| .. |
|
EventDefine.cs
|
a5245356d0
source files
|
3 years ago |
|
GasBoxLeakCheckRoutine.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
GasFlowRoutine.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
LLPickRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LLPlaceRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LoadLockLeakCheckRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LoadLockPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
LoadLockPurgeRoutine.cs
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
LoadLockVentRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
PMControlPressureRoutine.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
PMEntity.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
PMGasVerificationRoutine.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
PMGaslinePurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
PMHomeRoutine.cs
|
818383115c
UI优化
|
1 year ago |
|
PMLeakCheckRoutine.cs
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
PMPartialPressureRoutine.cs
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
PMProcessRoutine.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
PMProcess_FA.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 year ago |
|
PMPurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
PMRoutineBase.cs
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
PMVATPerformanceRoutine.cs
|
818383115c
UI优化
|
1 year ago |
|
Process.cs
|
3cad102221
更新 RT
|
3 years ago |
|
ProcessDefine.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 year ago |
|
PumpDownRoutine.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
RFPowerSwitchRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
StartDryPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
StartTurboPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
VentRoutine.cs
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
VenusRecipeFileContext.cs
|
7d93bf0076
Job Clean function, not finished.
|
2 years ago |
|
VenusSequenceFileContext.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 year ago |
|
VirgoRecipeFileContext.cs
|
896c7407de
优化log功能
|
3 years ago |
|
VirgoSequenceFileContext.cs
|
896c7407de
优化log功能
|
3 years ago |
