SimulatorSystem.cs 62 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. namespace Venus_Simulator.Instances
  13. {
  14. public class SimulatorSystem : Singleton<SimulatorSystem>
  15. {
  16. private PeriodicJob _thread;
  17. private Random _rd = new Random();
  18. private RD_TRIG _trigATM = new RD_TRIG();
  19. private RD_TRIG _trigVAC = new RD_TRIG();
  20. private R_TRIG _trigLLExtend = new R_TRIG();
  21. private R_TRIG _trigLLRetract = new R_TRIG();
  22. private static int count = 0;
  23. private readonly float ATM_THRESHOLD = 750000;
  24. private readonly float ATM_PRESSURE = 760000;
  25. private readonly float ATM_LoadLock_PRESSURE = 760000;
  26. private readonly uint VAC_SW_PRESSURE = 9500;
  27. private readonly uint PROCESS_GAUGE = 10000;
  28. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  29. public SimulatorSystem()
  30. {
  31. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  32. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  33. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  34. // TODO
  35. }
  36. ~SimulatorSystem()
  37. {
  38. _thread?.Stop();
  39. }
  40. public void Initialize()
  41. {
  42. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. SetTMDefaultValue();
  45. Singleton<DataManager>.Instance.Initialize(false);
  46. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  47. }
  48. private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
  49. {
  50. if (jetChamber == JetChamber.Venus)
  51. {
  52. // chamber
  53. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  54. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  55. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  56. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  57. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  58. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  59. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  60. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  61. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  62. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  63. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  64. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  65. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  66. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  67. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  68. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  69. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  71. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  72. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  73. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  74. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  75. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  76. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  78. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  79. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  82. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  83. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  85. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  86. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  88. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  89. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  90. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  91. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  92. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  93. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  94. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  95. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  99. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  100. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  101. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  102. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  103. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  104. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  106. //// pressure
  107. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  108. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  109. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  110. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  111. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  112. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  113. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  114. //// Temperature
  115. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  116. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  117. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  118. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  119. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  120. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  121. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  122. //if (mod == ModuleName.PMA)
  123. //{
  124. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  125. //}
  126. //else if (mod == ModuleName.PMB)
  127. //{
  128. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  129. //}
  130. // Datetime
  131. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  132. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  133. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  134. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  135. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  136. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  137. }
  138. else
  139. {
  140. // chamber
  141. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  142. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  143. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  144. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  145. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  146. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  147. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  148. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  149. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  150. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  151. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  152. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  153. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  154. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  155. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  156. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  157. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  158. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  159. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  160. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  161. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  162. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  165. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  167. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  168. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  169. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  170. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  171. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  172. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  173. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  179. //// pressure
  180. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  181. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  182. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  183. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  184. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  185. //// Temperature
  186. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  187. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  188. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  189. // Datetime
  190. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  191. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  192. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  193. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  194. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  195. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  196. }
  197. }
  198. private void SetTMDefaultValue()
  199. {
  200. ModuleName mod = ModuleName.TM;
