| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341 | using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using Aitex.Sorter.Common;using MECF.Framework.Common.DBCore;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using System.Windows;using System.Windows.Interop;using Venus_Core;using Venus_RT.Devices;using Venus_RT.Devices.IODevices;using Venus_RT.Devices.TM;using Venus_RT.Modules.PMs;namespace Venus_RT.Modules.TM.VenusEntity{    public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine    {        private enum PickStep        {            WaitPMReady,            WaitforControlPressure,            PMPrepare,            ArmExtend,            QueryAWC,            DropDownWafer,            PickDelay,            PickDelay1,            PickDelay2,            ArmRetract,            SavePickeData,            NotifyDone,            CloseSlitDoor,            CloseLinerDoor,            EndDelay        }        private readonly TMBase _tm;        private readonly ITransferRobot _robot;        private int _pickdelay = 0;        private ModuleName _targetModule;        private Hand _hand;        private int _targetSlot;        private PMEntity _pmModule;        private int _ExtendTimeout = 120 * 1000;        private int _RetractTimeout = 120 * 1000;        private JetPMBase _chamber;        private bool NeedControlPressure;        private int _controlPressureSetPoint = 90;        private int _controlFlowSetPoint = 10;           //private DateTime _starttime;        private bool _queryAwc;        private bool havelinerdoor;        public SEMFPMPickRoutine(TMBase honghutm, ITransferRobot robot,ModuleName module) : base(module)        {            _tm = honghutm;            _robot = robot;            _queryAwc = false;        }        public RState Start(params object[] objs)        {            //_starttime = DateTime.Now;            if (!_robot.IsHomed)            {                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");                return RState.Failed;            }            var pickItem = (Queue<MoveItem>)objs[0];            _targetModule = pickItem.Peek().SourceModule;            _targetSlot = pickItem.Peek().SourceSlot;            _hand = pickItem.Peek().RobotHand;            _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());//(JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");            if ( _chamber.ChamberType== JetChamber.VenusDE)             {                havelinerdoor = true;            }            else            {                havelinerdoor = false;            }            if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);            }            else            {                LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");                return RState.Failed;            }            if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");                return RState.Failed;            }            if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");                return RState.Failed;            }            var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);            LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");            _ExtendTimeout = SC.GetValue<int>($"{Module}.ExtendTimeout") * 1000;            _RetractTimeout = SC.GetValue<int>($"{Module}.RetractTimeout") * 1000;            _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");            if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)            {                NeedControlPressure = true;            }            else            {                NeedControlPressure = false;            }            Reset();            return Runner.Start(Module, $"Pick from {_targetModule}");        }        public RState Monitor()        {            Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)                        .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)                        .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady,_delay_60s)                        .Delay(PickStep.PickDelay, _pickdelay)                        .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)                        .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)                        .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)                        .Delay(PickStep.PickDelay1, _pickdelay)                        .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)                        .Run(PickStep.SavePickeData, RecordAWCData, NullFun)                        .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)                        .Delay(PickStep.PickDelay2, _delay_50ms)                        .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)                        .RunIf(PickStep.CloseLinerDoor, havelinerdoor, PMLinerDoorClose, WaitPMLinerDoorClose)                        .End(PickStep.EndDelay, NullFun, _delay_50ms);            return Runner.Status;        }        private bool ModulePrepare()        {            _pmModule.PostMsg(PMEntity.MSG.PreparePick);            //_tm.TurnSlitDoor(_targetModule, true);            return true;        }        private bool IsModulePrepareReady()        {            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;        }        private bool ArmExtend()        {            if (!_pmModule.IsSlitDoorOpen)            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");                return false;            }            return _robot.PickExtend(_targetModule, _targetSlot, _hand);        }        private bool ArmRetract()        {            return _robot.PickRetract(_targetModule, _targetSlot, _hand);        }        private bool WaitRobotExtendDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                return true;            }            else            {                Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");                Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);                return true;            }        }        private bool IsPressureReady()        {            double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");            //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;            double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");            double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");            if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))            {                //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);                //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));                //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";                //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);                return true;            }            else return false;        }        private bool StartControlPressure()        {            _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());            _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");            _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");            _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);            return true;        }        private bool QueryAWC()        {            if (!_queryAwc)                return true;            else                return _robot.QueryAwc(); ;        }        private bool WaitRobotQueryDone()        {            if (!_queryAwc)                return true;            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");                Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);                return true;            }        }        private bool RecordAWCData()        {            if (!_queryAwc)                return true;            return true;        }        private bool NotifyPMPickWafer()        {            _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);            return true;        }        private bool WaitPMWaferDropDown()        {            return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;        }        private bool WaitRobotRetractDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");                Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);                return true;            }        }        private bool NotifyPMDone()        {            _pmModule.PostMsg(PMEntity.MSG.PickReady);            return true;        }        private bool PMDoorClose()        {            LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");            return _tm.TurnSlitDoor(_targetModule, false);        }        private bool PMLinerDoorClose()        {            LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Liner Door Again");            return _chamber.SetLinerDoor(false, out _);        }        private bool WaitPMDoorClose()        {            if (_tm.CheckSlitValveClose(_targetModule))            {                LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");                return true;            }            else            {                LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");                return false;            }        }        private bool WaitPMLinerDoorClose()        {            if (_chamber.CheckLinerDoorClose())            {                LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check LinerDoor Close");                return true;            }            else            {                LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close LinerDoor");                return false;            }        }        public void Abort()        {            _robot.Halt();        }    }}
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