| .. |
|
EFEM
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
LLs
|
a9d8e56970
1.扩展alarm list
|
hai 1 ano |
|
LPs
|
9e9459c927
efem界面按钮功能优化
|
hai 1 ano |
|
PMs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
hai 1 ano |
|
Schedulers
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
TM
|
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
|
hai 11 meses |
|
VCE
|
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
|
hai 11 meses |
|
AutoCycle.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
Autotransfer_LP_FA.cs
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
hai 1 ano |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
hai 1 ano |
|
EntityErrorRaiseTrigger.cs
|
d35b997884
1.优化RevtechMatch状态机
|
hai 1 ano |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
%!s(int64=2) %!d(string=hai) anos |
|
ManualTransfer.cs
|
3b1932fced
Add Loadport loaded check while manual transfer wafer.
|
hai 1 ano |
|
ResourceMonitor.cs
|
3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
|
hai 1 ano |
|
RouteManager.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
SEManualTransfer.cs
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
hai 1 ano |
|
SETMCycle.cs
|
b6309f712c
upload for Venus SE/DE
|
hai 11 meses |
|
SystemDispatcher.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
hai 1 ano |
|
VenusDispatcher.cs
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
hai 11 meses |
zhouhr
9e1a79673e
1. add the item of AutoUnLoad for Job