OverKepler2300ViewModel.cs 67 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. namespace Venus_MainPages.ViewModels
  24. {
  25. internal class OverKepler2300ViewModel : BindableBase
  26. {
  27. #region 私有字段
  28. private List<string> m_CurrentModuleRecipes = new List<string>();
  29. private bool m_PVN21ValveIsOpen;
  30. private bool m_PVN22ValveIsOpen;
  31. private bool m_N2ValveIsOpen;
  32. private bool m_PV11ValveIsOpen;
  33. private bool m_PV12ValveIsOpen;
  34. private bool m_PV21ValveIsOpen;
  35. private bool m_PV22ValveIsOpen;
  36. private bool m_PV31ValveIsOpen;
  37. private bool m_PV32ValveIsOpen;
  38. private bool m_PV41ValveIsOpen;
  39. private bool m_PV42ValveIsOpen;
  40. private bool m_MFC1ValveIsOpen;
  41. private bool m_MFC2ValveIsOpen;
  42. private bool m_MFC3ValveIsOpen;
  43. private bool m_MFC4ValveIsOpen;
  44. private bool m_MFC5ValveIsOpen;
  45. private bool m_MFC6ValveIsOpen;
  46. private bool m_MFC7ValveIsOpen;
  47. private bool m_MFC8ValveIsOpen;
  48. private bool m_GasFinalValveIsOpen;
  49. private bool m_SoftPumpValveIsOpen;
  50. private bool m_FastPumpValveIsOpen;
  51. private bool m_PVHe1ValveIsOpen;
  52. private bool m_PVHe2ValveIsOpen;
  53. private bool m_TurboPumpPumpingValveIsOpen;
  54. private bool m_TurboPumpPurgeValveIsOpen;
  55. private bool m_GuageValveIsOpen;
  56. private bool m_PendulumValveIsOpen;
  57. //private bool m_BRFIsOn;
  58. //private bool m_SRFIsOn;
  59. private double m_HeGasSetpoint;
  60. private int m_HePressureSetpoint;
  61. private float m_SRFFwdPowerSetpoint;
  62. private float m_BRFFwdPowerSetpoint;
  63. private float m_SRFMatchC1;
  64. private float m_SRFMatchC2;
  65. private float m_BRFMatchC1;
  66. private float m_BRFMatchC2;
  67. private double m_MFC1SetPoint;
  68. private double m_MFC2SetPoint;
  69. private double m_MFC3SetPoint;
  70. private double m_MFC4SetPoint;
  71. private double m_MFC5SetPoint;
  72. private double m_MFC6SetPoint;
  73. private double m_MFC7SetPoint;
  74. private double m_MFC8SetPoint;
  75. private double m_N2SetPoint;
  76. private AITMfcData m_MFC1Data;
  77. private AITMfcData m_MFC2Data;
  78. private AITMfcData m_MFC3Data;
  79. private AITMfcData m_MFC4Data;
  80. private AITMfcData m_MFC5Data;
  81. private AITMfcData m_MFC6Data;
  82. private AITMfcData m_MFC7Data;
  83. private AITMfcData m_MFC8Data;
  84. private AITMfcData m_MFCHeData;
  85. private AITMfcData m_MFCN2Data;
  86. private AITHeaterData m_ValveHeaterData;
  87. private AITHeaterData m_ForelineHeaterData;
  88. private AITHeaterData m_WallHeaterData;
  89. private AITRfData m_SRFData;
  90. private AITRfData m_BRFData;
  91. private AITPendulumValveData m_PendulumValveData;
  92. //private AITHVData m_ESCHVData;
  93. private PMState m_PMCurrentState;
  94. private bool m_SourceRFFanInterlock;
  95. private bool m_IsWLK;
  96. private bool m_IsWaterFlowOk;
  97. private bool m_IsTurboPumpInterlock;
  98. private bool m_IsCDAOK;
  99. private bool m_SensorGasBoxDoor;
  100. private bool m_SensorGasBoxPressure;
  101. private bool m_PumpIsOpen;
  102. private bool m_TurboIsOpen;
  103. private bool m_IsATM;
  104. private bool m_IsVAC;
  105. private List<string> m_RtDataKeys;
  106. private Dictionary<string, object> m_RtDataValues;
  107. private int m_PositionValue;
  108. private bool m_IsPositionMode;
  109. private int m_ESCVoltage;
  110. private bool m_GasIsFlowing;
  111. private bool m_IsProcessing;
  112. private bool m_IsAutoMode;
  113. private string m_SelectedRecipe;
  114. private float m_ChillerTempSetpoint;
  115. private float m_InnerChillerTempSetpoint;
  116. private float m_OuterChillerTempSetpoint;
  117. private float m_TopChillerTempSetpoint;
  118. private float m_WallTempSetpoint;
  119. private bool m_HeIsPressureMode = true;
  120. private bool m_ChillerIsOn;
  121. private bool m_InnerChillerIsOn;
  122. private bool m_OuterChillerIsOn;
  123. private bool m_TopChillerIsOn;
  124. private float m_ProcessHighPressure;
  125. private float m_ProcessLowPressure;
  126. private float m_ForelinePressurePressure;
  127. private float m_ESCHePressure;
  128. ButterflyValveView butterflyValveMessageBox;
  129. HeaterView heaterView;
  130. private int m_TurboPumpRotationalSpeed;
  131. private bool m_LiftPinIsUp;
  132. private bool m_IsSlitDoorClosed;
  133. private bool m_IsLidClosed;
  134. private float m_ChillerTemperature;
  135. private float m_InnerTemperature;
  136. private float m_OuterTemperature;
  137. private float m_TopTemperature;
  138. //private float m_HVTemperature;
  139. private int m_ESCHVOutputVoltage;
  140. //private float m_SRfReflectPower;
  141. //private float m_SRfForwardPowerFeedBack;
  142. //private float m_BRfReflectPower;
  143. //private float m_BRfForwardPowerFeedBack;
  144. //private int m_MatchWorkMode;
  145. //private int m_BiasMatchWorkMode;
  146. private float m_MatchC1;
  147. private float m_MatchC2;
  148. private float m_BiasMatchC1;
  149. private float m_BiasMatchC2;
  150. private float m_PendulumValvePosition;
  151. private bool m_IsTurboPumpAtSpeed;
  152. private bool m_TurboPumpWaterFlowSwitch;
  153. private bool m_IsHasWafer;
  154. private Recipe m_CurrentRecipe = new Recipe();
  155. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  156. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  157. private double m_ChamberPressureFeedBack;
  158. #endregion
  159. #region 属性
  160. public List<string> CurrentModuleRecipes
  161. {
  162. get { return m_CurrentModuleRecipes; }
  163. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  164. }
  165. public Recipe CurrentRecipe
  166. {
  167. get { return m_CurrentRecipe; }
  168. set { SetProperty(ref m_CurrentRecipe, value); }
  169. }
  170. public RecipeResult CurrentRecipeResult
  171. {
  172. get { return m_CurrentRecipeResult; }
  173. set { SetProperty(ref m_CurrentRecipeResult, value); }
  174. }
  175. public RecipeStep CurrentRecipeStep
  176. {
  177. get { return m_CurrentRecipeStep; }
  178. set { SetProperty(ref m_CurrentRecipeStep, value); }
  179. }
  180. public bool IsHasWafer
  181. {
  182. get { return m_IsHasWafer; }
  183. set { SetProperty(ref m_IsHasWafer, value); }
  184. }
  185. public bool IsTurboPumpAtSpeed
  186. {
  187. get { return m_IsTurboPumpAtSpeed; }
  188. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  189. }
  190. public bool TurboPumpWaterFlowSwitch
  191. {
  192. get { return m_TurboPumpWaterFlowSwitch; }
  193. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  194. }
