123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531 |
- using System;
- using Aitex.Core.Util;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_RT.Modules.TM;
- using Venus_RT.Devices;
- using Venus_Core;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.SCCore;
- namespace Venus_RT.Modules
- {
- class LLEntity : Entity, IEntity, IModuleEntity
- {
- public enum LLStatus
- {
- Not_Ready,
- Ready_For_TM,
- Ready_For_EFEM,
- }
- public enum STATE
- {
- Unknown,
- Init,
- Initializing,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- LeakCheck,
- Prepare_For_TM,
- Prepare_For_EFEM,
- Ready_For_TM,
- Ready_For_EFEM,
- }
- public enum MSG
- {
- Home,
- Online,
- Offline,
- Pump,
- Vent,
- Purge,
- CyclePurge,
- LeakCheck,
- Prepare_TM,
- Prepare_EFEM,
- TM_Exchange_Ready,
- EFEM_Exchange_Ready,
- Error,
- Abort,
- }
- public ModuleName Module { get; private set; }
- public LLStatus Status { get; private set; }
- public bool Check(int msg, out string reason, params object[] args)
- {
- throw new NotImplementedException();
- }
- public bool IsIdle
- {
- get { return fsm.State == (int)STATE.Idle; }
- }
- public bool IsError
- {
- get { return fsm.State == (int)STATE.Error; }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- public bool IsOnline { get; internal set; }
- private readonly JetTM _JetTM;
- private readonly MFPumpRoutine _pumpingRoutine;
- private readonly MFVentRoutine _ventingRoutine;
- private readonly MFLeakCheckRoutine _leakCheckRoutine;
- private readonly MFPurgeRoutine _purgeRoutine;
- public LLEntity(ModuleName module)
- {
- Module = module;
- //_JetTM = Singleton<JetTM>.Instance;
- _JetTM= DEVICE.GetDevice<JetTM>("TM");
- _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
- _ventingRoutine = new MFVentRoutine(_JetTM, Module);
- _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
- _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
- var soltCount= SC.GetValue<int>($"{module.ToString()}.SlotNumber");
- WaferManager.Instance.SubscribeLocation(Module, soltCount);
- InitFsmMap();
- }
- protected override bool Init()
- {
- OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
- OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
- OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
- OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
- OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
- OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
- OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
- OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
- DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()),SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsOnline", () => IsOnline,SubscriptionAttribute.FLAG.IgnoreSaveDB);
- return true;
- }
- private void InitFsmMap()
- {
- fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
- fsm.EnableRepeatedMsg(true);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
- //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
- AnyStateTransition(MSG.Error, fnError, STATE.Error);
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
- // Home
- Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
- Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
- Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
- //vent sequence
- Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
- Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
- Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
- //Pump sequence
- Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
- Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
- Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
- // Purge sequence
- Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
- Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
- Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
- // Leak check sequence
- Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
- Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
- Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
- // Prepare TM Transfer
- Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
- Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
- Transition(STATE.Prepare_For_TM, MSG.Abort, FnAbortPreparaTM, STATE.Idle);
- Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
- Transition(STATE.Ready_For_TM, MSG.Abort, null, STATE.Idle);
- // Prepare EFEM Transfer
- Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
- Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
- Transition(STATE.Prepare_For_EFEM, MSG.Abort, FnAbortPrepareEFEM, STATE.Idle);
- Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
- Transition(STATE.Ready_For_EFEM, MSG.Abort, null, STATE.Idle);
- Running = true;
- }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "Home":
- CheckToPostMessage((int)MSG.Home);
