LLEntity.cs 16 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. namespace Venus_RT.Modules
  15. {
  16. class LLEntity : Entity, IEntity, IModuleEntity
  17. {
  18. public enum LLStatus
  19. {
  20. Not_Ready,
  21. Ready_For_TM,
  22. Ready_For_EFEM,
  23. }
  24. public enum STATE
  25. {
  26. Unknown,
  27. Init,
  28. Initializing,
  29. Idle,
  30. Error,
  31. Pumping,
  32. Venting,
  33. Purging,
  34. LeakCheck,
  35. Prepare_For_TM,
  36. Prepare_For_EFEM,
  37. Ready_For_TM,
  38. Ready_For_EFEM,
  39. }
  40. public enum MSG
  41. {
  42. Home,
  43. Online,
  44. Offline,
  45. Pump,
  46. Vent,
  47. Purge,
  48. CyclePurge,
  49. LeakCheck,
  50. Prepare_TM,
  51. Prepare_EFEM,
  52. TM_Exchange_Ready,
  53. EFEM_Exchange_Ready,
  54. Error,
  55. Abort,
  56. }
  57. public ModuleName Module { get; private set; }
  58. public LLStatus Status { get; private set; }
  59. public bool Check(int msg, out string reason, params object[] args)
  60. {
  61. throw new NotImplementedException();
  62. }
  63. public bool IsIdle
  64. {
  65. get { return fsm.State == (int)STATE.Idle; }
  66. }
  67. public bool IsError
  68. {
  69. get { return fsm.State == (int)STATE.Error; }
  70. }
  71. public bool IsInit
  72. {
  73. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  74. }
  75. public bool IsBusy
  76. {
  77. get { return !IsInit && !IsError && !IsIdle; }
  78. }
  79. public bool IsOnline { get; internal set; }
  80. private readonly JetTM _JetTM;
  81. private readonly MFPumpRoutine _pumpingRoutine;
  82. private readonly MFVentRoutine _ventingRoutine;
  83. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  84. private readonly MFPurgeRoutine _purgeRoutine;
  85. public LLEntity(ModuleName module)
  86. {
  87. Module = module;
  88. //_JetTM = Singleton<JetTM>.Instance;
  89. _JetTM= DEVICE.GetDevice<JetTM>("TM");
  90. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  91. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  92. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  93. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  94. var soltCount= SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  95. WaferManager.Instance.SubscribeLocation(Module, soltCount);
  96. InitFsmMap();
  97. }
  98. protected override bool Init()
  99. {
  100. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  101. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  102. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  103. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  104. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  105. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  106. OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
  107. OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
  108. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  109. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()),SubscriptionAttribute.FLAG.IgnoreSaveDB);
  110. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  111. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline,SubscriptionAttribute.FLAG.IgnoreSaveDB);
  112. return true;
  113. }
  114. private void InitFsmMap()
  115. {
  116. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  117. fsm.EnableRepeatedMsg(true);
  118. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  119. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  120. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  121. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  122. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  123. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  124. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  125. // Home
  126. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  127. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  128. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  129. //vent sequence
  130. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  131. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  132. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  133. //Pump sequence
