RtState.cs 4.4 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. SETMCycle,
  33. SERunning,
  34. ReturnWafer,
  35. SETransfer,
  36. SEReturnWafer
  37. }
  38. public enum PMState
  39. {
  40. Init,
  41. Idle,
  42. Homing,
  43. GasFlowing,
  44. RfPowering,
  45. Heating,
  46. LaunchingPump,
  47. LaunchingTurboPump,
  48. Pumping,
  49. Venting,
  50. Purging,
  51. GasLinePurge,
  52. PumpingLoadLock,
  53. VentingLoadLock,
  54. PurgingLoadLock,
  55. LoadLockLeakCheck,
  56. MoveLift,
  57. Purge,
  58. // transfer
  59. LLPlacing,
  60. LLPicking,
  61. Transfer,
  62. Error,
  63. PrepareTransfer,
  64. PostTransfer,
  65. TransferHandoff,
  66. //Process,
  67. LeakCheck,
  68. GasBoxLeakCheck,
  69. LiftpinMoving,
  70. LiftpinWaiting,
  71. GuidePinMoving,
  72. Clean,
  73. LoadProcessRecipe,
  74. PreProcess,
  75. Processing,
  76. PostProcess,
  77. OpeningLid,
  78. ClosingLid,
  79. MFCVerification,
  80. AllMFCVerification,
  81. // exchange wafer with TM
  82. PreparePick,
  83. PreparePlace,
  84. ReadyForPick,
  85. ReadyForPlace,
  86. DropDownWafer,
  87. LiftUpWafer,
  88. DropDownReady,
  89. LiftUpReady,
  90. FinishPick,
  91. FinishPlace,
  92. PartialPressureTesting,
  93. VATPerformanceTesting
  94. }
  95. public enum TMState
  96. {
  97. Unknown,
  98. Init,
  99. Initializing,
  100. InitializingRB,
  101. Idle,
  102. Error,
  103. Pumping,
  104. Venting,
  105. Purging,
  106. Leakchecking,
  107. Picking,
  108. Placing,
  109. Swaping,
  110. PMPicking,
  111. PMPlacing,
  112. PMSwaping,
  113. Aligning,
  114. Mapping,
  115. Extending,
  116. Retracting,
  117. Swapping,
  118. Gotoing,
  119. ControllingPressure
  120. }
  121. public enum LLState
  122. {
  123. //Unknown,
  124. //Init,
  125. //Initializing,
  126. //Idle,
  127. //Error,
  128. //Pumping,
  129. //Venting,
  130. //Purging,
  131. //Leakchecking,
  132. //Picking,
  133. //Placing,
  134. //Swaping,
  135. //PMPicking,
  136. //PMPlacing,
  137. //PMSwaping,
  138. //Aligning,
  139. //Mapping,
  140. //Extending,
  141. //Retracting,
  142. //Swapping,
  143. //Gotoing,
  144. Unknown,
  145. Init,
  146. Initializing,
  147. Idle,
  148. Error,
  149. Pumping,
  150. Venting,
  151. Purging,
  152. LeakCheck,
  153. Prepare_For_TM,
  154. Prepare_For_EFEM,
  155. Ready_For_TM,
  156. Ready_For_EFEM,
  157. }
  158. public enum EFEMSTATE
  159. {
  160. Unknown, // 0
  161. Initializing, // 1
  162. Idle, // 2
  163. Error, // 3
  164. Picking, // 4
  165. Placing, // 5
  166. Aligning, // 6
  167. Mapping, // 7
  168. Init, // 8
  169. Orgshing, // 9
  170. Lifting, // 10
  171. InitingAL, // 11
  172. InitingRB, // 12
  173. Extending, // 13
  174. Retracting, // 14
  175. //SettingLamp, // 15
  176. Swapping,
  177. Gotoing,
  178. Gripping,
  179. Ungripping,
  180. Fliping,
  181. }
  182. public enum VceSTATE
  183. {
  184. Init,//初始化
  185. Idle,//空闲
  186. Error,//错误
  187. ClearError,
  188. Homing,//home操作 对应HM
  189. DoorOpenning,//开门操作 对应DC
  190. DoorClosing,//关门操作 对应DO
  191. Loading,//取cassette操作 包括开门关门 对应LOAD,
  192. UnLoading,
  193. Mapping,//扫片
  194. ReadingMap, //对应MP 包括三种格式 hex binary 智能(只有智能模式可以判断复杂情况)
  195. Goting,//指定槽到达窗口 对应 GC
  196. GotingLP,
  197. Resetting,//重置
  198. LoadingWithSMIF,//有SMIF的load
  199. UnLoadingWithSMIF,//有SMIF的load
  200. LoadPreparing,//准备
  201. SafeLoading,
  202. SafeUnloading,
  203. Pumping,
  204. Venting,
  205. Unknown
  206. }
  207. }