ProcessUnitDefine.cs 7.2 KB

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  1. using Newtonsoft.Json;
  2. using Newtonsoft.Json.Converters;
  3. using System;
  4. using System.Collections.Generic;
  5. using System.ComponentModel;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using Venus_Core.Attributes;
  10. namespace Venus_Core
  11. {
  12. /// <summary>
  13. /// 设计概述:
  14. /// 本设计主要目的,为了满足复杂的刻蚀工艺需求(各个工艺参数之间相互关联), 和应对未来不断新增的工艺需求(新的设备、
  15. /// 新的工艺、新的材料等等), 同时又能对现存的Recipe保持最大的兼容
  16. ///
  17. /// 1. 将Process 的每道工艺分解为1个至多个逻辑工艺单元, 每个逻辑工艺单元通过 Class Name 和RT的工艺算法绑定,
  18. /// 同时也和 GUI Recipe Editor 的页面布局绑定。
  19. ///
  20. /// 2. 一个逻辑单元功能调试好, 并且有在客户端使用后, 此逻辑单元想关联的 RT Process 代码和GUI 界面代码,
  21. /// 不允许再修改, 只能增加新的Class 来实现新的工艺需求
  22. ///
  23. /// 3. 通过配置文件里面定义 ProcessUnit Class Name列表, 来定义当前机台支持的工艺功能, 也就是说如果Recipe文件里面保函了
  24. /// 配置文件里面没有列出的工艺单元, 表明本机台不支持此Recipe, 并报警提示用户
  25. /// </summary>
  26. public enum Suspect
  27. {
  28. Home,
  29. Position1,
  30. Position2
  31. }
  32. public enum VenusUnits
  33. {
  34. PressureByPressureModeUnit,
  35. TCPUnit,
  36. BiasUnit,
  37. GasControlUnit,
  38. ESCHVUnit,
  39. ProcessKitUnit
  40. }
  41. public enum Kepler2300Uints
  42. {
  43. }
  44. public enum Kepler2200AUnits
  45. {
  46. }
  47. public enum Kepler2200BUnits
  48. {
  49. }
  50. public partial class PressureByPressureModeUnit : ProcessUnitBase
  51. {
  52. public string UnitName { get; set; } = "PressureModeUnit";
  53. public PressureUnitMode PressureUnitMode { get; set; }
  54. public int StartValue { get; set; } = 10;
  55. public int ValvePositionPreset { get; set; } = 10;
  56. public bool EnableRamp { get; set; }
  57. public int HoldTime { get; set; } = 1000;
  58. public int TargetValue { get; set; } = 100;
  59. public event PropertyChangedEventHandler PropertyChanged;
  60. public void InvokePropertyChanged(string propertyName)
  61. {
  62. if (PropertyChanged != null)
  63. {
  64. PropertyChanged.Invoke(this, new PropertyChangedEventArgs(propertyName));
  65. }
  66. }
  67. }
  68. public class PressureByValveModeUnit : ProcessUnitBase
  69. {
  70. public string UnitName { get; set; } = "PressureByValveModeUnit";
  71. public bool EnableRamp { get; set; }
  72. public int StartPosition { get; set; } = 10;
  73. public int TargetPosition { get; set; } = 100;
  74. public int HoldTime { get; set; }= 10000;
  75. }
  76. public class HeaterUnit : ProcessUnitBase
  77. {
  78. public string UnitName { get; set; } = "HeaterUnit";
  79. public int HeaterPressure { get; set; } = 10;
  80. public int HeaterTemp { get; set; } = 10;
  81. public int HeaterRatio { get; set; } = 10;
  82. }
  83. public class TCPUnit : ProcessUnitBase
  84. {
  85. private string m_UnitName = "TCPUnit";
  86. public string UnitName
  87. {
  88. get { return m_UnitName; }
  89. set { m_UnitName = value; }
  90. }
  91. public int RFPower { get; set; } = 10;
  92. public int TuneCapPreset { get; set; } = 10;
  93. public int LoadCapPreset { get; set; } = 10;
  94. public int MaxReflectedPower { get; set; } = 100;
  95. private bool m_EnableRamp;
  96. public bool EnableRamp
  97. {
  98. get { return m_EnableRamp;}
  99. set { m_EnableRamp = value; }
  100. }
  101. public int StartPower { get; set; } = 10;
  102. public int TargetPower { get; set; } = 100;
  103. public int HoldTime { get; set; } = 1000;