  195. public float PendulumValvePosition
  196. {
  197. get { return m_PendulumValvePosition; }
  198. set { SetProperty(ref m_PendulumValvePosition, value); }
  199. }
  200. public float BiasMatchC1
  201. {
  202. get { return m_BiasMatchC1; }
  203. set
  204. {
  205. SetProperty(ref m_BiasMatchC1, value);
  206. }
  207. }
  208. public float BiasMatchC2
  209. {
  210. get { return m_BiasMatchC2; }
  211. set
  212. {
  213. SetProperty(ref m_BiasMatchC2, value);
  214. }
  215. }
  216. public float MatchC1
  217. {
  218. get { return m_MatchC1; }
  219. set
  220. {
  221. SetProperty(ref m_MatchC1, value);
  222. }
  223. }
  224. public float MatchC2
  225. {
  226. get { return m_MatchC2; }
  227. set
  228. {
  229. SetProperty(ref m_MatchC2, value);
  230. }
  231. }
  232. public AITPendulumValveData PendulumValveData
  233. {
  234. get { return m_PendulumValveData; }
  235. set
  236. {
  237. SetProperty(ref m_PendulumValveData, value);
  238. }
  239. }
  240. //public AITHVData ESCHVData
  241. //{
  242. // get { return m_ESCHVData; }
  243. // set
  244. // {
  245. // SetProperty(ref m_ESCHVData, value);
  246. // }
  247. //}
  248. public int ESCHVOutputVoltage
  249. {
  250. get { return m_ESCHVOutputVoltage; }
  251. set
  252. {
  253. SetProperty(ref m_ESCHVOutputVoltage, value);
  254. }
  255. }
  256. public float ChillerTemperature
  257. {
  258. get { return m_ChillerTemperature; }
  259. set
  260. {
  261. SetProperty(ref m_ChillerTemperature, value);
  262. }
  263. }
  264. public float InnerTemperature
  265. {
  266. get { return m_InnerTemperature; }
  267. set
  268. {
  269. SetProperty(ref m_InnerTemperature, value);
  270. }
  271. }
  272. public float OuterTemperature
  273. {
  274. get { return m_OuterTemperature; }
  275. set
  276. {
  277. SetProperty(ref m_OuterTemperature, value);
  278. }
  279. }
  280. public float TopTemperature
  281. {
  282. get { return m_TopTemperature; }
  283. set
  284. {
  285. SetProperty(ref m_TopTemperature, value);
  286. }
  287. }
  288. //public float HVTemperature
  289. //{
  290. // get { return m_HVTemperature; }
  291. // set
  292. // {
  293. // SetProperty(ref m_HVTemperature, value);
  294. // }
  295. //}
  296. public bool IsLidClosed
  297. {
  298. get { return m_IsLidClosed; }
  299. set
  300. {
  301. SetProperty(ref m_IsLidClosed, value);
  302. }
  303. }
  304. public bool IsSlitDoorClosed
  305. {
  306. get { return m_IsSlitDoorClosed; }
  307. set
  308. {
  309. SetProperty(ref m_IsSlitDoorClosed, value);
  310. }
  311. }
  312. public bool LiftPinIsUp
  313. {
  314. get { return m_LiftPinIsUp; }
  315. set
  316. {
  317. SetProperty(ref m_LiftPinIsUp, value);
  318. }
  319. }
  320. public int TurboPumpRotationalSpeed
  321. {
  322. get { return m_TurboPumpRotationalSpeed; }
  323. set
  324. {
  325. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  326. }
  327. }
  328. public float ESCHePressure
  329. {
  330. get { return m_ESCHePressure; }
  331. set
  332. {
  333. SetProperty(ref m_ESCHePressure, value);
  334. }
  335. }
  336. public float ProcessHighPressure
  337. {
  338. get { return m_ProcessHighPressure; }
  339. set
  340. {
  341. SetProperty(ref m_ProcessHighPressure, value);
  342. }
  343. }
  344. public float ProcessLowPressure
  345. {
  346. get { return m_ProcessLowPressure; }
  347. set
  348. {
  349. SetProperty(ref m_ProcessLowPressure, value);
  350. }
  351. }
  352. public float ForelinePressure
  353. {
  354. get { return m_ForelinePressurePressure; }
  355. set
  356. {
  357. SetProperty(ref m_ForelinePressurePressure, value);
  358. }
  359. }
  360. public bool SourceRFFanInterlock
  361. {
  362. get { return m_SourceRFFanInterlock; }
  363. set
  364. {
  365. SetProperty(ref m_SourceRFFanInterlock, value);
  366. }
  367. }
  368. public bool IsWLK
  369. {
  370. get { return m_IsWLK; }
  371. set
  372. {
  373. SetProperty(ref m_IsWLK, value);
  374. }
  375. }
  376. public bool IsWaterFlowOk
  377. {
  378. get { return m_IsWaterFlowOk; }
  379. set
  380. {
  381. SetProperty(ref m_IsWaterFlowOk, value);
  382. }
  383. }
  384. public bool IsCDAOK
  385. {
  386. get { return m_IsCDAOK; }
  387. set
  388. {
  389. SetProperty(ref m_IsCDAOK, value);
  390. }
  391. }
  392. public bool SensorGasBoxDoor
  393. {
  394. get { return m_SensorGasBoxDoor; }
  395. set
  396. {
  397. SetProperty(ref m_SensorGasBoxDoor, value);
  398. }
  399. }
  400. public bool SensorGasBoxPressure
  401. {
  402. get { return m_SensorGasBoxPressure; }
  403. set
  404. {
  405. SetProperty(ref m_SensorGasBoxPressure, value);
  406. }
  407. }
  408. public bool IsTurboPumpInterlock
  409. {
  410. get { return m_IsTurboPumpInterlock; }
  411. set
  412. {
  413. SetProperty(ref m_IsTurboPumpInterlock, value);
  414. }
  415. }
  416. public string ModuleName { get; set; }
  417. public double MFC1SetPoint
  418. {
  419. get { return m_MFC1SetPoint; }
  420. set { SetProperty(ref m_MFC1SetPoint, value); }
  421. }
  422. public double MFC2SetPoint
  423. {
  424. get { return m_MFC2SetPoint; }
  425. set { SetProperty(ref m_MFC2SetPoint, value); }
  426. }
  427. public double MFC3SetPoint
  428. {
  429. get { return m_MFC3SetPoint; }
  430. set { SetProperty(ref m_MFC3SetPoint, value); }
  431. }
  432. public double MFC4SetPoint
  433. {
  434. get { return m_MFC4SetPoint; }
  435. set { SetProperty(ref m_MFC4SetPoint, value); }
  436. }
  437. public double MFC5SetPoint
  438. {
  439. get { return m_MFC5SetPoint; }
  440. set { SetProperty(ref m_MFC5SetPoint, value); }
  441. }
  442. public double MFC6SetPoint
  443. {
  444. get { return m_MFC6SetPoint; }
  445. set { SetProperty(ref m_MFC6SetPoint, value); }
  446. }
  447. public double MFC7SetPoint
  448. {
  449. get { return m_MFC7SetPoint; }
  450. set { SetProperty(ref m_MFC7SetPoint, value); }
  451. }
  452. public double MFC8SetPoint
  453. {
  454. get { return m_MFC8SetPoint; }
  455. set { SetProperty(ref m_MFC8SetPoint, value); }
  456. }
  457. public double N2SetPoint
  458. {
  459. get { return m_N2SetPoint; }
  460. set { SetProperty(ref m_N2SetPoint, value); }
  461. }
  462. public AITMfcData MFC1Data
  463. {
  464. get { return m_MFC1Data; }
  465. set { SetProperty(ref m_MFC1Data, value); }
  466. }
  467. public AITMfcData MFC2Data
  468. {
  469. get { return m_MFC2Data; }
  470. set { SetProperty(ref m_MFC2Data, value); }
  471. }
  472. public AITMfcData MFC3Data
  473. {
  474. get { return m_MFC3Data; }
  475. set { SetProperty(ref m_MFC3Data, value); }
