SimulatorSystem.cs 145 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. using System.Configuration;
  17. namespace Venus_Simulator.Instances
  18. {
  19. public class SimulatorSystem : Singleton<SimulatorSystem>
  20. {
  21. private PeriodicJob _thread;
  22. private Random _rd = new Random();
  23. ConfigType type;
  24. private RD_TRIG _trigATM = new RD_TRIG();
  25. private RD_TRIG _trigVAC = new RD_TRIG();
  26. private R_TRIG _trigLLExtend = new R_TRIG();
  27. private R_TRIG _trigLLRetract = new R_TRIG();
  28. private static int count = 0;
  29. private readonly float ATM_THRESHOLD = 750000;
  30. private readonly float ATM_PRESSURE = 760000;
  31. //private readonly float ATM_LoadLock_PRESSURE = 760000;
  32. private readonly uint VAC_SW_PRESSURE = 9500;
  33. private readonly uint PROCESS_GAUGE = 10000;
  34. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  35. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  36. public SimulatorSystem()
  37. {
  38. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  40. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  41. // TODO
  42. var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
  43. type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
  44. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  45. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  46. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  47. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  48. //double _OffsetTemp = SystemConfig.Instance.GetValue<double>($"PMA.Chiller.ChillerTemperatureOffset");
  49. }
  50. ~SimulatorSystem()
  51. {
  52. _thread?.Stop();
  53. }
  54. public void Initialize()
  55. {
  56. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  57. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  58. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  59. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  60. if (type == ConfigType.Kepler2200)
  61. {
  62. SetKepler2200TMDefaultValue();
  63. }
  64. else if (type == ConfigType.Kepler2300)
  65. {
  66. SetKepler2300TMDefaultValue();
  67. }
  68. else if (type == ConfigType.VenusSE)
  69. {
  70. SetSETMDefaultValue();
  71. }
  72. else if (type == ConfigType.VenusDE)
  73. {
  74. SetDETMDefaultValue();
  75. }
  76. Singleton<DataManager>.Instance.Initialize(false);
  77. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  78. }
  79. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  80. {
  81. switch (jetChamber)
  82. {
  83. case JetChamber.VenusSE:
  84. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  85. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  86. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  87. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  88. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  89. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  91. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  92. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  93. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  94. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  95. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  96. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  103. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  104. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  107. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  108. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  109. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  123. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  124. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  127. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  128. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  129. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  130. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  131. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  134. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  135. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  136. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  137. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  138. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  139. //// pressure
  140. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  141. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  142. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  143. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  144. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  145. //// Temperature
  146. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  147. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  148. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  149. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  150. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  151. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  152. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  153. // Datetime
  154. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  155. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  156. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  157. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  158. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  159. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  160. break;
  161. case JetChamber.VenusDE:
  162. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  163. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  164. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  165. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  166. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  167. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  168. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  169. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  170. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  171. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  172. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  173. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  174. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  175. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  176. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  178. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  182. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  183. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  187. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  191. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  192. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  193. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  206. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  207. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  208. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  211. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  212. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  213. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  214. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  215. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  216. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  217. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  220. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  221. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  222. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  224. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  225. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  226. //// pressure
  227. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  228. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  229. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  230. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  231. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  232. //// Temperature
  233. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  234. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  235. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  236. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  237. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  238. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  239. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  240. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  241. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  242. // Datetime
  243. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  244. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  245. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  246. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  247. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  248. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  249. break;
  250. case JetChamber.Kepler2300:
  251. // chamber
  252. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  253. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  255. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  256. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  257. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  258. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  259. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  260. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  261. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  262. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  263. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  267. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  271. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  275. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  276. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  277. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  287. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  288. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  290. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  291. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  292. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  293. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  294. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  295. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  296. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  297. //// pressure
  298. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  299. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  300. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  301. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  302. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  303. //// Temperature
  304. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  306. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  307. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  308. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  309. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  310. // Datetime
  311. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  312. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  313. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  314. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  315. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  316. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  317. break;
  318. case JetChamber.Kepler2200A:
  319. case JetChamber.Kepler2200B:
  320. if (jetChamber == JetChamber.Kepler2200B)
  321. {
  322. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  323. }
  324. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  325. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  326. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  327. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  328. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  329. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  330. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  331. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  332. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  333. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  334. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  335. IO.DI[$"{mod}.DI_TOP_Shield_Cover_closed"].Value = true;
