| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Venus_RT.Devices;using MECF.Framework.Common.Jobs;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using System;using System.Text;using System.Collections.Generic;using MECF.Framework.Common.Schedulers;namespace Venus_RT.Modules.TM{    class MFSwapRoutine : ModuleRoutineBase, IRoutine    {        private enum SwapStep        {            WaitModuleReady,            PreRotation,            ModulePrepare,            OpenSlitDoor,            MoveWafer,            WaitMaferMoved,            CloseSlitDoor,            NotifyDone,        }        private readonly JetTM _JetTM;        private readonly ITransferRobot _robot;        private int _swapTimeout = 120 * 1000;        private ModuleName _targetModule;        private LLEntity _llModule;        private int _autoVentOptInWafer = 0;        private int _autoVentOptOutWafer = 4;        private SequenceLLInOutPath _sequencePattern = SequenceLLInOutPath.DInDOut;        private bool _bAutoMode = true;        Queue<MoveItem> _actionList = new Queue<MoveItem>();        MoveItem _currentAction;        public MFSwapRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)        {            _JetTM = tm;            _robot = robot;            Name = "Swap";        }        public RState Start(params object[] objs)        {            if (!_robot.IsHomed)            {                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");                return RState.Failed;            }            _actionList.Clear();            foreach(var item in (Queue<MoveItem>)objs[0])            {                _actionList.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, item.DestinationModule, item.DestinationSlot, item.RobotHand));            }            var firtItem = _actionList.Peek();            if (ModuleHelper.IsLoadLock(firtItem.SourceModule))                _targetModule = firtItem.SourceModule;            else if (ModuleHelper.IsLoadLock(firtItem.DestinationModule))                _targetModule = firtItem.DestinationModule;            else            {                LOG.Write(eEvent.ERR_TM, Module, $"Invalid move parameter: {firtItem.SourceModule},{firtItem.SourceSlot + 1} => {firtItem.DestinationModule},{firtItem.DestinationSlot + 1} ");                return RState.Failed;            }            _llModule = Singleton<RouteManager>.Instance.GetLL(_targetModule);            if(_llModule == null)            {                LOG.Write(eEvent.ERR_TM, Module, $"Invalid Loadlock: {_targetModule}, maybe not installed");                return RState.Failed;            }            Reset();            _swapTimeout = SC.GetValue<int>($"TM.SwapTimeout") * 1000;            _autoVentOptInWafer = SC.GetValue<int>("TM.LLAutoVentInWaferOpt");            _autoVentOptOutWafer = SC.GetValue<int>("TM.LLAutoVentOutWaferOpt");            _sequencePattern = Singleton<RouteManager>.Instance.LLInOutPath;            _bAutoMode = Singleton<RouteManager>.Instance.IsAutoMode;            return Runner.Start(Module, $"Swap with {_targetModule}");        }        public RState Monitor()        {            Runner.Wait(SwapStep.WaitModuleReady,   () => _llModule.IsIdle,         _delay_60s)                .RunIf(SwapStep.PreRotation,        _JetTM.PreRotateModules.ContainsKey(_targetModule),         RotateArm,  WaitRotateDone)                .Run(SwapStep.ModulePrepare,        ModulePrepare,                  IsModulePrepareReady)                .Run(SwapStep.OpenSlitDoor,         OpenSlitDoor,                   IsSlitDoorOpen)                .LoopStart(SwapStep.MoveWafer,      loopName(),                     _actionList.Count,          MoveWafer)                .LoopEnd(SwapStep.WaitMaferMoved,   NullFun,                        WaitWaferMoved)                .Run(SwapStep.CloseSlitDoor,        CloseSlitDoor,                  IsSlitDoorClosed)                .End(SwapStep.NotifyDone,           NotifyLLDone,                   _delay_50ms);                            return Runner.Status;        }        private bool ModulePrepare()        {            _llModule.PostMsg(LLEntity.MSG.Prepare_TM);            return true;        }        private string loopName()        {            return "LoadLock Swap" ;        }        private bool IsModulePrepareReady()        {            return _llModule.Status == LLEntity.LLStatus.Ready_For_TM;        }        private bool OpenSlitDoor()        {            return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);        }        private bool CloseSlitDoor()        {            return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);        }        private bool IsSlitDoorOpen()        {            if (_targetModule == ModuleName.LLA)                return _JetTM.IsLLASlitDoorOpen;            else                return _JetTM.IsLLBSlitDoorOpen;        }        private bool IsSlitDoorClosed()        {            if (_targetModule == ModuleName.LLA)                return _JetTM.IsLLASlitDoorClosed;            else                return _JetTM.IsLLBSlitDoorClosed;        }        private bool VerifyWaferExistence(MoveItem item)        {            if (WaferManager.Instance.CheckHasWafer(item.DestinationModule, item.DestinationSlot))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot move wafer as desitination {_currentAction.DestinationModule},{_currentAction.DestinationSlot + 1} already a wafer: ");                return false;            }            if (WaferManager.Instance.CheckNoWafer(_currentAction.SourceModule, _currentAction.SourceSlot))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot move wafer as source {_currentAction.SourceModule}, {_currentAction.SourceSlot + 1} has no wafer");                return false;            }            return true;        }        private bool MoveWafer()        {            _currentAction = _actionList.Dequeue();            if (!VerifyWaferExistence(_currentAction))                return false;            var wafer = WaferManager.Instance.GetWafer(_currentAction.SourceModule, _currentAction.SourceSlot);            LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_currentAction.SourceModule} {_currentAction.SourceSlot + 1}  to {_currentAction.DestinationModule} {_currentAction.DestinationSlot + 1}");            if (ModuleHelper.IsLoadLock(_currentAction.SourceModule) && ModuleHelper.IsTMRobot(_currentAction.DestinationModule))            {                return _robot.Pick(_currentAction.SourceModule, _currentAction.SourceSlot, (Hand)_currentAction.DestinationSlot);            }            else if(ModuleHelper.IsTMRobot(_currentAction.SourceModule) && ModuleHelper.IsLoadLock(_currentAction.DestinationModule))            {                return _robot.Place(_currentAction.DestinationModule, _currentAction.DestinationSlot, (Hand)_currentAction.SourceSlot);            }            else            {                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Invalid move parameter, source:{_currentAction.SourceModule},{_currentAction.SourceSlot}, destination: {_currentAction.DestinationModule}, {_currentAction.DestinationSlot}");                return false;            }        }        private bool WaitWaferMoved()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                WaferManager.Instance.WaferMoved(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);                return true;            }            else            {                Runner.Stop($"TM Robot moving wafer failed, {_robot.Status}");                return true;            }        }        private bool RotateArm()        {            ModuleName preModule = _targetModule;            Hand rotateHand = Hand.Blade1;            if (ModuleHelper.IsLoadLock(_actionList.Peek().DestinationModule) && ModuleHelper.IsTMRobot(_actionList.Peek().SourceModule))            {                rotateHand = (Hand)_actionList.Peek().SourceSlot;                preModule = _JetTM.PreRotateModules[_targetModule];            }            else            {                rotateHand = (Hand)_actionList.Peek().DestinationSlot;            }                            _llModule.PostMsg(LLEntity.MSG.Prepare_TM); // Notify Loadlock to Serv pressure in advance for throughput enhancement            return _robot.Goto(preModule, 0, rotateHand);        }        private bool WaitRotateDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                return true;            }            else            {                Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");                return true;            }        }        private bool NotifyLLDone()        {            bool bAutoVent = false;            var waferStatus = _llModule.GetWaferProcessStatus();            if(_bAutoMode)            {                if (((_sequencePattern == SequenceLLInOutPath.AInBOut && _targetModule == ModuleName.LLA) ||                      (_sequencePattern == SequenceLLInOutPath.BInAOut && _targetModule == ModuleName.LLB)) &&                      waferStatus.unprocessed <= _autoVentOptInWafer)                {                    bAutoVent = true;                }                else if (((_sequencePattern == SequenceLLInOutPath.AInBOut && _targetModule == ModuleName.LLB) ||                          (_sequencePattern == SequenceLLInOutPath.BInAOut && _targetModule == ModuleName.LLA)) &&                           waferStatus.processed >= _autoVentOptOutWafer)                {                    bAutoVent = true;                }                else if(_sequencePattern == SequenceLLInOutPath.DInDOut &&                     waferStatus.processed   >= _autoVentOptOutWafer &&                     waferStatus.unprocessed <= _autoVentOptInWafer)                {                    bAutoVent = true;                }            }            LOG.Write(eEvent.INFO_TM, Module, $"NotifyLLDone() => {_targetModule}, Sequence Pattern{_sequencePattern}, unprocessed wafer:{waferStatus.unprocessed}, processed wafer: {waferStatus.processed},bAutoVent  = {bAutoVent}, Config Option:{_autoVentOptInWafer},{_autoVentOptOutWafer}");            _llModule.PostMsg(bAutoVent ? LLEntity.MSG.AutoVent : LLEntity.MSG.TM_Exchange_Ready);            return true;        }        public void Abort()        {            _robot.Halt();        }    }}
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