HongHuTM.cs 18 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Device.Unit;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.Device.Bases;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  12. using System;
  13. using IoMfc = Venus_RT.Devices.IODevices.IoMfc;
  14. using IoPressureMeter = Venus_RT.Devices.IODevices.IoPressureMeter;
  15. using Venus_Core;
  16. using Venus_RT.Modules;
  17. namespace Venus_RT.Devices
  18. {
  19. public class HongHuTM : TM
  20. {
  21. /// <summary>
  22. /// 针对VenusSE设计
  23. /// </summary>
  24. #region io 信号抽象
  25. //控制阀信号
  26. private readonly IoValve _TMFastPumpValve;
  27. private readonly IoValve _TMSoftPumpValve;
  28. private readonly IoValve _VCESoftPumpValve;
  29. private readonly IoValve _VCEFastPumpValve;
  30. private readonly IoValve _TMFastVentValve;
  31. private readonly IoValve _TMSoftVentValve;
  32. private readonly IoValve _VCESoftVentValve;
  33. private readonly IoValve _VCEFastVentValve;
  34. //判断信号
  35. //private readonly IoSensor _VCESlitDoorOpen;
  36. //private readonly IoSensor _PMASlitDoorOpen;
  37. //private readonly IoSensor _PMBSlitDoorOpen;
  38. //private readonly IoSensor _PMCSlitDoorOpen;
  39. private readonly IoSensor _VCESlitDoorOpenEnable;
  40. private readonly IoSensor _PMASlitDoorOpenEnable;
  41. private readonly IoSensor _PMBSlitDoorOpenEnable;
  42. private readonly IoSensor _PMCSlitDoorOpenEnable;
  43. //private readonly IoSensor _TMExtendVCEEnable;
  44. //private readonly IoSensor _TMExtendPMAEnable;
  45. //private readonly IoSensor _TMExtendPMBEnable;
  46. //private readonly IoSensor _TMExtendPMCEnable;
  47. private readonly IoSensor _TMVACSensor;
  48. private readonly IoSensor _VCEVACSensor;
  49. private readonly IoSensor _VCEATMSensor;
  50. private readonly IoSensor _TMATMSensor;
  51. //控制门信号
  52. private readonly IoCylinder _VCESlitDoor;
  53. private readonly IoCylinder _PMASlitDoor;
  54. private readonly IoCylinder _PMBSlitDoor;
  55. private readonly IoCylinder _PMCSlitDoor;
  56. private readonly IoMfc _TMMfc;
  57. private readonly IoPressureMeter _TMPressure;
  58. private readonly IoPressureMeter _TMPiplinePressure;
  59. private readonly IoPressureMeter _VCEPressure;
  60. //private readonly IoPressureMeter _VCEPiplinePressure;
  61. private readonly PumpBase _TMPump;
  62. //控压
  63. //安装的module
  64. private string _allInstalledModules { get { return SC.GetStringValue("System.InstalledModules").ToString(); } }
  65. #endregion
  66. #region 暴露变量
  67. //ATM VAC信号
  68. public bool IsTMATM => _TMPressure.Value >= SC.GetValue<double>($"{Module}.ATMTargetPressure");
  69. public bool IsVCEATM => _VCEPressure.Value >= SC.GetValue<double>("VCE1.ATMTargetPressure");
  70. public bool IsTMVAC => _TMVACSensor.Value;
  71. public bool IsVCEVAC => _VCEVACSensor.Value;
  72. public bool? IsTMPumpRunning => _TMPump?.IsRunning;
  73. //valve开关状态
  74. public bool IsTMFastPumpOpen => _TMFastPumpValve.Status;
  75. public bool IsTMSoftPumpOpen => _TMSoftPumpValve.Status;
  76. public bool IsTMFastVentOpen => _TMFastVentValve.Status;
  77. public bool IsTMSoftVentOpen => _TMSoftVentValve.Status;
  78. public bool IsVCEFastPumpOpen => _VCEFastPumpValve.Status;
  79. public bool IsVCESoftPumpOpen => _VCESoftPumpValve.Status;
  80. public bool IsVCEFastVentOpen => _VCEFastVentValve.Status;
  81. public bool IsVCESoftVentOpen => _VCESoftVentValve.Status;
  82. public bool IsTMVentValveOpen => IsTMFastVentOpen && IsTMSoftVentOpen;
  83. public bool IsVCEVentValveOpen => IsVCEFastVentOpen && IsVCESoftVentOpen;
  84. //SlitDoor
  85. public bool VCESlitDoorClosed => _VCESlitDoor.State == CylinderState.Close;
  86. public bool PMASlitDoorClosed
  87. {
  88. get
  89. {
  90. if (_allInstalledModules.Contains("PMA"))
  91. return _PMASlitDoor.State == CylinderState.Close;