  476. }
  477. public AITMfcData MFC4Data
  478. {
  479. get { return m_MFC4Data; }
  480. set { SetProperty(ref m_MFC4Data, value); }
  481. }
  482. public AITMfcData MFC5Data
  483. {
  484. get { return m_MFC5Data; }
  485. set { SetProperty(ref m_MFC5Data, value); }
  486. }
  487. public AITMfcData MFC6Data
  488. {
  489. get { return m_MFC6Data; }
  490. set { SetProperty(ref m_MFC6Data, value); }
  491. }
  492. public AITMfcData MFC7Data
  493. {
  494. get { return m_MFC7Data; }
  495. set { SetProperty(ref m_MFC7Data, value); }
  496. }
  497. public AITMfcData MFC8Data
  498. {
  499. get { return m_MFC8Data; }
  500. set { SetProperty(ref m_MFC8Data, value); }
  501. }
  502. public AITMfcData MFCHeData
  503. {
  504. get { return m_MFCHeData; }
  505. set { SetProperty(ref m_MFCHeData, value); }
  506. }
  507. public AITMfcData MFCN2Data
  508. {
  509. get { return m_MFCN2Data; }
  510. set { SetProperty(ref m_MFCN2Data, value); }
  511. }
  512. public AITHeaterData ValveHeaterData
  513. {
  514. get { return m_ValveHeaterData; }
  515. set { SetProperty(ref m_ValveHeaterData, value); }
  516. }
  517. public AITHeaterData ForelineHeaterData
  518. {
  519. get { return m_ForelineHeaterData; }
  520. set { SetProperty(ref m_ForelineHeaterData, value); }
  521. }
  522. public AITHeaterData WallHeaterData
  523. {
  524. get { return m_WallHeaterData; }
  525. set { SetProperty(ref m_WallHeaterData, value); }
  526. }
  527. public AITRfData SRFData
  528. {
  529. get { return m_SRFData; }
  530. set { SetProperty(ref m_SRFData, value); }
  531. }
  532. public AITRfData BRFData
  533. {
  534. get { return m_BRFData; }
  535. set { SetProperty(ref m_BRFData, value); }
  536. }
  537. public PMState PMCurrentState
  538. {
  539. get { return m_PMCurrentState; }
  540. set { SetProperty(ref m_PMCurrentState, value); }
  541. }
  542. #region 阀
  543. public bool GasFinalValveIsOpen
  544. {
  545. get { return m_GasFinalValveIsOpen; }
  546. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  547. }
  548. public bool PVN21ValveIsOpen
  549. {
  550. get { return m_PVN21ValveIsOpen; }
  551. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  552. }
  553. public bool PVN22ValveIsOpen
  554. {
  555. get { return m_PVN22ValveIsOpen; }
  556. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  557. }
  558. public bool N2ValveIsOpen
  559. {
  560. get { return m_N2ValveIsOpen; }
  561. set { SetProperty(ref m_N2ValveIsOpen, value); }
  562. }
  563. public bool PV11ValveIsOpen
  564. {
  565. get { return m_PV11ValveIsOpen; }
  566. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  567. }
  568. public bool PV12ValveIsOpen
  569. {
  570. get { return m_PV12ValveIsOpen; }
  571. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  572. }
  573. public bool MFC1ValveIsOpen
  574. {
  575. get { return m_MFC1ValveIsOpen; }
  576. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  577. }
  578. public bool PV21ValveIsOpen
  579. {
  580. get { return m_PV21ValveIsOpen; }
  581. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  582. }
  583. public bool PV22ValveIsOpen
  584. {
  585. get { return m_PV22ValveIsOpen; }
  586. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  587. }
  588. public bool MFC2ValveIsOpen
  589. {
  590. get { return m_MFC2ValveIsOpen; }
  591. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  592. }
  593. public bool PV31ValveIsOpen
  594. {
  595. get { return m_PV31ValveIsOpen; }
  596. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  597. }
  598. public bool PV32ValveIsOpen
  599. {
  600. get { return m_PV32ValveIsOpen; }
  601. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  602. }
  603. public bool MFC3ValveIsOpen
  604. {
  605. get { return m_MFC3ValveIsOpen; }
  606. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  607. }
  608. public bool PV41ValveIsOpen
  609. {
  610. get { return m_PV41ValveIsOpen; }
  611. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  612. }
  613. public bool PV42ValveIsOpen
  614. {
  615. get { return m_PV42ValveIsOpen; }
  616. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  617. }
  618. public bool MFC4ValveIsOpen
  619. {
  620. get { return m_MFC4ValveIsOpen; }
  621. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  622. }
  623. public bool MFC5ValveIsOpen
  624. {
  625. get { return m_MFC5ValveIsOpen; }
  626. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  627. }
  628. public bool MFC6ValveIsOpen
  629. {
  630. get { return m_MFC6ValveIsOpen; }
  631. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  632. }
  633. public bool MFC7ValveIsOpen
  634. {
  635. get { return m_MFC7ValveIsOpen; }
  636. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  637. }
  638. public bool MFC8ValveIsOpen
  639. {
  640. get { return m_MFC8ValveIsOpen; }
  641. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  642. }
  643. public bool PVHe1ValveIsOpen
  644. {
  645. get { return m_PVHe1ValveIsOpen; }
  646. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  647. }
  648. public bool PVHe2ValveIsOpen
  649. {
  650. get { return m_PVHe2ValveIsOpen; }
  651. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  652. }
  653. public bool TurboPumpPumpingValveIsOpen
  654. {
  655. get { return m_TurboPumpPumpingValveIsOpen; }
  656. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  657. }
  658. public bool TurboPumpPurgeValveIsOpen
  659. {
  660. get { return m_TurboPumpPurgeValveIsOpen; }
  661. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  662. }
  663. public bool SoftPumpValveIsOpen
  664. {
  665. get { return m_SoftPumpValveIsOpen; }
  666. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  667. }
  668. public bool FastPumpValveIsOpen
  669. {
  670. get { return m_FastPumpValveIsOpen; }
  671. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  672. }
  673. public bool GuageValveIsOpen
  674. {
  675. get { return m_GuageValveIsOpen; }
  676. set { SetProperty(ref m_GuageValveIsOpen, value); }
  677. }
  678. #endregion
  679. public Dictionary<string, object> RtDataValues
  680. {
  681. get { return m_RtDataValues; }
  682. set { SetProperty(ref m_RtDataValues, value); }
  683. }
  684. public bool PumpIsOpen
  685. {
  686. get { return m_PumpIsOpen; }
  687. set { SetProperty(ref m_PumpIsOpen, value); }
  688. }
  689. public bool PendulumValveIsOpen
  690. {
  691. get { return m_PendulumValveIsOpen; }
  692. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  693. }