  336. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  338. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  339. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  350. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  351. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  352. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  353. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  354. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  355. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  356. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  357. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  358. IO.DI[$"{mod}.DI_SCRUBBER_OK"].Value = true;
  359. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  360. //// pressure
  361. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  362. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  363. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  364. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  365. //// Temperature
  366. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  367. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  368. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  369. // Datetime
  370. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  371. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  372. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  373. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  374. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  375. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  376. break;
  377. }
  378. }
  379. private void SetKepler2200TMDefaultValue()
  380. {
  381. ModuleName mod = ModuleName.TM;
  382. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  384. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  385. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  388. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  389. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  390. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  391. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  392. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  393. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  394. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  395. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  396. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  397. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  398. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  399. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  400. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  401. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  402. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  403. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  404. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  405. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  406. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  407. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  408. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  409. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  410. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  411. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  412. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  413. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  414. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  415. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  416. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  417. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  418. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  419. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  420. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  421. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  422. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  423. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  424. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  425. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  426. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  427. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  428. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  429. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  430. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  431. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  432. // Datetime
  433. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  434. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  435. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  436. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  437. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  438. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  439. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  440. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  441. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  442. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  443. {
  444. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  445. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  446. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  447. }
  448. else
  449. {
  450. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  451. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  452. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  453. }
  454. }
  455. private void SetKepler2300TMDefaultValue()
  456. {
  457. ModuleName mod = ModuleName.TM;
  458. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  460. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  464. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  465. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  466. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  467. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  468. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  469. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  470. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  471. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  473. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  474. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  475. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  476. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  477. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  478. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  479. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  480. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  481. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  482. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  483. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  484. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  485. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  486. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  487. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  488. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  489. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  490. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  491. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  492. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  493. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  494. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  495. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  496. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  497. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  498. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  499. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  500. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  501. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  502. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  503. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  504. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  505. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  506. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  507. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  508. // Datetime
  509. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  510. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  511. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  512. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  513. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  514. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  515. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  516. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  517. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  518. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  519. {
  520. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  521. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  522. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  523. }
  524. else
  525. {
  526. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  527. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  528. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  529. }
  530. }
  531. private void SetSETMDefaultValue()
  532. {
  533. string mod = "SETM";
  534. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  535. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  536. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  537. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  538. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  539. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  540. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  541. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  542. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  543. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  544. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  545. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  546. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  547. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  548. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  549. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  550. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  551. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  552. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  553. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  554. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  555. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  556. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  558. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  559. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  560. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  561. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  562. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  563. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  564. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  565. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  566. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  567. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  568. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  569. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  570. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  571. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  572. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  573. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  574. }
  575. private void SetDETMDefaultValue()
  576. {
  577. string mod = "DETM";