  92. else
  93. return true;
  94. }
  95. }
  96. public bool PMBSlitDoorClosed
  97. {
  98. get
  99. {
  100. if (_allInstalledModules.Contains("PMB"))
  101. return _PMBSlitDoor.State == CylinderState.Close;
  102. else
  103. return true;
  104. }
  105. }
  106. public bool PMCSlitDoorClosed
  107. {
  108. get
  109. {
  110. if (_allInstalledModules.Contains("PMC"))
  111. return _PMCSlitDoor.State == CylinderState.Close;
  112. else
  113. return true;
  114. }
  115. }
  116. public bool AllPMSlitDoorClosed
  117. {
  118. get
  119. {
  120. if (PMASlitDoorClosed && PMBSlitDoorClosed && PMCSlitDoorClosed)
  121. return true;
  122. else
  123. return false;
  124. }
  125. }
  126. public bool VCESlitDoorOpenEnable => _VCESlitDoorOpenEnable.Value;
  127. public bool PMASlitDoorOpenEnable => _PMASlitDoorOpenEnable.Value;
  128. public bool PMBSlitDoorOpenEnable => _PMBSlitDoorOpenEnable.Value;
  129. public bool PMCSlitDoorOpenEnable => _PMCSlitDoorOpenEnable.Value;
  130. //Robot动作
  131. //public bool TMExtendVCEEnable => _TMExtendVCEEnable.Value;
  132. //public bool TMExtendPMAEnable => _TMExtendPMAEnable.Value;
  133. //public bool TMExtendPMBEnable => _TMExtendPMBEnable.Value;
  134. //public bool TMExtendPMCEnable => _TMExtendPMCEnable.Value;
  135. public double TMPressure => _TMPressure.Value;
  136. public double VCEPressure => _VCEPressure.Value;
  137. enum PumpState
  138. {
  139. Idle,
  140. TMUsing,
  141. VCEUsing,
  142. }
  143. PumpState _PumpingState = PumpState.Idle;
  144. #endregion
  145. public HongHuTM() : base(ModuleName.SETM.ToString())
  146. {
  147. Module = ModuleName.SETM.ToString();
  148. _TMFastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.TMFastPumpValve}");
  149. _TMSoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.TMSoftPumpValve}");
  150. _VCESoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.VCESoftPumpValve}");
  151. _VCEFastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.VCEFastPumpValve}");
  152. _TMFastVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.TMFastVentValve}");
  153. _TMSoftVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.TMSoftVentValve}");
  154. _VCESoftVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.VCESoftVentValve}");
  155. _VCEFastVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.VCEFastVentValve}");
  156. _VCESlitDoorOpenEnable = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.VCESlitDoorOpenEnable}");
  157. _PMASlitDoorOpenEnable = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.PMASlitDoorOpenEnable}");
  158. _PMBSlitDoorOpenEnable = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.PMBSlitDoorOpenEnable}");
  159. _TMVACSensor = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.TMVACSensor}");
  160. _VCEVACSensor = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.VCEVACSensor}");
  161. _TMATMSensor = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.TMATMSensor}");
  162. _VCEATMSensor = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.VCEATMSensor}");
  163. _VCESlitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.VCESlitDoor}");
  164. _PMASlitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.PMASlitDoor}");
  165. _PMBSlitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.PMBSlitDoor}");
  166. if (_allInstalledModules.Contains("PMC"))
  167. {
  168. _PMCSlitDoorOpenEnable = DEVICE.GetDevice<IoSensor>($"{Module}.{VenusDevice.PMCSlitDoorOpenEnable}");
  169. _PMCSlitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.PMCSlitDoor}");
  170. }
  171. _TMMfc = DEVICE.GetDevice<IoMfc>($"{Module}.TM_MFC1");
  172. _TMPressure = DEVICE.GetDevice<IoPressureMeter>($"{Module}.TMPressure");
  173. _TMPiplinePressure = DEVICE.GetDevice<IoPressureMeter>($"{Module}.TMPipelinePressure");
