VenusDispatcher.cs 120 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. using Venus_RT.Modules.TM.VenusEntity;
  25. using System.Threading.Tasks;
  26. using Venus_RT.Modules.VCE;
  27. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  28. namespace Venus_RT.Modules
  29. {
  30. class VCETask : ModuleTask
  31. {
  32. public VCETask(ModuleName mod) : base(mod)
  33. {
  34. }
  35. }
  36. public class VenusPMTask : ModuleTask
  37. {
  38. enum CleanType
  39. {
  40. LongIdleClean,
  41. IdleClean,
  42. PreJobClean,
  43. PostJobClean,
  44. WTWClean,
  45. }
  46. public override int TimeToReady
  47. {
  48. get
  49. {
  50. if (!Scheduler.IsOnline)
  51. return int.MaxValue / 2;
  52. switch (Status)
  53. {
  54. case ModuleStatus.Idle:
  55. case ModuleStatus.Processing:
  56. case ModuleStatus.IdleClean:
  57. case ModuleStatus.PreJobClean:
  58. {
  59. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  60. }
  61. case ModuleStatus.PostJobClean:
  62. case ModuleStatus.WTWClean:
  63. {
  64. if (_pendingCleanTask.Count == 0)
  65. {
  66. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  67. }
  68. }
  69. break;
  70. }
  71. return int.MaxValue / 2;
  72. }
  73. }
  74. public bool HasPendingCleanTask => _pendingCleanTask.Count > 0;
  75. private WaferTask _wafer;
  76. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  77. private string _longIdleCleanRecipe;
  78. private string _preJobCleanRecipe;
  79. private string _postJobCleanRecipe;
  80. private string _wtwCleanRecipe;
  81. private DateTime _lstProcessTime;
  82. private Queue<CleanType> _pendingCleanTask = new Queue<CleanType>();
  83. public VenusPMTask(ModuleName pm) : base(pm)
  84. {
  85. }
  86. public override RState Run()
  87. {
  88. if (Scheduler.IsIdle)
  89. {
  90. switch (Status)
  91. {
  92. case ModuleStatus.Idle:
  93. {
  94. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  95. {
  96. if (_pendingCleanTask.Count > 0)
  97. {
  98. var cleanTask = _pendingCleanTask.Dequeue();
  99. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  100. {
  101. Status = ModuleStatus.WaitPostJobClean;
  102. }
  103. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  104. {
  105. Status = ModuleStatus.WaitPreJobClean;
  106. }
  107. else if (cleanTask == CleanType.LongIdleClean && !string.IsNullOrWhiteSpace(_longIdleCleanRecipe))
  108. {
  109. Status = ModuleStatus.WaitLongIdleClean;
  110. }
  111. }
  112. else if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  113. {
  114. Status = ModuleStatus.StartIdleClean;
  115. }
  116. }
  117. }
  118. break;
  119. case ModuleStatus.WaitProcess:
  120. {
  121. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  122. Status = ModuleStatus.StartProcess;
  123. }
  124. break;
  125. case ModuleStatus.WaitPreJobClean:
  126. {
  127. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  128. {
  129. if (_pmScheduler.RunJobCleanTask(_preJobCleanRecipe))
  130. {
  131. Status = ModuleStatus.StartPreJobClean;
  132. }
  133. else
  134. {
  135. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe{_preJobCleanRecipe} failed");
  136. Status = ModuleStatus.Idle;
  137. _preJobCleanRecipe = string.Empty;
  138. }
  139. }
  140. }
  141. break;
  142. case ModuleStatus.WaitPostJobClean:
  143. {
  144. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  145. {
  146. if (_pmScheduler.RunJobCleanTask(_postJobCleanRecipe))
  147. {
  148. Status = ModuleStatus.StartPostJobClean;
  149. }
  150. else
  151. {
  152. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe{_postJobCleanRecipe} failed");
  153. Status = ModuleStatus.Idle;
  154. _postJobCleanRecipe = string.Empty;
  155. }
  156. }
  157. }
  158. break;
  159. case ModuleStatus.WaitWTWClean:
  160. {
  161. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  162. {
  163. if (_pmScheduler.RunJobCleanTask(_wtwCleanRecipe))
  164. {
  165. Status = ModuleStatus.StartWTWClean;
  166. }
  167. else
  168. {
  169. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW Wafer clean recipe{_wtwCleanRecipe} failed");
  170. Status = ModuleStatus.Idle;
  171. _wtwCleanRecipe = string.Empty;
  172. }
  173. }
  174. }
  175. break;
  176. case ModuleStatus.WaitLongIdleClean:
  177. {
  178. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  179. {
  180. if (_pmScheduler.RunJobCleanTask(_longIdleCleanRecipe))
  181. {
  182. Status = ModuleStatus.StartLongIdleClean;
  183. }
  184. else
  185. {
  186. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run LongTime clean recipe{_longIdleCleanRecipe} failed");
  187. Status = ModuleStatus.Idle;
  188. _longIdleCleanRecipe = string.Empty;
  189. }
  190. }
  191. }
  192. break;
  193. case ModuleStatus.Processing:
  194. {
  195. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  196. if (Scheduler.IsOnline)
  197. {
  198. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  199. {
  200. _wafer.Return();
  201. Status = ModuleStatus.Idle;
  202. }
  203. }
  204. else // handle offline exception situation
  205. {
  206. Status = ModuleStatus.Idle;
  207. }
  208. }
  209. break;
  210. case ModuleStatus.LongIdleClean:
  211. {
  212. _longIdleCleanRecipe = string.Empty;
  213. Status = ModuleStatus.Idle;
  214. }
  215. break;
  216. case ModuleStatus.PreJobClean:
  217. {
  218. _preJobCleanRecipe = string.Empty;
  219. Status = ModuleStatus.Idle;
  220. }
  221. break;
  222. case ModuleStatus.PostJobClean:
  223. {
  224. _postJobCleanRecipe = string.Empty;
  225. if (_pendingCleanTask.Count > 0)
  226. {
  227. var cleanTask = _pendingCleanTask.Dequeue();
  228. if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  229. {
  230. Status = ModuleStatus.WaitPreJobClean;
  231. break;
  232. }
  233. }
  234. Status = ModuleStatus.Idle;
  235. }
  236. break;
  237. case ModuleStatus.WTWClean:
  238. {
  239. if (_pendingCleanTask.Count > 0)
  240. {
  241. var cleanTask = _pendingCleanTask.Dequeue();
  242. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  243. {
  244. Status = ModuleStatus.WaitPostJobClean;
  245. }
  246. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  247. {
  248. Status = ModuleStatus.WaitPreJobClean;
  249. }
  250. }
  251. else
  252. {
  253. Status = ModuleStatus.Idle;
  254. }
  255. _wtwCleanRecipe = string.Empty;
  256. }
  257. break;
  258. case ModuleStatus.IdleClean:
  259. {
  260. Status = ModuleStatus.Idle;
  261. }
  262. break;
  263. case ModuleStatus.StartProcess:
  264. {
  265. if (RouteManager.IsATMMode)
  266. {
  267. Status = ModuleStatus.Processing;
  268. }
  269. }
  270. break;
  271. }
  272. }
  273. else
  274. {
  275. switch (Status)
  276. {
  277. case ModuleStatus.StartProcess:
  278. Status = ModuleStatus.Processing;
  279. break;
  280. case ModuleStatus.StartIdleClean:
  281. Status = ModuleStatus.IdleClean;
  282. break;
  283. case ModuleStatus.StartLongIdleClean:
  284. Status = ModuleStatus.LongIdleClean;
  285. break;
  286. case ModuleStatus.StartPreJobClean:
  287. Status = ModuleStatus.PreJobClean;
  288. break;
  289. case ModuleStatus.StartPostJobClean:
  290. Status = ModuleStatus.PostJobClean;
  291. break;
  292. case ModuleStatus.StartWTWClean:
  293. Status = ModuleStatus.WTWClean;
  294. break;
  295. }
  296. }
  297. return RState.Running;
  298. }
  299. public override void WaferArrived(WaferTask wafer, int slot)
  300. {
  301. _wafer = wafer;
  302. Status = ModuleStatus.WaitProcess;
  303. }
  304. public override void WaferLeaved(WaferTask wafer, int slot)
  305. {
  306. if (!string.IsNullOrWhiteSpace(_wafer.wtwCleanRecipe.Trim()) && (_pendingCleanTask.Count == 0 || _pendingCleanTask.First() != CleanType.PostJobClean))
  307. {
  308. Status = ModuleStatus.WaitWTWClean;
  309. _wtwCleanRecipe = _wafer.wtwCleanRecipe;
  310. }
  311. else if (_pendingCleanTask.Count > 0)
  312. {
  313. var cleanTask = _pendingCleanTask.Dequeue();
  314. if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
  315. {
  316. Status = ModuleStatus.WaitPostJobClean;
  317. }
  318. else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
  319. {
  320. Status = ModuleStatus.WaitPreJobClean;
  321. }
  322. else if (cleanTask == CleanType.LongIdleClean && !string.IsNullOrWhiteSpace(_longIdleCleanRecipe))
  323. {
  324. Status = ModuleStatus.WaitLongIdleClean;
  325. }
  326. }
  327. _wafer = null;
  328. }
  329. public void InvokePreJobClean(string preJobClean)
  330. {
  331. _preJobCleanRecipe = preJobClean;
  332. _pendingCleanTask.Enqueue(CleanType.PreJobClean);
  333. //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke preClean {preJobClean}");
  334. }
  335. public bool IsPreJobCleanDone()
  336. {
  337. return !_pendingCleanTask.Contains(CleanType.PreJobClean) && string.IsNullOrWhiteSpace(_preJobCleanRecipe);
  338. }
  339. public void InvokePostJobClean(string postJobClean)
  340. {
  341. _postJobCleanRecipe = postJobClean;
  342. _pendingCleanTask.Enqueue(CleanType.PostJobClean);
  343. //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke postClean {postJobClean}");
  344. }
  345. public bool IsPostJobCleanDone()
  346. {
  347. return !_pendingCleanTask.Contains(CleanType.PostJobClean) && string.IsNullOrWhiteSpace(_postJobCleanRecipe);
  348. }
  349. public void InvokeLongIdleClean(string longIdleJobClean)
  350. {
  351. _longIdleCleanRecipe = longIdleJobClean;
  352. _pendingCleanTask.Enqueue(CleanType.LongIdleClean);
  353. }
  354. }
  355. //class VenusPMTask : ModuleTask
  356. //{
  357. // public enum RecipeJobType
  358. // {
  359. // PreClean,
  360. // Process,
  361. // PostClean,
  362. // WtwClean,
  363. // }
  364. //
  365. // public override int TimeToReady
  366. // {
  367. // get
  368. // {
  369. // switch (Status)
  370. // {
  371. // case ModuleStatus.Idle:
  372. // case ModuleStatus.IdleClean:
  373. // case ModuleStatus.PreJobClean:
  374. // case ModuleStatus.PostJobClean:
  375. // case ModuleStatus.WTWClean:
  376. // case ModuleStatus.Processing:
  377. // {
  378. // return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  379. // }
  380. // }
  381. //
  382. // return int.MaxValue / 2;
  383. // }
  384. // }
  385. //
  386. // private WaferTask _wafer;
  387. // private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  388. //
  389. // Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  390. // KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  391. //