  694. public bool TurboIsOpen
  695. {
  696. get { return m_TurboIsOpen; }
  697. set { SetProperty(ref m_TurboIsOpen, value); }
  698. }
  699. public bool IsATM
  700. {
  701. get { return m_IsATM; }
  702. set { SetProperty(ref m_IsATM, value); }
  703. }
  704. public bool IsVAC
  705. {
  706. get { return m_IsVAC; }
  707. set { SetProperty(ref m_IsVAC, value); }
  708. }
  709. //public bool BRFIsOn
  710. //{
  711. // get { return m_BRFIsOn; }
  712. // set { SetProperty(ref m_BRFIsOn, value); }
  713. //}
  714. //public bool SRFIsOn
  715. //{
  716. // get { return m_SRFIsOn; }
  717. // set { SetProperty(ref m_SRFIsOn, value); }
  718. //}
  719. public int PositionValue
  720. {
  721. get { return m_PositionValue; }
  722. set { SetProperty(ref m_PositionValue, value); }
  723. }
  724. public bool IsPositionMode
  725. {
  726. get { return m_IsPositionMode; }
  727. set { SetProperty(ref m_IsPositionMode, value); }
  728. }
  729. public double HeGasSetpoint
  730. {
  731. get { return m_HeGasSetpoint; }
  732. set
  733. {
  734. SetProperty(ref m_HeGasSetpoint, value);
  735. }
  736. }
  737. public int HePressureSetpoint
  738. {
  739. get { return m_HePressureSetpoint; }
  740. set
  741. {
  742. SetProperty(ref m_HePressureSetpoint, value);
  743. }
  744. }
  745. public float SRFFwdPowerSetpoint
  746. {
  747. get { return m_SRFFwdPowerSetpoint; }
  748. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  749. }
  750. public float BRFFwdPowerSetpoint
  751. {
  752. get { return m_BRFFwdPowerSetpoint; }
  753. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  754. }
  755. public int ESCVoltage
  756. {
  757. get { return m_ESCVoltage; }
  758. set { SetProperty(ref m_ESCVoltage, value); }
  759. }
  760. public float SRFMatchC1
  761. {
  762. get { return m_SRFMatchC1; }
  763. set { SetProperty(ref m_SRFMatchC1, value); }
  764. }
  765. public float SRFMatchC2
  766. {
  767. get { return m_SRFMatchC2; }
  768. set { SetProperty(ref m_SRFMatchC2, value); }
  769. }
  770. public float BRFMatchC1
  771. {
  772. get { return m_BRFMatchC1; }
  773. set { SetProperty(ref m_BRFMatchC1, value); }
  774. }
  775. public float BRFMatchC2
  776. {
  777. get { return m_BRFMatchC2; }
  778. set { SetProperty(ref m_BRFMatchC2, value); }
  779. }
  780. public bool GasIsFlowing
  781. {
  782. get { return m_GasIsFlowing; }
  783. set { SetProperty(ref m_GasIsFlowing, value); }
  784. }
  785. public bool IsProcessing
  786. {
  787. get { return m_IsProcessing; }
  788. set { SetProperty(ref m_IsProcessing, value); }
  789. }
  790. public bool IsAutoMode
  791. {
  792. get { return m_IsAutoMode; }
  793. set { SetProperty(ref m_IsAutoMode, value); }
  794. }
  795. public string SelectedRecipe
  796. {
  797. get { return m_SelectedRecipe; }
  798. set { SetProperty(ref m_SelectedRecipe, value); }
  799. }
  800. public float ChillerTempSetpoint
  801. {
  802. get { return m_ChillerTempSetpoint; }
  803. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  804. }
  805. public float InnerChillerTempSetpoint
  806. {
  807. get { return m_InnerChillerTempSetpoint; }
  808. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  809. }
  810. public float OuterChillerTempSetpoint
  811. {
  812. get { return m_OuterChillerTempSetpoint; }
  813. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  814. }
  815. public float TopChillerTempSetpoint
  816. {
  817. get { return m_TopChillerTempSetpoint; }
  818. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  819. }
  820. public float WallTempSetpoint
  821. {
  822. get { return m_WallTempSetpoint; }
  823. set { SetProperty(ref m_WallTempSetpoint, value); }
  824. }
  825. public bool HeIsPressureMode
  826. {
  827. get { return m_HeIsPressureMode; }
  828. set { SetProperty(ref m_HeIsPressureMode, value); }
  829. }
  830. public bool ChillerIsOn
  831. {
  832. get { return m_ChillerIsOn; }
  833. set { SetProperty(ref m_ChillerIsOn, value); }
  834. }
  835. public bool InnerChillerIsOn
  836. {
  837. get { return m_InnerChillerIsOn; }
  838. set { SetProperty(ref m_InnerChillerIsOn, value); }
  839. }
  840. public bool OuterChillerIsOn
  841. {
  842. get { return m_OuterChillerIsOn; }
  843. set { SetProperty(ref m_OuterChillerIsOn, value); }
  844. }
  845. public bool TopChillerIsOn
  846. {
  847. get { return m_TopChillerIsOn; }
  848. set { SetProperty(ref m_TopChillerIsOn, value); }
  849. }
  850. public double ChamberPressureFeedBack
  851. {
  852. get { return m_ChamberPressureFeedBack; }
  853. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  854. }
  855. #endregion
  856. #region 命令
  857. private DelegateCommand _PMInitCommnad;
  858. public DelegateCommand PMInitCommnad =>
  859. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  860. private DelegateCommand _PMAbortCommnad;
  861. public DelegateCommand PMAbortCommnad =>
  862. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  863. private DelegateCommand _GasCommand;
  864. public DelegateCommand GasCommand =>
  865. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  866. private DelegateCommand _HeCommand;
  867. public DelegateCommand HeCommand =>
  868. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  869. private DelegateCommand _RfCommand;
  870. public DelegateCommand RfCommand =>
  871. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  872. private DelegateCommand _PurgeCommand;
  873. public DelegateCommand PurgeCommand =>
  874. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  875. private DelegateCommand _VentCommand;
  876. public DelegateCommand VentCommand =>
  877. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  878. private DelegateCommand _PumpCommand;
  879. public DelegateCommand PumpCommand =>
  880. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  881. private DelegateCommand _OpenPumpCommand;
  882. public DelegateCommand OpenPumpCommand =>
  883. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  884. private DelegateCommand _ClosePumpCommand;
  885. public DelegateCommand ClosePumpCommand =>
  886. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  887. private DelegateCommand _OpenTurboPumpCommand;
  888. public DelegateCommand OpenTurboPumpCommand =>
  889. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  890. private DelegateCommand _CloseTurboPumpCommand;
  891. public DelegateCommand CloseTurboPumpCommand =>
  892. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  893. private DelegateCommand _OpenPendulumValveCommand;
