,           FSM_STATE.SAME);
 
-             AnyStateTransition(MSG.Offline,     fnOffline,          FSM_STATE.SAME);
 
-             AnyStateTransition(MSG.Home,        fnHome,             STATE.Initializing);
 
-             // Home
 
-             Transition(STATE.Initializing,      FSM_MSG.TIMER,      fnHoming,           STATE.Idle);
 
-             Transition(STATE.Idle,              FSM_MSG.TIMER,      fnMonitor,          STATE.Idle);
 
-             Transition(STATE.Init,              FSM_MSG.TIMER,      fnMonitor,          STATE.Init);
 
-             //vent sequence
 
-             Transition(STATE.Idle,              MSG.Vent,           FnStartVent,        STATE.Venting);
 
-             Transition(STATE.Venting,           FSM_MSG.TIMER,      FnVentTimeout,      STATE.Idle);
 
-             Transition(STATE.Venting,           MSG.Abort,          FnAbortVent,        STATE.Idle);
 
-             //Pump sequence
 
-             Transition(STATE.Idle,              MSG.Pump,           FnStartPump,        STATE.Pumping);
 
-             Transition(STATE.Pumping,           FSM_MSG.TIMER,      FnPumpTimeout,      STATE.Idle);
 
-             Transition(STATE.Pumping,           MSG.Abort,          FnAbortPump,        STATE.Idle);
 
-             // Purge sequence
 
-             Transition(STATE.Idle,              MSG.CyclePurge,     FnStartPurge,       STATE.Purging);
 
-             Transition(STATE.Purging,           FSM_MSG.TIMER,      FnPurgeTimeout,     STATE.Idle);
 
-             Transition(STATE.Purging,           MSG.Abort,          FnAbortPurge,       STATE.Idle);
 
-             // Leak check sequence
 
-             Transition(STATE.Idle,              MSG.LeakCheck,      FnStartLeakCheck,   STATE.LeakCheck);
 
-             Transition(STATE.LeakCheck,         FSM_MSG.TIMER,      FnLeakCheckTimeout, STATE.Idle);
 
-             Transition(STATE.LeakCheck,         MSG.Abort,          FnAbortLeakCheck,   STATE.Idle);
 
-             // Prepare TM Transfer
 
-             Transition(STATE.Idle,              MSG.Prepare_TM,         FnStartPrepareTM,       STATE.Prepare_For_TM);
 
-             Transition(STATE.Prepare_For_TM,    FSM_MSG.TIMER,          FnPreparaTMTimeout,     STATE.Ready_For_TM);
 
-             Transition(STATE.Ready_For_TM,      MSG.TM_Exchange_Ready,  null,                   STATE.Idle);
 
-             // Prepare EFEM Transfer
 
-             Transition(STATE.Idle,              MSG.Prepare_EFEM,       FnStartPrepareEFEM,     STATE.Prepare_For_EFEM);
 
-             Transition(STATE.Prepare_For_EFEM,  FSM_MSG.TIMER,          FnPrepareEFEMTimeout,   STATE.Ready_For_EFEM);
 
-             Transition(STATE.Ready_For_EFEM,    MSG.EFEM_Exchange_Ready, null,                  STATE.Idle);
 
-             Running = true;
 
-         }
 
-         public int Invoke(string function, params object[] args)
 
-         {
 
-             switch (function)
 
-             {
 
-                 case "Home":
 
-                     CheckToPostMessage((int)MSG.Home);
 
-                     return (int)MSG.Home;
 
-             }
 
-             return (int)FSM_MSG.NONE;
 
-         }
 
-         public bool CheckAcked(int msg)
 
-         {
 
-             return fsm.CheckExecuted(msg);
 
-         }
 
-         public bool CheckToPostMessage(int msg, params object[] args)
 
-         {
 
-             if (!fsm.FindTransition(fsm.State, msg))
 
-             {
 
-                 LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
 
-                 return false;
 
-             }
 
-             Running = true;
 
-             fsm.PostMsg(msg, args);
 
-             return true;
 
-         }
 
-         private bool fnEnterTMReady(object[] param)
 
-         {
 
-             Status = LLStatus.Ready_For_TM;
 
-             return true;
 
-         }
 
-         private bool fnExitTMReady(object[] param)
 
-         {
 
-             Status = LLStatus.Not_Ready;
 
-             return true;
 
-         }
 
-         private bool fnEnterEFEMReady(object[] param)
 
-         {
 
-             Status = LLStatus.Ready_For_EFEM;
 
-             return true;
 
-         }
 
-         private bool fnExitEFEMReady(object[] param)
 
-         {
 
-             Status = LLStatus.Not_Ready;
 
-             return true;
 
-         }
 
-         private bool fnMonitor(object[] param)
 
-         {
 
-             _debugRoutine();
 
-             return true;
 
-         }
 
-         private bool fnError(object[] param)
 
-         {
 
-             IsOnline = false;
 
-             return true;
 
-         }
 
-         private bool fnOnline(object[] param)
 
-         {
 
-             IsOnline = true;
 
-             return true;
 
-         }
 
-         private bool fnOffline(object[] param)
 
-         {
 
-             IsOnline = false;
 
-             return true;
 
-         }
 
-         private bool fnAbort(object[] param)
 
-         {
 
-             return true;
 
-         }
 
-         private bool fnHome(object[] param)
 
-         {
 
-             return true;
 
-         }
 
-         private bool fnHoming(object[] param)
 
-         {
 
-             return true;
 