  392. // public VenusPMTask(ModuleName mod) : base(mod)
  393. // { }
  394. // public override RState Run()
  395. // {
  396. // if(_runingWaferTask.Value.Count == 0)
  397. // {
  398. // if(_pendingWaferTasks.Count > 0)
  399. // {
  400. // _runingWaferTask = _pendingWaferTasks.Dequeue();
  401. // }
  402. // else
  403. // {
  404. // if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  405. // {
  406. // if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  407. // {
  408. // if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  409. // {
  410. // Status = ModuleStatus.StartIdleClean;
  411. // }
  412. // }
  413. // }
  414. // }
  415. // }
  416. // else
  417. // {
  418. // if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  419. // {
  420. //
  421. // switch(_runingWaferTask.Value.First().Key)
  422. // {
  423. // case RecipeJobType.PreClean:
  424. // {
  425. // if(WaferManager.Instance.CheckNoWafer(Module,0))
  426. // {
  427. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  428. // {
  429. // Status = ModuleStatus.StartPreJobClean;
  430. // }
  431. // else
  432. // {
  433. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  434. // TryDequeueRuningTask(Status);
  435. // Status = ModuleStatus.Idle;
  436. // }
  437. // }
  438. // }
  439. // break;
  440. // case RecipeJobType.Process:
  441. // {
  442. // if (WaferManager.Instance.CheckHasWafer(Module, 0))
  443. // {
  444. // if(_wafer.waferId == _runingWaferTask.Key)
  445. // {
  446. // Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  447. // Status = ModuleStatus.StartProcess;
  448. // }
  449. // else
  450. // {
  451. // LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  452. // }
  453. // }
  454. // }
  455. // break;
  456. // case RecipeJobType.PostClean:
  457. // {
  458. // if (WaferManager.Instance.CheckNoWafer(Module, 0))
  459. // {
  460. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  461. // {
  462. // Status = ModuleStatus.StartPostJobClean;
  463. // }
  464. // else
  465. // {
  466. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  467. // TryDequeueRuningTask(Status);
  468. // Status = ModuleStatus.Idle;
  469. // }
  470. // }
  471. // }
  472. // break;
  473. // case RecipeJobType.WtwClean:
  474. // {
  475. // if (WaferManager.Instance.CheckNoWafer(Module, 0))
  476. // {
  477. // if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  478. // {
  479. // Status = ModuleStatus.StartWTWClean;
  480. // }
  481. // else
  482. // {
  483. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  484. // TryDequeueRuningTask(Status);
  485. // Status = ModuleStatus.Idle;
  486. // }
  487. // }
  488. // }
  489. // break;
  490. // }
  491. // }
  492. // }
  493. //
  494. // if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  495. // {
  496. // if (Scheduler.IsIdle)
  497. // {
  498. // if (Scheduler.NoWafer(0) && Scheduler.LastPMWaferID != null)
  499. // {
  500. // TryDequeueRuningTask(Status);
  501. // }
  502. //
  503. // switch (Status)
  504. // {
  505. // case ModuleStatus.Processing:
  506. // {
  507. // var wafer = WaferManager.Instance.GetWafer(Module, 0);
  508. // if (Scheduler.IsOnline)
  509. // {
  510. // if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  511. // {
  512. // _wafer.Return();
  513. // // Last Process PM ID
  514. // Scheduler.LastPMWaferID = wafer.InnerId;
  515. // //TryDequeueRuningTask(Status);
  516. // Status = ModuleStatus.Idle;
  517. // }
  518. // }
  519. // else // handle offline exception situation
  520. // {
  521. // TryDequeueRuningTask(Status);
  522. // Status = ModuleStatus.Idle;
  523. // }
  524. // }
  525. // break;
  526. // case ModuleStatus.PreJobClean:
  527. // case ModuleStatus.PostJobClean:
  528. // case ModuleStatus.WTWClean:
  529. // {
  530. // TryDequeueRuningTask(Status);
  531. // Status = ModuleStatus.Idle;
  532. // }
  533. // break;
  534. // case ModuleStatus.IdleClean:
  535. // {
  536. // Status = ModuleStatus.Idle;
  537. // }
  538. // break;
  539. // case ModuleStatus.StartProcess:
  540. // {
  541. // if (RouteManager.IsATMMode)
  542. // {
  543. // Status = ModuleStatus.Processing;
  544. // }
  545. // }
  546. // break;
  547. // }
  548. // }
  549. // else
  550. // {
  551. // switch (Status)
  552. // {
  553. // case ModuleStatus.StartProcess:
  554. // Status = ModuleStatus.Processing;
  555. // break;
  556. // case ModuleStatus.StartIdleClean:
  557. // Status = ModuleStatus.IdleClean;
  558. // break;
  559. // case ModuleStatus.StartPreJobClean:
  560. // Status = ModuleStatus.PreJobClean;
  561. // break;
  562. // case ModuleStatus.StartPostJobClean:
  563. // Status = ModuleStatus.PostJobClean;
  564. // break;
  565. // case ModuleStatus.StartWTWClean:
  566. // Status = ModuleStatus.WTWClean;
  567. // break;
  568. // }
  569. // }
  570. // }
  571. //
  572. // return RState.Running;
  573. // }
  574. //
  575. // void TryDequeueRuningTask( ModuleStatus status)
  576. // {
  577. // bool bMatch = false;
  578. // if (_runingWaferTask.Value.Count > 0)
  579. // {
  580. // switch(status)
  581. // {
  582. // case ModuleStatus.PreJobClean:
  583. // if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  584. // {
  585. // _runingWaferTask.Value.Dequeue();
  586. // bMatch = true;
  587. // }
  588. // break;
  589. // case ModuleStatus.Processing:
  590. // if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  591. // {
  592. // //_runingWaferTask.Value.Dequeue();
  593. // bMatch = true;
  594. // }
  595. // break;
  596. // case ModuleStatus.PostJobClean:
  597. // if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  598. // {
  599. // _runingWaferTask.Value.Dequeue();
  600. // bMatch = true;
  601. // }
  602. // break;
  603. // case ModuleStatus.WTWClean:
  604. // if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  605. // {
  606. // _runingWaferTask.Value.Dequeue();
  607. // bMatch = true;
  608. // }
  609. // break;
  610. // case ModuleStatus.WaitPreJobClean:
  611. // case ModuleStatus.WaitProcess:
  612. // case ModuleStatus.WaitPostJobClean:
  613. // case ModuleStatus.WaitWTWClean:
  614. // case ModuleStatus.Idle:
  615. // _runingWaferTask.Value.Dequeue();
  616. // break;
  617. // }
  618. // }
  619. //
  620. // if(!bMatch)
  621. // {
  622. // string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  623. // LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  624. // }
  625. //
  626. // if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  627. // {
  628. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  629. // }
  630. // }
  631. //
  632. // public override void WaferArrived(WaferTask wafer, int slot)
  633. // {
  634. // _wafer = wafer;
  635. // }
  636. //
  637. // public override void WaferLeaved(WaferTask wafer, int slot)
  638. // {
  639. // _wafer = null;
  640. // }
  641. //
  642. // public void SubscribeWaferTask(WaferTask waferTask)
  643. // {
  644. // var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  645. //
  646. // if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  647. // {
  648. // waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  649. // }
  650. //
  651. // if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  652. // {
  653. // waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  654. // }
  655. //
  656. // if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  657. // {
  658. // LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  659. // }
  660. // else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  661. // {
  662. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  663. // }
  664. // else
  665. // {
  666. // _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  667. // }
  668. // }
  669. //
  670. // public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  671. // {
  672. // var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  673. //
  674. // if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  675. // {
  676. // lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  677. // }
  678. // else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  679. // {
  680. // lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  681. // }
  682. // else
  683. // {
  684. // return;
  685. // }
  686. //
  687. // if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  688. // {
  689. // LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  690. // }
  691. // else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  692. // {
  693. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  694. // }
  695. // else
  696. // {
  697. // _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  698. // }
  699. // }
  700. //
  701. // public bool ReadyMoveIn(WaferTask wafer)
  702. // {
  703. // return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  704. // }
  705. //
  706. // public bool IsAllJobCompleted()
  707. // {
  708. // return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  709. // }
  710. //
  711. // public bool IsRecipeJobDone(RecipeJobType job)
  712. // {
  713. // return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
  714. // }
  715. //
  716. // public override void ResetTask()
  717. // {
  718. // base.ResetTask();
  719. //
  720. // _wafer = null;
  721. // _pendingWaferTasks.Clear();
  722. // _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  723. // }
  724. //}
  725. class PreAlignTask : ModuleTask
  726. {
  727. private WaferTask _wafer;
  728. public PreAlignTask(ModuleName aligner) : base(aligner)
  729. {
  730. }
  731. public override RState Run()
  732. {
  733. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  734. if (tmRobot == null || !tmRobot.IsAvailable)
  735. return RState.Running;
  736. switch (Status)
  737. {
  738. case ModuleStatus.WaitAlign:
  739. {
  740. tmRobot.Align(0);
  741. Status = ModuleStatus.Aligning;
  742. }
  743. break;
  744. case ModuleStatus.Aligning:
  745. {
  746. _wafer.IsAligned = true;
  747. Status = ModuleStatus.Idle;
  748. }
  749. break;
  750. }
  751. return RState.Running;
  752. }
  753. public override void WaferArrived(WaferTask wafer, int slot)
  754. {
  755. _wafer = wafer;
  756. Status = ModuleStatus.WaitAlign;
  757. }
  758. public override void WaferLeaved(WaferTask wafer, int slot)
  759. {
  760. _wafer = null;
  761. }
  762. }
  763. class VenusTMRobotTask : ModuleTask