  894. public DelegateCommand OpenPendulumValveCommand =>
  895. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  896. private DelegateCommand _ClosePendulumValveCommand;
  897. public DelegateCommand ClosePendulumValveCommand =>
  898. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  899. private DelegateCommand<object> _PinUpDownCommand;
  900. public DelegateCommand<object> PinUpDownCommand =>
  901. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  902. private DelegateCommand<object> _LidUpDownCommand;
  903. public DelegateCommand<object> LidUpDownCommand =>
  904. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  905. private DelegateCommand _SetSRfCommand;
  906. public DelegateCommand SetSRfCommand =>
  907. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  908. private DelegateCommand _SetBRfCommand;
  909. public DelegateCommand SetBRfCommand =>
  910. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  911. private DelegateCommand _OpenButterflyValveViewCommand;
  912. public DelegateCommand OpenButterflyValveViewCommand =>
  913. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  914. //private DelegateCommand _HVCommand;
  915. //public DelegateCommand HVCommand =>
  916. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  917. private DelegateCommand _HVSetCommand;
  918. public DelegateCommand HVSetCommand =>
  919. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  920. private DelegateCommand _LoadRecipeCommand;
  921. public DelegateCommand LoadRecipeCommand =>
  922. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  923. private DelegateCommand<object> _ControlValveCommand;
  924. public DelegateCommand<object> ControlValveCommand =>
  925. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  926. private DelegateCommand<object> _RunRecipeCommand;
  927. public DelegateCommand<object> RunRecipeCommand =>
  928. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  929. private DelegateCommand<object> _SetChillerTempCommand;
  930. public DelegateCommand<object> SetChillerTempCommand =>
  931. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  932. private DelegateCommand<object> _OnOffChillerCommand;
  933. public DelegateCommand<object> OnOffChillerCommand =>
  934. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  935. private DelegateCommand<object> _HeaterCommand;
  936. public DelegateCommand<object> HeaterCommand =>
  937. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  938. private DelegateCommand _EndStepCommand;
  939. public DelegateCommand EndStepCommand =>
  940. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  941. #endregion
  942. #region 构造函数
  943. public OverKepler2300ViewModel()
  944. {
  945. m_RtDataKeys = new List<string>();
  946. m_IsATM = true;
  947. ModuleName = "PMA";
  948. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  949. DispatcherTimer timer = new DispatcherTimer();
  950. timer.Interval = TimeSpan.FromSeconds(0.5);
  951. timer.Tick += timer_Tick;
  952. timer.Start();
  953. }
  954. #endregion
  955. #region 命令方法
  956. private void OnControlValve(object obj)
  957. {
  958. CommonValveControl commonValveControl = (CommonValveControl)obj;
  959. if (commonValveControl.IsCanEdit == true)
  960. {
  961. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  962. }
  963. }
  964. private void OnPMInit()
  965. {
  966. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  967. }
  968. private async void OnGas()
  969. {
  970. await Task.Run(async () =>
  971. {
  972. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  973. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  974. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  975. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  976. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  977. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  978. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  980. await Task.Delay(1000);
  981. object[] mfc = new object[8];
  982. string[] mfcSetPoint = new string[8];
  983. mfc[0] = MFC1Data.SetPoint;
  984. mfc[1] = MFC2Data.SetPoint;
  985. mfc[2] = MFC3Data.SetPoint;
  986. mfc[3] = MFC4Data.SetPoint;
  987. mfc[4] = MFC5Data.SetPoint;
  988. mfc[5] = MFC6Data.SetPoint;
  989. mfc[6] = MFC7Data.SetPoint;
  990. mfc[7] = MFC8Data.SetPoint;
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  992. });
  993. }
  994. private void OnHe()
  995. {
  996. if (PVHe1ValveIsOpen == true)
  997. {
  998. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  999. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1000. }
  1001. else
  1002. {
  1003. if (HeIsPressureMode)
  1004. {
  1005. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1006. }
  1007. else
  1008. {
  1009. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1010. }
  1011. }
  1012. }
  1013. private void OnRf()
  1014. {
  1015. if (PMCurrentState == PMState.RfPowering)
  1016. {
  1017. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1018. }
  1019. else
  1020. {
  1021. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1022. }
  1023. }
  1024. private void OnPurge()
  1025. {
  1026. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1027. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1028. //{
  1029. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1030. // await Task.Delay(1000);
  1031. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1032. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1033. //}
  1034. //else
  1035. //{
  1036. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1037. // await Task.Delay(1000);
  1038. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1039. //}
  1040. if (PMCurrentState == PMState.Purging)
  1041. {
  1042. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1043. //await Task.Delay(1000);
  1044. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1045. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1046. }
  1047. else
  1048. {
  1049. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1050. //await Task.Delay(1000);
  1051. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1052. }
  1053. }
  1054. private void OnVent()
  1055. {
  1056. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1057. if (PMCurrentState == PMState.Venting)
  1058. {
  1059. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1060. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1061. }
  1062. else
  1063. {
  1064. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1065. }
  1066. }
  1067. private void OnPump()
  1068. {