  578. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  579. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  580. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  581. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  582. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  583. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  584. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  585. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  586. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  587. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  588. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  589. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  590. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  591. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  592. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  593. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  594. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  595. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  596. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  597. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  598. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  599. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  600. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  601. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  603. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  604. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  605. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  606. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  607. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  608. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  609. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  610. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  611. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  612. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  613. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  615. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  616. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  617. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  618. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  619. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  620. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  621. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  622. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  623. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  624. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  625. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  626. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  627. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  628. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  629. IO.DI[$"{mod}.DI_EMO"].Value = false;
  630. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  631. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  632. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  633. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  634. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  635. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  636. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  637. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  638. }
  639. private bool OnMonitor()
  640. {
  641. try
  642. {
  643. foreach (var item in jetChambers)
  644. {
  645. switch (item.Value)
  646. {
  647. case JetChamber.Kepler2300:
  648. MonitorSlitDoorInTM(item.Key);
  649. MonitorPin(item.Key);
  650. MonitorPressure_Kepler(item.Key);
  651. //MonitorTemperature(item.Key);
  652. MonitorGas(item.Key);
  653. this.SimulateHe(item.Key);
  654. //MonitorRF(item.Key);
  655. ChangeTime(item.Key);
  656. //MonitorIOPumpCtrl(item.Key);
  657. MonitorLid(item.Key);
  658. break;
  659. case JetChamber.Kepler2200A:
  660. case JetChamber.Kepler2200B:
  661. MonitorSlitDoorInTM(item.Key);
  662. MonitorPressure_Kepler2200(item.Key);
  663. //MonitorTemperature(item.Key);
  664. MonitorGas(item.Key);
  665. MonitorKeplerTMGas();
  666. // MonitorRF(item.Key);
  667. ChangeTime(item.Key);
  668. //MonitorIOPumpCtrl(item.Key);
  669. MonitorLid(item.Key);
  670. MonitorIOHighTemperatureHeater(item.Key);
  671. MonitorKepler2200Heater(item.Key);
  672. break;
  673. case JetChamber.VenusSE:
  674. MonitorPin(item.Key);
  675. //MonitorVenuSESlitDoor(item.Key);
  676. MonitorSEPressure(item.Key);
  677. MonitorSEGas(item.Key);
  678. ChangeTime(item.Key);
  679. this.SimulateSEHe(item.Key);
  680. break;
  681. case JetChamber.VenusDE:
  682. MonitorPin(item.Key);
  683. MonitorDEGas(item.Key);
  684. //MonitorVenuDESlitDoor(item.Key);
  685. MonitorDEPressure(item.Key);
  686. ChangeTime(item.Key);
  687. MonitorLinerDoor(item.Key);
  688. this.SimulateDEHe(item.Key);
  689. break;
  690. }
  691. }
  692. //ChangeTime(ModuleName.TM);
  693. if (type == ConfigType.Kepler2200)
  694. {
  695. ChangeTime(ModuleName.TM);
  696. MonitorMFSlitDoor();
  697. MonitorMFKepler2200Pressure();
  698. }
  699. else if (type == ConfigType.Kepler2300)
  700. {
  701. ChangeTime(ModuleName.TM);
  702. MonitorMFSlitDoor();
  703. MonitorMFKepler2300Pressure();
  704. }
  705. else if (type == ConfigType.VenusSE)
  706. {
  707. MonitorSEMFSlitDoor();
  708. MonitorSEMFPressure();
  709. //MonitorDEMFSlitDoor();
  710. //MonitorDEMFPressure();
  711. }
  712. else if (type == ConfigType.VenusDE)
  713. {
  714. MonitorDEMFSlitDoor();
  715. MonitorDEMFPressure();
  716. }
  717. }
  718. catch (Exception e)
  719. {
  720. LOG.WriteExeption(e);
  721. }
  722. return true;
  723. }
  724. private void ChangeTime(ModuleName mod)
  725. {
  726. // Heartbeat with PLC
  727. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  728. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  729. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  730. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  731. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  732. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  733. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  734. }
  735. //void MonitorVenuSESlitDoor(ModuleName mod)
  736. //{
  737. //}
  738. void MonitorSlitDoorInPM(ModuleName mod)
  739. {
  740. // slit door open
  741. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  742. {
  743. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  744. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  745. }
  746. // slit door close
  747. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  748. {
  749. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  750. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  751. }
  752. }
  753. void MonitorLinerDoor(ModuleName mod)
  754. {
  755. // slit door open
  756. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  757. {
  758. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  759. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  760. }
  761. // slit door close
  762. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  763. {
  764. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  765. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  766. }
  767. }
  768. void MonitorSlitDoorInTM(ModuleName mod)
  769. {
  770. // slit door open
  771. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  772. {
  773. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  774. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  775. }
  776. // slit door close
  777. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  778. {
  779. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  780. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  781. }
  782. }
  783. void MonitorMFSlitDoor()
  784. {
  785. ModuleName mod = ModuleName.TM;
  786. // LLA T door open
  787. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  788. {
  789. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  790. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  791. }
  792. // LLB T door open
  793. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  794. {
  795. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  796. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  797. }
  798. // LLA E door open
  799. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  800. {
  801. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  802. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  803. }
  804. // LLB E door open
  805. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  806. {
  807. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  808. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  809. }
  810. // LLA T door close
  811. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  812. {
  813. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  814. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  815. }
  816. // LLB T door close
  817. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  818. {
  819. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  820. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  821. }
  822. // LLA E door close
  823. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  824. {
  825. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  826. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  827. }
  828. // LLB E door close
  829. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  830. {
  831. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  832. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  833. }
  834. // PMA slitdoor door close/open
  835. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  836. {
  837. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  838. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  839. }
  840. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  841. {
  842. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  843. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  844. }
  845. // PMB slitdoor door close/open
  846. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  847. {
  848. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  849. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  850. }
  851. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  852. {
  853. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  854. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  855. }
  856. // PMC slitdoor door close/open
  857. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  858. {
  859. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  860. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  861. }
  862. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  863. {
  864. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  865. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  866. }
  867. // PMD slitdoor door close/open
  868. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  869. {
  870. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  871. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  872. }
  873. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  874. {
  875. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  876. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  877. }
  878. }
  879. void MonitorSEMFSlitDoor()
  880. {
  881. string mod = "SETM";
  882. // VCE T door open
  883. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  884. {
  885. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  886. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  887. }
  888. // VCE T door Close
  889. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  890. {
  891. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  892. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  893. }
  894. //pma
  895. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  896. {
  897. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  898. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  899. }
  900. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  901. {
  902. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  903. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  904. }
  905. //pmb
  906. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  907. {
  908. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  909. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  910. }
  911. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  912. {
  913. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  914. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  915. }
  916. //pmc
  917. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  918. {
  919. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  920. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  921. }
  922. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  923. {
  924. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  925. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  926. }
  927. }
  928. void MonitorDEMFSlitDoor()
  929. {
  930. string mod = "DETM";
  931. // VCE L door open
  932. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  933. {
  934. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  935. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  936. }