  134. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  135. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  136. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  137. // Purge sequence
  138. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  139. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  140. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  141. // Leak check sequence
  142. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  143. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  144. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  145. // Prepare TM Transfer
  146. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  147. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  148. Transition(STATE.Prepare_For_TM, MSG.Abort, FnAbortPreparaTM, STATE.Idle);
  149. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  150. Transition(STATE.Ready_For_TM, MSG.Abort, null, STATE.Idle);
  151. // Prepare EFEM Transfer
  152. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  153. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  154. Transition(STATE.Prepare_For_EFEM, MSG.Abort, FnAbortPrepareEFEM, STATE.Idle);
  155. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  156. Transition(STATE.Ready_For_EFEM, MSG.Abort, null, STATE.Idle);
  157. Running = true;
  158. }
  159. public int Invoke(string function, params object[] args)
  160. {
  161. switch (function)
  162. {
  163. case "Home":
  164. CheckToPostMessage((int)MSG.Home);
  165. return (int)MSG.Home;
  166. }
  167. return (int)FSM_MSG.NONE;
  168. }
  169. public bool CheckAcked(int msg)
  170. {
  171. return fsm.CheckExecuted(msg);
  172. }
  173. public bool CheckToPostMessage(int msg, params object[] args)
  174. {
  175. if (!fsm.FindTransition(fsm.State, msg))
  176. {
  177. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  178. return false;
  179. }
  180. Running = true;
  181. fsm.PostMsg(msg, args);
  182. return true;
  183. }
  184. private bool fnEnterTMReady(object[] param)
  185. {
  186. Status = LLStatus.Ready_For_TM;
  187. return true;
  188. }
  189. private bool fnExitTMReady(object[] param)
  190. {
  191. Status = LLStatus.Not_Ready;
  192. return true;
  193. }
  194. private bool fnEnterEFEMReady(object[] param)
  195. {
  196. Status = LLStatus.Ready_For_EFEM;
  197. return true;
  198. }
  199. private bool fnExitEFEMReady(object[] param)
  200. {
  201. Status = LLStatus.Not_Ready;
  202. return true;
  203. }
  204. private bool fnMonitor(object[] param)
  205. {
  206. _debugRoutine();
  207. return true;
  208. }
  209. private bool fnError(object[] param)
  210. {
  211. IsOnline = false;
  212. return true;
  213. }
  214. private bool fnOnline(object[] param)
  215. {
  216. IsOnline = true;
  217. return true;
  218. }
  219. private bool fnOffline(object[] param)
  220. {
  221. IsOnline = false;
  222. return true;
  223. }
  224. private bool fnAbort(object[] param)
  225. {
  226. return true;
  227. }
  228. private bool fnHome(object[] param)
  229. {
  230. IsOnline = true;
  231. return true;
  232. }
  233. private bool fnHoming(object[] param)
  234. {
  235. return true;
  236. }
  237. private bool FnStartVent(object[] param)
  238. {
  239. return _ventingRoutine.Start() == RState.Running;
  240. }
  241. private bool FnVentTimeout(object[] param)
  242. {
  243. RState ret = _ventingRoutine.Monitor();
  244. if (ret == RState.Failed || ret == RState.Timeout)
  245. {
  246. PostMsg(MSG.Error);
  247. return false;
  248. }
  249. return ret == RState.End;
  250. }
  251. private bool FnAbortVent(object[] param)
  252. {
  253. _ventingRoutine.Abort();
  254. return true;
  255. }
  256. private bool FnStartPump(object[] param)
  257. {
  258. return _pumpingRoutine.Start() == RState.Running;
  259. }
  260. private bool FnPumpTimeout(object[] param)
  261. {
  262. RState ret = _pumpingRoutine.Monitor();
  263. if (ret == RState.Failed || ret == RState.Timeout)
  264. {
  265. PostMsg(MSG.Error);
  266. return false;
  267. }
  268. return ret == RState.End;
  269. }
  270. private bool FnAbortPump(object[] param)
  271. {
  272. _pumpingRoutine.Abort();
  273. return true;
  274. }
  275. private bool FnStartPurge(object[] param)
  276. {