  1069. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1070. if (PMCurrentState == PMState.Pumping)
  1071. {
  1072. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1073. return;
  1074. }
  1075. //if (PMCurrentState == PMState.pum)
  1076. //{
  1077. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1078. // return;
  1079. //}
  1080. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1081. //{
  1082. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1083. //}
  1084. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1085. //{
  1086. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1087. //}
  1088. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1089. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1090. // 设置底压
  1091. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1092. if (basePressure <= 0.01 || basePressure >= 1000)
  1093. {
  1094. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1095. return;
  1096. }
  1097. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1098. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1099. {
  1100. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1101. return;
  1102. }
  1103. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1104. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1106. }
  1107. private void OnOpenPump()
  1108. {
  1109. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1110. if (PMCurrentState == PMState.LaunchingPump)
  1111. {
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1113. return;
  1114. }
  1115. //if (PumpIsOpen == true)
  1116. //{
  1117. // return;
  1118. //}
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1120. }
  1121. private void OnClosePump()
  1122. {
  1123. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1124. }
  1125. private void OnOpenTurboPump()
  1126. {
  1127. //TurboIsOpen = true;
  1128. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1129. if (PMCurrentState == PMState.LaunchingTurboPump)
  1130. {
  1131. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1132. return;
  1133. }
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1135. }
  1136. private void OnCloseTurboPump()
  1137. {
  1138. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1139. }
  1140. private void OnOpenPendulumValve()
  1141. {
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1143. }
  1144. private void OnClosePendulumValve()
  1145. {
  1146. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1147. }
  1148. private void OnPinUpDown(object upDown)
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1151. }
  1152. private void OnLidUpDown(object upDown)
  1153. {
  1154. //var value = (bool)upDown;
  1155. if (upDown.ToString() == "Up")
  1156. {
  1157. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1158. }
  1159. else
  1160. {
  1161. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1162. }
  1163. }
  1164. private async void OnSetSRf()
  1165. {
  1166. if (SRFData.IsRfOn == true)
  1167. {
  1168. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1169. }
  1170. else
  1171. {
  1172. if (GasIsFlowing == true)
  1173. {
  1174. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1175. await Task.Delay(100);
  1176. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1177. }
  1178. }
  1179. }
  1180. private async void OnSetBRf()
  1181. {
  1182. if (BRFData.IsRfOn == true)
  1183. {
  1184. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1185. }
  1186. else
  1187. {
  1188. if (GasIsFlowing == true)
  1189. {
  1190. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1191. await Task.Delay(100);
  1192. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1193. }
  1194. }
  1195. }
  1196. private void OnPMAbort()
  1197. {
  1198. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1199. }
  1200. private void OnOpenButterflyValveView()
  1201. {
  1202. //if (butterflyValveMessageBox == null)
  1203. //{
  1204. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1205. butterflyValveMessageBox = new ButterflyValveView();
  1206. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1207. butterflyValveMessageBox.Left = 700;
  1208. butterflyValveMessageBox.Top = 600;
  1209. butterflyValveMessageBox.Show();
  1210. butterflyValveMessageBox.Owner = _mainWindow;
  1211. //}
  1212. }
  1213. private void OnLoadRecipe()
  1214. {
  1215. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1216. }
  1217. //private async void OnHV()
  1218. //{
  1219. // if (ESCHVData.IsOn == true)
  1220. // {
  1221. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1222. // }
  1223. // else
  1224. // {
  1225. // await Task.Run(async () =>
  1226. // {
  1227. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1228. // await Task.Delay(1000);
  1229. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1230. // });
  1231. // }
  1232. //}
  1233. private void OnHVSet()
  1234. {
  1235. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1236. }
  1237. private void OnRunRecipe(object obj)
  1238. {
  1239. string recipeName = SelectedRecipe;
  1240. if (recipeName == null)
  1241. {
  1242. return;
  1243. }
  1244. ClearData();
  1245. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1246. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1247. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName);
  1248. }
  1249. private void OnSetChillerTemp(object obj)
  1250. {
  1251. float offset;
  1252. float setPoint;
  1253. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1254. switch (chillerType)
  1255. {
  1256. case ChillerType.Chiller:
  1257. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1258. float.TryParse(value, out offset);
  1259. setPoint = ChillerTempSetpoint;
  1260. break;
  1261. case ChillerType.InnerChiller:
  1262. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1263. float.TryParse(Innervalue, out offset);
  1264. setPoint = InnerChillerTempSetpoint;
  1265. break;
  1266. case ChillerType.OuterChiller:
  1267. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1268. float.TryParse(Outervalue, out offset);
  1269. setPoint = OuterChillerTempSetpoint;
  1270. break;
  1271. case ChillerType.TopChiller:
  1272. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1273. float.TryParse(Topvalue, out offset);
  1274. setPoint = TopChillerTempSetpoint;
  1275. break;
  1276. default:
  1277. return;
  1278. }
  1279. //var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1280. //float x;
  1281. //float.TryParse(value, out x);
  1282. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1283. }