  937. // VCE R door open
  938. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  939. {
  940. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  941. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  942. }
  943. // VCE L door Close
  944. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  945. {
  946. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  947. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  948. }
  949. // VCE R door Close
  950. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  951. {
  952. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  953. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  954. }
  955. //pma
  956. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  957. {
  958. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  959. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  960. }
  961. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  962. {
  963. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  964. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  965. }
  966. //pmb
  967. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  968. {
  969. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  970. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  971. }
  972. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  973. {
  974. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  975. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  976. }
  977. //pmc
  978. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  979. {
  980. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  981. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  982. }
  983. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  984. {
  985. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  986. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  987. }
  988. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  989. {
  990. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true;
  991. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false;
  992. }
  993. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  994. {
  995. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false;
  996. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true;
  997. }
  998. if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
  999. {
  1000. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  1001. }
  1002. else
  1003. {
  1004. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
  1005. }
  1006. if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
  1007. {
  1008. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
  1009. }
  1010. else
  1011. {
  1012. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
  1013. }
  1014. if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
  1015. {
  1016. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  1017. }
  1018. else
  1019. {
  1020. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
  1021. }
  1022. }
  1023. void MonitorPin(ModuleName mod)
  1024. {
  1025. // lift pin up
  1026. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  1027. {
  1028. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  1029. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  1030. }
  1031. }
  1032. void MonitorLid(ModuleName mod)
  1033. {
  1034. // lift pin up
  1035. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  1036. {
  1037. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  1038. }
  1039. }
  1040. void MonitorExtendAndRetract(ModuleName mod)
  1041. {
  1042. // Extend
  1043. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1044. if (_trigLLExtend.Q)
  1045. {
  1046. _trigLLRetract.RST = true;
  1047. Thread.Sleep(500);
  1048. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1049. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1050. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1051. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1052. }
  1053. // Retract
  1054. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1055. if (_trigLLRetract.Q)
  1056. {
  1057. count++;
  1058. _trigLLExtend.RST = true;
  1059. Thread.Sleep(500);
  1060. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1061. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1062. if (count == 1)
  1063. {
  1064. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1065. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1066. }
  1067. else if (count == 2)
  1068. {
  1069. count = 0;
  1070. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1071. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1072. }
  1073. }
  1074. }
  1075. void MonitorPressure(ModuleName mod)
  1076. {
  1077. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1078. // Loadlock pressure
  1079. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1080. // Foreline
  1081. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1082. {
  1083. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1084. }
  1085. else
  1086. {
  1087. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1088. }
  1089. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1090. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1091. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1092. //float chamber_pressure = GetMockChamberPressure(mod);
  1093. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1094. // soft pump & fast pump
  1095. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1096. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1097. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1098. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1099. {
  1100. //任意泵打开
  1101. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1102. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1103. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1104. {//开双泵
  1105. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1106. {
  1107. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1108. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1109. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1110. }
  1111. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1112. {
  1113. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1114. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1115. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1116. }
  1117. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1118. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1119. }
  1120. else if (fast_pump_vlv.Value)//开
  1121. {
  1122. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1123. {
  1124. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1125. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1126. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1127. }
  1128. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1129. {
  1130. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1131. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1132. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1133. }
  1134. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1135. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1136. }
  1137. else if (soft_pump_vlv.Value)
  1138. {
  1139. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1140. {
  1141. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1142. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1143. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1144. }
  1145. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1146. {
  1147. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1148. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1149. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1150. }
  1151. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1152. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1153. }
  1154. else if (turbo_pump_vlv.Value)
  1155. {
  1156. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1157. if ((getAiValue_ChamberPressure - 500) >= 0)
  1158. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1159. else
  1160. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1161. if ((getAiValue_ProcessPressure - 500) >= 0)
  1162. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1163. else
  1164. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1165. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1166. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1167. }
  1168. }
  1169. // fast vent & purge
  1170. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1171. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1172. //if (vent_vlv.Value || purge_vlv.Value)
  1173. //{
  1174. // if (vent_vlv.Value && purge_vlv.Value)
  1175. // {
  1176. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1177. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1178. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1179. // {
  1180. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1181. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1182. // }
  1183. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1184. // {
  1185. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1186. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1187. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1188. // }
  1189. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1190. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1191. // }
  1192. // else
  1193. //
  1194. if (vent_vlv.Value)
  1195. {
  1196. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1197. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1198. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1199. {
  1200. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1201. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1202. }
  1203. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1204. {
  1205. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1206. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1207. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1208. }
  1209. else
  1210. {
  1211. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1212. }
  1213. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1214. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1215. }
  1216. // Loadlock Pumping Valve
  1217. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1218. if (Loadlock_pump_vlv.Value)
  1219. {
  1220. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1221. }
  1222. // Loadlock vent
  1223. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1224. if (Loadlock_vent_vlv.Value)
  1225. {
  1226. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1227. }
  1228. // 压力值越界,复位
  1229. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1230. if (chamber_pressure1 > ATM_PRESSURE)
  1231. {
  1232. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1233. }
  1234. else if (chamber_pressure1 < 20)
  1235. {
  1236. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1237. }
  1238. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1239. if (process_pressure1 > PROCESS_GAUGE)
  1240. {
  1241. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1242. }
  1243. else if (process_pressure1 < 20)
  1244. {
  1245. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1246. }
  1247. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1248. if (foreline_pressure > 10000)
  1249. {
  1250. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1251. }
  1252. else if (foreline_pressure < 150)
  1253. {
  1254. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1255. }
  1256. // 模拟压力计漂移
  1257. //int p1 = (int)GetMockChamberPressure(mod);
  1258. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1259. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1260. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1261. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1262. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1263. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1264. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1265. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1266. // 根据当前压力值设定信号
  1267. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1268. // ATM switch
  1269. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1270. // VAC switch
  1271. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1272. // Throttle valve
