PumpDownRoutine.cs 11 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. namespace Venus_RT.Modules.PMs
  9. {
  10. class PumpDownRoutine : PMRoutineBase, IRoutine
  11. {
  12. private enum PumpStep
  13. {
  14. kDelay_2s,
  15. kCloseISOValve,
  16. kSoftPump,
  17. kFastPump,
  18. kHe2ExDelay,
  19. kPVHe2,
  20. kISOValve,
  21. kTurboN2Purge,
  22. kVATValve,
  23. kOpenTurboPumpPurgeGasFinal,
  24. kOpenTurboPump,
  25. kGasFinal,
  26. kFinalStep,
  27. kCloseValve,
  28. kEnd,
  29. }
  30. //private int _ventTime;
  31. private int _pump_delay = 5000;
  32. private int _roughPumpPressure = 75000;
  33. private int _vHe2FlowPressure = 200;
  34. private int _forelinePressure = 200;
  35. private int _basePressure = 10;
  36. private JetChamber jetChamber = JetChamber.None;
  37. //private bool needsoft = true;
  38. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  39. {
  40. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  41. Name = "PumpDown";
  42. //if (jetChamber == JetChamber.VenusDE)
  43. //{
  44. // needsoft = false;
  45. //}
  46. }
  47. public RState Start(params object[] objs)
  48. {
  49. if (CheckLid() &&
  50. CheckSlitDoor())
  51. {
  52. Reset();
  53. _chamber.CloseValves();
  54. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  55. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  56. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  57. if(jetChamber != JetChamber.VenusSE && jetChamber != JetChamber.VenusDE)
  58. _chamber.OpenValve(ValveType.PVN22, true);
  59. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  60. _chamber.TurnPendulumValve(false);
  61. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  62. //前端压力值高于某个数值
  63. _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
  64. if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
  65. {
  66. LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
  67. return RState.Failed;
  68. }
  69. return Runner.Start(Module, Name);
  70. }
  71. return RState.Failed;
  72. }
  73. public RState Monitor()
  74. {
  75. switch (jetChamber)
  76. {
  77. //case JetChamber.Venus:
  78. case JetChamber.VenusSE:
  79. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  80. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  81. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  82. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  83. .Delay(PumpStep.kHe2ExDelay, 3000)
  84. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  85. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  86. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  87. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  88. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  89. .Run(PumpStep.kCloseValve, CloseValve, NullFun)
  90. .End(PumpStep.kEnd, NullFun, _delay_1s);
  91. break;
  92. case JetChamber.Kepler2300:
  93. case JetChamber.Kepler2200A:
  94. case JetChamber.Kepler2200B:
  95. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  96. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  97. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  98. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  99. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  100. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  101. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  102. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  103. .End(PumpStep.kEnd, NullFun, _delay_1s);
  104. break;
  105. case JetChamber.VenusDE:
  106. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  107. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  108. .RunIf(PumpStep.kFastPump, _chamber.ChamberPressure > _vHe2FlowPressure, OpenDEFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  109. .Delay(PumpStep.kHe2ExDelay, 3000)
  110. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  111. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  112. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  113. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  114. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  115. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  116. .Run(PumpStep.kCloseValve,CloseValve,NullFun)
  117. .End(PumpStep.kEnd, NullFun, _delay_1s);
  118. break;
  119. }
  120. //if (jetChamber == JetChamber.VenusDE)
  121. //{
  122. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  123. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  124. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  125. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  126. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  127. // .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  128. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  129. // .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  130. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  131. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  132. //}
  133. //else
  134. //{
  135. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  136. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  137. // .RunIf(PumpStep.kSoftPump, needsoft, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  138. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  139. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  140. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  141. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  142. // .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  143. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  144. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  145. //}
  146. return Runner.Status;
  147. }
  148. private bool CloseValve()
  149. {
  150. _chamber.OpenValve(ValveType.PVN22, true);
  151. return true;
  152. }
  153. private bool OpenTurboPumpPurgeGasFinalValve()
  154. {
  155. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  156. _chamber.OpenValve(ValveType.GasFinal, true);
  157. return true;
  158. }
  159. private bool OpenTurboValve()
  160. {
  161. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  162. return true;
  163. }
  164. private bool OpenGuageGasFinalValve()
  165. {
  166. _chamber.OpenValve(ValveType.GasFinal, true);
  167. _chamber.OpenValve(ValveType.Guage, true);
  168. return true;
  169. }
  170. private bool OpenFastPump()
  171. {
  172. _chamber.OpenValve(ValveType.SoftPump, false);
  173. _chamber.OpenValve(ValveType.FastPump, true);
  174. return true;
  175. }
  176. private bool OpenDEFastPump()
  177. {
  178. //_chamber.OpenValve(ValveType.SoftPump, false);
  179. _chamber.OpenValve(ValveType.PVHe2, false);
  180. _chamber.OpenValve(ValveType.FastPump, true);
  181. return true;
  182. }
  183. private bool OpenHe2Valve()
  184. {
  185. _chamber.OpenValve(ValveType.FastPump, false);
  186. _chamber.OpenValve(ValveType.PVHe2, true);
  187. return true;
  188. }
  189. private bool OpenISOValve()
  190. {
  191. _chamber.OpenValve(ValveType.FastPump, false);
  192. _chamber.OpenValve(ValveType.PVHe2, false);
  193. // ISO Valve
  194. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  195. return true;
  196. }
  197. private bool OpenVATValve()
  198. {
  199. return _chamber.TurnPendulumValve(true);
  200. }
  201. private bool FinalStep()
  202. {
  203. _chamber.OpenValve(ValveType.Guage, true);
  204. //2023/04/25修改
  205. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  206. //_chamber.OpenValve(ValveType.GasFinal, true);
  207. return true;
  208. }
  209. public void Abort()
  210. {
  211. CloseAllValves();
  212. }
  213. }
  214. }