1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586878889909192939495969798991001011021031041051061071081091101111121131141151161171181191201211221231241251261271281291301311321331341351361371381391401411421431441451461471481491501511521531541551561571581591601611621631641651661671681691701711721731741751761771781791801811821831841851861871881891901911921931941951961971981992002012022032042052062072082092102112122132142152162172182192202212222232242252262272282292302312322332342352362372382392402412422432442452462472482492502512522532542552562572582592602612622632642652662672682692702712722732742752762772782792802812822832842852862872882892902912922932942952962972982993003013023033043053063073083093103113123133143153163173183193203213223233243253263273283293303313323333343353363373383393403413423433443453463473483493503513523533543553563573583593603613623633643653663673683693703713723733743753763773783793803813823833843853863873883893903913923933943953963973983994004014024034044054064074084094104114124134144154164174184194204214224234244254264274284294304314324334344354364374384394404414424434444454464474484494504514524534544554564574584594604614624634644654664674684694704714724734744754764774784794804814824834844854864874884894904914924934944954964974984995005015025035045055065075085095105115125135145155165175185195205215225235245255265275285295305315325335345355365375385395405415425435445455465475485495505515525535545555565575585595605615625635645655665675685695705715725735745755765775785795805815825835845855865875885895905915925935945955965975985996006016026036046056066076086096106116126136146156166176186196206216226236246256266276286296306316326336346356366376386396406416426436446456466476486496506516526536546556566576586596606616626636646656666676686696706716726736746756766776786796806816826836846856866876886896906916926936946956966976986997007017027037047057067077087097107117127137147157167177187197207217227237247257267277287297307317327337347357367377387397407417427437447457467477487497507517527537547557567577587597607617627637647657667677687697707717727737747757767777787797807817827837847857867877887897907917927937947957967977987998008018028038048058068078088098108118128138148158168178188198208218228238248258268278288298308318328338348358368378388398408418428438448458468478488498508518528538548558568578588598608618628638648658668678688698708718728738748758768778788798808818828838848858868878888898908918928938948958968978988999009019029039049059069079089099109119129139149159169179189199209219229239249259269279289299309319329339349359369379389399409419429439449459469479489499509519529539549559569579589599609619629639649659669679689699709719729739749759769779789799809819829839849859869879889899909919929939949959969979989991000100110021003100410051006100710081009101010111012101310141015101610171018101910201021102210231024102510261027102810291030103110321033103410351036103710381039104010411042104310441045104610471048104910501051105210531054105510561057105810591060106110621063106410651066106710681069107010711072107310741075107610771078107910801081108210831084108510861087108810891090109110921093109410951096109710981099110011011102110311041105110611071108110911101111111211131114111511161117111811191120112111221123112411251126112711281129113011311132113311341135113611371138113911401141114211431144114511461147114811491150115111521153115411551156115711581159116011611162116311641165116611671168116911701171117211731174117511761177117811791180118111821183118411851186118711881189119011911192119311941195119611971198119912001201120212031204120512061207120812091210121112121213121412151216121712181219122012211222122312241225122612271228122912301231123212331234123512361237123812391240124112421243124412451246124712481249125012511252125312541255125612571258125912601261126212631264126512661267126812691270127112721273127412751276127712781279128012811282128312841285128612871288128912901291129212931294129512961297129812991300130113021303130413051306130713081309 |
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Simulator.Core.Driver;
- using System;
- using System.Collections.Generic;
- using Venus_Simulator.Devices;
- using System.Threading;
- using Venus_Core;
- namespace Venus_Simulator.Instances
- {
- public class SimulatorSystem : Singleton<SimulatorSystem>
- {
- private PeriodicJob _thread;
- private Random _rd = new Random();
- private RD_TRIG _trigATM = new RD_TRIG();
- private RD_TRIG _trigVAC = new RD_TRIG();
- private R_TRIG _trigLLExtend = new R_TRIG();
- private R_TRIG _trigLLRetract = new R_TRIG();
- private static int count = 0;
- private readonly float ATM_THRESHOLD = 750000;
- private readonly float ATM_PRESSURE = 760000;
- private readonly float ATM_LoadLock_PRESSURE = 760000;
- private readonly uint VAC_SW_PRESSURE = 9500;
- private readonly uint PROCESS_GAUGE = 10000;
- private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
- public SimulatorSystem()
- {
- //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
- //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
- //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
- // TODO
-
- }
- ~SimulatorSystem()
- {
- _thread?.Stop();
- }
- public void Initialize()
- {
-
- SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
- SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
- SetTMDefaultValue();
-
-
- Singleton<DataManager>.Instance.Initialize(false);
- _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
- }
- private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
- {
- if (jetChamber == JetChamber.Venus)
- {
- // chamber
- IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
- IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
- IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
- IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
- IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
- IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
- IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
- //// pressure
- SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
- SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
- SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