  1284. private void OnOffChiller(object obj)
  1285. {
  1286. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1287. switch (chillerType)
  1288. {
  1289. case ChillerType.Chiller:
  1290. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1291. break;
  1292. case ChillerType.InnerChiller:
  1293. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1294. break;
  1295. case ChillerType.OuterChiller:
  1296. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1297. break;
  1298. case ChillerType.TopChiller:
  1299. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1300. break;
  1301. default:
  1302. return;
  1303. }
  1304. }
  1305. private void OnHeater(object obj)
  1306. {
  1307. AITHeaterData heaterData = obj as AITHeaterData;
  1308. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1309. heaterView = new HeaterView(heaterData, ModuleName);
  1310. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1311. heaterView.Owner = _mainWindow;
  1312. heaterView.Show();
  1313. }
  1314. private void OnEndStep()
  1315. {
  1316. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1317. {
  1318. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1319. }
  1320. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1321. {
  1322. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1323. }
  1324. }
  1325. #endregion
  1326. #region 私有方法
  1327. private void ClearData()
  1328. {
  1329. ESCVoltage = 0;
  1330. SRFFwdPowerSetpoint = 0;
  1331. SRFMatchC1 = 0;
  1332. SRFMatchC2 = 0;
  1333. BRFFwdPowerSetpoint = 0;
  1334. BRFMatchC1 = 0;
  1335. BRFMatchC2 = 0;
  1336. HeGasSetpoint = 0;
  1337. MFC1SetPoint = 0;
  1338. MFC2SetPoint = 0;
  1339. MFC3SetPoint = 0;
  1340. MFC4SetPoint = 0;
  1341. MFC5SetPoint = 0;
  1342. MFC6SetPoint = 0;
  1343. MFC7SetPoint = 0;
  1344. MFC8SetPoint = 0;
  1345. }
  1346. private IEnumerable<string> GetFilesNames(string path)
  1347. {
  1348. return Directory.GetFiles(path, "*.rcp")
  1349. .Select(Path.GetFileNameWithoutExtension);
  1350. }
  1351. void timer_Tick(object sender, EventArgs e)
  1352. {
  1353. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1354. if (RtDataValues == null)
  1355. {
  1356. return;
  1357. }
  1358. var N2SetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1359. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1360. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1361. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1362. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1363. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1364. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1365. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1366. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1367. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1368. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1369. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1370. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1371. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1372. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1373. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1374. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1375. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1376. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1377. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1378. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1379. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1380. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1381. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1382. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1383. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1384. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1385. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1386. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1387. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1388. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1389. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1390. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1391. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1392. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1393. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1394. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1395. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1396. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1397. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1398. IsProcessing = PMCurrentState == PMState.Processing;
  1399. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1400. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1401. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1402. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1403. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1404. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1405. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1406. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1407. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1408. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1409. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1410. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1411. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1412. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1413. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1414. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1415. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1416. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1417. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1418. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1419. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1420. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1421. InnerTemperature = float.Parse(RtDataValues[$"{ModuleName}.ChillerInnerTemp"].ToString());
  1422. OuterTemperature = float.Parse(RtDataValues[$"{ModuleName}.ChillerOuterTemp"].ToString());
  1423. TopTemperature = float.Parse(RtDataValues[$"{ModuleName}.ChillerTopTemp"].ToString());