  1273. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1274. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1275. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1276. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1277. // 压力值
  1278. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1279. //{
  1280. // short increase = (short)_rd.Next(20, 30);
  1281. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1282. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1283. // {
  1284. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1285. // }
  1286. //}
  1287. //else
  1288. //{
  1289. // short increase = (short)_rd.Next(20, 30);
  1290. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1291. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1292. // {
  1293. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1294. // }
  1295. //}
  1296. //// 位置值
  1297. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1298. //{
  1299. // short increase = (short)_rd.Next(20, 30);
  1300. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1301. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1302. // {
  1303. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1304. // }
  1305. //}
  1306. //else
  1307. //{
  1308. // short increase = (short)_rd.Next(20, 30);
  1309. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1310. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1311. // {
  1312. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1313. // }
  1314. //}
  1315. }
  1316. void MonitorSEPressure(ModuleName mod)
  1317. {
  1318. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1319. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1320. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1321. // Foreline
  1322. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1323. {
  1324. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1325. }
  1326. else
  1327. {
  1328. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1329. }
  1330. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1331. // soft pump & fast pump
  1332. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1333. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1334. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1335. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1336. {
  1337. //任意泵打开
  1338. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1339. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1340. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1341. {//开双泵
  1342. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1343. {
  1344. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1345. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1346. }
  1347. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1348. {
  1349. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1350. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1351. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1352. }
  1353. }
  1354. else if (fast_pump_vlv.Value)//开
  1355. {
  1356. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1357. {
  1358. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1359. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1360. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1361. }
  1362. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1363. {
  1364. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1365. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1366. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1367. }
  1368. }
  1369. else if (soft_pump_vlv.Value)
  1370. {
  1371. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1372. {
  1373. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1374. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1375. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1376. }
  1377. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1378. {
  1379. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1380. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1381. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1382. }
  1383. }
  1384. else if (turbo_pump_vlv.Value)
  1385. {
  1386. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1387. if ((getAiValue_ChamberPressure - 500) >= 0)
  1388. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1389. else
  1390. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1391. if ((getAiValue_ProcessPressure - 500) >= 0)
  1392. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1393. else
  1394. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1395. }
  1396. }
  1397. // fast vent & purge
  1398. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1399. if (vent_vlv.Value)
  1400. {
  1401. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1402. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1403. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1404. {
  1405. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1406. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1407. }
  1408. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1409. {
  1410. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1411. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1412. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1413. }
  1414. else
  1415. {
  1416. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1417. }
  1418. }
  1419. // Loadlock Pumping Valve
  1420. // 压力值越界,复位
  1421. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1422. if (chamber_pressure1 > ATM_PRESSURE)
  1423. {
  1424. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1425. }
  1426. else if (chamber_pressure1 < 20)
  1427. {
  1428. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1429. }
  1430. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1431. if (process_pressure1 > PROCESS_GAUGE)
  1432. {
  1433. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1434. }
  1435. else if (process_pressure1 < 20)
  1436. {
  1437. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1438. }
  1439. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1440. if (foreline_pressure > 1999)
  1441. {
  1442. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1443. }
  1444. else if (foreline_pressure < 150)
  1445. {
  1446. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1447. }
  1448. // ATM switch
  1449. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1450. // VAC switch
  1451. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1452. }
  1453. void MonitorDEPressure(ModuleName mod)
  1454. {
  1455. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1456. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1457. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1458. // Foreline
  1459. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1460. {
  1461. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1462. }
  1463. else
  1464. {
  1465. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1466. }
  1467. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1468. // soft pump & fast pump
  1469. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1470. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1471. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1472. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1473. {
  1474. //任意泵打开
  1475. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1476. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1477. if (fast_pump_vlv.Value)
  1478. {//开双泵
  1479. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1480. {
  1481. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1482. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1483. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1484. }
  1485. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1486. {
  1487. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1488. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1489. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1490. }
  1491. }
  1492. else if (turbo_pump_vlv.Value)
  1493. {
  1494. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1495. if ((getAiValue_ChamberPressure - 500) >= 0)
  1496. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1497. else
  1498. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1499. if ((getAiValue_ProcessPressure - 500) >= 0)
  1500. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1501. else
  1502. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1503. }
  1504. }
  1505. // fast vent & purge
  1506. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1507. if (vent_vlv.Value)
  1508. {
  1509. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1510. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1511. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1512. {
  1513. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1514. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1515. }
  1516. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1517. {
  1518. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1519. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1520. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1521. }
  1522. else
  1523. {
  1524. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1525. }
  1526. }
  1527. // Loadlock Pumping Valve
  1528. // 压力值越界,复位
  1529. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1530. if (chamber_pressure1 > ATM_PRESSURE)
  1531. {
  1532. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1533. }
  1534. else if (chamber_pressure1 < 20)
  1535. {
  1536. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1537. }
  1538. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1539. if (process_pressure1 > PROCESS_GAUGE)
  1540. {
  1541. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1542. }
  1543. else if (process_pressure1 < 20)
  1544. {
  1545. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1546. }
  1547. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1548. if (foreline_pressure > 10000)
  1549. {
  1550. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1551. }
  1552. else if (foreline_pressure < 150)
  1553. {
  1554. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1555. }
  1556. // ATM switch
  1557. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1558. // VAC switch
  1559. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1560. }
  1561. void MonitorPressure_Kepler(ModuleName mod)
  1562. {
  1563. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1564. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1565. {
  1566. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1567. }
  1568. else
  1569. {
  1570. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1571. }
  1572. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1573. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1574. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1575. //float chamber_pressure = GetMockChamberPressure(mod);
  1576. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1577. // soft pump & fast pump
  1578. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1579. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1580. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1581. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1582. {
  1583. //任意泵打开
  1584. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1585. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1586. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1587. {//开双泵
  1588. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1589. {
  1590. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1591. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1592. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1593. }
  1594. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1595. {
  1596. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1597. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1598. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1599. }
  1600. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1601. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1602. }
  1603. else if (fast_pump_vlv.Value)//开
  1604. {
  1605. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1606. {
  1607. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1608. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1609. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1610. }
  1611. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1612. {