  201. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  202. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  203. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  204. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  205. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  206. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  207. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  208. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  209. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  210. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  211. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  212. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  214. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  215. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  216. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  217. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  218. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  219. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  220. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  221. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  222. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  223. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  224. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  225. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  226. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  227. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  228. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  229. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  231. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  232. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  233. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  234. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  235. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  236. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  237. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  239. // Datetime
  240. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  241. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  242. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  243. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  244. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  245. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  246. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  247. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  248. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  249. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  250. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  251. }
  252. private bool OnMonitor()
  253. {
  254. try
  255. {
  256. switch (SimulatorJetChamber.CurrentPMAChamber)
  257. {
  258. case JetChamber.Venus:
  259. // PMA
  260. MonitorSlitDoor(ModuleName.PMA);
  261. MonitorPin(ModuleName.PMA);
  262. MonitorPressure(ModuleName.PMA);
  263. MonitorExtendAndRetract(ModuleName.PMA);
  264. //MonitorTemperature(ModuleName.PMA);
  265. MonitorGas(ModuleName.PMA);
  266. //MonitorRF(ModuleName.PMA);
  267. ChangeTime(ModuleName.PMA);
  268. //MonitorIOPumpCtrl(ModuleName.PMA);
  269. break;
  270. case JetChamber.Kepler2300:
  271. case JetChamber.Kepler2200A:
  272. case JetChamber.Kepler2200B:
  273. // PMA
  274. MonitorSlitDoor(ModuleName.PMA);
  275. MonitorPin(ModuleName.PMA);
  276. MonitorPressure_Kepler(ModuleName.PMA);
  277. //MonitorTemperature(ModuleName.PMA);
  278. MonitorGas(ModuleName.PMA);
  279. //MonitorRF(ModuleName.PMA);
  280. ChangeTime(ModuleName.PMA);
  281. //MonitorIOPumpCtrl(ModuleName.PMA);
  282. MonitorLid(ModuleName.PMA);
  283. break;
  284. }
  285. switch (SimulatorJetChamber.CurrentPMBChamber)
  286. {
  287. case JetChamber.Venus:
  288. // PMB
  289. MonitorSlitDoor(ModuleName.PMB);
  290. MonitorPin(ModuleName.PMB);
  291. MonitorPressure(ModuleName.PMB);
  292. //MonitorTemperature(ModuleName.PMB);
  293. MonitorGas(ModuleName.PMB);
  294. // MonitorRF(ModuleName.PMB);
  295. ChangeTime(ModuleName.PMB);
  296. //MonitorIOPumpCtrl(ModuleName.PMB);
  297. break;
  298. case JetChamber.Kepler2300:
  299. case JetChamber.Kepler2200A:
  300. case JetChamber.Kepler2200B:
  301. // PMB
  302. MonitorSlitDoor(ModuleName.PMB);
  303. MonitorPin(ModuleName.PMB);
  304. MonitorPressure_Kepler(ModuleName.PMB);
  305. //MonitorTemperature(ModuleName.PMB);
  306. MonitorGas(ModuleName.PMB);
  307. // MonitorRF(ModuleName.PMB);
  308. ChangeTime(ModuleName.PMB);
  309. //MonitorIOPumpCtrl(ModuleName.PMB);
  310. MonitorLid(ModuleName.PMB);
  311. break;
  312. }
  313. ChangeTime(ModuleName.TM);
  314. MonitorMFSlitDoor();
  315. MonitorMFPressure();
  316. }
  317. catch (Exception e)
  318. {
  319. LOG.WriteExeption(e);
  320. }
  321. return true;
  322. }
  323. private void ChangeTime(ModuleName mod)
  324. {
  325. // Heartbeat with PLC
  326. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  327. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  328. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  329. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  330. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  331. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  332. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  333. }
  334. void MonitorSlitDoor(ModuleName mod)
  335. {
  336. // slit door open
  337. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  338. {
  339. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  340. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  341. }
  342. // slit door close
  343. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  344. {
  345. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  346. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  347. }
  348. }
  349. void MonitorMFSlitDoor()
  350. {
  351. ModuleName mod = ModuleName.TM;
  352. // LLA T door open
  353. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  354. {
  355. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  356. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  357. }
  358. // LLB T door open
  359. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  360. {
  361. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  362. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  363. }
  364. // LLA E door open
  365. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  366. {
  367. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  368. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  369. }
  370. // LLB E door open
  371. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  372. {
  373. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  374. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  375. }
  376. // LLA T door close
  377. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  378. {
  379. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  380. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  381. }
  382. // LLB T door close
  383. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  384. {
  385. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  386. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  387. }
  388. // LLA E door close
  389. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  390. {
  391. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  392. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  393. }
  394. // LLB E door close
  395. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  396. {
  397. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  399. }
  400. }
  401. void MonitorPin(ModuleName mod)
  402. {
  403. // lift pin up
  404. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  405. {
  406. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  407. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  408. }
  409. }
  410. void MonitorLid(ModuleName mod)
  411. {
  412. // lift pin up
  413. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  414. {
  415. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  416. }
  417. }
  418. void MonitorExtendAndRetract(ModuleName mod)
  419. {
  420. // Extend
  421. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  422. if (_trigLLExtend.Q)
  423. {
  424. _trigLLRetract.RST = true;
  425. Thread.Sleep(500);