  1424. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1425. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1426. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1427. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1428. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1429. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1430. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1431. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1432. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1433. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1434. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1435. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1436. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1437. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1438. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1439. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1440. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1441. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1442. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1443. if (PMCurrentState == PMState.Processing)
  1444. {
  1445. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1446. if (CurrentRecipeResult.RecipeStepNumber != null)
  1447. {
  1448. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1449. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1450. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1451. }
  1452. }
  1453. else
  1454. {
  1455. CurrentRecipeResult = null;
  1456. CurrentRecipeStep = null;
  1457. }
  1458. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1459. {
  1460. ChamberPressureFeedBack = ProcessLowPressure;
  1461. }
  1462. else
  1463. {
  1464. ChamberPressureFeedBack = ProcessHighPressure;
  1465. }
  1466. }
  1467. public void addDataKeys()
  1468. {
  1469. m_RtDataKeys.Clear();
  1470. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1471. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1472. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1473. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1474. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1475. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1476. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1477. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1478. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1479. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1480. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1481. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1482. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1483. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1484. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1485. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1486. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1487. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1488. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1489. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1490. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1491. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1492. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1493. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1494. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1495. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1496. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1497. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1498. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1499. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1500. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1501. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1502. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1503. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1504. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1505. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1506. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1507. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1508. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1509. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1510. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1511. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1512. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1513. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1514. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1515. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1516. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1517. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1518. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1519. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1520. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1521. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1522. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1523. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1524. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1525. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1526. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1527. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1528. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1529. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1530. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1531. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1532. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1533. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1534. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1535. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1536. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1537. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1538. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1539. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1540. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1541. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1542. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1543. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1544. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1545. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1546. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1547. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1548. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1549. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1550. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1551. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1552. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1553. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1554. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1555. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1556. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1557. }
  1558. #endregion
  1559. }
  1560. }