- return (int)MSG.Home;
- }
- return (int)FSM_MSG.NONE;
- }
- public bool CheckAcked(int msg)
- {
- return fsm.CheckExecuted(msg);
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- Running = true;
- fsm.PostMsg(msg, args);
- return true;
- }
- private bool fnEnterTMReady(object[] param)
- {
- Status = LLStatus.Ready_For_TM;
- return true;
- }
- private bool fnExitTMReady(object[] param)
- {
- Status = LLStatus.Not_Ready;
- return true;
- }
- private bool fnEnterEFEMReady(object[] param)
- {
- Status = LLStatus.Ready_For_EFEM;
- return true;
- }
- private bool fnExitEFEMReady(object[] param)
- {
- Status = LLStatus.Not_Ready;
- return true;
- }
- private bool fnMonitor(object[] param)
- {
- _debugRoutine();
- return true;
- }
- private bool fnError(object[] param)
- {
- IsOnline = false;
- return true;
- }
- private bool fnOnline(object[] param)
- {
- IsOnline = true;
- return true;
- }
- private bool fnOffline(object[] param)
- {
- IsOnline = false;
- return true;
- }
- private bool fnAbort(object[] param)
- {
- return true;
- }
- private bool fnHome(object[] param)
- {
- IsOnline = true;
- return true;
- }
- private bool fnHoming(object[] param)
- {
- return true;
- }
- private bool FnStartVent(object[] param)
- {
- return _ventingRoutine.Start() == RState.Running;
- }
- private bool FnVentTimeout(object[] param)
- {
- RState ret = _ventingRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortVent(object[] param)
- {
- _ventingRoutine.Abort();
- return true;
- }
- private bool FnStartPump(object[] param)
- {
- return _pumpingRoutine.Start() == RState.Running;
- }
- private bool FnPumpTimeout(object[] param)
- {
- RState ret = _pumpingRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPump(object[] param)
- {
- _pumpingRoutine.Abort();
- return true;
- }
- private bool FnStartPurge(object[] param)
- {
- return _purgeRoutine.Start() == RState.Running;
- }
- private bool FnPurgeTimeout(object[] param)
- {
- RState ret = _purgeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPurge(object[] param)
- {
- _purgeRoutine.Abort();
- return true;
- }
- private bool FnStartLeakCheck(object[] param)
- {
- return _leakCheckRoutine.Start() == RState.Running;
- }
- private bool FnLeakCheckTimeout(object[] param)
- {
- RState ret = _leakCheckRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortLeakCheck(object[] param)
- {
- _leakCheckRoutine.Abort();
- return true;
- }
- private bool FnStartPrepareTM(object[] param)
- {
- if (RouteManager.IsATMMode)
- return true;
- return _pumpingRoutine.Start() == RState.Running;
- }
- private bool FnPreparaTMTimeout(object[] param)
- {
- if (RouteManager.IsATMMode)
- {
- if (fsm.ElapsedTime > 10000)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
- PostMsg(MSG.Error);
- return true;
- }
-
- return _JetTM.IsModuleATM(Module);
- }
- RState ret = _pumpingRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPreparaTM(object[] param)
- {
- _pumpingRoutine.Abort();
- return true;
- }
- private bool FnStartPrepareEFEM(object[] param)
- {
- if (RouteManager.IsATMMode)
- return true;
- return _ventingRoutine.Start() == RState.Running;
- }
- private bool FnPrepareEFEMTimeout(object[] param)
- {
- if (RouteManager.IsATMMode)
- {
- if (fsm.ElapsedTime > 10000)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot transfer wafer as {Module} is not ATM.");
- PostMsg(MSG.Error);
- return true;
- }
- return _JetTM.IsModuleATM(Module);
- }
- RState ret = _ventingRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPrepareEFEM(object[] param)
- {
- _ventingRoutine.Abort();
- return true;
- }
- private void _debugRoutine()
- {
- int flag = 0;
- // Test Home routine
- if (flag == 1)
- {
- PostMsg(MSG.Home);
- }
- else if (flag == 2)
- {
- PostMsg(MSG.Vent);
- }
- else if (flag == 3)
- {
- PostMsg(MSG.Pump);
- }
- //else if (flag == 4)
- //{
- // PostMsg(MSG.PumpLoadLock);
- //}
- //else if (flag == 5)
- //{
- // PostMsg(MSG.VentLoadLock);
- //}
- //else if (flag == 6)
- //{
- // PostMsg(MSG.PurgeLoadLock);
- //}
- //else if (flag == 7)
- //{
- // PostMsg(MSG.LaunchPump);
- //}
- //else if (flag == 8)
- //{
- // PostMsg(MSG.LaunchTurboPump);
- //}
- //else if (flag == 9)
- //{
- // PostMsg(MSG.LoadLockLeakCheck);
- //}
- else if (flag == 10)
- {
- PostMsg(MSG.CyclePurge);
- }
- //else if (flag == 11)
- //{
- // PostMsg(MSG.GasLinePurge);
- //}
- //else if (flag == 12)
- //{
- // PostMsg(MSG.LeakCheck);
- //}
- //else if (flag == 13)
- //{
- // PostMsg(MSG.GasLeakCheck);
- //}
- //else if (flag == 14)
- //{
- // PostMsg(MSG.LLPlace);
- //}
- //else if (flag == 15)
- //{
- // PostMsg(MSG.LLPick);
- //}
- //else if (flag == 16)
- //{
- // PostMsg(MSG.RunRecipe, "7777");
- //}
- //else if (flag == 17)
- //{
- // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
- //}
- }
- }
- }
|