  764. {
  765. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  766. public override RState Run()
  767. {
  768. return base.Run();
  769. }
  770. }
  771. class VenusDispatcher : ICycle
  772. {
  773. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  774. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  775. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  776. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  777. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  778. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  779. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  780. private List<MoveItem> _curTmAction = new List<MoveItem>();
  781. private Dictionary<ModuleName, List<Guid>> _preLotCleanMarks = new Dictionary<ModuleName, List<Guid>>();
  782. private Dictionary<ModuleName, List<Guid>> _postLotCleanMarks = new Dictionary<ModuleName, List<Guid>>();
  783. // process => int => pm 0.PMA 1.PMB 2.PMC 3.PMD
  784. private Dictionary<string, Dictionary<ModuleName, int>> _Sequence2PMWaferCount = new Dictionary<string, Dictionary<ModuleName, int>>();
  785. private bool _isCycleMode;
  786. private int _cycleSetPoint = 0;
  787. private int _cycledCount = 0;
  788. private int _cycledWafer = 0;
  789. private float _throughput = 0.0f;
  790. private bool _IsPumpBeforeSequence = false; //是否需要自动pump
  791. private bool _VceAutoUnLoad = false; //是否需要job完自动unload
  792. private int _tmRobotSingleArmOption = 0;
  793. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  794. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  795. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  796. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  797. private Stopwatch _cycleWatch = new Stopwatch();
  798. private SchedulerFACallback _faCallback;
  799. private SchedulerDBCallback _dbCallback;
  800. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  801. public bool HasJobRunning => _lstControlJobs.Count > 0;
  802. private RState _cycleState = RState.Init;
  803. public RState CycleState => _cycleState;
  804. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  805. public List<string> InUseRecipes = new List<string>();
  806. public VenusDispatcher()
  807. {
  808. _faCallback = new SchedulerFACallback();
  809. _dbCallback = new SchedulerDBCallback();
  810. InitModules();
  811. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  812. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  813. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  814. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  815. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  816. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  817. {
  818. _loadportControlJobDic[lp.ToString()] = null;
  819. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  820. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  821. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  822. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  823. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  824. }
  825. DATA.Subscribe("Scheduler.CurrentRecipeList", () => _lstProcessJobs);
  826. _IsPumpBeforeSequence = SC.GetValue<bool>("System.IsPumpBeforeJob");
  827. _VceAutoUnLoad = SC.GetValue<bool>("System.IsAutoUnload");
  828. }
  829. #region public interface
  830. /// <summary>
  831. /// 获取lp当前的ControlJob
  832. /// </summary>
  833. /// <param name="lp"></param>
  834. /// <returns></returns>
  835. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  836. {
  837. if (ModuleHelper.IsLoadPort(lp))
  838. {
  839. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  840. }
  841. else
  842. {
  843. return null;
  844. }
  845. }
  846. public RState Start(params object[] objs)
  847. {
  848. if (WaferManager.Instance.HasDuplicatedWafer)
  849. {
  850. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  851. return RState.Failed;
  852. }
  853. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  854. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  855. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  856. _cycledWafer = 0;
  857. _cycledCount = 0;
  858. _throughput = 0;
  859. Clear();
  860. _cycleWatch.Stop();
  861. _lpCycleWafer[ModuleName.LP1] = 0;
  862. _lpCycleWafer[ModuleName.LP2] = 0;
  863. _lpCycleCount[ModuleName.LP1] = 0;
  864. _lpCycleCount[ModuleName.LP2] = 0;
  865. return RState.Running;
  866. }
  867. public bool CreateJob(Dictionary<string, object> param, out string reason)
  868. {
  869. reason = "";
  870. //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  871. //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  872. string[] slotSequence = (string[])param["SlotSequence"];
  873. string jobId = (string)param["JobId"];
  874. string module = (string)param["Module"];
  875. if (string.IsNullOrEmpty(jobId))
  876. {
  877. jobId = "CJ_Local_" + module;
  878. }
  879. //bool autoStart = (bool)param["AutoStart"];
  880. string lotId = jobId;
  881. if (param.ContainsKey("LotId"))
  882. lotId = (string)param["LotId"];
  883. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  884. {
  885. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  886. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  887. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  888. return false;
  889. }
  890. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  891. {
  892. reason = $"{module} should be LoadPort";
  893. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  894. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  895. return false;
  896. }
  897. if (_lstControlJobs.Exists(x => x.Name == jobId))
  898. {
  899. reason = $"{jobId} already created";
  900. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  901. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  902. return false;
  903. }
  904. ControlJobInfo cj = new ControlJobInfo();
  905. cj.Name = jobId;
  906. cj.Module = module;
  907. cj.LotName = lotId;
  908. cj.LotInnerId = Guid.NewGuid();
  909. cj.LotWafers = new List<WaferInfo>();
  910. cj.SetState(EnumControlJobState.WaitingForStart);
  911. cj.JetState = EnumJetCtrlJobState.Quequed;
  912. cj.SequenceNameList = slotSequence;
  913. cj.CycleNumber = _cycleSetPoint; // only for temperary debug
  914. _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
  915. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  916. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  917. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  918. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  919. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  920. {
  921. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  922. continue;
  923. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  924. indexSequence[groupName] = slotSequence[i];
  925. if (!seqSlot.ContainsKey(groupName))
  926. {
  927. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  928. }
  929. if (!seqSlotWafers.ContainsKey(groupName))
  930. {
  931. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  932. }
  933. seqSlot[groupName][i] = true;
  934. if (!WaferManager.Instance.CheckHasWafer(module, i))
  935. {
  936. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  937. return false;
  938. }
  939. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  940. {
  941. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  942. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  943. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  944. return false;
  945. }
  946. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  947. {
  948. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  949. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  950. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  951. return false;
  952. }
  953. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  954. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  955. cj.LotWafers.Add(waferInfo);
  956. waferInfo.SequenceName = slotSequence[i];
  957. waferInfo.LotId = lotId;
  958. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  959. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  960. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  961. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  962. }
  963. if (seqSlotWafers.Count == 0)
  964. {
  965. reason = $"job has not assign wafer";
  966. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  967. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  968. return false;
  969. }
  970. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  971. string[] seqs = seqSlot.Keys.ToArray();
  972. for (int i = 0; i < seqs.Length; i++)
  973. {
  974. ProcessJobInfo pj = new ProcessJobInfo();
  975. pj.Name = jobId + "_" + (i + 1);
  976. pj.Sequence = SequenceInfoHelper.VenusGetInfo(indexSequence[seqs[i]]);
  977. if (pj.Sequence == null)
  978. {
  979. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  980. return false;
  981. }
  982. pj.ControlJobName = cj.Name;
  983. pj.LotName = lotId;
  984. pj.SlotWafers = seqSlotWafers[seqs[i]];
  985. pj.SetState(EnumProcessJobState.Queued);
  986. if (!_Sequence2PMWaferCount.ContainsKey(pj.Sequence.Name))
  987. _Sequence2PMWaferCount.Add(pj.Sequence.Name,new Dictionary<ModuleName, int>()
  988. {
  989. {ModuleName.PMA , 0},
  990. {ModuleName.PMB , 0},
  991. {ModuleName.PMC , 0},
  992. {ModuleName.PMD , 0},
  993. });
  994. if (!CheckSequencePmReady(pj.Sequence, out reason))
  995. {
  996. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  997. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  998. return false;
  999. }
  1000. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  1001. {
  1002. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  1003. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  1004. return false;
  1005. }
  1006. pjs.Add(pj);
  1007. }
  1008. _dbCallback.LotUpdate(cj);
  1009. foreach (var pj in pjs)
  1010. {
  1011. cj.ProcessJobNameList.Add(pj.Name);
  1012. _lstProcessJobs.Add(pj);
  1013. }
  1014. _lstControlJobs.Add(cj);
  1015. //AssociatedPMWithLP(cj);
  1016. _loadportControlJobDic[cj.Module] = cj;
  1017. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  1018. return true;
  1019. }
  1020. public bool CheckAllJobDone()
  1021. {
  1022. foreach (var cj in _lstControlJobs)
  1023. {
  1024. if (cj.State != EnumControlJobState.Completed)
  1025. return false;
  1026. }