- //// Temperature
- SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
- SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
- //if (mod == ModuleName.PMA)
- //{
- // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
- //}
- //else if (mod == ModuleName.PMB)
- //{
- // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
- //}
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- }
- else
- {
- // chamber
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
-
-
- IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
- IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
- IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
- //// pressure
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
- SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- //// Temperature
- SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- }
-
- }
- private void SetTMDefaultValue()
- {
- ModuleName mod = ModuleName.TM;
-
- IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
- IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
- IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
- IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
-
- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
- IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
- IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
- IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
- // Datetime
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
- SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
- SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
- SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
- SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
- }
- private bool OnMonitor()
- {
- try
- {
- switch (SimulatorJetChamber.CurrentPMAChamber)
- {
- case JetChamber.Venus:
- // PMA
- MonitorSlitDoor(ModuleName.PMA);
- MonitorPin(ModuleName.PMA);
- MonitorPressure(ModuleName.PMA);
- MonitorExtendAndRetract(ModuleName.PMA);
- //MonitorTemperature(ModuleName.PMA);
- MonitorGas(ModuleName.PMA);
- //MonitorRF(ModuleName.PMA);
- ChangeTime(ModuleName.PMA);
- //MonitorIOPumpCtrl(ModuleName.PMA);
- break;
- case JetChamber.Kepler2300:
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- // PMA
- MonitorSlitDoor(ModuleName.PMA);
- MonitorPin(ModuleName.PMA);
- MonitorPressure_Kepler(ModuleName.PMA);
- //MonitorTemperature(ModuleName.PMA);
- MonitorGas(ModuleName.PMA);
- //MonitorRF(ModuleName.PMA);
- ChangeTime(ModuleName.PMA);
- //MonitorIOPumpCtrl(ModuleName.PMA);
- MonitorLid(ModuleName.PMA);
- break;
- }
- switch (SimulatorJetChamber.CurrentPMBChamber)
- {
- case JetChamber.Venus:
- // PMB
- MonitorSlitDoor(ModuleName.PMB);
- MonitorPin(ModuleName.PMB);
- MonitorPressure(ModuleName.PMB);
- //MonitorTemperature(ModuleName.PMB);
- MonitorGas(ModuleName.PMB);
- // MonitorRF(ModuleName.PMB);
- ChangeTime(ModuleName.PMB);
- //MonitorIOPumpCtrl(ModuleName.PMB);
- break;
- case JetChamber.Kepler2300:
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- // PMB
- MonitorSlitDoor(ModuleName.PMB);
- MonitorPin(ModuleName.PMB);
- MonitorPressure_Kepler(ModuleName.PMB);
- //MonitorTemperature(ModuleName.PMB);
- MonitorGas(ModuleName.PMB);
- // MonitorRF(ModuleName.PMB);
- ChangeTime(ModuleName.PMB);
- //MonitorIOPumpCtrl(ModuleName.PMB);
- MonitorLid(ModuleName.PMB);
- break;
- }
-
- ChangeTime(ModuleName.TM);
- MonitorMFSlitDoor();
- MonitorMFPressure();
- }
- catch (Exception e)
- {
- LOG.WriteExeption(e);
- }
- return true;
- }
- private void ChangeTime(ModuleName mod)
- {
- // Heartbeat with PLC
- SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
- SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
- SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
- SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
- }
-
- void MonitorSlitDoor(ModuleName mod)
- {
- // slit door open
- if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
- {
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
- }
- // slit door close
- if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
- {
- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
- }
- }
- void MonitorMFSlitDoor()
- {
- ModuleName mod = ModuleName.TM;
- // LLA T door open
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
- }
- // LLB T door open
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
- }
- // LLA E door open
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
- }
- // LLB E door open
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
- }
- // LLA T door close
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
- }
- // LLB T door close
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
- }
- // LLA E door close
- if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
- }
- // LLB E door close
- if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
- {
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
- IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
- }
- }
- void MonitorPin(ModuleName mod)
- {
- // lift pin up
- if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
- {
- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
- }
- }
- void MonitorLid(ModuleName mod)
- {
-
- // lift pin up
- if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
- {
- IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
- }
- }
- void MonitorExtendAndRetract(ModuleName mod)
- {
- // Extend
- _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
- if (_trigLLExtend.Q)
- {
- _trigLLRetract.RST = true;
- Thread.Sleep(500);
- IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
- IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- }
- // Retract
- _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
- if (_trigLLRetract.Q)
- {
- count++;
- _trigLLExtend.RST = true;
- Thread.Sleep(500);
- IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
- IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
- if (count == 1)
- {
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- }
- else if (count == 2)
- {
- count = 0;
- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
- }
- }
- }
- void MonitorPressure(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_760t";
-
- // Loadlock pressure
