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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace Venus_Core
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Manual,
- Transfer,
- AutoIdle,
- AutoRunning,
- AutoRunningPaused,
- ReturningCassette,
- Cycle,
- PrepareCycle,
- PostCycle,
- SetSpeed,
- Error,
- Reset,
- Processing,
- PostProcess,
- PauseProcess,
- //Maintenance,
- //WaferMapping,
- //Cycling,
- TMCycle,
- SETMCycle,
- SERunning,
- ReturnWafer,
- SETransfer,
- SEReturnWafer
- }
- public enum PMState
- {
- Init,
- Idle,
- Homing,
- GasFlowing,
- RfPowering,
- Heating,
- LaunchingPump,
- LaunchingTurboPump,
- Pumping,
- Venting,
- Purging,
- GasLinePurge,
- PumpingLoadLock,
- VentingLoadLock,
- PurgingLoadLock,
- LoadLockLeakCheck,
- MoveLift,
- Purge,
- // transfer
- LLPlacing,
- LLPicking,
- Transfer,
- Error,
- PrepareTransfer,
- PostTransfer,
- TransferHandoff,
- //Process,
- LeakCheck,
- GasBoxLeakCheck,
- LiftpinMoving,
- LiftpinWaiting,
- GuidePinMoving,
- Clean,
- LoadProcessRecipe,
- PreProcess,
- Processing,
- PostProcess,
- OpeningLid,
- ClosingLid,
- MFCVerification,
- AllMFCVerification,
- // exchange wafer with TM
- PreparePick,
- PreparePlace,
- ReadyForPick,
- ReadyForPlace,
- DropDownWafer,
- LiftUpWafer,
- DropDownReady,
- LiftUpReady,
- FinishPick,
- FinishPlace,
- PartialPressureTesting,
- VATPerformanceTesting
- }
- public enum TMState
- {
- Unknown,
- Init,
- Initializing,
- InitializingRB,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- Leakchecking,
- Picking,
- Placing,
- Swaping,
- PMPicking,
- PMPlacing,
- PMSwaping,
- Aligning,
- Mapping,
- Extending,
- Retracting,
- Swapping,
- Gotoing,
- ControllingPressure
- }
- public enum LLState
- {
- //Unknown,
- //Init,
- //Initializing,
- //Idle,
- //Error,
- //Pumping,
- //Venting,
- //Purging,
- //Leakchecking,
- //Picking,
- //Placing,
- //Swaping,
- //PMPicking,
- //PMPlacing,
- //PMSwaping,
- //Aligning,
- //Mapping,
- //Extending,
- //Retracting,
- //Swapping,
- //Gotoing,
- Unknown,
- Init,
- Initializing,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- LeakCheck,
- Prepare_For_TM,
- Prepare_For_EFEM,
- Ready_For_TM,
- Ready_For_EFEM,
- }
- public enum EFEMSTATE
- {
- Unknown, // 0
- Initializing, // 1
- Idle, // 2
- Error, // 3
- Picking, // 4
- Placing, // 5
- Aligning, // 6
- Mapping, // 7
- Init, // 8
- Orgshing, // 9
- Lifting, // 10
- InitingAL, // 11
- InitingRB, // 12
- Extending, // 13
- Retracting, // 14
- //SettingLamp, // 15
- Swapping,
- Gotoing,
- Gripping,
- Ungripping,
- Fliping,
- }
- public enum VceSTATE
- {
- Init,//初始化
- Idle,//空闲
- Error,//错误
- ClearError,
- Homing,//home操作 对应HM
- DoorOpenning,//开门操作 对应DC
- DoorClosing,//关门操作 对应DO
- Loading,//取cassette操作 包括开门关门 对应LOAD,
- UnLoading,
- Mapping,//扫片
- ReadingMap, //对应MP 包括三种格式 hex binary 智能(只有智能模式可以判断复杂情况)
- Goting,//指定槽到达窗口 对应 GC
- GotingLP,
- Resetting,//重置
- LoadingWithSMIF,//有SMIF的load
- UnLoadingWithSMIF,//有SMIF的load
- LoadPreparing,//准备
- SafeLoading,
- SafeUnloading,
- Pumping,
- Venting,
- Unknown
- }
- }
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