  426. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  427. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  428. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  429. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  430. }
  431. // Retract
  432. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  433. if (_trigLLRetract.Q)
  434. {
  435. count++;
  436. _trigLLExtend.RST = true;
  437. Thread.Sleep(500);
  438. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  439. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  440. if (count == 1)
  441. {
  442. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  443. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  444. }
  445. else if (count == 2)
  446. {
  447. count = 0;
  448. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  449. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  450. }
  451. }
  452. }
  453. void MonitorPressure(ModuleName mod)
  454. {
  455. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  456. // Loadlock pressure
  457. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  458. // Foreline
  459. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  460. {
  461. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  462. }
  463. else
  464. {
  465. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  466. }
  467. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  468. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  469. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  470. //float chamber_pressure = GetMockChamberPressure(mod);
  471. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  472. // soft pump & fast pump
  473. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  474. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  475. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  476. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  477. {
  478. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  479. {
  480. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  481. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  482. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  483. {
  484. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  485. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  486. }
  487. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  488. {
  489. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  490. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  491. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  492. }
  493. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  494. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  495. }
  496. else if (fast_pump_vlv.Value)
  497. {
  498. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  499. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  500. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  501. {
  502. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  503. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  504. }
  505. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  506. {
  507. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  508. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  509. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  510. }
  511. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  512. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  513. }
  514. else if (soft_pump_vlv.Value)
  515. {
  516. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  517. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  518. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  519. {
  520. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  521. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  522. }
  523. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  524. {
  525. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  526. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  527. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  528. }
  529. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  530. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  531. }
  532. else if (turbo_pump_vlv.Value)
  533. {
  534. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  535. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  536. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  537. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  538. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  539. }
  540. }
  541. // fast vent & purge
  542. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  543. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  544. //if (vent_vlv.Value || purge_vlv.Value)
  545. //{
  546. // if (vent_vlv.Value && purge_vlv.Value)
  547. // {
  548. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  549. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  550. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  551. // {
  552. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  553. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  554. // }
  555. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  556. // {
  557. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  558. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  559. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  560. // }
  561. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  562. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  563. // }
  564. // else
  565. //
  566. if (vent_vlv.Value)
  567. {
  568. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  569. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  570. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  571. {
  572. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  573. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  574. }
  575. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  576. {
  577. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  578. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  579. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  580. }
  581. else
  582. {
  583. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  584. }
  585. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  586. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  587. }
  588. // Loadlock Pumping Valve
  589. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  590. if (Loadlock_pump_vlv.Value)
  591. {
  592. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  593. }
  594. // Loadlock vent
  595. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  596. if (Loadlock_vent_vlv.Value)
  597. {
  598. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  599. }
  600. // 压力值越界,复位
  601. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  602. if (chamber_pressure1 > ATM_PRESSURE)
  603. {
  604. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  605. }
  606. else if (chamber_pressure1 < 20)
  607. {
  608. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 20);
  609. }
  610. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  611. if (process_pressure1 > PROCESS_GAUGE)
  612. {
  613. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  614. }
  615. else if (process_pressure1 < 20)
  616. {
  617. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  618. }
  619. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  620. if (foreline_pressure > 10000)
  621. {
  622. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  623. }
  624. else if (foreline_pressure < 150)
  625. {
  626. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  627. }
  628. // 模拟压力计漂移
  629. //int p1 = (int)GetMockChamberPressure(mod);
  630. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  631. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  632. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  633. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  634. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  635. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  636. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  637. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  638. // 根据当前压力值设定信号
  639. //float chamber_pressure2 = GetMockChamberPressure(mod);
  640. // ATM switch
  641. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  642. // VAC switch
  643. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  644. // Throttle valve