  1027. InUseRecipes.Clear();
  1028. return true;
  1029. }
  1030. public bool CheckJobJustDone(out string sJobName)
  1031. {
  1032. foreach (var cj in _lstControlJobs)
  1033. {
  1034. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  1035. {
  1036. //LP;WaferSize;Lot;Number;Start;End;
  1037. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  1038. cj.BeenPosted = true;
  1039. return true;
  1040. }
  1041. }
  1042. sJobName = "NULL";
  1043. return false;
  1044. }
  1045. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  1046. {
  1047. foreach (var pj in _lstProcessJobs)
  1048. {
  1049. if (pj.ControlJobName == cj.Name)
  1050. return pj;
  1051. }
  1052. return null;
  1053. }
  1054. public bool AbortJob(string jobName, out string reason)
  1055. {
  1056. reason = "";
  1057. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1058. if (cj == null)
  1059. {
  1060. reason = $"abort job rejected, not found job with id {jobName}";
  1061. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1062. return false;
  1063. }
  1064. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  1065. foreach (var pj in _lstProcessJobs)
  1066. {
  1067. if (pj.ControlJobName == cj.Name)
  1068. {
  1069. pj.SetState(EnumProcessJobState.Aborting);
  1070. pjAbortList.Add(pj);
  1071. int unprocessed = 0;
  1072. int aborted = 0;
  1073. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  1074. foreach (var waferInfo in wafers)
  1075. {
  1076. waferInfo.ProcessJob = null;
  1077. waferInfo.NextSequenceStep = 0;
  1078. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  1079. unprocessed++;
  1080. }
  1081. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  1082. }
  1083. }
  1084. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  1085. _dbCallback.LotFinished(cj);
  1086. foreach (var pj in pjAbortList)
  1087. {
  1088. _lstProcessJobs.Remove(pj);
  1089. }
  1090. _lstControlJobs.Remove(cj);
  1091. if (_loadportControlJobDic.ContainsKey(cj.Module))
  1092. {
  1093. _loadportControlJobDic[cj.Module] = null;
  1094. }
  1095. return true;
  1096. }
  1097. public bool StopJob(string jobName, out string reason)
  1098. {
  1099. reason = "";
  1100. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1101. if (cj == null)
  1102. {
  1103. reason = $"stop job rejected, not found job with id {jobName}";
  1104. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1105. return false;
  1106. }
  1107. foreach (var pj in _lstProcessJobs)
  1108. {
  1109. if (pj.ControlJobName == cj.Name)
  1110. {
  1111. pj.SetState(EnumProcessJobState.Stopping);
  1112. }
  1113. }
  1114. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  1115. _dbCallback.LotFinished(cj);
  1116. if (_loadportControlJobDic.ContainsKey(cj.Module))
  1117. {
  1118. _loadportControlJobDic[cj.Module] = null;
  1119. }
  1120. return true;
  1121. }
  1122. public bool ResumeJob(string jobName, out string reason)
  1123. {
  1124. reason = "";
  1125. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1126. if (cj == null)
  1127. {
  1128. reason = $"resume job rejected, not found job with id {jobName}";
  1129. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  1130. return false;
  1131. }
  1132. if (cj.State == EnumControlJobState.Paused)
  1133. {
  1134. cj.SetState(EnumControlJobState.Executing);
  1135. }
  1136. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  1137. _cycleState = RState.Running;
  1138. return true;
  1139. }
  1140. public bool PauseJob(string jobName, out string reason)
  1141. {
  1142. reason = "";
  1143. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1144. if (cj == null)
  1145. {
  1146. reason = $"pause job rejected, not found job with id {jobName}";
  1147. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  1148. return false;
  1149. }
  1150. if (cj.State == EnumControlJobState.Executing)
  1151. {
  1152. cj.SetState(EnumControlJobState.Paused);
  1153. }
  1154. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  1155. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  1156. _cycleState = RState.Paused;
  1157. return true;
  1158. }
  1159. public bool StartJob(string jobName, out string reason)
  1160. {
  1161. reason = "";
  1162. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  1163. if (cj == null)
  1164. {
  1165. reason = $"start job rejected, not found job with id {jobName}";
  1166. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  1167. return false;
  1168. }
  1169. if (cj.State == EnumControlJobState.WaitingForStart)
  1170. {
  1171. cj.SetState(EnumControlJobState.Queued);
  1172. //PreJobClean(cj);
  1173. cj.StartTime = DateTime.Now;
  1174. _dbCallback.LotCreated(cj);
  1175. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  1176. //if (!_blockingWatcher.IsRunning)
  1177. // _blockingWatcher.Restart();
  1178. //ResetTraceFlag();
  1179. }
  1180. if (!_cycleWatch.IsRunning)
  1181. {
  1182. _cycleWatch.Restart();
  1183. }
  1184. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  1185. {
  1186. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  1187. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  1188. }
  1189. _cycleState = RState.Running;
  1190. if (_IsPumpBeforeSequence)
  1191. {
  1192. Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(ModuleHelper.Converter(cj.Module))).PostMsg(VceMSG.Pump);
  1193. }
  1194. return true;
  1195. }
  1196. public RState Monitor()
  1197. {
  1198. prelude();
  1199. RunWaferTask();
  1200. RunModuleTasks();
  1201. RoutingWafers();
  1202. epilogue();
  1203. return _cycleState;
  1204. }
  1205. public void Abort()
  1206. {
  1207. }
  1208. public void Clear()
  1209. {
  1210. foreach (var module in _dictModuleTask)
  1211. {
  1212. module.Value.Status = ModuleStatus.Idle;
  1213. module.Value.Scheduler.ResetTask();
  1214. module.Value.ResetTask();
  1215. }
  1216. List<string> keys = _loadportControlJobDic.Keys.ToList();
  1217. foreach (var key in keys)
  1218. {
  1219. _loadportControlJobDic[key] = null;
  1220. }
  1221. foreach (var preLot in _preLotCleanMarks)
  1222. {
  1223. preLot.Value.Clear();
  1224. }
  1225. foreach (var postLot in _postLotCleanMarks)
  1226. {
  1227. postLot.Value.Clear();
  1228. }
  1229. _lstWaferTasks.Clear();
  1230. _tmSchdActions.Clear();
  1231. _curTmAction.Clear();
  1232. _lstControlJobs.Clear();
  1233. _lstProcessJobs.Clear();
  1234. _Sequence2PMWaferCount.Clear();
  1235. InUseRecipes.Clear();
  1236. _lpCycleWafer[ModuleName.LP1] = 0;
  1237. _lpCycleWafer[ModuleName.LP2] = 0;
  1238. _lpCycleCount[ModuleName.LP1] = 0;
  1239. _lpCycleCount[ModuleName.LP2] = 0;
  1240. _lpThroughput[ModuleName.LP1] = 0;
  1241. _lpThroughput[ModuleName.LP2] = 0;
  1242. _cycleState = RState.End;
  1243. }
  1244. #endregion
  1245. #region manual return wafer
  1246. // manual return one wafer while system is auto running
  1247. public bool ManualReturnWafer(object[] objs)
  1248. {
  1249. ModuleName SourceModule = (ModuleName)objs[0];
  1250. int SourceSlot = (int)objs[1];
  1251. if (!_dictModuleTask.Keys.Contains(SourceModule))
  1252. {
  1253. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  1254. return false;
  1255. }
  1256. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  1257. {
  1258. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  1259. return false;
  1260. }
  1261. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  1262. {
  1263. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  1264. return false;
  1265. }
  1266. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  1267. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  1268. _qeReturnWafers.Enqueue(wafer);
  1269. return true;
  1270. }
  1271. public RState CheckManualReturnWafer()
  1272. {
  1273. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  1274. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  1275. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  1276. {
  1277. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  1278. return RState.Failed;
  1279. }
  1280. foreach (var mod in _dictModuleTask)
  1281. {
  1282. if (ModuleHelper.IsLoadPort(mod.Key))
  1283. continue;
  1284. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  1285. {
  1286. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  1287. return RState.Failed;
  1288. }
  1289. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  1290. for (int slot = 0; slot < nSlotNumber; slot++)
  1291. {
  1292. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  1293. if (wafer.IsEmpty)
  1294. continue;
  1295. var destLP = (ModuleName)wafer.OriginStation;
  1296. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  1297. {
  1298. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  1299. return RState.Failed;
  1300. }
  1301. if (!ModuleHelper.IsLoadPort(destLP))
  1302. {
  1303. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  1304. return RState.Failed;
  1305. }
  1306. }
  1307. }
  1308. Clear();
  1309. return RState.Running;
  1310. }
  1311. public RState ReturnAllWafers()
  1312. {
  1313. int systemWaferCount = 0;
  1314. foreach (var mod in _dictModuleTask)
  1315. {
  1316. if (ModuleHelper.IsLoadPort(mod.Key))
  1317. continue;
  1318. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  1319. for (int slot = 0; slot < nSlotNumber; slot++)
  1320. {
  1321. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  1322. if (!wafer.IsEmpty)
  1323. systemWaferCount++;
  1324. }
  1325. }
  1326. if (systemWaferCount == 0)
  1327. return RState.End;
  1328. ReturnInternalWafers();
  1329. return RState.Running;
  1330. }
  1331. #endregion
  1332. #region internal implementation
  1333. private void InitModules()
  1334. {
  1335. foreach (var module in ModuleHelper.InstalledModules)
  1336. {
  1337. if (ModuleHelper.IsInstalled(module))
  1338. {
  1339. if (ModuleHelper.IsPm(module))
  1340. {
  1341. _dictModuleTask[module] = new VenusPMTask(module);
  1342. _preLotCleanMarks[module] = new List<Guid>();
  1343. _postLotCleanMarks[module] = new List<Guid>();
  1344. }
  1345. else if (ModuleHelper.IsTMRobot(module))
  1346. {
  1347. _dictModuleTask[module] = new VenusTMRobotTask(module);
  1348. }
  1349. else if (ModuleHelper.IsAligner(module))
  1350. {
  1351. _dictModuleTask[module] = new PreAlignTask(module);
  1352. }
  1353. else if (ModuleHelper.IsLoadPort(module))
  1354. {
  1355. _dictModuleTask[module] = new LoadPortTask(module);