  174. _VCEPressure = DEVICE.GetDevice<IoPressureMeter>($"{Module}.VCEPressure");
  175. if (SC.GetValue<int>($"{Module}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
  176. {
  177. if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.SKY)
  178. {
  179. _TMPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
  180. }
  181. else if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
  182. {
  183. _TMPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
  184. }
  185. }
  186. DATA.Subscribe($"{Module}.VCESlitDoorClosed", () => VCESlitDoorClosed);
  187. DATA.Subscribe($"{Module}.PMASlitDoorClosed", () => PMASlitDoorClosed);
  188. DATA.Subscribe($"{Module}.PMBSlitDoorClosed", () => PMBSlitDoorClosed);
  189. DATA.Subscribe($"{Module}.PMCSlitDoorClosed", () => PMCSlitDoorClosed);
  190. DATA.Subscribe($"{Module}.PumpIsRunning", () => IsTMPumpRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  191. DATA.Subscribe($"{Module}.TMIsATM", ()=> IsTMATM);
  192. DATA.Subscribe($"{Module}.VCEIsATM", ()=> IsVCEATM);
  193. OP.Subscribe($"{Module}.ControlPump", (cmd, args) =>
  194. {
  195. _TMPump.SetPumpOnOff((bool)args[0]);
  196. return true;
  197. });
  198. OP.Subscribe($"{Module}.SetSlitDoor", (cmd, args) =>
  199. {
  200. var module = (ModuleName)Enum.Parse(typeof(ModuleName), args[0].ToString());
  201. return TurnSlitDoor(module, (bool)args[1]);
  202. });
  203. }
  204. #region IO控制方法
  205. //slitdoor
  206. //2023/11/1 增加两边压差比较
  207. public bool TurnSlitDoor(ModuleName mod, bool bOn)
  208. {
  209. double MaxPressureDifference = SC.GetValue<double>("System.PMTMMaxPressureDifference");
  210. switch (mod)
  211. {
  212. case ModuleName.VCE1:
  213. if (bOn && Math.Abs(_TMPressure.Value - _VCEPressure.Value)> MaxPressureDifference)
  214. {
  215. LOG.Write(eEvent.ERR_TM, ModuleName.SETM, $"cannot open door cause pressure, TM Pressure:{_TMPressure.Value} and VCE Pressure:{_VCEPressure.Value}");
  216. return false;
  217. }
  218. return _VCESlitDoor.SetCylinder(bOn, out _);
  219. case ModuleName.PMA:
  220. if (bOn && !CanOpenSlitDoor(mod, MaxPressureDifference))
  221. return false;
  222. return _PMASlitDoor.SetCylinder(bOn, out _);
  223. case ModuleName.PMB:
  224. if (bOn && !CanOpenSlitDoor(mod, MaxPressureDifference))
  225. return false;
  226. return _PMBSlitDoor.SetCylinder(bOn, out _);
  227. case ModuleName.PMC:
  228. if (bOn && !CanOpenSlitDoor(mod, MaxPressureDifference))
  229. return false;
  230. return _PMCSlitDoor.SetCylinder(bOn, out _);
  231. }
  232. return false;
  233. }
  234. //valve
  235. public void TurnFastPumpValve(ModuleName mod, bool bOn)
  236. {
  237. switch (mod)
  238. {
  239. case ModuleName.SETM:
  240. _TMFastPumpValve.TurnValve(bOn, out string _);
  241. break;
  242. case ModuleName.VCE1:
  243. _VCEFastPumpValve.TurnValve(bOn, out string _);
  244. break;
  245. }
  246. }
  247. public void TurnSoftPumpValve(ModuleName mod, bool bOn)
  248. {
  249. switch (mod)
  250. {
  251. case ModuleName.SETM:
  252. _TMSoftPumpValve.TurnValve(bOn, out string _);
  253. break;
  254. case ModuleName.VCE1:
  255. _VCESoftPumpValve.TurnValve(bOn, out string _);
  256. break;
  257. }
  258. }
  259. public void TurnFastVentValve(ModuleName mod, bool bOn)
  260. {
  261. switch (mod)
  262. {
  263. case ModuleName.SETM:
  264. _TMFastVentValve.TurnValve(bOn, out string _);
  265. break;
  266. case ModuleName.VCE1:
  267. _VCEFastVentValve.TurnValve(bOn, out string _);
  268. break;
  269. }
  270. }
  271. public void TurnSoftVentValve(ModuleName mod, bool bOn)
  272. {
  273. switch (mod)
  274. {
  275. case ModuleName.SETM:
  276. _TMSoftVentValve.TurnValve(bOn, out string _);
  277. break;
  278. case ModuleName.VCE1:
  279. _VCESoftVentValve.TurnValve(bOn, out string _);