  1613. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1614. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1615. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1616. }
  1617. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1618. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1619. }
  1620. else if (soft_pump_vlv.Value)
  1621. {
  1622. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1623. {
  1624. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1625. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1626. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1627. }
  1628. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1629. {
  1630. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1631. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1632. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1633. }
  1634. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1635. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1636. }
  1637. else if (turbo_pump_vlv.Value)
  1638. {
  1639. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1640. if ((getAiValue_ChamberPressure - 500) >= 0)
  1641. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1642. else
  1643. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1644. if ((getAiValue_ProcessPressure - 500) >= 0)
  1645. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1646. else
  1647. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1648. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1649. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1650. }
  1651. }
  1652. // fast vent & purge
  1653. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1654. if (vent_vlv.Value)
  1655. {
  1656. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1657. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1658. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1659. {
  1660. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1661. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1662. }
  1663. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1664. {
  1665. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1666. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1667. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1668. }
  1669. else
  1670. {
  1671. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1672. }
  1673. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1674. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1675. }
  1676. // Loadlock Pumping Valve
  1677. // 压力值越界,复位
  1678. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1679. if (chamber_pressure1 > ATM_PRESSURE)
  1680. {
  1681. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1682. }
  1683. else if (chamber_pressure1 < 20)
  1684. {
  1685. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 1);
  1686. }
  1687. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1688. if (process_pressure1 > PROCESS_GAUGE)
  1689. {
  1690. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1691. }
  1692. else if (process_pressure1 < 20)
  1693. {
  1694. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1695. }
  1696. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1697. if (foreline_pressure > 10000)
  1698. {
  1699. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1700. }
  1701. else if (foreline_pressure < 150)
  1702. {
  1703. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1704. }
  1705. // ATM switch
  1706. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1707. // VAC switch
  1708. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1709. }
  1710. void MonitorPressure_Kepler2200(ModuleName mod)
  1711. {
  1712. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1713. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1714. {
  1715. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1716. }
  1717. else
  1718. {
  1719. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1720. }
  1721. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1722. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1723. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1724. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1725. //float chamber_pressure = GetMockChamberPressure(mod);
  1726. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1727. // soft pump & fast pump
  1728. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1729. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1730. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1731. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1732. {
  1733. //任意泵打开
  1734. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1735. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1736. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1737. {
  1738. //开双泵
  1739. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1740. {
  1741. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1742. }
  1743. else
  1744. {
  1745. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1746. }
  1747. //if (getAiValue_ChamberPressure > 1000)
  1748. //{
  1749. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1750. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1751. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1752. //}
  1753. //else if ( getAiValue_ChamberPressure <= 1000)
  1754. //{
  1755. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1756. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1757. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1758. //}
  1759. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1760. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1761. }
  1762. else if (fast_pump_vlv.Value)//开
  1763. {
  1764. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1765. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1766. else
  1767. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1768. }
  1769. else if (soft_pump_vlv.Value)
  1770. {
  1771. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1772. {
  1773. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1774. }
  1775. else
  1776. {
  1777. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1778. }
  1779. //if (getAiValue_ChamberPressure > 5000)
  1780. //{
  1781. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1782. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1783. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1784. //}
  1785. //else if (getAiValue_ChamberPressure <= 1000)
  1786. //{
  1787. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1788. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1789. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1790. //}
  1791. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1792. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1793. }
  1794. else if (turbo_pump_vlv.Value)
  1795. {
  1796. if ((getAiValue_ChamberPressure - 50) >= 0)
  1797. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1798. else
  1799. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1800. }
  1801. }
  1802. // fast vent & purge
  1803. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1804. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1805. if (vent_vlv.Value && gas_final_vlv.Value)
  1806. {
  1807. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1808. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1809. if (getAiValue_ChamberPressure > 1000)
  1810. {
  1811. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1812. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1813. }
  1814. else if (getAiValue_ChamberPressure <= 1000)
  1815. {
  1816. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1817. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1818. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1819. }
  1820. else
  1821. {
  1822. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1823. }
  1824. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1825. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1826. }
  1827. // Loadlock Pumping Valve
  1828. // 压力值越界,复位
  1829. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1830. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1831. {
  1832. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1833. }
  1834. else if (chamber_pressure1 < 20)
  1835. {
  1836. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 0.5F);
  1837. }
  1838. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1839. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1840. //{
  1841. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1842. //}
  1843. //else if (process_pressure1 < 20)
  1844. //{
  1845. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1846. //}
  1847. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1848. if (foreline_pressure > 1000)
  1849. {
  1850. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1851. }
  1852. else if (foreline_pressure < 15)
  1853. {
  1854. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1855. }
  1856. // ATM switch
  1857. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1858. // VAC switch
  1859. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1860. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1861. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1862. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1863. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1864. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1865. }
  1866. void MonitorSEMFPressure()
  1867. {
  1868. string mod = "SETM";
  1869. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1870. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1871. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1872. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1873. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1874. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1875. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1876. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1877. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1878. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1879. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1880. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1881. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1882. {
  1883. if (getAiValue_TM_ChamberPressure > 10000)
  1884. {
  1885. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1886. }
  1887. else if (getAiValue_TM_ChamberPressure <= 10000)
  1888. {
  1889. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1890. }
  1891. }
  1892. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1893. {
  1894. if (getAiValue_TM_ChamberPressure > 10000)
  1895. {
  1896. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1897. }
  1898. else if (getAiValue_TM_ChamberPressure <= 10000)
  1899. {
  1900. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1901. }
  1902. }
  1903. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1904. {
  1905. if (getAiValue_VCE_ChamberPressure > 10000)
  1906. {
  1907. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1908. }
  1909. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1910. {
  1911. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1912. }
  1913. }
  1914. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1915. {
  1916. if (getAiValue_VCE_ChamberPressure > 10000)
  1917. {
  1918. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1919. }
  1920. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1921. {
  1922. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1923. }
  1924. }
  1925. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1926. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1927. {
  1928. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1929. }
  1930. else if (getAiValue_VCE_ChamberPressure < 20)
  1931. {
  1932. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1933. }
  1934. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1935. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1936. {
  1937. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1938. }
  1939. else if (getAiValue_TM_ChamberPressure < 20)
  1940. {
  1941. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1942. }
  1943. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1944. // VAC switch
  1945. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1946. }
  1947. void MonitorDEMFPressure()
  1948. {
  1949. string mod = "DETM";