  277. return _purgeRoutine.Start() == RState.Running;
  278. }
  279. private bool FnPurgeTimeout(object[] param)
  280. {
  281. RState ret = _purgeRoutine.Monitor();
  282. if (ret == RState.Failed || ret == RState.Timeout)
  283. {
  284. PostMsg(MSG.Error);
  285. return false;
  286. }
  287. return ret == RState.End;
  288. }
  289. private bool FnAbortPurge(object[] param)
  290. {
  291. _purgeRoutine.Abort();
  292. return true;
  293. }
  294. private bool FnStartLeakCheck(object[] param)
  295. {
  296. return _leakCheckRoutine.Start() == RState.Running;
  297. }
  298. private bool FnLeakCheckTimeout(object[] param)
  299. {
  300. RState ret = _leakCheckRoutine.Monitor();
  301. if (ret == RState.Failed || ret == RState.Timeout)
  302. {
  303. PostMsg(MSG.Error);
  304. return false;
  305. }
  306. return ret == RState.End;
  307. }
  308. private bool FnAbortLeakCheck(object[] param)
  309. {
  310. _leakCheckRoutine.Abort();
  311. return true;
  312. }
  313. private bool FnStartPrepareTM(object[] param)
  314. {
  315. if (RouteManager.IsATMMode)
  316. return true;
  317. return _pumpingRoutine.Start() == RState.Running;
  318. }
  319. private bool FnPreparaTMTimeout(object[] param)
  320. {
  321. if (RouteManager.IsATMMode)
  322. {
  323. if (fsm.ElapsedTime > 10000)
  324. {
  325. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  326. PostMsg(MSG.Error);
  327. return true;
  328. }
  329. return _JetTM.IsModuleATM(Module);
  330. }
  331. RState ret = _pumpingRoutine.Monitor();
  332. if (ret == RState.Failed || ret == RState.Timeout)
  333. {
  334. PostMsg(MSG.Error);
  335. return false;
  336. }
  337. return ret == RState.End;
  338. }
  339. private bool FnAbortPreparaTM(object[] param)
  340. {
  341. _pumpingRoutine.Abort();
  342. return true;
  343. }
  344. private bool FnStartPrepareEFEM(object[] param)
  345. {
  346. if (RouteManager.IsATMMode)
  347. return true;
  348. return _ventingRoutine.Start() == RState.Running;
  349. }
  350. private bool FnPrepareEFEMTimeout(object[] param)
  351. {
  352. if (RouteManager.IsATMMode)
  353. {
  354. if (fsm.ElapsedTime > 10000)
  355. {
  356. LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
  357. PostMsg(MSG.Error);
  358. return true;
  359. }
  360. return _JetTM.IsModuleATM(Module);
  361. }
  362. RState ret = _ventingRoutine.Monitor();
  363. if (ret == RState.Failed || ret == RState.Timeout)
  364. {
  365. PostMsg(MSG.Error);
  366. return false;
  367. }
  368. return ret == RState.End;
  369. }
  370. private bool FnAbortPrepareEFEM(object[] param)
  371. {
  372. _ventingRoutine.Abort();
  373. return true;
  374. }
  375. private void _debugRoutine()
  376. {
  377. int flag = 0;
  378. // Test Home routine
  379. if (flag == 1)
  380. {
  381. PostMsg(MSG.Home);
  382. }
  383. else if (flag == 2)
  384. {
  385. PostMsg(MSG.Vent);
  386. }
  387. else if (flag == 3)
  388. {
  389. PostMsg(MSG.Pump);
  390. }
  391. //else if (flag == 4)
  392. //{
  393. // PostMsg(MSG.PumpLoadLock);
  394. //}
  395. //else if (flag == 5)
  396. //{
  397. // PostMsg(MSG.VentLoadLock);
  398. //}
  399. //else if (flag == 6)
  400. //{
  401. // PostMsg(MSG.PurgeLoadLock);
  402. //}
  403. //else if (flag == 7)
  404. //{
  405. // PostMsg(MSG.LaunchPump);
  406. //}
  407. //else if (flag == 8)
  408. //{
  409. // PostMsg(MSG.LaunchTurboPump);
  410. //}
  411. //else if (flag == 9)
  412. //{
  413. // PostMsg(MSG.LoadLockLeakCheck);
  414. //}
  415. else if (flag == 10)
  416. {
  417. PostMsg(MSG.CyclePurge);
  418. }
  419. //else if (flag == 11)
  420. //{
  421. // PostMsg(MSG.GasLinePurge);
  422. //}
  423. //else if (flag == 12)
  424. //{
  425. // PostMsg(MSG.LeakCheck);
  426. //}
  427. //else if (flag == 13)
  428. //{
  429. // PostMsg(MSG.GasLeakCheck);
  430. //}
  431. //else if (flag == 14)
  432. //{
  433. // PostMsg(MSG.LLPlace);
  434. //}
  435. //else if (flag == 15)
  436. //{
  437. // PostMsg(MSG.LLPick);
  438. //}
  439. //else if (flag == 16)
  440. //{
  441. // PostMsg(MSG.RunRecipe, "7777");
  442. //}
  443. //else if (flag == 17)
  444. //{
  445. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  446. //}
  447. }
  448. }
  449. }