- string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
- // Foreline
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
- }
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- //float chamber_pressure = GetMockChamberPressure(mod);
- //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- if (fast_pump_vlv.Value && soft_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
- }
- else if (fast_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
- }
- else if (soft_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
- }
- else if (turbo_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
- //if (vent_vlv.Value || purge_vlv.Value)
- //{
- // if (vent_vlv.Value && purge_vlv.Value)
- // {
- // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- // {
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
- // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- // }
- // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- // {
- // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
- // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
- // }
- // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
- // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
- // }
- // else
- //
- if (vent_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
- }
- // Loadlock Pumping Valve
- DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
- if (Loadlock_pump_vlv.Value)
- {
- SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
- }
- // Loadlock vent
- DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
- if (Loadlock_vent_vlv.Value)
- {
- SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
- }
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 20);
- }
- float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (process_pressure1 > PROCESS_GAUGE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- }
- else if (process_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
- }
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 10000)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
- }
- else if (foreline_pressure < 150)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
- }
- // 模拟压力计漂移
- //int p1 = (int)GetMockChamberPressure(mod);
- //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
- //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
- //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
- //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
- //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
- //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
- // 根据当前压力值设定信号
- //float chamber_pressure2 = GetMockChamberPressure(mod);
- // ATM switch
- IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
- // Throttle valve
- //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
- //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
- ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
- //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
- // 压力值
- //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
- // }
- //}
- //else
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
- // }
- //}
- //// 位置值
- //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
- // }
- //}
- //else
- //{
- // short increase = (short)_rd.Next(20, 30);
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
- // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
- // {
- // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
- // }
- //}
- }
- void MonitorPressure_Kepler(ModuleName mod)
- {
- string sAI_Foreline = "AI_Foreline_Pressure_10t";
-
- if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
- }
- else
- {
- SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
- }
- // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
- string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
- string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
- //float chamber_pressure = GetMockChamberPressure(mod);
- //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
- // soft pump & fast pump
- DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
- DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
- DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
- if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
- {
- if (fast_pump_vlv.Value && soft_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
- }
- else if (fast_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
- }
- else if (soft_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
- }
- else if (turbo_pump_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
- }
- }
- // fast vent & purge
- DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
- if (vent_vlv.Value)
- {
- float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
- }
- else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
- {
- getAiValue_ProcessPressure = getAiValue_ChamberPressure;
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
- }
- else
- {
- SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
- }
- //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
- //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
- }
- // Loadlock Pumping Valve
-
- // 压力值越界,复位
- float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
- if (chamber_pressure1 > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
- }
- else if (chamber_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
- }
- float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
- if (process_pressure1 > PROCESS_GAUGE)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
- }
- else if (process_pressure1 < 20)
- {
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
- }
- float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
- if (foreline_pressure > 10000)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
- }
- else if (foreline_pressure < 150)
- {
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
- }
- void MonitorMFPressure()
- {
- string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
- string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
- string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
- ModuleName mod = ModuleName.TM;
- DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
- DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
- DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
- DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
- DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
- DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
- DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
- DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
- DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
- DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
- DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
- DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
- float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
- {
- if ( getAiValue_LLA_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_LLA_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
- }
- }
- if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
- {
- if (getAiValue_LLB_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_LLB_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
- }
- }
- if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
- }
- }
- if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
- {
- if (getAiValue_LLA_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_LLA_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
- }
- }
- if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
- {
- if (getAiValue_LLB_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_LLB_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
- }
- }
- if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
- {
- if (getAiValue_TM_ChamberPressure > 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
- }
- else if (getAiValue_TM_ChamberPressure <= 10000)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
- }
- }
- getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
- if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_LLA_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
- }
- getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
- if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_LLB_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
- }
- getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
- if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
- }
- else if (getAiValue_TM_ChamberPressure < 20)
- {
- SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
- }
- // ATM switch
- IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- // ATM switch
- IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- // ATM switch
- IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
- // VAC switch
- IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
- }
- void SetAiValue(string name, float value)
- {
- byte[] flow = BitConverter.GetBytes(value);
- short high1 = BitConverter.ToInt16(flow, 0);
- short low1 = BitConverter.ToInt16(flow, 2);
- IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
- IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
- byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
- byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
- float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
- }
- float GetAiValue(string name)
- {
- byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
- byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
- float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
- return flow;
- }
- float GetAoValue(string name)
- {
- byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
- byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
- float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
- return flow;
- }
- void MonitorTemperature(ModuleName mod)
- {
- //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
- IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
- // 底座
- //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
- // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
- //{
- // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
- // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
- //}
- //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
- // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
- //{
- // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
- // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
- //}
- // Foreline
- if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
- }
- else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
- }
- // Wall
- if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
- }
- else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
- GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
- {
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
- }
- }
- void MonitorGas(ModuleName mod)
- {
- // gas
- this.SimulateMFC(ModuleName.PMA, 1);
- this.SimulateMFC(ModuleName.PMA, 2);
- this.SimulateMFC(ModuleName.PMA, 3);
- this.SimulateMFC(ModuleName.PMA, 4);
- this.SimulateMFC(ModuleName.PMA, 5);
- this.SimulateMFC(ModuleName.PMA, 6);
- this.SimulateMFC(ModuleName.PMA, 7);
- this.SimulateMFC(ModuleName.PMA, 8);
- this.SimulateN2(ModuleName.PMA);
- this.SimulateHe(ModuleName.PMA);
- }
- private void SimulateMFC(ModuleName mod, byte gasNum)
- {
- var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
- }
- private void SimulateN2(ModuleName mod)
- {
- var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
- }
- private void SimulateHe(ModuleName mod)
- {
- var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
- }
- void MonitorRF(ModuleName mod)
- {
- // RF generator
- var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
- var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
- //var mock_sp = _rd.Next(sp - 3, sp + 3);
- SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
- //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
- }
- void MonitorIOPumpCtrl(ModuleName mod)
- {
- if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
- if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
- }
- public void Terminate()
- {
- _thread.Stop();
- }
- public void SetCoolantOutletTemp(string module, int Temp)
- {
- //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
- //{
- //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
- //}
- }
- }
- }
|