chenkui 2f30fa17c4 1、修复了Wafer_Left_Position上报数据; 1 gadu atpakaļ
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WaferInfo.cs 4259958c23 Remove the Align angle definition in sequence and implement the Loadlock delay function. 1 gadu atpakaļ
WaferManager.cs 2f30fa17c4 1、修复了Wafer_Left_Position上报数据; 1 gadu atpakaļ