  104. }
  105. public class Kepler2200RFUnit : ProcessUnitBase
  106. {
  107. public string UnitName { get; set; } = "RFUnit";
  108. public Suspect SuspectPosition { get; set; } = Suspect.Home;
  109. public int PositionOffset { get; set; } = 1;
  110. public int TuneCapPreset { get; set; } = 10;
  111. public int LoadCapPreset { get; set; } = 10;
  112. }
  113. public class BiasUnit : ProcessUnitBase
  114. {
  115. public string UnitName { get; set; } = "BiasUnit";
  116. public int BiasRFPower { get; set; } = 10;
  117. public int BiasTuneCapPreset { get; set; } = 10;
  118. public int BiasLoadCapPreset { get; set; } = 10;
  119. public int BiasMaxReflectedPower { get; set; } = 1000;
  120. public bool EnableRamp { get; set; }
  121. public int StartBiasRFPower { get; set; } = 10;
  122. public int TargetBiasRFPower { get; set; } = 100;
  123. public int BiasRFHoldTime { get; set; } = 1000;
  124. [JsonConverter(typeof(StringEnumConverter))]
  125. public GeneratorMode BiasGeneratorMode { get; set; }
  126. public int PulseRateFreq { get; set; } = 10;
  127. public int PulseDutyCycle { get; set; } = 10;
  128. }
  129. public class GasControlUnit : ProcessUnitBase
  130. {
  131. public string UnitName { get; set; } = "GasControlUnit";
  132. public int Gas1 { get; set; } = 10;
  133. public int Gas2 { get; set; } = 10;
  134. public int Gas3 { get; set; } = 10;
  135. public int Gas4 { get; set; } = 10;
  136. public int Gas5 { get; set; } = 10;
  137. public int Gas6 { get; set; } = 100;
  138. public int Gas7 { get; set; } = 100;
  139. public int Gas8 { get; set; } = 100;
  140. public bool EnableRamp { get; set; }
  141. public int Gas1Target { get; set; } = 100;
  142. public int Gas2Target { get; set; }= 100;
  143. public int Gas3Target { get; set; }=100;
  144. public int Gas4Target { get; set; } = 100;
  145. public int Gas5Target { get; set; } = 100;
  146. public int Gas6Target { get; set; } = 10;
  147. public int Gas7Target { get; set; } = 10;
  148. public int Gas8Target { get; set; } = 10;
  149. public int FlowRatie { get; set; } = 100;
  150. }
  151. public class Kepler2200GasControlUnit : ProcessUnitBase
  152. {
  153. public string UnitName { get; set; } = "GasUnit";
  154. public int Gas1 { get; set; } = 100;
  155. public int Gas2 { get; set; } = 100;
  156. public int Gas3 { get; set; } = 100;
  157. public int Gas4 { get; set; } = 100;
  158. public int Gas5 { get; set; } = 100;
  159. public int Gas6 { get; set; } = 100;
  160. }
  161. public class ESCHVUnit : ProcessUnitBase
  162. {
  163. public string UnitName { get; set; } = "ESCHVUnit";
  164. public int BacksideHelum { get; set; } = 10;
  165. public int MinHeFlow { get; set; } = 10;
  166. public int MaxHeFlow { get; set; } = 100;
  167. public int ESCClampValtage { get; set; } = 10;
  168. public int Temperature { get; set; } = 20;
  169. }
  170. public class ProcessKitUnit : ProcessUnitBase
  171. {
  172. public string UnitName { get; set; } = "ProcessKitUnit";
  173. [JsonConverter(typeof(StringEnumConverter))]
  174. private MovementPosition m_LiftPinPostion;
  175. public MovementPosition LiftPinPostion
  176. {
  177. get { return m_LiftPinPostion; }
  178. set { m_LiftPinPostion = value; }
  179. }
  180. [JsonConverter(typeof(StringEnumConverter))]
  181. public MovementPosition WeprBasrPinPosition { get; set; }
  182. }
  183. }