  1356. }
  1357. }
  1358. }
  1359. }
  1360. private void prelude()
  1361. {
  1362. bool available = true;
  1363. foreach (var mod in _dictModuleTask)
  1364. {
  1365. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  1366. }
  1367. }
  1368. private void epilogue()
  1369. {
  1370. UpdateProcessJobStatus();
  1371. UpdateControlJobStatus();
  1372. RunLotCleanTasks();
  1373. CreateNewWaferTask();
  1374. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  1375. }
  1376. private void RunWaferTask()
  1377. {
  1378. foreach (var task in _lstWaferTasks)
  1379. {
  1380. task.Run();
  1381. }
  1382. }
  1383. private void RunModuleTasks()
  1384. {
  1385. foreach (var task in _dictModuleTask)
  1386. {
  1387. task.Value.Run();
  1388. }
  1389. }
  1390. private void RoutingWafers()
  1391. {
  1392. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1393. {
  1394. RunSchdTMActions();
  1395. return;
  1396. }
  1397. if (_tmRobotStatus != RState.End)
  1398. return;
  1399. if (_tmRobotSingleArmOption != 0)
  1400. {
  1401. RoutingWaferWithSingleArm();
  1402. return;
  1403. }
  1404. //wait for pick
  1405. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1406. //ready for back
  1407. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1408. // pm ready in 20s or pm is empty
  1409. var emptyAndReadyIn40sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 40).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1410. //robot has wafer
  1411. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1412. // aligner wafer
  1413. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1414. //robot is empty
  1415. if(robotWafers.Count == 0)
  1416. {
  1417. //has need return wafer
  1418. if(readyReturnWafers.Count > 0)
  1419. {
  1420. //==1 or ready destination is no the same
  1421. if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
  1422. {
  1423. // return one wafer
  1424. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1425. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1426. }
  1427. else
  1428. {
  1429. // return two wafer
  1430. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1431. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1432. var doublePlaceActions = new List<MoveItem>
  1433. {
  1434. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1435. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1436. };
  1437. _tmSchdActions.Enqueue(doublePlaceActions);
  1438. }
  1439. }
  1440. // aligner has wafer need back
  1441. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1442. {
  1443. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1444. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1445. if (emptyAndReadyIn40sPMs.Contains(alignerWafer.destMod))
  1446. {
  1447. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1448. if(alignerWafer.destMod == pmTask.Module)
  1449. {
  1450. // move aligner wafer to PM
  1451. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1452. }
  1453. }
  1454. }
  1455. else
  1456. {
  1457. if (emptyAndReadyIn40sPMs.Count >= 2 && waitInWafers.Count >= 2)
  1458. {
  1459. var doublePickActions = new List<MoveItem>()
  1460. {
  1461. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1462. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1463. };
  1464. _tmSchdActions.Enqueue(doublePickActions);
  1465. if (aligner.Count > 0)
  1466. {
  1467. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1468. }
  1469. }
  1470. else if (emptyAndReadyIn40sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1471. {
  1472. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1473. if (waitInWafers.Count == 2)
  1474. {
  1475. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1476. }
  1477. else if (aligner.Count > 0)
  1478. {
  1479. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1480. }
  1481. }
  1482. else if (waitInWafers.Count >= 1)
  1483. {
  1484. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1485. }
  1486. }
  1487. }
  1488. else if(robotWafers.Count == 1)
  1489. {
  1490. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1491. if (readyReturnWafers.Count >= 1)
  1492. {
  1493. // return one wafer
  1494. //_tmSchdActions.Enqueue(new List<MoveItem> {
  1495. // new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand),
  1496. // new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand)
  1497. //});
  1498. if (robotWafers[0].destMod == readyReturnWafers.First().currentMod && ModuleHelper.IsPm(robotWafers[0].destMod) && string.IsNullOrEmpty(readyReturnWafers.First().wtwCleanRecipe))
  1499. {
  1500. _tmSchdActions.Enqueue(new List<MoveItem> {
  1501. new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand),
  1502. new MoveItem(ModuleName.TMRobot, freeHand == 0 ? 1:0, readyReturnWafers.First().currentMod, 0, freeHand== Hand.Blade1 ? Hand.Blade2: Hand.Blade1)
  1503. });
  1504. }
  1505. else
  1506. {
  1507. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand)});
  1508. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1509. }
  1510. }
  1511. else
  1512. {
  1513. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1514. {
  1515. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1516. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1517. if(!robotWafers.First().IsAligned)
  1518. {
  1519. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1520. }
  1521. if (emptyAndReadyIn40sPMs.Contains(alignerWafer.destMod))
  1522. {
  1523. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1524. if (alignerWafer.destMod == pmTask.Module)
  1525. {
  1526. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1527. }
  1528. }
  1529. }
  1530. else
  1531. {
  1532. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1533. {
  1534. if (!robotWafers.First().IsAligned)
  1535. {
  1536. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1537. }
  1538. else if (emptyAndReadyIn40sPMs.Contains(robotWafers.First().destMod))
  1539. {
  1540. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1541. if (robotWafers.First().destMod == pmTask.Module)
  1542. {
  1543. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1544. }
  1545. }
  1546. }
  1547. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1548. {
  1549. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1550. }
  1551. }
  1552. }
  1553. }
  1554. else // had better not go here
  1555. {
  1556. foreach(var wafer in robotWafers)
  1557. {
  1558. if (ModuleHelper.IsPm(wafer.destMod))
  1559. {
  1560. if (!wafer.IsAligned)
  1561. {
  1562. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod))&& _tmSchdActions.Count == 0)
  1563. {
  1564. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1565. }
  1566. }
  1567. else if (emptyAndReadyIn40sPMs.Contains(wafer.destMod))
  1568. {
  1569. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1570. if (wafer.destMod == pmTask.Module && _tmSchdActions.Count == 0)
  1571. {
  1572. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1573. }
  1574. }
  1575. }
  1576. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1577. {
  1578. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1579. }
  1580. }
  1581. }
  1582. }
  1583. private void RoutingWaferWithSingleArm()
  1584. {
  1585. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1586. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1587. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1588. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1589. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1590. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1591. if (robotWafers.Count == 0)
  1592. {
  1593. if (readyReturnWafers.Count > 0)
  1594. {
  1595. // return one wafer
  1596. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1597. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1598. }
  1599. else
  1600. {
  1601. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1602. {
  1603. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1604. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1605. {
  1606. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1607. // move aligner wafer to PM
  1608. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1609. if (alignerWafer.destMod == pmTask.Module)
  1610. {
  1611. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1612. }
  1613. }
  1614. }
  1615. else
  1616. {
  1617. foreach(var wafer in waitInWafers)
  1618. {
  1619. if (_tmSchdActions.Count > 0)
  1620. break;
  1621. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1622. {
  1623. // move one wafer from LP to aligner
  1624. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1625. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1626. }
  1627. }
  1628. }
  1629. }
  1630. }
  1631. else
  1632. {
  1633. var wafer = robotWafers[0];
  1634. if (ModuleHelper.IsPm(wafer.destMod))
  1635. {
  1636. if (!wafer.IsAligned)
  1637. {
  1638. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1639. {
  1640. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1641. }
  1642. }
  1643. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1644. {
  1645. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1646. if (wafer.destMod == pmTask.Module)
  1647. {
  1648. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1649. }
  1650. }
  1651. }
  1652. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1653. {
  1654. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1655. }
  1656. }
  1657. }
  1658. private void RunSchdTMActions()
  1659. {
  1660. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1661. {
  1662. if (_tmSchdActions.Count > 0)
  1663. {
  1664. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1665. {
  1666. bool pmswap = false;
  1667. //if (_tmSchdActions.Count == 1
  1668. // && _tmSchdActions.First().Count == 2
  1669. // && _tmSchdActions.First()[0].TransferType == EnumMoveType.Pick
  1670. // && _tmSchdActions.First()[1].TransferType == EnumMoveType.Place
  1671. // && _tmSchdActions.First()[0].SourceModule == _tmSchdActions.First()[1].DestinationModule)
  1672. //{
  1673. // pmswap = true;
  1674. //}
  1675. var nextActions = _tmSchdActions.First();
  1676. if (!pmswap && nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1677. return;
  1678. if (!pmswap && ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1679. return;
  1680. //if (_tmSchdActions.Count == 2 && _tmSchdActions[0].)