-         }
 
-         private bool FnStartVent(object[] param)
 
-         {
 
-             return _ventingRoutine.Start() == RState.Running;
 
-         }
 
-         private bool FnVentTimeout(object[] param)
 
-         {
 
-             RState ret = _ventingRoutine.Monitor();
 
-             if (ret == RState.Failed || ret == RState.Timeout)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == RState.End;
 
-         }
 
-         private bool FnAbortVent(object[] param)
 
-         {
 
-             _ventingRoutine.Abort();
 
-             return true;
 
-         }
 
-         private bool FnStartPump(object[] param)
 
-         {
 
-             return _pumpingRoutine.Start() == RState.Running;
 
-         }
 
-         private bool FnPumpTimeout(object[] param)
 
-         {
 
-             RState ret = _pumpingRoutine.Monitor();
 
-             if (ret == RState.Failed || ret == RState.Timeout)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == RState.End;
 
-         }
 
-         private bool FnAbortPump(object[] param)
 
-         {
 
-             _pumpingRoutine.Abort();
 
-             return true;
 
-         }
 
-         private bool FnStartPurge(object[] param)
 
-         {
 
-             return _purgeRoutine.Start() == RState.Running;
 
-         }
 
-         private bool FnPurgeTimeout(object[] param)
 
-         {
 
-             RState ret = _purgeRoutine.Monitor();
 
-             if (ret == RState.Failed || ret == RState.Timeout)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == RState.End;
 
-         }
 
-         private bool FnAbortPurge(object[] param)
 
-         {
 
-             _purgeRoutine.Abort();
 
-             return true;
 
-         }
 
-         private bool FnStartLeakCheck(object[] param)
 
-         {
 
-             return _leakCheckRoutine.Start() == RState.Running;
 
-         }
 
-         private bool FnLeakCheckTimeout(object[] param)
 
-         {
 
-             RState ret = _leakCheckRoutine.Monitor();
 
-             if (ret == RState.Failed || ret == RState.Timeout)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == RState.End;
 
-         }
 
-         private bool FnAbortLeakCheck(object[] param)
 
-         {
 
-             _leakCheckRoutine.Abort();
 
-             return true;
 
-         }
 
-         private bool FnStartPrepareTM(object[] param)
 
-         {
 
-             return _pumpingRoutine.Start() == RState.Running;
 
-         }
 
-         private bool FnPreparaTMTimeout(object[] param)
 
-         {
 
-             RState ret = _pumpingRoutine.Monitor();
 
-             if (ret == RState.Failed || ret == RState.Timeout)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == RState.End;
 
-         }
 
-         private bool FnStartPrepareEFEM(object[] param)
 
-         {
 
-             return _ventingRoutine.Start() == RState.Running;
 
-         }
 
-         private bool FnPrepareEFEMTimeout(object[] param)
 
-         {
 
-             RState ret = _ventingRoutine.Monitor();
 
-             if (ret == RState.Failed || ret == RState.Timeout)
 
-             {
 
-                 PostMsg(MSG.Error);
 
-                 return false;
 
-             }
 
-             return ret == RState.End;
 
-         }
 
-         private void _debugRoutine()
 
-         {
 
-             int flag = 0;
 
-             // Test Home routine
 
-             if (flag == 1)
 
-             {
 
-                 PostMsg(MSG.Home);
 
-             }
 
-             else if (flag == 2)
 
-             {
 
-                 PostMsg(MSG.Vent);
 
-             }
 
-             else if (flag == 3)
 
-             {
 
-                 PostMsg(MSG.Pump);
 
-             }
 
-             //else if (flag == 4)
 
-             //{
 
-             //    PostMsg(MSG.PumpLoadLock);
 
-             //}
 
-             //else if (flag == 5)
 
-             //{
 
-             //    PostMsg(MSG.VentLoadLock);
 
-             //}
 
-             //else if (flag == 6)
 
-             //{
 
-             //    PostMsg(MSG.PurgeLoadLock);
 
-             //}
 
-             //else if (flag == 7)
 
-             //{
 
-             //    PostMsg(MSG.LaunchPump);
 
-             //}
 
-             //else if (flag == 8)
 
-             //{
 
-             //    PostMsg(MSG.LaunchTurboPump);
 
-             //}
 
-             //else if (flag == 9)
 
-             //{
 
-             //    PostMsg(MSG.LoadLockLeakCheck);
 
-             //}
 
-             else if (flag == 10)
 
-             {
 
-                 PostMsg(MSG.CyclePurge);
 
-             }
 
-             //else if (flag == 11)
 
-             //{
 
-             //    PostMsg(MSG.GasLinePurge);
 
-             //}
 
-             //else if (flag == 12)
 
-             //{
 
-             //    PostMsg(MSG.LeakCheck);
 
-             //}
 
-             //else if (flag == 13)
 
-             //{
 
-             //    PostMsg(MSG.GasLeakCheck);
 
-             //}
 
-             //else if (flag == 14)
 
-             //{
 
-             //    PostMsg(MSG.LLPlace);
 
-             //}
 
-             //else if (flag == 15)
 
-             //{
 
-             //    PostMsg(MSG.LLPick);
 
-             //}
 
-             //else if (flag == 16)
 
-             //{
 
-             //    PostMsg(MSG.RunRecipe, "7777");
 
-             //}
 
-             //else if (flag == 17)
 
-             //{
 
-             //    PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
 
-             //}
 
-         }
 
-     }
 
- }
 
 
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