  1950. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1951. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1952. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1953. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1954. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1955. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1956. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1957. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1958. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1959. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1960. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1961. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1962. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1963. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1964. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1965. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1966. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1967. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1968. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1969. {
  1970. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1971. {
  1972. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1973. }
  1974. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1975. {
  1976. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1977. }
  1978. }
  1979. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1980. {
  1981. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1982. {
  1983. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1984. }
  1985. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1986. {
  1987. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1988. }
  1989. }
  1990. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1991. {
  1992. if (getAiValue_TM_ChamberPressure > 10000)
  1993. {
  1994. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1995. }
  1996. else if (getAiValue_TM_ChamberPressure <= 10000)
  1997. {
  1998. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1999. }
  2000. }
  2001. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  2002. {
  2003. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  2004. {
  2005. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  2006. }
  2007. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  2008. {
  2009. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  2010. }
  2011. }
  2012. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  2013. {
  2014. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  2015. {
  2016. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  2017. }
  2018. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  2019. {
  2020. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  2021. }
  2022. }
  2023. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2024. {
  2025. if (getAiValue_TM_ChamberPressure > 10000)
  2026. {
  2027. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2028. }
  2029. else if (getAiValue_TM_ChamberPressure <= 10000)
  2030. {
  2031. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2032. }
  2033. }
  2034. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  2035. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  2036. {
  2037. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  2038. }
  2039. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  2040. {
  2041. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  2042. }
  2043. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2044. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2045. {
  2046. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2047. }
  2048. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2049. {
  2050. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2051. }
  2052. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2053. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2054. {
  2055. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2056. }
  2057. else if (getAiValue_TM_ChamberPressure < 20)
  2058. {
  2059. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2060. }
  2061. // ATM switch
  2062. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2063. // VAC switch
  2064. // ATM switch
  2065. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2066. // ATM switch
  2067. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2068. }
  2069. void MonitorMFKepler2200Pressure()
  2070. {
  2071. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2072. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2073. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2074. ModuleName mod = ModuleName.TM;
  2075. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2076. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2077. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2078. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2079. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2080. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2081. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2082. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2083. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2084. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2085. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2086. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2087. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2088. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2089. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2090. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2091. {
  2092. if (getAiValue_LLA_ChamberPressure > 20000)
  2093. {
  2094. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 12000);
  2095. }
  2096. else if(getAiValue_LLA_ChamberPressure > 10000)
  2097. {
  2098. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 3000);
  2099. }
  2100. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2101. {
  2102. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 500);
  2103. }
  2104. }
  2105. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2106. {
  2107. if (getAiValue_LLB_ChamberPressure > 20000)
  2108. {
  2109. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 12000);
  2110. }
  2111. else if (getAiValue_LLB_ChamberPressure > 10000)
  2112. {
  2113. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 3000);
  2114. }
  2115. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2116. {
  2117. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 500);
  2118. }
  2119. }
  2120. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2121. {
  2122. if (getAiValue_TM_ChamberPressure > 10000)
  2123. {
  2124. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2125. }
  2126. else if (getAiValue_TM_ChamberPressure <= 10000)
  2127. {
  2128. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2129. }
  2130. }
  2131. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2132. {
  2133. if (getAiValue_LLA_ChamberPressure > 20000)
  2134. {
  2135. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 13000);
  2136. }
  2137. else if (getAiValue_LLA_ChamberPressure > 10000)
  2138. {
  2139. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 2100);
  2140. }
  2141. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2142. {
  2143. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 500);
  2144. }
  2145. }
  2146. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2147. {
  2148. if (getAiValue_LLB_ChamberPressure > 20000)
  2149. {
  2150. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 13000);
  2151. }
  2152. else if (getAiValue_LLB_ChamberPressure > 10000)
  2153. {
  2154. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 2100);
  2155. }
  2156. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2157. {
  2158. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 500);
  2159. }
  2160. }
  2161. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2162. {
  2163. if (getAiValue_TM_ChamberPressure > 10000)
  2164. {
  2165. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2166. }
  2167. else if (getAiValue_TM_ChamberPressure <= 10000)
  2168. {
  2169. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2170. }
  2171. }
  2172. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2173. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2174. {
  2175. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2176. }
  2177. else if (getAiValue_LLA_ChamberPressure < 3)
  2178. {
  2179. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 0.5F);
  2180. }
  2181. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2182. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2183. {
  2184. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2185. }
  2186. else if (getAiValue_LLB_ChamberPressure < 3)
  2187. {
  2188. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 0.5F);
  2189. }
  2190. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2191. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2192. {
  2193. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2194. }
  2195. else if (getAiValue_TM_ChamberPressure < 3)
  2196. {
  2197. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2198. }
  2199. // ATM switch
  2200. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2201. // VAC switch
  2202. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2203. // ATM switch
  2204. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2205. // VAC switch
  2206. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2207. // ATM switch
  2208. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2209. // VAC switch
  2210. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2211. }
  2212. void MonitorMFKepler2300Pressure()
  2213. {
  2214. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2215. //{
  2216. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2217. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2218. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2219. ModuleName mod = ModuleName.TM;
  2220. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2221. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2222. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2223. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2224. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2225. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2226. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2227. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2228. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2229. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2230. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2231. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2232. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2233. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2234. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2235. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2236. {
  2237. if (getAiValue_LLA_ChamberPressure > 10000)
  2238. {
  2239. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2240. }
  2241. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2242. {
  2243. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2244. }
  2245. }
  2246. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2247. {
  2248. if (getAiValue_LLB_ChamberPressure > 10000)
  2249. {
  2250. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2251. }
  2252. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2253. {
  2254. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2255. }
  2256. }
  2257. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2258. {
  2259. if (getAiValue_TM_ChamberPressure > 10000)
  2260. {
  2261. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2262. }
  2263. else if (getAiValue_TM_ChamberPressure <= 10000)
  2264. {
  2265. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2266. }
  2267. }
  2268. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2269. {
  2270. if (getAiValue_LLA_ChamberPressure > 10000)
  2271. {
  2272. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2273. }
  2274. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2275. {
  2276. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2277. }
  2278. }
  2279. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2280. {
  2281. if (getAiValue_LLB_ChamberPressure > 10000)
  2282. {
  2283. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2284. }
  2285. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2286. {
