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lixiang add331513f 1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息 hai 11 meses
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ShellView.xaml e00ff4f30d 1.高温Heater position1-position5加上动画 hai 1 ano
ShellView.xaml.cs add331513f 1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息 hai 11 meses