  645. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  646. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  647. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  648. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  649. // 压力值
  650. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  651. //{
  652. // short increase = (short)_rd.Next(20, 30);
  653. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  654. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  655. // {
  656. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  657. // }
  658. //}
  659. //else
  660. //{
  661. // short increase = (short)_rd.Next(20, 30);
  662. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  663. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  664. // {
  665. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  666. // }
  667. //}
  668. //// 位置值
  669. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  670. //{
  671. // short increase = (short)_rd.Next(20, 30);
  672. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  673. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  674. // {
  675. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  676. // }
  677. //}
  678. //else
  679. //{
  680. // short increase = (short)_rd.Next(20, 30);
  681. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  682. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  683. // {
  684. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  685. // }
  686. //}
  687. }
  688. void MonitorPressure_Kepler(ModuleName mod)
  689. {
  690. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  691. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  692. {
  693. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  694. }
  695. else
  696. {
  697. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  698. }
  699. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  700. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  701. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  702. //float chamber_pressure = GetMockChamberPressure(mod);
  703. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  704. // soft pump & fast pump
  705. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  706. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  707. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  708. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  709. {
  710. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  711. {
  712. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  713. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  714. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  715. {
  716. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  717. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  718. }
  719. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  720. {
  721. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  722. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  723. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  724. }
  725. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  726. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  727. }
  728. else if (fast_pump_vlv.Value)
  729. {
  730. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  731. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  732. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  733. {
  734. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  735. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  736. }
  737. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  738. {
  739. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  740. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  741. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  742. }
  743. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  744. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  745. }
  746. else if (soft_pump_vlv.Value)
  747. {
  748. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  749. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  750. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  751. {
  752. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  753. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  754. }
  755. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  756. {
  757. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  758. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  759. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  760. }
  761. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  762. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  763. }
  764. else if (turbo_pump_vlv.Value)
  765. {
  766. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  767. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  768. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  769. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  770. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  771. }
  772. }
  773. // fast vent & purge
  774. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  775. if (vent_vlv.Value)
  776. {
  777. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  778. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  779. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  780. {
  781. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  782. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  783. }
  784. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  785. {
  786. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  787. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  788. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  789. }
  790. else
  791. {
  792. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  793. }
  794. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  795. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  796. }
  797. // Loadlock Pumping Valve
  798. // 压力值越界,复位
  799. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  800. if (chamber_pressure1 > ATM_PRESSURE)
  801. {
  802. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  803. }
  804. else if (chamber_pressure1 < 20)
  805. {
  806. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  807. }
  808. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  809. if (process_pressure1 > PROCESS_GAUGE)
  810. {
  811. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  812. }
  813. else if (process_pressure1 < 20)
  814. {
  815. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  816. }
  817. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  818. if (foreline_pressure > 10000)
  819. {
  820. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  821. }
  822. else if (foreline_pressure < 150)
  823. {
  824. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  825. }
  826. // ATM switch
  827. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  828. // VAC switch
  829. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  830. }
  831. void MonitorMFPressure()
  832. {
  833. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  834. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  835. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  836. ModuleName mod = ModuleName.TM;
  837. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  838. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  839. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  840. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  841. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  842. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  843. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  844. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  845. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  846. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  847. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  848. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  849. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  850. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  851. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  852. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  853. {
  854. if ( getAiValue_LLA_ChamberPressure > 10000)
  855. {
  856. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  857. }