  280. break;
  281. }
  282. }
  283. public bool CloseAllSlitDoor()
  284. {
  285. _VCESlitDoor.SetCylinder(false, out _);
  286. if (_allInstalledModules.Contains("PMA"))
  287. _PMASlitDoor.SetCylinder(false, out _);
  288. if (_allInstalledModules.Contains("PMB"))
  289. _PMBSlitDoor.SetCylinder(false, out _);
  290. if (_allInstalledModules.Contains("PMC"))
  291. _PMCSlitDoor.SetCylinder(false, out _);
  292. return true;
  293. }
  294. public void HomeVceSlitDoor()
  295. {
  296. //由SlitDoor的状态对其下发同样的指令
  297. if (VCESlitDoorClosed == true)
  298. _VCESlitDoor.SetCylinder(false, out _);
  299. else
  300. _VCESlitDoor.SetCylinder(true, out _);
  301. }
  302. public void CloseVentValve()
  303. {
  304. _TMSoftVentValve.TurnValve(false, out _);
  305. _TMFastVentValve.TurnValve(false, out _);
  306. _VCESoftVentValve.TurnValve(false, out _);
  307. _VCEFastVentValve.TurnValve(false, out _);
  308. }
  309. public bool CheckPumpValveClosed(ModuleName mod)
  310. {
  311. switch (mod)
  312. {
  313. case ModuleName.SETM:
  314. return !IsTMFastPumpOpen && !IsTMSoftPumpOpen;
  315. case ModuleName.VCE1:
  316. return !IsVCEFastPumpOpen && !IsVCESoftPumpOpen;
  317. }
  318. return true;
  319. }
  320. public bool CheckVentValveClosed(ModuleName mod)
  321. {
  322. switch (mod)
  323. {
  324. case ModuleName.SETM:
  325. if (IsTMVentValveOpen)
  326. {
  327. LOG.Write(eEvent.ERR_TM, ModuleName.SETM, "TM Vent Valve not closed");
  328. return false;
  329. }
  330. break;
  331. case ModuleName.VCE1:
  332. if (IsVCEVentValveOpen)
  333. {
  334. LOG.Write(eEvent.ERR_TM, ModuleName.VCE1, "VCE1 Vent Valve not closed");
  335. return false;
  336. }
  337. break;
  338. }
  339. return true;
  340. }
  341. public void SetTMFlow(int flowValue)
  342. {
  343. _TMMfc.SetPoint = (flowValue);
  344. }
  345. public double GetModulePressure(ModuleName mod)
  346. {
  347. switch (mod)
  348. {
  349. case ModuleName.SETM:
  350. return TMPressure;
  351. case ModuleName.VCE1:
  352. return VCEPressure;
  353. }
  354. return 0.0;
  355. }
  356. public bool TryGetPump(ModuleName mod)
  357. {
  358. //Self
  359. if ((mod == ModuleName.VCE1 && _PumpingState == PumpState.VCEUsing) || (mod == ModuleName.SETM && _PumpingState == PumpState.TMUsing))
  360. return true;
  361. //Idle
  362. if (mod == ModuleName.SETM && !IsTMFastPumpOpen && !IsTMSoftPumpOpen && _PumpingState == PumpState.Idle)
  363. {
  364. _PumpingState = PumpState.TMUsing;
  365. return true;
  366. }
  367. if (mod == ModuleName.VCE1 && !IsVCEFastPumpOpen && !IsVCESoftPumpOpen && _PumpingState == PumpState.Idle)
  368. {
  369. _PumpingState = PumpState.VCEUsing;
  370. return true;
  371. }
  372. LOG.Write(eEvent.WARN_DEFAULT_WARN, mod, "无法打开,另一个泵正在用!");
  373. //locked
  374. return false;
  375. }
  376. public void ReleasePump(ModuleName Module)
  377. {
  378. //release pump (must do it by user)
  379. if ((Module == ModuleName.SETM && _PumpingState == PumpState.TMUsing) || (Module == ModuleName.VCE1 && _PumpingState == PumpState.VCEUsing))
  380. _PumpingState = PumpState.Idle;
  381. }
  382. #endregion
  383. #region 工具方法
  384. private bool CanOpenSlitDoor(ModuleName mod,double MaxPressureDifference)
  385. {
  386. if (Singleton<RouteManager>.Instance.GetPM(mod) == null || RouteManager.IsATMMode)
  387. return true;
  388. else
  389. {
  390. double PMPressure = Singleton<RouteManager>.Instance.GetPM(mod).ChamberPressure;
  391. if (Math.Abs(_TMPressure.Value - PMPressure) > MaxPressureDifference)
  392. {
  393. LOG.Write(eEvent.ERR_TM, ModuleName.SETM, $"cannot open door cause pressure, TM Pressure:{_TMPressure.Value} and {mod} pressure:{PMPressure}");
  394. return false;
  395. }
  396. else
  397. return true;
  398. }
  399. }
  400. #endregion
  401. }
  402. }