  2287. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2288. }
  2289. }
  2290. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2291. {
  2292. if (getAiValue_TM_ChamberPressure > 10000)
  2293. {
  2294. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2295. }
  2296. else if (getAiValue_TM_ChamberPressure <= 10000)
  2297. {
  2298. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2299. }
  2300. }
  2301. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2302. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2303. {
  2304. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2305. }
  2306. else if (getAiValue_LLA_ChamberPressure < 20)
  2307. {
  2308. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2309. }
  2310. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2311. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2312. {
  2313. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2314. }
  2315. else if (getAiValue_LLB_ChamberPressure < 20)
  2316. {
  2317. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2318. }
  2319. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2320. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2321. {
  2322. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2323. }
  2324. else if (getAiValue_TM_ChamberPressure < 20)
  2325. {
  2326. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2327. }
  2328. // ATM switch
  2329. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2330. // VAC switch
  2331. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2332. // ATM switch
  2333. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2334. // VAC switch
  2335. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2336. // ATM switch
  2337. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2338. // VAC switch
  2339. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2340. // }
  2341. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2342. //{
  2343. // ModuleName mod = ModuleName.TM;
  2344. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2345. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2346. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2347. //}
  2348. }
  2349. void SetAiValue(string name, float value)
  2350. {
  2351. byte[] flow = BitConverter.GetBytes(value);
  2352. short high1 = BitConverter.ToInt16(flow, 0);
  2353. short low1 = BitConverter.ToInt16(flow, 2);
  2354. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2355. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2356. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2357. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2358. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2359. }
  2360. float GetAiValue(string name)
  2361. {
  2362. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2363. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2364. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2365. return flow;
  2366. }
  2367. float GetAoValue(string name)
  2368. {
  2369. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2370. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2371. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2372. return flow;
  2373. }
  2374. void MonitorTemperature(ModuleName mod)
  2375. {
  2376. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2377. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2378. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2379. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2380. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2381. // 底座
  2382. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2383. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2384. //{
  2385. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2386. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2387. //}
  2388. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2389. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2390. //{
  2391. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2392. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2393. //}
  2394. // Foreline
  2395. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2396. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2397. {
  2398. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2399. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2400. }
  2401. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2402. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2403. {
  2404. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2405. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2406. }
  2407. // Wall
  2408. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2409. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2410. {
  2411. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2412. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2413. }
  2414. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2415. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2416. {
  2417. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2418. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2419. }
  2420. }
  2421. void MonitorGas(ModuleName mod)
  2422. {
  2423. // gas
  2424. this.SimulateMFC(mod, 1);
  2425. this.SimulateMFC(mod, 2);
  2426. this.SimulateMFC(mod, 3);
  2427. this.SimulateMFC(mod, 4);
  2428. this.SimulateMFC(mod, 5);
  2429. this.SimulateMFC(mod, 6);
  2430. this.SimulateMFC(mod, 7);
  2431. this.SimulateMFC(mod, 8);
  2432. this.SimulateN2(mod);
  2433. }
  2434. void MonitorKeplerTMGas()
  2435. {
  2436. this.SimulateKeplerMFC(ModuleName.LLA, 1);
  2437. this.SimulateKeplerMFC(ModuleName.LLB, 1);
  2438. this.SimulateKeplerMFC(ModuleName.TM, 1);
  2439. }
  2440. void MonitorSEGas(ModuleName mod)
  2441. {
  2442. SimulateMFC(mod, 1);
  2443. SimulateMFC(mod, 2);
  2444. SimulateMFC(mod, 3);
  2445. SimulateMFC(mod, 4);
  2446. SimulateMFC(mod, 5);
  2447. SimulateMFC(mod, 6);
  2448. SimulateMFC(mod, 7);
  2449. SimulateMFC(mod, 8);
  2450. SimulateMFC(mod, 9);
  2451. SimulateMFC(mod, 10);
  2452. SimulateMFC(mod, 11);
  2453. SimulateMFC(mod, 12);
  2454. }
  2455. void MonitorDEGas(ModuleName mod)
  2456. {
  2457. SimulateMFC(mod, 1);
  2458. SimulateMFC(mod, 2);
  2459. SimulateMFC(mod, 3);
  2460. SimulateMFC(mod, 4);
  2461. SimulateMFC(mod, 5);
  2462. SimulateMFC(mod, 6);
  2463. SimulateMFC(mod, 7);
  2464. SimulateMFC(mod, 8);
  2465. SimulateMFC(mod, 9);
  2466. SimulateMFC(mod, 10);
  2467. SimulateMFC(mod, 11);
  2468. SimulateMFC(mod, 12);
  2469. }
  2470. private void SimulateMFC(ModuleName mod, byte gasNum)
  2471. {
  2472. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2473. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2474. }
  2475. private void SimulateKeplerMFC(ModuleName mod, byte gasNum)
  2476. {
  2477. var sp = GetAoValue($"TM.AO_{mod}_MFC{gasNum}_Flow_Setpoint");
  2478. SetAiValue($"TM.AI_{mod}_MFC{gasNum}_Flow", (float)sp);
  2479. }
  2480. private void SimulateN2(ModuleName mod)
  2481. {
  2482. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2483. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2484. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2485. }
  2486. private void SimulateSEHe(ModuleName mod)
  2487. {
  2488. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2489. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2490. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2491. }
  2492. private void SimulateDEHe(ModuleName mod)
  2493. {
  2494. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2495. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2496. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2497. }
  2498. private void SimulateHe(ModuleName mod)
  2499. {
  2500. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2501. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2502. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2503. }
  2504. void MonitorRF(ModuleName mod)
  2505. {
  2506. // RF generator
  2507. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2508. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2509. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2510. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2511. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2512. }
  2513. void MonitorIOPumpCtrl(ModuleName mod)
  2514. {
  2515. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2516. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2517. }
  2518. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2519. {
  2520. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2521. {
  2522. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2523. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2524. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2525. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2526. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2527. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2528. }
  2529. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2530. {
  2531. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2532. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2533. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2534. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2535. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2536. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2537. }
  2538. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2539. {
  2540. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2541. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2542. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2543. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2544. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2545. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2546. }
  2547. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2548. {
  2549. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2550. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2551. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2552. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2553. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2554. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2555. }
  2556. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2557. {
  2558. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2559. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2560. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2561. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2562. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2563. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2564. }
  2565. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2566. {
  2567. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2568. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2569. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2570. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2571. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2572. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2573. }
  2574. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2575. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2576. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2577. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2578. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2579. SetAiValue($"{mod}.AI_Source_TC_Temp", 100.123456F);
  2580. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Power_FB", 100.1F);
  2581. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Power_FB", 100.2F);
  2582. }
  2583. void MonitorKepler2200Heater(ModuleName mod)
  2584. {
  2585. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2586. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2587. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Alarm_Word1", (float)0);
  2588. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Alarm_Word2", (float)0);
  2589. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Alarm_Word1", (float)0);
  2590. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Alarm_Word2", (float)0);
  2591. }
  2592. public void Terminate()
  2593. {
  2594. _thread.Stop();
  2595. }
  2596. public void SetCoolantOutletTemp(string module, int Temp)
  2597. {
  2598. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2599. //{
  2600. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2601. //}
  2602. }
  2603. }
  2604. }