  1681. //{
  1682. //
  1683. //}
  1684. _curTmAction = _tmSchdActions.Dequeue();
  1685. foreach (var action in _curTmAction)
  1686. {
  1687. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1688. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1689. }
  1690. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1691. }
  1692. }
  1693. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1694. {
  1695. _curTmAction.Clear();
  1696. }
  1697. }
  1698. }
  1699. private bool isReturnActionsDone(List<MoveItem> items)
  1700. {
  1701. foreach (var item in items)
  1702. {
  1703. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1704. return false;
  1705. }
  1706. return true;
  1707. }
  1708. private bool IsMovingActionsDone(List<MoveItem> actions)
  1709. {
  1710. bool CheckWaferExistence(ModuleName mod, int slot)
  1711. {
  1712. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1713. }
  1714. if (actions.Count == 1)
  1715. {
  1716. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1717. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1718. return false;
  1719. }
  1720. else
  1721. {
  1722. // initialize all the wafer existance before move
  1723. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1724. foreach (var ac in actions)
  1725. {
  1726. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1727. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1728. if (!slotWafers.ContainsKey(scrSlot))
  1729. {
  1730. slotWafers[scrSlot] = true;
  1731. }
  1732. if (!slotWafers.ContainsKey(destSlot))
  1733. {
  1734. slotWafers[destSlot] = false;
  1735. }
  1736. }
  1737. // simulate moved result
  1738. foreach (var ac in actions)
  1739. {
  1740. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1741. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1742. if (!slotWafers[scrSlot])
  1743. {
  1744. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1745. }
  1746. else
  1747. {
  1748. slotWafers[scrSlot] = false;
  1749. }
  1750. if (slotWafers[destSlot])
  1751. {
  1752. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1753. }
  1754. else
  1755. {
  1756. slotWafers[destSlot] = true;
  1757. }
  1758. }
  1759. foreach (var slot in slotWafers)
  1760. {
  1761. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1762. return false;
  1763. }
  1764. }
  1765. return true;
  1766. }
  1767. private void WaferArrived(WaferTask wafer, MoveItem item)
  1768. {
  1769. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1770. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1771. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1772. {
  1773. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1774. if (currentControlJob != null)
  1775. {
  1776. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1777. }
  1778. }
  1779. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1780. }
  1781. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1782. {
  1783. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1784. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1785. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1786. {
  1787. //(_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1788. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1789. if (currentControlJob != null)
  1790. {
  1791. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1792. }
  1793. }
  1794. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1795. }
  1796. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1797. {
  1798. bool allWaferReturn = true;
  1799. foreach (var slot in pj.SlotWafers)
  1800. {
  1801. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1802. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1803. {
  1804. allWaferReturn = false;
  1805. break;
  1806. }
  1807. }
  1808. return allWaferReturn;
  1809. }
  1810. private void ReturnInternalWafers()
  1811. {
  1812. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1813. {
  1814. RunSchdTMReturnActions();
  1815. return;
  1816. }
  1817. if (_tmRobotStatus != RState.End)
  1818. return;
  1819. for (int i = 0; i < 2; i++)
  1820. {
  1821. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1822. {
  1823. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1824. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1825. return;
  1826. }
  1827. }
  1828. foreach(var mod in _dictModuleTask)
  1829. {
  1830. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1831. continue;
  1832. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1833. {
  1834. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1835. var freeHands = GetTMFreeHand();
  1836. if(freeHands.Count > 0)
  1837. {
  1838. var hand = freeHands[0];
  1839. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1840. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1841. return;
  1842. }
  1843. }
  1844. }
  1845. }
  1846. private List<Hand> GetTMFreeHand()
  1847. {
  1848. var lstHands = new List<Hand>();
  1849. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1850. lstHands.Add(Hand.Blade1);
  1851. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1852. lstHands.Add(Hand.Blade2);
  1853. return lstHands;
  1854. }
  1855. private void UpdateProcessJobStatus()
  1856. {
  1857. if (_tmRobotStatus == RState.Running)
  1858. return;
  1859. foreach (var pj in _lstProcessJobs)
  1860. {
  1861. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1862. {
  1863. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1864. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1865. }
  1866. }
  1867. }
  1868. private void UpdateControlJobStatus()
  1869. {
  1870. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1871. return;
  1872. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1873. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1874. if (runningJobs.Count == 0)
  1875. {
  1876. if (queueJobs.Count() > 0)
  1877. {
  1878. // start the first waiting job
  1879. RunControlJob(queueJobs.First());
  1880. }
  1881. }
  1882. else
  1883. {
  1884. foreach (var runningjob in runningJobs)
  1885. {
  1886. // update the running job
  1887. RunControlJob(runningjob);
  1888. }
  1889. foreach (var queueJob in queueJobs)
  1890. {
  1891. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1892. {
  1893. // parallelly start the not intersect job
  1894. RunControlJob(queueJob);
  1895. }
  1896. }
  1897. }
  1898. // update system cycle status
  1899. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1900. _cycleState = RState.End;
  1901. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1902. foreach (var cj in _lstControlJobs)
  1903. {
  1904. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1905. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1906. {
  1907. cjRemoveList.Add(cj);
  1908. }
  1909. }
  1910. foreach (var cj in cjRemoveList)
  1911. {
  1912. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1913. foreach (var pj in _lstProcessJobs)
  1914. {
  1915. if (pj.ControlJobName == cj.Name)
  1916. pjRemoveList.Add(pj);
  1917. }
  1918. foreach (var pj in pjRemoveList)
  1919. {
  1920. _lstProcessJobs.Remove(pj);
  1921. }
  1922. _lstControlJobs.Remove(cj);
  1923. }
  1924. }
  1925. private void RunLotCleanTasks()
  1926. {
  1927. foreach (var pm in _dictModuleTask)
  1928. {
  1929. if (!ModuleHelper.IsPm(pm.Key))
  1930. continue;
  1931. var pmTask = pm.Value as VenusPMTask;
  1932. if (pmTask.HasWafer)
  1933. {
  1934. var pmWafer = _lstWaferTasks.Find(wt => wt.currentMod == pm.Key);
  1935. if (pmWafer != null && IsProcessJobEnding(pmWafer.lotId, pm.Key) && !_postLotCleanMarks[pm.Key].Contains(pmWafer.lotId))
  1936. {
  1937. var pj = _lstProcessJobs.Find(process => process.InnerId == pmWafer.lotId);
  1938. if (pj != null)
  1939. {
  1940. //2024-10-31 15:36:19 修改postjob来源
  1941. var postClean = pj.Sequence.GetPostCleanRecipe(pm.Key);
  1942. if (!string.IsNullOrWhiteSpace(postClean))
  1943. {
  1944. pmTask.InvokePostJobClean(postClean);
  1945. _postLotCleanMarks[pm.Key].Add(pmWafer.lotId);
  1946. }
  1947. }
  1948. }
  1949. }
  1950. // pre clean
  1951. var waitInWafer = GetFirstWaitInWafer(pm.Key);
  1952. if (waitInWafer != null && !_preLotCleanMarks[pm.Key].Contains(waitInWafer.lotId))
  1953. {
  1954. var pj = _lstProcessJobs.Find(process => process.InnerId == waitInWafer.lotId);
  1955. if (pj != null)
  1956. {
  1957. var longIdleClean = pj.Sequence.GetLongIdleCleanRecipe(pm.Key, out int idletime);
  1958. if (!string.IsNullOrWhiteSpace(longIdleClean) && idletime >= 0 && Singleton<RouteManager>.Instance.GetPM(pm.Key).LastProcessDone != null && (DateTime.Now - Singleton<RouteManager>.Instance.GetPM(pm.Key).LastProcessDone).TotalSeconds > idletime)
  1959. {
  1960. pmTask.InvokeLongIdleClean(longIdleClean);
  1961. }
  1962. //2024-10-31 15:36:37 修改prejob来源
  1963. var preClean = pj.Sequence.GetPreCleanRecipe(pm.Key);
  1964. if (!string.IsNullOrWhiteSpace(preClean))
  1965. {
  1966. pmTask.InvokePreJobClean(preClean);
  1967. _preLotCleanMarks[pm.Key].Add(waitInWafer.lotId);
