SEMFPMPickRoutine.cs 12 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using System.Windows;
  19. using System.Windows.Interop;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Devices.IODevices;
  23. using Venus_RT.Devices.TM;
  24. using Venus_RT.Modules.PMs;
  25. namespace Venus_RT.Modules.TM.VenusEntity
  26. {
  27. public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
  28. {
  29. private enum PickStep
  30. {
  31. WaitPMReady,
  32. WaitforControlPressure,
  33. PMPrepare,
  34. ArmExtend,
  35. QueryAWC,
  36. DropDownWafer,
  37. PickDelay,
  38. ArmRetract,
  39. SavePickeData,
  40. NotifyDone,
  41. CloseSlitDoor,
  42. CloseLinerDoor,
  43. EndDelay
  44. }
  45. private readonly TMBase _tm;
  46. private readonly ITransferRobot _robot;
  47. private int _pickdelay = 0;
  48. private ModuleName _targetModule;
  49. private Hand _hand;
  50. private int _targetSlot;
  51. private PMEntity _pmModule;
  52. private int _ExtendTimeout = 120 * 1000;
  53. private int _RetractTimeout = 120 * 1000;
  54. private JetPMBase _chamber;
  55. private bool NeedControlPressure;
  56. private int _controlPressureSetPoint = 90;
  57. private int _controlFlowSetPoint = 10;
  58. //private DateTime _starttime;
  59. private bool _queryAwc;
  60. private bool havelinerdoor;
  61. public SEMFPMPickRoutine(TMBase honghutm, ITransferRobot robot,ModuleName module) : base(module)
  62. {
  63. _tm = honghutm;
  64. _robot = robot;
  65. _queryAwc = false;
  66. }
  67. public RState Start(params object[] objs)
  68. {
  69. //_starttime = DateTime.Now;
  70. if (!_robot.IsHomed)
  71. {
  72. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  73. return RState.Failed;
  74. }
  75. var pickItem = (Queue<MoveItem>)objs[0];
  76. _targetModule = pickItem.Peek().SourceModule;
  77. _targetSlot = pickItem.Peek().SourceSlot;
  78. _hand = pickItem.Peek().RobotHand;
  79. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());//(JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
  80. if ( _chamber.ChamberType== JetChamber.VenusDE)
  81. {
  82. havelinerdoor = true;
  83. }
  84. else
  85. {
  86. havelinerdoor = false;
  87. }
  88. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  89. {
  90. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  91. }
  92. else
  93. {
  94. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
  95. return RState.Failed;
  96. }
  97. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  98. {
  99. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  100. return RState.Failed;
  101. }
  102. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  103. {
  104. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  105. return RState.Failed;
  106. }
  107. var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
  108. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
  109. _ExtendTimeout = SC.GetValue<int>($"{Module}.ExtendTimeout") * 1000;
  110. _RetractTimeout = SC.GetValue<int>($"{Module}.RetractTimeout") * 1000;
  111. _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  112. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  113. {
  114. NeedControlPressure = true;
  115. }
  116. else
  117. {
  118. NeedControlPressure = false;
  119. }
  120. Reset();
  121. return Runner.Start(Module, $"Pick from {_targetModule}");
  122. }
  123. public RState Monitor()
  124. {
  125. Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
  126. .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
  127. .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
  128. .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
  129. .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
  130. .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  131. .Delay(PickStep.PickDelay, _pickdelay)
  132. .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
  133. .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
  134. .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
  135. .Delay(PickStep.PickDelay, _delay_50ms)
  136. .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
  137. .RunIf(PickStep.CloseLinerDoor, havelinerdoor, PMLinerDoorClose, WaitPMLinerDoorClose)
  138. .End(PickStep.EndDelay, NullFun, _delay_50ms);
  139. return Runner.Status;
  140. }
  141. private bool ModulePrepare()
  142. {
  143. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  144. //_tm.TurnSlitDoor(_targetModule, true);
  145. return true;
  146. }
  147. private bool IsModulePrepareReady()
  148. {
  149. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  150. }
  151. private bool ArmExtend()
  152. {
  153. if (!_pmModule.IsSlitDoorOpen)
  154. {
  155. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
  156. return false;
  157. }
  158. return _robot.PickExtend(_targetModule, _targetSlot, _hand);
  159. }
  160. private bool ArmRetract()
  161. {
  162. return _robot.PickRetract(_targetModule, _targetSlot, _hand);
  163. }
  164. private bool WaitRobotExtendDone()
  165. {
  166. if (_robot.Status == RState.Running)
  167. {
  168. return false;
  169. }
  170. else if (_robot.Status == RState.End)
  171. {
  172. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  173. return true;
  174. }
  175. else
  176. {
  177. Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
  178. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  179. return true;
  180. }
  181. }
  182. private bool IsPressureReady()
  183. {
  184. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  185. //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
  186. double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
  187. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  188. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  189. {
  190. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
  191. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
  192. //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
  193. //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  194. return true;
  195. }
  196. else return false;
  197. }
  198. private bool StartControlPressure()
  199. {
  200. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
  201. _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  202. _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
  203. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  204. return true;
  205. }
  206. private bool QueryAWC()
  207. {
  208. if (!_queryAwc)
  209. return true;
  210. else
  211. return _robot.QueryAwc(); ;
  212. }
  213. private bool WaitRobotQueryDone()
  214. {
  215. if (!_queryAwc)
  216. return true;
  217. if (_robot.Status == RState.Running)
  218. {
  219. return false;
  220. }
  221. else if (_robot.Status == RState.End)
  222. {
  223. return true;
  224. }
  225. else
  226. {
  227. Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
  228. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  229. return true;
  230. }
  231. }
  232. private bool RecordAWCData()
  233. {
  234. if (!_queryAwc)
  235. return true;
  236. return true;
  237. }
  238. private bool NotifyPMPickWafer()
  239. {
  240. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  241. return true;
  242. }
  243. private bool WaitPMWaferDropDown()
  244. {
  245. return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
  246. }
  247. private bool WaitRobotRetractDone()
  248. {
  249. if (_robot.Status == RState.Running)
  250. {
  251. return false;
  252. }
  253. else if (_robot.Status == RState.End)
  254. {
  255. return true;
  256. }
  257. else
  258. {
  259. Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
  260. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  261. return true;
  262. }
  263. }
  264. private bool NotifyPMDone()
  265. {
  266. _pmModule.PostMsg(PMEntity.MSG.PickReady);
  267. return true;
  268. }
  269. private bool PMDoorClose()
  270. {
  271. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
  272. return _tm.TurnSlitDoor(_targetModule, false);
  273. }
  274. private bool PMLinerDoorClose()
  275. {
  276. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Liner Door Again");
  277. return _chamber.SetLinerDoor(false, out _);
  278. }
  279. private bool WaitPMDoorClose()
  280. {
  281. if (_tm.CheckSlitValveClose(_targetModule))
  282. {
  283. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
  284. return true;
  285. }
  286. else
  287. {
  288. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
  289. return false;
  290. }
  291. }
  292. private bool WaitPMLinerDoorClose()
  293. {
  294. if (_chamber.CheckLinerDoorClose())
  295. {
  296. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check LinerDoor Close");
  297. return true;
  298. }
  299. else
  300. {
  301. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close LinerDoor");
  302. return false;
  303. }
  304. }
  305. public void Abort()
  306. {
  307. _robot.Halt();
  308. }
  309. }
  310. }