  858. else if (getAiValue_LLA_ChamberPressure <= 10000)
  859. {
  860. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  861. }
  862. }
  863. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  864. {
  865. if (getAiValue_LLB_ChamberPressure > 10000)
  866. {
  867. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  868. }
  869. else if (getAiValue_LLB_ChamberPressure <= 10000)
  870. {
  871. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  872. }
  873. }
  874. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  875. {
  876. if (getAiValue_TM_ChamberPressure > 10000)
  877. {
  878. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  879. }
  880. else if (getAiValue_TM_ChamberPressure <= 10000)
  881. {
  882. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  883. }
  884. }
  885. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  886. {
  887. if (getAiValue_LLA_ChamberPressure > 10000)
  888. {
  889. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  890. }
  891. else if (getAiValue_LLA_ChamberPressure <= 10000)
  892. {
  893. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  894. }
  895. }
  896. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  897. {
  898. if (getAiValue_LLB_ChamberPressure > 10000)
  899. {
  900. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  901. }
  902. else if (getAiValue_LLB_ChamberPressure <= 10000)
  903. {
  904. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  905. }
  906. }
  907. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  908. {
  909. if (getAiValue_TM_ChamberPressure > 10000)
  910. {
  911. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  912. }
  913. else if (getAiValue_TM_ChamberPressure <= 10000)
  914. {
  915. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  916. }
  917. }
  918. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  919. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  920. {
  921. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  922. }
  923. else if (getAiValue_LLA_ChamberPressure < 20)
  924. {
  925. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  926. }
  927. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  928. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  929. {
  930. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  931. }
  932. else if (getAiValue_LLB_ChamberPressure < 20)
  933. {
  934. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  935. }
  936. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  937. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  938. {
  939. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  940. }
  941. else if (getAiValue_TM_ChamberPressure < 20)
  942. {
  943. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  944. }
  945. // ATM switch
  946. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  947. // VAC switch
  948. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  949. // ATM switch
  950. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  951. // VAC switch
  952. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  953. // ATM switch
  954. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  955. // VAC switch
  956. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  957. }
  958. void SetAiValue(string name, float value)
  959. {
  960. byte[] flow = BitConverter.GetBytes(value);
  961. short high1 = BitConverter.ToInt16(flow, 0);
  962. short low1 = BitConverter.ToInt16(flow, 2);
  963. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  964. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  965. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  966. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  967. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  968. }
  969. float GetAiValue(string name)
  970. {
  971. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  972. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  973. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  974. return flow;
  975. }
  976. float GetAoValue(string name)
  977. {
  978. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  979. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  980. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  981. return flow;
  982. }
  983. void MonitorTemperature(ModuleName mod)
  984. {
  985. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  986. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  987. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  988. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  989. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  990. // 底座
  991. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  992. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  993. //{
  994. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  995. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  996. //}
  997. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  998. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  999. //{
  1000. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1001. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1002. //}
  1003. // Foreline
  1004. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1005. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1006. {
  1007. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1008. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1009. }
  1010. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1011. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1012. {
  1013. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1014. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1015. }
  1016. // Wall
  1017. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1018. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1019. {
  1020. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1021. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1022. }
  1023. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1024. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1025. {
  1026. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1027. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1028. }
  1029. }
  1030. void MonitorGas(ModuleName mod)
  1031. {
  1032. // gas
  1033. this.SimulateMFC(ModuleName.PMA, 1);
  1034. this.SimulateMFC(ModuleName.PMA, 2);
  1035. this.SimulateMFC(ModuleName.PMA, 3);
  1036. this.SimulateMFC(ModuleName.PMA, 4);
  1037. this.SimulateMFC(ModuleName.PMA, 5);
  1038. this.SimulateMFC(ModuleName.PMA, 6);
  1039. this.SimulateMFC(ModuleName.PMA, 7);
  1040. this.SimulateMFC(ModuleName.PMA, 8);
  1041. this.SimulateN2(ModuleName.PMA);
  1042. this.SimulateHe(ModuleName.PMA);
  1043. }
  1044. private void SimulateMFC(ModuleName mod, byte gasNum)
  1045. {
  1046. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1047. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1048. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1049. }
  1050. private void SimulateN2(ModuleName mod)
  1051. {
  1052. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1053. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1054. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1055. }
  1056. private void SimulateHe(ModuleName mod)
  1057. {
  1058. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1059. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1060. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1061. }
  1062. void MonitorRF(ModuleName mod)
  1063. {
  1064. // RF generator
  1065. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1066. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1067. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1068. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1069. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1070. }
  1071. void MonitorIOPumpCtrl(ModuleName mod)
  1072. {
  1073. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1074. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1075. }
  1076. public void Terminate()
  1077. {
  1078. _thread.Stop();
  1079. }
  1080. public void SetCoolantOutletTemp(string module, int Temp)
  1081. {
  1082. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1083. //{
  1084. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1085. //}
  1086. }
  1087. }
  1088. }