  1968. }
  1969. }
  1970. }
  1971. }
  1972. }
  1973. ControlJobInfo FindControlJobByName(string CJName)
  1974. {
  1975. return _lstControlJobs.Find(x=>x.Name == CJName);
  1976. }
  1977. bool IsProcessJobEnding(Guid pjId, ModuleName pm)
  1978. {
  1979. if (!_lstWaferTasks.Exists(wt => wt.lotId == pjId && wt.destMod == pm && !ModuleHelper.IsPm(wt.currentMod)))
  1980. {
  1981. var processJob = _lstProcessJobs.Find(pj => pj.InnerId == pjId);
  1982. if (processJob == null)
  1983. return false;
  1984. foreach (var slot in processJob.SlotWafers)
  1985. {
  1986. if (WaferManager.Instance.CheckHasWafer(slot.Item1, slot.Item2))
  1987. {
  1988. if (WaferManager.Instance.GetWafer(slot.Item1, slot.Item2).NextSequenceStep == 0)
  1989. return false;
  1990. }
  1991. }
  1992. return true;
  1993. }
  1994. return false;
  1995. }
  1996. WaferTask GetFirstWaitInWafer(ModuleName pm)
  1997. {
  1998. int distance(WaferTask wafer)
  1999. {
  2000. if (ModuleHelper.IsTMRobot(wafer.currentMod))
  2001. return 0;
  2002. else if (ModuleHelper.IsLoadLock(wafer.currentMod))
  2003. {
  2004. return (_dictModuleTask[wafer.currentMod] as LoadlockTask).Distance;
  2005. }
  2006. else if (ModuleHelper.IsEFEMRobot(wafer.currentMod))
  2007. {
  2008. if (wafer.IsAligned)
  2009. return 15;
  2010. else
  2011. return 19;
  2012. }
  2013. return 17;
  2014. }
  2015. var waitInWafers = _lstWaferTasks.Where(wt => (wt.destMod == pm) && !ModuleHelper.IsPm(wt.currentMod) && !ModuleHelper.IsLoadPort(wt.currentMod)).OrderBy(wt => distance(wt));
  2016. if (waitInWafers.Count() > 0)
  2017. return waitInWafers.First();
  2018. return null;
  2019. }
  2020. private bool RunControlJob(ControlJobInfo cj)
  2021. {
  2022. switch (cj.JetState)
  2023. {
  2024. //case EnumJetCtrlJobState.Quequed:
  2025. // {
  2026. // if (IsCtrlJobNeedPreClean(cj))
  2027. // {
  2028. // cj.JetState = EnumJetCtrlJobState.PreJobClean;
  2029. // var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  2030. // foreach (var pm in PMs)
  2031. // {
  2032. // var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2033. // if (pmTask != null && pmTask.Scheduler.IsOnline)
  2034. // {
  2035. // pmTask.InvokePreJobClean(cj.PreJobClean);
  2036. // //pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  2037. // }
  2038. // }
  2039. // }
  2040. // else
  2041. // {
  2042. // ActiveControlJob(cj);
  2043. // }
  2044. // cj.SetState(EnumControlJobState.Executing);
  2045. // }
  2046. // break;
  2047. //case EnumJetCtrlJobState.PreJobClean:
  2048. // {
  2049. // if (IsPreJobCleanDone(cj))
  2050. // {
  2051. // ActiveControlJob(cj);
  2052. // }
  2053. // }
  2054. // break;
  2055. //case EnumJetCtrlJobState.Processing:
  2056. // {
  2057. // if (IsCtrlJobNeedPostClean(cj))
  2058. // {
  2059. // if (IsAllJobWaferProcessedOrProcessing(cj))
  2060. // {
  2061. // cj.JetState = EnumJetCtrlJobState.PostJobClean;
  2062. // var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  2063. // foreach (var pm in PMs)
  2064. // {
  2065. // var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2066. // if (pmTask != null && pmTask.Scheduler.IsOnline)
  2067. // {
  2068. // pmTask.InvokePostJobClean(cj.PostJobClean);
  2069. // //pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  2070. // }
  2071. // }
  2072. // }
  2073. // }
  2074. // else
  2075. // {
  2076. // if (IsAllProcessJobComplete(cj))
  2077. // {
  2078. // cj.JetState = EnumJetCtrlJobState.Completed;
  2079. // }
  2080. // }
  2081. // }
  2082. // break;
  2083. //case EnumJetCtrlJobState.PostJobClean:
  2084. // {
  2085. // if (IsPostJobCleanDone(cj))
  2086. // {
  2087. // cj.JetState = EnumJetCtrlJobState.Completed;
  2088. // }
  2089. // }
  2090. // break;
  2091. case EnumJetCtrlJobState.Quequed:
  2092. {
  2093. ActiveControlJob(cj);
  2094. }
  2095. break;
  2096. case EnumJetCtrlJobState.Processing:
  2097. {
  2098. if (IsAllProcessJobComplete(cj))
  2099. {
  2100. cj.JetState = EnumJetCtrlJobState.Completed;
  2101. }
  2102. }
  2103. break;
  2104. }
  2105. // caculate processed wafer by control job
  2106. var lp = ModuleHelper.Converter(cj.Module);
  2107. int countProcessed = 0;
  2108. foreach (var pjName in cj.ProcessJobNameList)
  2109. {
  2110. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  2111. if (pj == null)
  2112. {
  2113. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  2114. continue;
  2115. }
  2116. // caculate process wafer by process
  2117. if (_lpCycleCount[lp] < cj.CycleNumber)
  2118. {
  2119. foreach (var pjSlotWafer in pj.SlotWafers)
  2120. {
  2121. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2122. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  2123. countProcessed++;
  2124. }
  2125. }
  2126. }
  2127. int lpCycleWafer = 0;
  2128. if (cj.JetState == EnumJetCtrlJobState.Completed)
  2129. {
  2130. cj.EndTime = DateTime.Now;
  2131. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  2132. _dbCallback.LotFinished(cj);
  2133. if (_lpCycleCount[lp] >= cj.CycleNumber - 1 || !_isCycleMode)
  2134. {
  2135. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  2136. if(_VceAutoUnLoad)
  2137. Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(ModuleHelper.Converter(cj.Module))).PostMsg(VceMSG.SafeUnload);
  2138. }
  2139. _lpCycleCount[lp]++;
  2140. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  2141. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  2142. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  2143. if (_lpCycleCount[lp] < cj.CycleNumber)
  2144. {
  2145. cj.SetState(EnumControlJobState.Executing);
  2146. cj.JetState = EnumJetCtrlJobState.Quequed;
  2147. cj.LotInnerId = Guid.NewGuid();
  2148. _dbCallback.LotCreated(cj);
  2149. foreach (var pj in _lstProcessJobs)
  2150. {
  2151. if (pj.ControlJobName == cj.Name)
  2152. {
  2153. foreach (var marks in _preLotCleanMarks)
  2154. {
  2155. if (marks.Value.Contains(pj.InnerId))
  2156. marks.Value.Remove(pj.InnerId);
  2157. }
  2158. foreach (var marks in _postLotCleanMarks)
  2159. {
  2160. if (marks.Value.Contains(pj.InnerId))
  2161. marks.Value.Remove(pj.InnerId);
  2162. }
  2163. pj.SetState(EnumProcessJobState.Queued);
  2164. pj.InnerId = Guid.NewGuid();
  2165. foreach (var pjSlotWafer in pj.SlotWafers)
  2166. {
  2167. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2168. wafer.ProcessJob = null;
  2169. wafer.NextSequenceStep = 0;
  2170. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  2171. }
  2172. }
  2173. }
  2174. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  2175. }
  2176. else
  2177. {
  2178. cj.SetState(EnumControlJobState.Completed);
  2179. }
  2180. }
  2181. else
  2182. {
  2183. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  2184. }
  2185. if (lpCycleWafer != _lpCycleWafer[lp])
  2186. {
  2187. _lpCycleWafer[lp] = lpCycleWafer;
  2188. if (_lpCycleCount[lp] > 0)
  2189. {
  2190. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  2191. }
  2192. }
  2193. return cj.State == EnumControlJobState.Completed;
  2194. }
  2195. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  2196. {
  2197. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  2198. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  2199. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  2200. }
  2201. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  2202. {
  2203. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  2204. }
  2205. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  2206. {
  2207. return !string.IsNullOrWhiteSpace(cj.PostJobClean?.Trim());
  2208. }
  2209. private bool IsPreJobCleanDone(ControlJobInfo cj)
  2210. {
  2211. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  2212. foreach (var pm in pms)
  2213. {
  2214. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2215. if (pmTask.Scheduler.IsOnline && !pmTask.IsPreJobCleanDone())
  2216. return false;
  2217. }
  2218. return true;
  2219. }
  2220. private bool IsPostJobCleanDone(ControlJobInfo cj)
  2221. {
  2222. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  2223. foreach (var pm in pms)
  2224. {
  2225. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  2226. if (pmTask.Scheduler.IsOnline && !pmTask.IsPostJobCleanDone())
  2227. return false;
  2228. }
  2229. return true;
  2230. }
  2231. private bool ActiveProcessJob(ProcessJobInfo pj)
  2232. {
  2233. foreach (var pjSlotWafer in pj.SlotWafers)
  2234. {
  2235. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  2236. wafer.ProcessJob = pj;
  2237. wafer.NextSequenceStep = 0;
  2238. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  2239. }
  2240. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  2241. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  2242. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  2243. pj.SetState(EnumProcessJobState.Processing);
  2244. return true;
  2245. }
  2246. private bool ActiveControlJob(ControlJobInfo cj)
  2247. {
  2248. cj.JetState = EnumJetCtrlJobState.Processing;
  2249. foreach (var pjName in cj.ProcessJobNameList)
  2250. {
  2251. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  2252. if (pj == null)
  2253. {
  2254. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  2255. continue;
  2256. }
  2257. if (pj.State == EnumProcessJobState.Queued)
  2258. {
  2259. ActiveProcessJob(pj);
  2260. }
  2261. }
  2262. return true;
  2263. }
  2264. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  2265. {
  2266. foreach (var pj in _lstProcessJobs)
  2267. {
  2268. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  2269. {
  2270. return false;
  2271. }
  2272. }
  2273. return true;
  2274. }
  2275. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  2276. {
  2277. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  2278. int original = (int)ModuleHelper.Converter(cj.Module);
  2279. foreach (var mod in allModules)
  2280. {
  2281. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  2282. continue;
  2283. var wafers = WaferManager.Instance.GetWafers(mod);
  2284. foreach (var wafer in wafers)
  2285. {
  2286. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  2287. continue;
  2288. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  2289. return false; ;
  2290. }
  2291. }
  2292. return true;
  2293. }
  2294. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  2295. {
  2296. var lstInProcessPMs = new List<ModuleName>();
  2297. foreach (var wafer in cj.LotWafers)
  2298. {
  2299. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  2300. {
  2301. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  2302. {
  2303. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  2304. lstInProcessPMs.Add(pm);
  2305. }
  2306. }
  2307. }
  2308. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  2309. foreach (var mod in _dictModuleTask)
  2310. {
  2311. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  2312. {
  2313. pmAssociatedWaferCount[mod.Key] = 0;
  2314. }
  2315. }
  2316. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  2317. foreach (var wafer in unprocessedWafer)
  2318. {
  2319. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  2320. {
  2321. pmAssociatedWaferCount[wafer.destMod]++;
  2322. }
  2323. }
  2324. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  2325. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  2326. return oderedPMCount.First().Key;
  2327. return ModuleName.System;
  2328. }
  2329. private void CreateNewWaferTask()
  2330. {
  2331. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  2332. var onDutyPms = new Dictionary<ModuleName, int>();
  2333. foreach (var job in runningJobs)
  2334. {
  2335. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  2336. foreach (var pm in pms)
  2337. {
  2338. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  2339. {
  2340. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  2341. }
  2342. }
  2343. }
  2344. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  2345. return;
  2346. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  2347. if (oderedPMs.First().Value <= 1)
  2348. {
  2349. foreach (var runningJob in runningJobs)
  2350. {
  2351. foreach (var wafer in runningJob.LotWafers)
  2352. {
  2353. if (wafer.IsEmpty || wafer.ProcessJob == null)
  2354. continue;
  2355. if (_lstWaferTasks.Count >= oderedPMs.Count() * 2)
  2356. return;
  2357. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  2358. {
  2359. if (oderedPMs.First().Key != oderedPMs.Last().Key)
  2360. {
  2361. if (oderedPMs.First().Value % 2 == 0 && Is1stPMFirst(oderedPMs.First().Key, oderedPMs.Last().Key))
  2362. CreateWaferTasks(wafer, oderedPMs.First().Key);
  2363. else
  2364. CreateWaferTasks(wafer, oderedPMs.Last().Key);
  2365. }
  2366. else
  2367. {
  2368. CreateWaferTasks(wafer, oderedPMs.First().Key);
  2369. }
  2370. }
  2371. if (_lstWaferTasks.Count >= oderedPMs.Count() * 2)
  2372. return;
  2373. }
  2374. }
  2375. }
  2376. }
  2377. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  2378. {
  2379. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  2380. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  2381. Recipe recipe = Recipe.Load(recipeContent);
  2382. int temperature = 0;
  2383. if (int.TryParse(recipe.Header.Temperature, out int temp))
  2384. {
  2385. temperature = temp;
  2386. }
  2387. int interval = wafer.ProcessJob.Sequence.GetWTWCleanInterval(pm);
  2388. WaferTask waferTask;
  2389. ++_Sequence2PMWaferCount[wafer.ProcessJob.Sequence.Name][pm];
  2390. if (interval == 1 || _Sequence2PMWaferCount[wafer.ProcessJob.Sequence.Name][pm] % interval == 0)
  2391. {
  2392. waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  2393. wafer.OriginSlot,
  2394. pm,
  2395. 0,
  2396. temperature,
  2397. wafer.InnerId,
  2398. wafer.ProcessJob.InnerId,
  2399. recipeName,
  2400. wafer.ProcessJob.Sequence.GetWTWCleanRecipe(pm),
  2401. wafer.ProcessJob.Sequence.LLInOutPath,
  2402. wafer.ProcessJob.Sequence.LLDelayTime,
  2403. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  2404. }
  2405. else
  2406. {
  2407. waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  2408. wafer.OriginSlot,
  2409. pm,
  2410. 0,
  2411. temperature,
  2412. wafer.InnerId,
  2413. wafer.ProcessJob.InnerId,
  2414. recipeName,
  2415. "",
  2416. wafer.ProcessJob.Sequence.LLInOutPath,
  2417. wafer.ProcessJob.Sequence.LLDelayTime,
  2418. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  2419. }
  2420. waferTask.OnWaferArrived += WaferArrived;
  2421. waferTask.OnWaferLeaved += WaferLeaved;
  2422. _lstWaferTasks.Add(waferTask);
  2423. }
  2424. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  2425. {
  2426. // check wether need align
  2427. foreach (var step in sequence.Steps)
  2428. {
  2429. foreach (var mod in step.StepModules)
  2430. {
  2431. if (ModuleHelper.IsAligner(mod))
  2432. return true;
  2433. }
  2434. }
  2435. return false;
  2436. }
  2437. private void RunSchdTMReturnActions()
  2438. {
  2439. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  2440. if (tmRobot == null || !tmRobot.IsAvailable)
  2441. return;
  2442. if (_tmSchdActions.Count > 0)
  2443. {
  2444. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  2445. {
  2446. var nextActions = _tmSchdActions.First();
  2447. var nextModule = nextActions.First().Module;
  2448. if (!_dictModuleTask[nextModule].IsIdle)
  2449. return;
  2450. _curTmAction = _tmSchdActions.Dequeue();
  2451. tmRobot.SendMoveItems(_curTmAction.ToArray());
  2452. }
  2453. }
  2454. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  2455. {
  2456. _curTmAction.Clear();
  2457. }
  2458. }
  2459. #endregion internal implementation
  2460. #region sequence/recipe validation
  2461. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  2462. {
  2463. reason = "";
  2464. foreach (var pm in seq.PMs)
  2465. {
  2466. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  2467. return true;
  2468. }
  2469. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  2470. return false;
  2471. }
  2472. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  2473. {
  2474. for (int i = 0; i < seq.Steps.Count; i++)
  2475. {
  2476. SequenceStepInfo stepInfo = seq.Steps[i];
  2477. foreach (var module in stepInfo.StepModules)
  2478. {
  2479. if (ModuleHelper.IsPm(module))
  2480. {
  2481. string attr = $"{module}Recipe";
  2482. if (stepInfo.StepParameter.ContainsKey(attr)
  2483. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  2484. {
  2485. var recipeName = (string)stepInfo.StepParameter[attr];
  2486. if (!string.IsNullOrWhiteSpace(recipeName))
  2487. {
  2488. var recipeContent =
  2489. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  2490. if (string.IsNullOrWhiteSpace(recipeContent))
  2491. {
  2492. reason = $"Can not find recipe file{recipeName}";
  2493. return false;
  2494. }
  2495. }
  2496. }
  2497. }
  2498. }
  2499. }
  2500. reason = "";
  2501. return true;
  2502. }
  2503. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  2504. {
  2505. var pmlist = new List<ModuleName>();
  2506. foreach (var pj in _lstProcessJobs)
  2507. {
  2508. if (pj.ControlJobName == cj.Name)
  2509. {
  2510. foreach (var pm in pj.Sequence.PMs)
  2511. {
  2512. if (!pmlist.Contains(pm))
  2513. pmlist.Add(pm);
  2514. }
  2515. }
  2516. }
  2517. return pmlist;
  2518. }
  2519. private bool Is1stPMFirst(ModuleName firstpm, ModuleName secondpm)
  2520. {
  2521. if (firstpm == secondpm)
  2522. return true;
  2523. if(_dictModuleTask[firstpm].HasWafer && !_dictModuleTask[secondpm].HasWafer)
  2524. return false;
  2525. if (!_dictModuleTask[firstpm].HasWafer && _dictModuleTask[secondpm].HasWafer)
  2526. return true;
  2527. if (_dictModuleTask[firstpm].HasWafer && _dictModuleTask[secondpm].HasWafer)
  2528. {
  2529. if (_dictModuleTask[firstpm].TimeToReady <= _dictModuleTask[secondpm].TimeToReady)
  2530. return true;
  2531. else
  2532. return false;
  2533. }
  2534. return true;
  2535. }
  2536. #endregion
  2537. }
  2538. }